JP5511519B2 - Control method of clean room and its air supply device - Google Patents

Description

  The present invention relates to a clean room and a method for controlling an air supply device in a clean room.

  In the clean room, dust is discharged to increase the cleanliness. In order to discharge dust in such a clean room, conventionally, there is a clean room in which a fan / filter unit in which a fan and a filter are integrated is provided on the ceiling, and an opening is provided in the ceiling member above the exothermic device. It is known (for example, refer to Patent Document 1).

  In this clean room, clean air having a low temperature is sucked from the side closer to the exothermic device toward the opening in the upper part of the device. Further, in the vicinity of the exothermic device, the air temperature rises and an ascending air current is generated and flows toward the opening provided on the ceiling. This air flow causes air to flow toward the opening provided in the upper part of the exothermic device, and prevents the dust from diffusing, and is captured by the filter member in the fan / filter unit provided on the ceiling. . For this reason, the dust of the position in which the exothermic apparatus was provided can be discharged | emitted efficiently from a clean room.

JP 2004-324939 A

  By the way, in a clean room in recent years, a high cleanliness area is set as an area for performing work that needs to be performed with a very high cleanliness, and a low cleanliness where a high cleanliness is not required in places other than the high cleanliness area. It may be an area. In such a clean room, the exothermic device disclosed in Patent Document 1 is often installed in a low cleanliness area.

  Here, in the clean room disclosed in Patent Document 1, dust can be efficiently discharged from the ceiling by the rising airflow by flowing air toward the opening provided in the upper part of the exothermic device. However, the dust staying on the floor or the like is also raised.

  At this time, in the low cleanliness area, the required cleanliness can be maintained by placing the raised dust on the rising airflow. However, in the high cleanliness area where high cleanliness is required and in the low cleanliness area adjacent to the high cleanliness area, when the updraft is generated in the vicinity of the exothermic device in Patent Document 1, the updraft is generated. For this reason, there is a problem in that the accumulated dust staying in the floor portion is also rolled up by the air for preventing the maintenance of high cleanliness.

  Then, the subject of this invention can discharge | emit the dust of the position where the high exothermic apparatus in the low cleanliness area is provided efficiently, and can maintain a high cleanliness area with high cleanliness. An object of the present invention is to provide a clean room and a method for controlling an air supply device in the clean room.

A clean room according to the present invention that has solved the above problems is a clean room that includes an air supply device that supplies air from the ceiling toward the floor, and in which a filter member that removes generated dust is disposed on the ceiling. And a high cleanliness area that requires higher cleanliness than the low cleanliness area, and high heat generating equipment is arranged in the low cleanliness area. Speed air is supplied from the air supply device , a ceiling opening is formed above the high heat generating device, and a fan filter unit for the high heat generating device is provided so as to surround the opening. The filter unit can be switched between high-power operation and low-power operation. During high-power operation, the blowout speed of the air supplied from the fan filter unit Is a blowout speed that promotes the updraft accompanying the heat generated by the high heat generation equipment. During low power operation, the blowout speed of the air supplied from the fan filter unit is higher than the normal blowout speed. It is slow and the blowing speed is such that the supplied air does not reach the floor .

  In the clean room according to the present invention, air at a blowing speed that promotes an updraft accompanying heat generated from the high heat generating device is supplied from the air supply device to the position where the high heat generating device is arranged in the low cleanliness area. The For this reason, air at a blowing speed that promotes the updraft is supplied at the position where the high heat generating device is provided, so the dust at the position where the high heat generating device is provided in the low cleanliness area can be efficiently removed. Can be discharged. On the other hand, air with a normal blowing speed is supplied from the air supply device to the high cleanliness area. For this reason, since it is possible to prevent the accumulated dust staying on the floor from being rolled up, a high cleanliness can be maintained. Therefore, it is possible to efficiently discharge the dust at the position where the highly exothermic device is provided in the low cleanliness area, and to maintain the high cleanliness area at a high cleanliness.

  Here, an eyelid is provided between the high cleanliness area and the low cleanliness area, and the eyelid extends to a position above the pass line, and between the high cleanliness area and the low cleanliness area. It can be set as the aspect provided with the air curtain formation means which forms an air curtain.

