JP2002048370A - Lifting chamber - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lifting chamber provided with an air-conditioning system capable of enhancing productivity and yield of single crystals and enabling manufacture of single crystal rods with high quality, by eliminating generation of an ascending air current caused by instruments and facilities producing heat functionally and disturbance of a descending air current and keeping cleanliness and temperature of a lifting chamber at an optimum state without damaging maintainability of implements attached to a lifting device. SOLUTION: The lifting chamber has a multi-layered structure with at least two layers having a circulating air conditioning system blowing cleaned air from an outlet provided in the uppermost layer and sucking air from a return duct in the lowermost layer. Among the instruments and facilities attached to a single crystal lifting device and installed in the lowermost layer, the instruments and facilities having working temperature higher by 10 deg.C than a room temperature of the lifting chamber are installed in the vicinity of the return duct, or an induction duct is provided above the instruments and facilities.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulling room for installing a single crystal pulling machine.

[0002]

2. Description of the Related Art Conventionally, several to several tens of single crystal pulling machines have been arranged in a single pulling chamber. The lifting room is divided into an upper floor where cleanliness is required and a lower floor where auxiliary equipment such as a vacuum pump, power supply, control unit, exhaust gas pipe, cooling water return pipe, etc. are arranged. It has an air conditioning system that supplies a clean airflow to the floor.

For example, what is shown in FIG. 2 is a two-story pulling room, in which several to several tens of single crystal pulling machines 11 are installed in a pulling room 1 and an upper layer having a grating ventilation port 6. The floor is divided into two floors, an upper floor and a lower floor.
On the other hand, there is a filter 8 near the ceiling of the upper floor, and clean air is blown out from the outlet 10 thereof. The air conditioner is provided with a circulation type air conditioning system 2 that sucks air, adjusts the temperature with a heat exchanger 9, and sends the air to a blow duct 3 with a blower 7. In addition, equipment and facilities such as the vacuum pump 12 and the power supply device 13 that are attached to the pulling machine 11 are usually arranged around the gantry of the pulling machine 11.

In recent years, with the increase in the size of the pulling machine, the size of the auxiliary equipment has been increasing in the same tendency. In particular, the calorific value of the vacuum pump has increased due to the increase in power, and an ascending airflow has been generated near the vacuum pump. Have been. If such equipment / equipment that generates heat in a function is installed in a place away from the return duct of the air conditioning system, the rising airflow does not go to the return duct, but blows through the grating ventilation holes on the upper floor. Climbing up and lowering the cleanliness of the upper floors.

[0005] In addition, on the lower floor where various large-scale ancillary equipment and equipment foundations are arranged, air currents tend to stagnate, forming a locally high-temperature area, deteriorating the maintenance work environment of the ancillary equipment, and improving the lifting equipment. The installed precision equipment could be adversely affected.

[0006] In order to solve these problems, the arrangement of ancillary equipment has been changed or a local air conditioner has been introduced. However, there have been disadvantages in that maintenance work is deteriorated and running costs are increased.

On the other hand, when a large number of devices that emit driving noise such as vacuum pumps are installed, the noise level of the upper floor where workers are constantly located or the lower floor where maintenance is performed is increased. In some cases, however, a separate air conditioning system must be provided, which has the disadvantage of increasing running costs.

[0008]

In order to maintain the upper floor of the pulling room as a clean room, various methods of controlling the air flow have been studied (for example, Japanese Patent Laid-Open No. 6-159).
No. 751). However, heat and waste heat generated in the lower floor are not sucked into the return duct of the pulling room, and locally generated ascending air currents or hot air currents in the lower floors deteriorating the working environment remain problems. Was. Especially 1
Once the air-conditioning system of a large pulling room exceeding 000 m ² is started, it is difficult to change the wind speed, air volume, wind direction, etc. of the air current drastically, and it has to be dealt with by the local treatment as described above. .

