JP2000085962A - Clean working device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve workability of working while favourably maintaining a clean environment of a clean tunnel in case of carrying out working such as inspection of a conveyor etc., in the clean tunnel in the clean space of which the conveyor is provided. SOLUTION: A tool storage box 21 to store working tools is arranged in a clean space 2 inside a clean tunnel free to move along a conveying passage of a conveyor 12. An opening part 16 for working to work by using a working tool of the tool storage box 21 from the outside of the tunnel A is formed on a front wall of the tunnel A, and this opening part 16 is sealed by a door 17 for maintenance which is free to open and close this opening part 16. Intrusion of a large amount of general air out of the tunnel A to the clean space 2 from the opening part 16 is restrained. The opening part 16 for working is sealed by the door 17 for maintenance after working, and returning of the clean space 2 is quickly carried out.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to the technical field of a clean working apparatus for performing operations such as maintenance of a conveying means in a clean tunnel for conveying a conveyed object in a clean space.

[0002]

2. Description of the Related Art Conventionally, a clean module in which a transfer conveyor is installed in a clean space in a casing and an air supply opening communicating with an air supply duct for supplying clean air is formed in a ceiling portion of the clean space is provided. A plurality of clean modules are connected in series so that the respective clean spaces communicate with each other in a substantially airtight manner, and the conveyed articles are conveyed while sequentially passing between the conveyers of the plurality of clean modules, thereby improving the cleanliness. Clean tunnels adapted to carry the required goods are known.

As one example, for example, Japanese Patent No. 25171
As shown in No. 12, etc., a dividing plate is detachably provided at a connection portion of each clean module, and when performing maintenance or repair work of a conveyor or the like in the clean module, the clean space in the clean module is replaced with another clean space. There has been proposed an apparatus in which a clean space of a clean module is connected and cut off by a dividing plate so that operations such as maintenance can be performed without destroying the clean environment of the entire clean tunnel.

[0004]

By the way, in the above-mentioned proposal, the dividing plates on both sides of the clean module to be inspected or the like are closed, and the clean space in the clean module and the clean space in another clean module are closed. The workability is extremely good since the work such as inspection is performed in a state where the communication with the air conditioner is cut off and the clean space is opened to general air outside the clean module.

However, on the other hand, when performing work,
Since the entire clean space of the target clean module is opened to the general air outside the clean tunnel, it cannot be said that the clean environment of the clean tunnel can be maintained satisfactorily. Also, when the clean module is released during this work and the clean space deviates from the clean environment,
There was a problem that it took time to return the clean space to the original clean environment after the work.

The present invention has been made in view of the above points, and an object of the present invention is to improve the structure of the above-mentioned clean tunnel, and to perform an operation such as inspection of transport means in the clean tunnel. An object of the present invention is to improve the workability while maintaining the clean environment satisfactorily or quickly returning to the original clean environment even if the clean environment is deviated.

[0007]

SUMMARY OF THE INVENTION In order to achieve the above object, according to the present invention, a storage section for working tools is disposed in a clean space in a clean tunnel so as to be movable along a transport path of a transport means. Through the sealable opening provided on the side of the storage unit with working tools, or by separating a part of the clean tunnel,
A movable booth was set up there, and work was performed inside the clean booth.

More specifically, according to the first aspect of the present invention, a predetermined operation is performed in the clean space of a clean tunnel provided with a conveying means for conveying a conveyed material in a clean space to which clean air of downflow is supplied. The target is a clean working device that is to be performed.

[0009] A work tool (in the present invention, for example, includes necessary adhesives and components in addition to the work tool) is movably disposed along the transfer path of the transfer means in the clean space. And a work opening that is opened in the wall of the clean tunnel and that can be closed from outside the clean tunnel using the work tool of the tool storage.

[0010] With this configuration, when work such as inspection of the transporting means is performed in the clean tunnel, the transporting operation of the transporting means is stopped, and the working tool of the tool storage section in the clean space is opened from the outside of the clean tunnel by the working opening. What is necessary is just to perform the required work using.