  In the clean room according to the present invention, an eyelid is provided between the high cleanliness area and the low cleanliness area, but the eyelid only extends to a position above the pass line. For this reason, when working in a clean room, it is possible to prevent the eyelid from interfering with the work. On the other hand, if the eyelid extends only above the pass line, it becomes difficult to partition the cleanliness between the high cleanliness area and the low cleanliness area. In this regard, air curtain forming means for forming an air curtain between the high cleanliness area and the low cleanliness area is provided. For this reason, the cleanliness partition between the high cleanliness area and the low cleanliness area can be reliably performed.

  Also, a blow speed control means for controlling the blow speed of the air supplied from the air supply device to the position where the high heat generating device is arranged in the low cleanliness area, and a high heat generation detecting the high heat generation state in the high heat generating device. A state detection means, and the blow speed control means controls the blow speed of the air supplied from the air supply device in accordance with the high heat generation state of the high heat generation device detected by the high heat generation state detection means. Can do.

  In this way, the blow speed control means is adapted to the operation of the high heat generation device by the high heat generation state detection means controlling the blow speed of the air supplied from the air supply device according to the high heat generation state of the high heat generation device. Therefore, air with an appropriate wind speed can be supplied to the low cleanliness area.

  Further, the high heat generation state detection means is an ON-OFF state detection means for detecting the ON / OFF state of the high heat generation device. When the high heat generation device is ON, the high heat generation device is in a high heat generation state. It can be set as the aspect detected.

  Thus, by detecting the high heat generation state of the high heat generation device in the ON-OFF state of the high heat generation device, it is possible to easily determine the high heat generation state of the high heat generation device.

  The blow speed control means controls the blow speed of the air supplied from the air supply device to a blow speed that promotes the rising air flow accompanying the heat generated from the high heat generating device when the high heat generating device is in the high heat generating state. In addition, when the high heat-generating device is in a non-high heat state, the air blowing speed supplied from the air supply device can be controlled to be slower than the normal blowing speed.

  As described above, when the high heat generating device is in operation, the air supply speed of the air supply device is controlled to a blowing speed that promotes the upward air flow when the high heat generating device is in a high heat generating state. Can be lifted up using the rising airflow and efficiently removed by the filter member. In addition, when the high heat-generating equipment is in a non-high heat state, it is controlled to a blow speed that is slower than the normal blow speed, so that the accumulated dust on the floor is not raised, and the cleanliness of the low cleanliness area is prevented from being lowered. can do.

  Furthermore, it can be set as the aspect by which the opening part is not formed in the floor part in a high cleanliness area and a low cleanliness area.

  Thus, since the opening is not formed in the floor, it is not necessary to form an air circulation region under the floor. Therefore, the height of the building can be reduced by reducing the space under the floor.

Moreover, the control method of the air supply apparatus in the clean room which solved the said subject is equipped with the air supply apparatus which supplies air toward a floor part from a ceiling, and the filter member which removes the generated dust on a ceiling A control method of an air supply device in a clean room for controlling an air supply device in a clean room, wherein the clean room has a low cleanliness area and a high cleanliness area that requires a higher cleanliness than the low cleanliness area. A high heat generating device is arranged in the low cleanliness area, and air of a normal blowing speed is supplied from the air supply device to the high cleanliness area, and a ceiling opening is provided above the high heat generating device. The fan filter unit for high heat generation equipment is provided so as to surround the opening, and the fan filter unit is It is possible to switch between high-power operation and low-power operation. During high-power operation, the blow-off speed of the air supplied from the fan / filter unit is changed to the upward air flow accompanying the heat generated from the high heat-generating equipment. Blowing speed that promotes, and at low power operation, the blowing speed of the air supplied from the fan filter unit is slower than the normal blowing speed, and the blowing speed that the supplied air does not reach the floor characterized by a.

  Moreover, it can be set as the aspect which controls the blowing speed of the air supplied from an air supply apparatus according to the high heat_generation | fever state of a high heat generation apparatus.