Accordingly, the present invention has been made to solve these problems, and has been described as an apparatus / device which generates heat due to its function.
Eliminates the generation of updrafts by the equipment and the resulting turbulence of downdrafts, while maintaining the optimal degree of cleanliness and temperature in the pulling room without impairing the maintenance workability of the equipment attached to the pulling machine. It is an object of the present invention to provide a pulling room equipped with an air conditioning system capable of improving the productivity and yield of the steel and producing a high-quality single crystal rod.

[0010]

SUMMARY OF THE INVENTION In order to solve the above problems, the invention relating to the pulling room of the present invention is directed to a circulation type air conditioning system which blows clean air from an outlet on an upper floor and sucks it from a return duct on a lower floor. With at least 2
In a pulling room with a multi-story structure with more than one layer, equipment / equipment that is attached to the single crystal pulling machine and installed on the lower floor and whose normal temperature is at least 10 ° C higher than the room temperature of the pulling room. The present invention is characterized in that it is installed near a return duct or an induction duct is installed above the device / equipment (claim 1).

According to the pulling room having the above-mentioned structure, the equipment / equipment which generates heat in the vicinity of the return duct installed on the side wall of the lower floor of the pulling room or the surrounding ceiling, ie, near the duct suction port or inside the duct. And installing equipment or facilities whose normal temperature is at least 10 ° C higher than the room temperature of the lifting room, or installing an induction duct above these equipment or facilities, and immediately returning heat from these to the return duct or By sucking the air into the induction duct, the dirty updraft generated on the lower floor is eliminated, sufficient heat is removed, the cleanliness of the upper floor is prevented, and the room temperature on the lower floor is maintained without lowering the room temperature on the upper floor. The temperature suitable for the maintenance work environment,
An adverse effect on the operating environment of the device can be avoided.

[0012] In this case, it is preferable that at least the vacuum pump be used for the equipment and facilities installed near the return duct. Here, the vacuum pump is a device that has been significantly increased in size with the increase in the size of the single crystal pulling machine. The calorific value has also increased, and an ascending air current has been generated near the vacuum pump. Therefore, a return duct is installed on the side wall of the lower floor of the lifting room or on the surrounding ceiling, and a vacuum pump is placed near the suction port or inside the duct, and the updraft from here on is immediately sucked into the return duct, so that the upper floor is It is possible to eliminate the ascending airflow that can be reached and to sufficiently raise the exhaust heat effect.

[0013] In this case, the equipment and facilities for installing the guide duct at the top can be a power supply device, a control device, an exhaust gas pipe, and a cooling water return pipe. As described above, the power supply device, the control device, the exhaust gas pipe, the cooling water return pipe, and the like also generate heat due to their functions, but their installation locations are limited due to their characteristics. Therefore, at the specific position, a guide duct is installed above the specific position to effectively arrange the suction port. As a result, it is possible to efficiently suck the upward airflow generated from these, prevent the lower floor from deteriorating the work environment due to exhaust heat, and prevent the cleanliness of the upper floor from deteriorating due to the dirty upward airflow.

Further, in this case, it is preferable to provide a blower in the middle of the guide duct. Since this guide duct is intended for equipment and facilities with various shapes and sizes, the duct shape and size are various and the air resistance is likely to be large, so a blower is installed in the middle of the duct to reduce the ascending airflow efficiently. Make sure to aspirate well.

[0015] In addition, when equipment or equipment whose normal temperature is higher than room temperature emits noise, a sound insulation wall can be provided upstream of the noise source. This makes it possible to easily and effectively take measures against noise in the pulling room.

Further, the floor area of the pulling room can be 150 square meters or more. By configuring the present invention as described above, a rectified downflow occurs, the heat interference between adjacent lifting machines is reduced, and the arrangement of the equipment and facilities on the lower floor is arranged. The interval between the crystal pullers can be reduced, and the packing density of the pullers in the pulling chamber can be increased. Further, the temperature difference between the upper floor and the lower floor becomes smaller, and there is no need for local air conditioning. Therefore, according to the present invention, equipment costs and running costs can be reduced. For example, in the case of an 8-inch diameter single crystal pulling machine, the floor area of a pulling room in which at least 5 units can be installed is 150 m ^2.
(30 m ² per vehicle).