At this time, for example, when working while opening a closed working opening, the working opening is
Since it is a relatively small one that is opened only on the wall of the clean tunnel, a large amount of general air does not enter the clean space from the working opening during work, and
Even if the clean environment of the clean space comes off due to the infiltration of general air from the work opening, the work environment can be quickly returned to the clean environment by closing the work opening after the work. On the other hand, when work is performed with the work opening sealed with gloves or the like, no general air enters the clean space from the work opening during the work. And since the work tool of the said tool storage part is arrange | positioned in the clean space, the contamination by the work tool itself can be prevented compared with the case where a work tool is brought in from the outside of a clean tunnel for work. Therefore, the clean space can be maintained in a favorable clean environment by these.

Further, since the tool storage section is provided so as to be movable along the transfer path of the transfer means, the tool storage section is moved to a position near the work opening as required, thereby enabling the work to be performed. Can easily get the working tool. Accordingly, the work in the clean tunnel can be performed with good workability while maintaining the clean environment, and both the maintenance of the clean environment and the improvement of workability can be achieved.

According to the second aspect of the present invention, the tool storage section includes:
It is configured to be disposed below the transport section of the transport means. In this way, in the clean space, a downflow of clean air occurs, so that dust is generated due to contact between the tool storage unit and the work tool or contact between the work tools, and the dust is transferred to the upper side of the tool storage unit. Even if an attempt is made to move to the transporting section of the means, the movement can be prevented by the down-flow clean air, and the cleanness of the transported material transported by the transporting means can be maintained well.

According to a third aspect of the present invention, the working opening is configured to be opened and closed by an opening and closing body. This way,
At the time of normal transport of goods by the transport means of the clean tunnel, the working opening is sealed with an opening and closing body,
At the time of work, the work opening may be opened by the opening and closing body, and the work may be performed by inserting a hand through the opening. At that time, since the working opening is a relatively small one that is opened only in the wall of the clean tunnel, a large amount of general air does not enter the clean space from the working opening during the work, The introduction of dust by the general air can be suppressed.

In addition, even if the general air enters through the working opening and the clean environment of the clean space comes off,
After the work, the work opening may be sealed with an opening and closing body,
The return to the clean environment is quickly performed, and the clean environment can be stably maintained.

According to the fourth aspect of the present invention, the working opening is sealed with a glove. In this case, when doing the work,
It is sufficient to work with the working tool while putting the hand in the glove of the working opening from outside the clean tunnel and moving the tool storage section in the clean space to a required position, thereby improving workability. Further, since the glove seals the working opening to shut off communication between the clean space and the outside of the clean tunnel, the clean environment of the clean space is not destroyed.

According to a fifth aspect of the present invention, similarly to the first aspect of the present invention, the clean space of the clean tunnel provided with a transporting means for transporting the transported material is provided in a clean space to which the down-flow clean air is supplied. As a clean working device for performing a predetermined work, a clean booth capable of separating and moving a part of the clean tunnel at an interval and moving toward and away from other parts is provided at the separated portion. Then, the clean booth and the other parts are air-tightly connected by an expandable and contractible tubular elastic member.

According to this configuration, since the clean booth can be moved while forming a part of the clean tunnel, that is, while forming a clean space inside, the clean space of the clean tunnel is maintained when performing work. In this state, move the clean booth to the place where the work is required, and after that move, use the work tools in the tool storage section in the clean booth, or enter the clean booth with workers to perform the work. Just do it. Therefore, also in the present invention, the work in the clean tunnel can be performed with good workability while maintaining the clean environment, and both the maintenance of the clean environment and the improvement of workability can be achieved.

According to a sixth aspect of the present invention, a tool storage section for storing work tools is provided in the clean booth. In this case, the work implement moves together with the clean booth, so that workability can be improved.

According to the seventh aspect of the present invention, at both ends of the clean space in the clean booth in the length direction of the clean tunnel, partition members are provided for suppressing the air in the clean space from flowing into the clean space other than the clean booth. . As a result, even if the cleanness of the air in the clean space in the clean booth is reduced during the work, it is difficult for the air to flow to the clean space in other parts of the clean tunnel.
The cleanliness of the entire clean tunnel can be favorably maintained.

According to the eighth aspect of the present invention, an air shower space through which clean air flows is provided in the clean booth so as to be separated from the clean space. In this way, even when a worker enters the clean booth and works, the user can enter the clean space after taking a clean air shower in the air shower space to remove dust and the like, and clean the clean space. Degree can be maintained.