  According to the control method of the clean room and the air supply device in the clean room according to the present invention, the dust at the position where the high heat generating device is provided in the low cleanliness area can be efficiently discharged, and the high cleanliness area Can be maintained at a high level of cleanliness.

It is a top view of the clean room which concerns on embodiment of this invention. It is a top view of the clean room containing FFU. It is the III-III sectional view taken on the line of FIG. It is a block block diagram of the principal part apparatus in a clean room. It is a flowchart which shows the control procedure of FFU for high heat generating apparatuses by ON-OFF of a control apparatus. It is explanatory drawing explaining the flow of the air in a clean room.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In each embodiment, portions having the same function are denoted by the same reference numerals, and redundant description may be omitted.

  As shown in FIGS. 1 to 3, the clean room R according to the present embodiment is provided with a high heat generating device 1, a high cleanliness area installation device 2, and a low heat generating device 3. The high heat generating device 1 is a device that generates a large amount of heat, such as a heating device or an oven, and the high cleanliness area installation device 2 requires work under high cleanliness, such as a coater or a laminator for applying a resist to a wafer. It is a device. The low heat generating device 3 is a device that generates a small amount of heat, such as a transfer device or an assembly robot. Further, the high cleanliness area installation device 2 is a device that generates a smaller amount of heat than the high heat generation device 1, similarly to the low heat generation device 3.

In the present embodiment, four low heat generating devices 3 are arranged in the clean room R. A conveyor 4 is provided between each of the high cleanliness area installation device 2 and the two low heat generation devices 3. The area where the high cleanliness area installation device 2 is provided in the clean room R is the high cleanliness area HP, and the other areas in the cleanroom R are the low cleanliness areas LP. Here, an eyelid 5 is provided at an upper position around the high cleanliness area installation device 2, and the high cleanliness area HP and the low cleanliness area LP are substantially partitioned by the eyelid 5. The high cleanliness area HP where the high cleanliness area installation device 2 is set is disposed adjacent to the position where the high heat generating device 1 is installed in the low cleanliness area LP.
The eyelid 5 is arranged suspended from the ceiling, extends above the pass line PL which is the height position where the conveyor 4 is provided, and extends below the pass line PL. It is not long. The pass line PL is about 1.5 m from the bottom of the floor, but can be about 1 to 3 m in height.

  The clean room R is provided with a floor 6, and the high heat generating device 1, the high cleanliness area installation device 2, and the low heat generating device 3 are all installed on the floor 6. The floor portion 6 is formed by a full block plate in which no opening is formed. Furthermore, the floor portion 6 in the clean room R is constituted by a slab of a structure, and has a structure in which no underfloor space is formed below the floor portion 6.

  Further, as shown in FIG. 2, an opening is formed in the ceiling portion above the high heat generating device 1, and a fan / filter unit (hereinafter referred to as "FFU") 11 for the high heat generating device 11 surrounds the opening. Is provided. A high cleanliness area FFU 12 is provided above the high cleanliness area HP. Further, a low heat generating device FFU 13 is provided above the low heat generating device 3.

  On the other hand, an air curtain airflow generation FFU 14 is provided above the position where the conveyor 4 passes around the high cleanliness area HP. The air curtain airflow generation FFU 14 blows air toward the floor to form air curtains in the entrance area and the exit area of the conveyor 4 with respect to the high cleanliness area HP. In the entrance region and the exit region of the conveyor 4 with respect to the high cleanliness area HP, the high cleanliness area HP and the low cleanliness area LP are formed by the air curtain and eyelid 5 formed by the air blown from the air curtain airflow generation FFU 14. And are separated.

  As FFU11-14, all are FFUs with which the air blower and the HEPA filter were integrated, and the thing of the same performance is used, The control from which the blowing speed at the time of a driving | operation differs is made. Further, the FFUs 11 to 14 are all provided on the ceiling 7 of the clean room R, and supply air from the ceiling 7 to the floor 6 and circulate dust in the circulating air that circulates in the clean room R and returns. To capture. The FFUs 11 to 14 constitute the air supply device and the filter member of the present invention.