In an air conditioning system for a large pulling room exceeding 1000 m ² , it is difficult to significantly change or adjust the wind speed, air volume, wind direction, etc. of the air flow once it is started up.
By applying the configuration of the present invention, a rectified downflow is generated, so that efficient air conditioning can be performed, and cost reduction and energy saving of equipment can be achieved.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below, but the present invention is not limited to these embodiments. Hereinafter, the present invention will be described in detail. The inventors of the present invention eliminate the occurrence of updrafts and turbulence of the airflow caused by the devices and equipment that generate heat in their functions, and also maintain the cleanliness and temperature of the pulling room without impairing the maintenance workability of the equipment attached to the pulling machine. In order to maintain the optimum condition, it was found that the above-mentioned purpose could be achieved by placing these devices and equipment near the return duct or by providing a guide duct above the return duct. The present invention has been completed.

As described above, the pulling room of the present invention comprises at least two or more multi-layered floors provided with a circulation type air-conditioning system which blows clean air from, for example, an outlet on an upper floor and sucks air from a return duct on a lower floor. It is composed of In the pulling room, several to several tens of single crystal pulling machines are installed, and the accompanying equipment and facilities are usually installed on the lower floor.

In the present invention, of these auxiliary devices and equipment, the target ones are defined as follows. That is, it refers to equipment / equipment installed on the lower floor, the equipment / equipment whose normal temperature is higher than the room temperature of the pulling room by 10 ° C. or more. Such equipment and facilities generate heat due to their function during operation, and this heat generates an updraft from around the equipment and facilities, which entrains contaminants on the lower floor and blows up. The work environment on the lower floors was deteriorated due to the increase in room temperature. If the normal temperature of the equipment / apparatus is lower than the room temperature of the pulling room by less than 10 ° C., almost no updraft which adversely affects the upper floor is generated.

Therefore, in the present invention, in order to prevent the above-mentioned adverse effects due to the equipment / equipment that generates heat due to its function, the equipment / equipment is installed near the return duct or guided above the equipment / equipment. A duct was installed. Incidentally, the vicinity of the return duct may be near the suction port of the return duct installed on the side wall of the lower floor of the pulling room or the surrounding ceiling, and may be inside the duct.

By adopting such a configuration, the heat generated by the equipment and facilities that generate heat can be immediately sucked into the return duct or the guide duct, and the dirty updraft generated on the lower floor can be eliminated. By exhausting heat sufficiently, the cleanliness of the upper floor was prevented from lowering, and the room temperature of the lower floor could be adjusted to a temperature suitable for the maintenance work environment without lowering the room temperature of the upper floor. In addition, it is possible to avoid adverse effects on the accuracy of the device and the operating environment of the device.

In this case, it is necessary that the equipment and facilities installed near the return duct be at least a vacuum pump. That is, the vacuum pump is a device that has been significantly increased in size with the increase in the size of the single crystal pulling machine. Therefore, a return duct is installed on the side wall of the lower floor of the pulling room or on the surrounding ceiling, and a vacuum pump is placed near the suction port. The heat effect can be sufficiently raised. In addition, there is an advantage that the vacuum pump can be relatively easily relocated even if it is enlarged.

Next, a device for installing an induction duct at the top
The equipment includes a power supply device, a control device, an exhaust gas pipe, a cooling water return pipe, and the like. Since the power supply device, the control device, the exhaust gas pipe, the cooling water return pipe, and the like are limited in their installation locations due to their functions and characteristics, they cannot always be arranged near the return duct. Therefore, at the specific position, a guide duct is installed above the specific position to effectively arrange the suction port. As a result, it is possible to prevent the deterioration of the work environment of the lower floor due to the exhaust heat by sucking the ascending airflow, and to prevent the deterioration of the cleanliness of the upper floor due to the dirty ascending airflow. Note that a pressure control device may be provided in the exhaust gas pipe or the cooling water pipe in some cases, but it is preferable to provide an induction duct also above the pressure control device. Since the guide duct is for guiding and sucking updrafts from the target equipment / equipment, it is preferable to install it so as to cover or surround the upper part of these equipment / equipment. May be provided.