[0022]

(Embodiment 1) FIG. 1 shows a clean tunnel A according to a first embodiment of the present invention. This clean tunnel A is used to transfer a conveyed object (not shown) such as a hard disk under a clean environment. The casing 1 is provided with a rectangular tubular transparent material extending in the left-right direction (the direction orthogonal to the drawing in FIG. 1) as the transfer direction of the clean tunnel A. A clean space 2 and a clean space 2 are provided inside the casing 1.
The air supply duct space 4 is located above the clean space 2 and is separated from the clean space 2 via the upper partition 3, and is located below the clean space 2 and is separated from the clean space 2 via the lower partition 5. An exhaust duct space 6 is formed, and an air supply port 7 composed of, for example, a large number of through holes is provided in a ceiling portion of the clean space 2, that is, the upper partition 3, and a similar exhaust is provided in a floor portion, that is, the lower partition 5. The mouths 8 are each opened. Therefore,
The clean space 2 communicates with the air supply duct space 4 via an air supply port 7 on the ceiling and with the exhaust duct space 6 via an exhaust port 8 on the floor.

On the upper surface of the casing 1, a plurality of HEPs
A (High Efficient Particle Arrester) filter 1
.. (Only one is shown) are attached and fixed at predetermined intervals in the length direction of the tunnel, and each HEPA filter 10 is connected to a blower (not shown) corresponding to the HEPA filter 10 ( The air discharged from the blower is filtered by a HEPA filter 10 to, for example, class 100 (a level that allows less than 100 particles per cubic foot with a particle size exceeding 0.5 μm).
The clean air flows into the air supply duct space 4 and is supplied from the air supply port 7 to the clean space 2, and the air in the clean space 2 is discharged to the exhaust duct space 6 through the exhaust port 8. , Clean space 2
A clean air down flow is generated.

On the floor (lower partition 5) of the clean space 2, a plurality of transport conveyors 12, 12,... (Only one is shown) as transport means extending in the left-right direction (transport direction).
Are installed side by side in series. Each conveyor 1
Reference numeral 2 denotes a pair of rollers (not shown) pivotally supported at the left and right end portions between the front and rear conveyor frames 13 and 13 located at the lower part of the clean space 2 with their front and rear axes, respectively. Conveyor belt 1 wrapped around
The conveyor belt 14 is rotated by the rotation of the left and right rollers, and the conveyed article is conveyed on the upper span 14a thereof while being transferred to and from the other conveyors 12, 12,. I have to.

On the right front wall of the casing 1 shown in FIG.
A plurality of working openings 16, 16,... (Only one is shown) communicating the clean space 2 in the casing 1 to the outside of the casing 1 are formed at predetermined intervals in the lengthwise direction of the tunnel. The size of the opening 16 is set to, for example, the minimum size necessary for an operator to perform a work with his or her hand. On the front surface of the casing 1, a maintenance door 17 as an opening / closing body for opening and closing each of the working openings 16 is provided with a hinge 1 on the casing 1 above the working opening 16.
When the maintenance door 17 is closed, the work opening 16 is closed in a substantially airtight manner when the maintenance door 17 is closed, and the clean space 2 and the outside of the casing 1 are defined by the work opening 16. Communication with is interrupted.

A guide rail 2 extending in the left-right direction is provided at the front end of the floor (lower partition wall 5) of the clean space 2, that is, at the front side of the conveyor 12 in the clean space 2.
0 is installed on the guide rail 20, and one tool which is located below the upper span 14a of the conveyor belt 14, which is a transport section of the transport conveyor 12, and stores work tools (not shown). A storage box 21 is movably mounted along a guide rail 20 by a cart (not shown), in other words, along a transport path of the transport conveyors 12, 12,. Although not shown, a large number of ventilation holes are opened. The driving device for the tool storage box 21 may be provided in the tool storage box 21 itself, but is arranged outside the casing 1 in order to avoid dust generation. It is desirable to be towed through. Further, the working tool is used for eliminating troubles such as catching of a conveyed object on each transport conveyor 12 and failure of the transport conveyor 12, and for example, an adhesive or a component in addition to the working tool. Including.