  Thus, in the clean room R, the high cleanliness area FFU 12 and the air curtain airflow generation FFU 14 are provided in the high cleanliness area HP, and the high cleanliness area FFU11 and low in the low cleanliness area LP. A FFU 13 for heat generating equipment is provided. Here, 99 FFUs are used as the FFU 12 for the high cleanliness area, and they are densely arranged in the high cleanliness area HP.

  In addition, 26 FFUs are used as the high heat generating device FFU 11 that can be disposed in the low cleanliness area LP, and are disposed so as to surround the opening formed above the high heat generating device 1. Further, the high heat generating equipment FFU 11 is arranged more sparsely than the high cleanliness area FFU 12. Further, the FFU 13 for low heat generation equipment uses 44 FFUs in the low cleanliness area LP, and is arranged more sparsely than the FFU 11 for high heat generation equipment. Moreover, as shown in FIG. 3, the dry coil 15 is provided further above the position where the FFUs 11 to 14 are provided in the back of the ceiling.

  Here, the blowing speed of the air supplied from the FFU 12 for the high cleanliness area is set to a normal blowing speed, and is controlled to a blowing speed at which the blow back air from the floor reaches the ceiling 7. . The normal blowing speed here is, for example, about 0.3 to 0.35 m / s.

  Further, the FFU 11 for high heat generating equipment can be switched between high output operation and low output operation. At the time of high output operation, the blowing speed of the air supplied from the FFU 11 for high heat generating equipment is a blowing speed that promotes the rising air flow accompanying the heat generated from the high heat generating equipment 1. For example, the normal blowing speed It is said that the blowing speed is faster than that.

  On the other hand, at the time of low output operation, the blowing speed of the air supplied from the high heat generating equipment FFU 11 is controlled to a blowing speed that is slower than the normal blowing speed and does not reach the floor. The Or it controls to a normal blowing speed. Moreover, the blowing speed of the air supplied from the FFU 13 for low heat generating equipment is controlled to a blowing speed that is slower than the normal blowing speed and does not reach the floor.

  Furthermore, a control room (not shown) in the clean room R is provided with a control device 20 shown in FIG. A high heat generating device switch sensor 30 provided in the high heat generating device 1 is connected to the control device 20. The high heat generating device 1 is operating when the high heat generating device switch is ON, and the high heat generating device 1 is stopped when the high heat generating device switch is OFF. The high heat generating device switch sensor 30 detects whether the high heat generating device switch is ON or OFF. Further, the high heat generation device switch sensor 30 transmits an ON-OFF signal based on the detected ON / OFF state of the high heat generation device switch to the control device 20.

  The control device 20 is connected to a high heat generating device FFU 11, a high cleanliness area FFU 12, a low heat generating device FFU 13, and an air curtain airflow generation FFU 14. The control device 20 controls the operation of the FFU 11 for high heat generation equipment, the FFU 12 for high cleanliness area, the FFU 13 for low heat generation equipment, and the FFU 14 for air curtain airflow generation, and the blow-out speed of air supplied from the respective FFUs 11 to 14 Is adjusted. In particular, the control device 20 adjusts the blowing speed of the high heat generating device FFU 11 based on the ON-OFF signal transmitted from the high heat generating device switch sensor 30.

  Here, as shown in FIG. 6, when the high heat generating device 1 is operating, the high heat generating device FFU 11 reaches the floor 6 in the clean room R, and the rising air flow accompanying the heat generated from the high heat generating device 1. The air A is supplied at a blowing speed at which the updraft easily reaches the ceiling 7 by promoting the above. For this reason, in the range from the ceiling 7 to the high heat generating device 1 and the floor portion 6 below it, the air A supplied from the high heat generating device FFU 11 circulates.

  Further, air A having a normal blowing speed is supplied from the FFU 12 for high cleanliness area. For this reason, in the high cleanliness area HP, the circulation of the air A is small, and the air mainly flows downward from above. Further, the air A having a blowing speed slower than the normal blowing speed is supplied from the FFU 13 for low heat generating equipment. For this reason, the air A supplied from the FFU 13 for low heat generation equipment circulates above the low heat generation equipment 3 and the conveyor 4 to form a short circuit.