Further, it is preferable to provide a blower in the middle of the guide duct. This guide duct is
Since equipment and facilities with various shapes, sizes, and positions are targeted, the shape, size, and position of the ducts are also various, and the air resistance of the ducts tends to increase, so a blower is installed in the middle of the induction duct. It is good to suck up the airflow efficiently.

Further, there is a case where a device or equipment which generates heat due to its function, such as the vacuum pump, generates noise. In this case, by providing a sound insulation wall on the upstream side of the noise generation source, noise countermeasures relating to the pulling room can be easily and effectively performed. This is realized by disposing a device that emits noise, such as a vacuum pump, near the return duct, not near each pulling machine.

Furthermore, in order to effectively use the pulling room of the present invention constructed as described above, it is desirable that the floor area is 150 square meters or more. By configuring the present invention as described above, a rectified downflow occurs, heat interference between the adjacent lifting machines is reduced, and the arrangement of the equipment and facilities on the lower floor is arranged.
It is possible to shorten the interval between single crystal pulling machines,
The packing density of the pulling machine in the pulling chamber can be increased. Further, the temperature difference between the upper floor and the lower floor becomes smaller, and there is no need for local air conditioning. Therefore, according to the present invention, equipment costs and running costs can be reduced. For example, diameter 8
In the case of an inch single crystal pulling machine, the floor area of at least five pulling rooms that can be installed has a floor area of 150 m ² (30 m per unit).
² ) could be reduced.

In an air-conditioning system for a large pulling room having a floor area exceeding 1000 m ² , it is difficult to significantly change or adjust the wind speed, flow rate, direction, etc. of the air flow once it is started up. By applying, a rectified downflow occurs, so that efficient air conditioning can be performed,
There is no need to provide local exhaust or air conditioning, so that the equipment can be reduced in cost and energy can be saved.

Here, an example of a pulling chamber in which a plurality of single crystal pulling machines of the present invention are installed is shown. FIG. 1 is a schematic diagram of the pulling chamber. The pulling room 1 shown in FIG. 1 is a pulling room composed of two floors, an upper floor and a lower floor, in which several to several tens of single crystal pulling machines 11 are installed. And is divided into two floors. On the other hand, near the ceiling of the upper floor, there is a filter 8 which blows clean air through the outlet 10 and passes through the grating ventilation port 6 to remove the polluted air current by the return duct 4 arranged on the side wall of the lower floor or on the surrounding ceiling. Suction and heat exchanger 9
And a circulation type air-conditioning system 2 in which the temperature is adjusted by an air blower 7 and sent to an air duct 3 by an air blower 7. And the vacuum pump 12 is arranged near the suction port of the return duct 4,
The exhaust heat and the rising airflow are directly sucked into the return duct 4. In addition, the power supply device 13 has an induction duct 5a disposed at an upper portion thereof so as to suck exhaust heat and an upward airflow. The cooling water return pipe 14 is arranged inside the guide duct 5 in this example. Further, a blower 7a is installed in the middle of the guide duct 5 to improve the suction efficiency of the duct. Then, as a noise countermeasure, a sound insulation wall 15 was installed on the upstream side of the vacuum pump 12. In the upper part of the induction duct 6,
It is also possible to provide a gallery vent 16 to entrain downflow airflow from the upper floor with airflow in the duct.
It is preferable that the gallery opening 16 is provided immediately below the grating ventilation opening 6 in a place where there is no equipment or equipment that generates an upward airflow thereunder. In FIG. 1, the return duct 4 is installed on one side of the pulling chamber (left side in FIG. 1). However, in a pulling chamber having a large area exceeding 1000 m ² , the opposite wall surface (FIG.
It is preferable to install the return duct 4 also on the right side of the drawing).