  In the clean room R according to the present embodiment having the above-described configuration, dust is raised up to the ceiling by the rising airflow at the position where the high heat generating device 1 is provided in the low cleanliness area LP, and thus a lot of dust is discharged. Can do. However, since the rising dust causes the accumulated dust staying on the floor 6 to be raised, the staying dust is raised in the air, and the cleanliness may be lowered. Here, in the clean room R according to the present embodiment, the air supplied from the high heat generating device FFU 11 disposed above the high heat generating device 1 is supplied at a higher blowing speed than usual, and the high heat generating device 1 performs. It promotes updraft. For this reason, even if the stagnant dust is soared from the floor 6, the dust can be efficiently soared by the rising air current to the FFU 11 for the high heat generating device on the ceiling. Therefore, even the dust soared in the air can be efficiently captured and discharged from the clean room R by the FFU 11 for high heat-generating equipment.

  In the high cleanliness area HP, the required cleanliness is higher than in the low cleanliness area LP. For this reason, when air A having a blowing speed equivalent to the blowing speed of air A supplied from the FFU 11 for high heat-generating equipment is supplied to the high cleanliness area HP, the staying dust staying on the floor portion 6 is raised. There is concern that it may cause a reduction in cleanliness. In this case, it is possible to maintain the cleanliness required for the low cleanliness area LP, but it is difficult to maintain the cleanliness required for the high cleanliness area HP.

  In this regard, in the clean room R according to the present embodiment, air A having a normal blowing speed is supplied from the high cleanliness area FFU 12 provided in the high cleanliness area HP. When air A at a normal blowing speed is supplied, the staying dust staying on the floor 6 is not swollen from the floor 6 and stays on the floor 6 as it is. As a result, the high cleanliness required for the high cleanliness area HP can be maintained.

  Further, the air supplied to the high cleanliness area HP often flows out to the low cleanliness area LP through the floor 6 without rising in the high cleanliness area HP. For this reason, it is possible to expect an effect of moving the staying dust staying on the floor 6 of the high cleanliness area HP to the low cleanliness area LP.

  Further, in the clean room R according to the present embodiment, in the low cleanliness area LP, the air A having a blowing speed slower than the normal blowing speed is supplied from the FFU 13 for low heat generating equipment, and the low heat generating equipment 3 and Air A supplied from the FFU 13 for low heat generation equipment circulates above the conveyor 4. For this reason, it is possible to prevent the vicinity of the low heat generating device 3 where it is difficult to use the rising airflow from rising from the floor. Moreover, the dust floating in the air can be suitably discharged from the clean room by the flow of air A supplied from the FFU 13 for low heat generating equipment. As a result, the dust can be efficiently discharged without increasing the amount of dust above the low heat generating device 3 and the conveyor 4.

  Furthermore, in the clean room R according to the present embodiment, the floor 6 is formed by a blocking plate in which no opening is formed. For this reason, since the air A supplied into the clean room R is discharged from the opening formed in the ceiling of the clean room R, it is not necessary to form a circulation area of the air A under the floor. Therefore, the space under the floor can be reduced, and the building height of the clean room R can be reduced.

  In the clean room R according to the present embodiment, the high cleanliness area HP is surrounded by the eyelid 5. If the eyelid 5 extends to a position lower than the pass line PL, the processed product mounted on the conveyor 4 and the eyelid 5 interfere with each other, generating dust or adversely affecting the processed product. Will be. In this respect, the eyelid 5 has a short length and extends only to the height of the pass line PL. For this reason, the workpiece etc. mounted on the conveyor 4 and the eyelid 5 can prevent interference.

  Further, if the eyelid 5 is shortened, there is a concern that dust enters the high cleanliness area HP. In particular, intrusion of dust is often performed via the conveyor 4 or the like. In this regard, an air curtain airflow generation FFU 14 that forms an air curtain is provided in the entry / exit region of the conveyor 4 in the high cleanliness area HP. By forming the air curtain with the air curtain airflow generation FFU 14, it is possible to prevent dust from entering the high cleanliness area HP.

  Next, the control procedure of the FFU for high heat generating equipment in the clean room according to the present embodiment will be described. FIG. 5 is a flowchart showing the control procedure of the FFU for high heat-generating equipment in the control device.