The present invention is not limited to the above embodiment. The above embodiment is an exemplification, and has substantially the same configuration as the technical idea described in the scope of the claims of the present invention. It is included in the technical scope of the invention.

For example, in the above embodiment, a pulling chamber in which a pulling machine of the CZ method is installed as a single crystal pulling machine has been described by way of example. However, the present invention is not limited to this. The present invention can also be applied to a pulling room in which a pulling machine or an FZ single crystal growing apparatus is installed.

[0032]

According to the present invention, the updraft generated from the equipment / equipment that generates heat due to its function, which causes the turbulence of the clean downflow, can be quickly sucked into the return duct or the guide duct, and the pulling chamber can be pulled up. It is possible to maintain the cleanliness in the upper floor and prevent the lower floor from raising the room temperature.
In particular, since the room temperature on the lower floor was not raised, a comfortable working environment could be realized on both floors without lowering the temperature on the upper floor. Further, since the temperature difference between the upper floor and the lower floor becomes small, there is no need for local air conditioning, and the running cost as well as the facility cost can be reduced. Furthermore, in the case of a device that emits driving noise, the effect of preventing noise can be improved by providing a sound insulation wall upstream of the device.

[Brief description of the drawings]

FIG. 1 is a schematic view showing an example of a pulling chamber of the present invention.

FIG. 2 is a schematic view showing a conventional pulling chamber.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Pulling room, 2 ... Air conditioning system, 3 ... Air duct, 4 ... Return duct, 5 ... Induction duct, 6 ... Grating ventilation port, 7 ... Blower, 8 ... Filter, 9
... heat exchanger, 10 ... outlet, 11 ... single crystal puller, 12 ... vacuum pump, 13 ... power supply unit, 14 ... cooling water return pipe, 15 ... sound insulation wall, 16 ... gallery outlet.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Kazuya Nakagawa 2-13-50 Kitafu, Takefu-shi, Fukui Prefecture Inside the Takefu Plant of Shin-Etsu Semiconductor Co., Ltd. (72) Toshio Hayashi 1-4-4 Marunouchi, Chiyoda-ku, Tokyo No.2 Shin-Etsu Semiconductor Co., Ltd. Head Office (72) Inventor Hidetoshi Seki 150 Odakura Odaikura, Nishigo-mura, Nishishirakawa-gun, Fukushima Prefecture F-term in the Semiconductor Shirakawa Research Laboratory, Shin-Etsu Semiconductor Co., Ltd. 3L058 BE02 BF01 BF01 BF06 BG01 BG02 5F053 AA12 AA48 RR04

Claims (6)

[Claims] 1. A single crystal pulling machine in a pulling room having at least two or more layers of a multi-layer structure provided with a circulation type air-conditioning system that blows clean air from an outlet on an upper floor and sucks air from a return duct on a lower floor. Incidental to
Install equipment / equipment that is installed on the lower floor and whose normal temperature is at least 10 ° C higher than the room temperature of the lifting room near the return duct, or install an induction duct above the equipment / equipment. Lifting room characterized by doing. 2. The pulling room according to claim 1, wherein the equipment and facilities installed near the return duct are at least vacuum pumps. 3. An apparatus for installing an induction duct on the upper part.
3. The equipment according to claim 1, wherein the equipment is a power supply device, a control device, an exhaust gas pipe, and a cooling water return pipe.
Pulling room described in. 4. The air conditioner according to claim 1, wherein a blower is provided in the middle of the guide duct.
Pulling room described in section. 5. The pull-up room according to claim 1, wherein when the equipment / equipment emits noise, a sound insulation wall is provided on an upstream side of the noise source. 6. The pulling room according to claim 1, wherein a floor area of the pulling room is 150 square meters or more.