  As shown in FIG. 5, in the control device 20 in the clean room R according to the present embodiment, first, an ON-OFF signal transmitted from the high heat generating device switch sensor 30 is confirmed to determine whether the high heat generating device is in operation. Is determined (S1). As a result, when it is determined that the high heat generating device 1 is in operation, it is subsequently determined whether or not the high heat generating device FFU 11 is in a low output operation (S2).

  Here, when it is determined that the FFU 11 for high heat-generating equipment is not in a low output operation, the process directly returns to step S1. On the other hand, if it is determined that the high heat generating device FFU 11 is in a low output operation, the high heat generating device FFU 11 is set in a high output operation (S3), and the process returns to step S1.

  If it is determined in step S1 that the high heat generating device 1 is not in operation, it is determined whether the high heat generating device FFU 11 is in a high output operation (S4). As a result, if the high heat generating device FFU 11 is in a high output operation, the high heat generating device FFU 11 is set in a low output operation (S5), and the process returns to step S1. On the other hand, if the high heat generating equipment FFU 11 is not in a high output operation, the process directly returns to step S1. In this way, control in the control device 20 is performed.

  Even the high heat-generating device 1 may not be in a high heat generation state, and when it is not in a high heat generation state, an updraft is not generated much. For this reason, when the high heat generating device 1 is not in a high heat generating state and the high heat generating device FFU 11 is operated at a high output, the dust generated from the high heat generating device 1 is raised and the dust is suspended in the air. It may be a cause of lowering.

  In this regard, in the control device 20 according to the present embodiment, when the high heat generating device 1 is in operation, it is determined that the heat generating device 1 is in a high heat generating state, and the high heat generating device FFU 11 is set to high output operation. For this reason, when the high heat generating device 1 is in operation and is in a state in which an upward air flow is likely to occur, the blow-back air A from the floor 6 is controlled to the blowing speed at which it reaches the ceiling 7, so that the accumulated dust from the floor Even if it is raised, the dust can be efficiently raised to the FFU 11 for high heat generating equipment on the ceiling by the rising airflow. Therefore, even the dust soared in the air can be efficiently captured and discharged from the clean room R by the FFU 11 for high heat-generating equipment.

  On the other hand, when the high heat generating device 1 is not in operation, it is determined that the high heat generating device 1 is in a low heat generating state, and the high heat generating device FFU 11 is operated at a low output. For this reason, it is possible to prevent the dust generated from the high heat-generating device 1 from being raised and floating the dust in the air. Therefore, it is possible to prevent a decrease in cleanliness. In addition, since the heat generation state of the high heat generating device 1 is determined by turning the high heat generating device 1 on and off, the heat generation state can be easily determined.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment. For example, in the above embodiment, the high heat generating device 1 in the low cleanliness area is disposed adjacent to the high cleanliness area HP, but the high heat generation in the low cleanliness area is sandwiched between the high cleanliness areas HP. It can also be set as the aspect by which the apparatus is arrange | positioned. Or it can also be set as the aspect by which the high heat generation apparatus is arrange | positioned away from the high cleanliness area.

  Moreover, in the said embodiment, although the high heat generation state is detected based on ON-OFF of the high heat generation apparatus 1, the temperature of the predetermined position in the high heat generation apparatus 1 is detected, or in the periphery of the high heat generation apparatus 1 It is also possible to detect the high heat generation state of the high heat generating device 1 by measuring the temperature of the air. Furthermore, in the said embodiment, although FFU of the same performance is used as FFU11-14, it can be set as the aspect which provides FFU of the performance according to an attachment position.

  Moreover, in the said embodiment, from the FFU13 for low heat generation apparatuses, the blowing speed is slower than a normal blowing speed and the supplied air does not reach the floor portion 6, but other blowing speeds are set. For example, a normal blowing speed can be set. Alternatively, the area where the high heat generating device 1 in the low cleanliness area LP is not provided is further divided into a device placement area where the device is placed and a floor area where no device is placed. It is also possible to supply air at a blowing speed that is slower than the blowing speed and that does not allow the supplied air to reach the floor 6 and supply air at a normal blowing speed to the floor surface area.

DESCRIPTION OF SYMBOLS 1 ... High heat generation equipment 2 ... High cleanliness area installation equipment 3 ... Low heat generation equipment 4 ... Conveyor 5 ... Eyelid 6 ... Floor part 7 ... Ceiling 11 ... FFU for high heat generation equipment
12 ... FFU for high cleanliness area
13 ... FFU for low heat generation equipment
14 ... FFU for air curtain airflow generation
15 ... Dry coil 20 ... Control device 30 ... High heat generating device switch sensor HP ... High cleanliness area LP ... Low cleanliness area R ... Clean room PL ... Pass line

Claims (8)

A clean room provided with an air supply device that supplies air from the ceiling toward the floor, and a filter member that removes generated dust on the ceiling,
A low cleanliness area and a high cleanliness area that requires a higher cleanliness than the low cleanliness area, and a high heat generating device is disposed in the low cleanliness area,
In the high cleanliness area, air at a normal blowing speed is supplied from the air supply device,
The ceiling opening is formed above the high heat generating device, and a fan filter unit for the high heat generating device is provided so as to surround the opening,
The fan filter unit can be switched between high output operation and low output operation,
At the time of the high output operation, the blowing speed of the air supplied from the fan filter unit is a blowing speed that promotes the rising air flow accompanying the heat generated from the high heat generating device,
During the low power operation, the blowing speed of air supplied from the fan filter unit is slower than the normal blowing speed, and the blowing speed is such that the supplied air does not reach the floor. clean room, characterized in that that. An eyelid is provided between the high cleanliness area and the low cleanliness area, and the eyelid extends to a position above the pass line,
The clean room according to claim 1, wherein an air curtain forming means for forming an air curtain between the high cleanliness area and the low cleanliness area is provided. A blow speed control means for controlling a blow speed of air supplied from the air supply device to a position where a high heat generating device is arranged in the low cleanliness area,
A high heat generation state detecting means for detecting a high heat generation state in the high heat generation device,
The blow-out speed control means controls the blow-out speed of air supplied from the air supply device according to a high heat generation state of the high heat generation device detected by the high heat generation state detection means. The listed clean room. The high heat generation state detection means is an ON-OFF state detection means for detecting an ON-OFF state of the high heat generation device,
The clean room according to claim 3, wherein when the high heat generating device is ON, it is detected that the high heat generating device is in a high heat generating state. The blowing speed control means is configured to increase the blowing speed of the air supplied from the air supply device when the high heat generating device is in a high heat generating state, and to promote the rising air flow accompanying the heat generated from the high heat generating device. Control to
5. The clean room according to claim 3, wherein when the high heat generating device is in a non-high heat state, the blow speed of air supplied from the air supply device is controlled to a blow speed that is slower than a normal blow speed.   The clean room according to any one of claims 1 to 5, wherein an opening is not formed in a floor portion in the high cleanliness area and the low cleanliness area. A control method for an air supply device in a clean room, comprising an air supply device for supplying air from the ceiling toward the floor, and controlling the air supply device in a clean room provided with a filter member for removing generated dust on the ceiling Because
The clean room includes a low cleanliness area and a high cleanliness area that requires a higher cleanliness than the low cleanliness area, and a high heat generating device is disposed in the low cleanliness area,
In the high cleanliness area, air at a normal blowing speed is supplied from the air supply device,
The ceiling opening is formed above the high heat generating device, and a fan filter unit for the high heat generating device is provided so as to surround the opening,
The fan filter unit can be switched between high output operation and low output operation,
At the time of the high output operation, the blowing speed of the air supplied from the fan filter unit is a blowing speed that promotes the rising air flow accompanying the heat generated from the high heat generating device,
At the time of the low power operation, the blowing speed of the air supplied from the fan filter unit is slower than the normal blowing speed, and the blowing speed is such that the supplied air does not reach the floor. A control method for an air supply device in a clean room.   The control method of the air supply apparatus in the clean room of Claim 7 which controls the blowing speed of the air supplied from the said air supply apparatus according to the high heat generation state of the said high heat generation apparatus.

Images