Next, the operation of the above embodiment will be described. When a conveyed object such as a hard disk is normally conveyed by the clean tunnel A, each maintenance door 17 is closed, and the work opening 16 on the front side of the casing 1 is closed in an airtight manner. The air discharged from the blower is filtered by the HEPA filter 10 to become clean air. After the clean air is supplied to the air supply duct space 4, the clean air is supplied from the air supply duct space 4 to the air supply port 7 on the ceiling. After that, it is supplied to the clean space 2. Thereafter, the air in the clean space 2 is discharged to the exhaust duct space 6 through the exhaust port 8 in the floor. Such a flow of air causes a downflow of clean air in the clean space 2. In this state, the plurality of transport conveyors 12 in the clean space 2
Operate in synchronism with each other, and the conveyed articles are sequentially conveyed to the plurality of conveyors 12, 12,.

During the transfer of the conveyed goods by the clean tunnel A, when a certain conveyer 12 encounters troubles such as that the conveyed goods are caught and are not conveyed or the conveyer 12 is broken, This is detected through the transparent casing 1. At that time, first, the transport operation itself of the target transport conveyor 12 is stopped. Next, the tool storage box 21 in the clean space 2 is moved by the driving device to the vicinity of the target transport conveyor 12, and among the plurality of maintenance doors 17, 17,.
The operator opens the operation opening 16 by opening the maintenance door 17 closest to the opening 2, and the operator puts his hand into the clean space 2 through the operation opening 16 and takes out the operation tool in the tool storage box 21. Then, an operation for eliminating troubles such as catching of a conveyed object on the conveyor 12 and failure of the conveyor 12 is performed.

At this time, the working opening 16 is opened in the front wall of the casing 1 and has a size necessary for an operator to work with his / her hand and has a relatively small opening area. Even if the working opening 16 is opened as described above, a large amount of general air outside the casing 1 does not enter the clean space 2 from the working opening 16. This can prevent dust in the general air outside the casing 1 of the clean tunnel A from entering the clean space 2 from the working opening 16 during the work, and the clean space 2 can be transported through the clean space 2 in substantially the same manner as during transport. A clean environment can be maintained.

Also, even if the clean environment is impeded by the general air entering the clean space 2 through the work opening 16 during this work, the maintenance door 17 is closed after the work is completed and the work opening 16 is closed. The return to the clean environment is quick if the is sealed. As a result, a clean environment can be stably maintained.
After the operation is completed, the operation opposite to the above operation is performed, and then the conveyor 12 may be operated again for conveyance.

Therefore, in this embodiment, the tool storage box 21 is moved into the clean space 2 by the conveyors 12, 12,.
As described above, by moving the tool storage box 21 to the vicinity of the work opening 16 near the target conveyor 12 as described above, the casing is provided. (1) Working tools can be easily obtained from outside. Therefore, the work in the clean tunnel A can be performed with good workability while maintaining the clean environment as described above, and both the maintenance of the clean environment and the improvement of workability can be achieved.

The tool storage box 21 is provided on the upper side 14 a of the conveyor belt 14 of the conveyor 12.
(Conveying section), the tool storage box 21
Dust is generated due to contact with the work tools therein and between the work tools, and the like.
Of the clean space 2 is stopped by the clean air flowing down the clean space 2. Therefore, it is possible to maintain the cleanliness of the conveyed material favorably.

Further, since the work tools are arranged and stored in the tool storage box 21 located in the clean space 2, the work tools are always kept in a clean environment in the clean space 2. Therefore, compared to a case where the work tool is brought into the clean space 2 from outside the clean tunnel A and the work is performed, contamination by the work tool itself can be prevented,
The clean environment of the clean tunnel A can be more favorably maintained.

(Embodiment 2) FIG. 2 shows Embodiment 2 of the present invention.
(In the following embodiments, the same parts as those in FIG. 1 are denoted by the same reference numerals and detailed description thereof is omitted). In the first embodiment, the work opening 16 is replaced with the maintenance door 17. Is sealed with gloves.

That is, in this embodiment, each working opening 16 opened in the front wall of the casing 1 is sealed by the glove 23, and the mounting frame 2
3a is attached and fixed in an airtight manner around the working opening 16. Other configurations are the same as those in the first embodiment.

Therefore, in this embodiment, when work is performed on the transport conveyor 12 or the like in the clean tunnel A, the casing 1 is attached to the glove 23 that seals the work opening 16 near the target transport conveyor 12. It is sufficient to work from outside and use the work tools in the tool storage box 21 in the clean space 2 to improve the workability.

Since the glove 23 closes the working opening 16 and constantly shuts off the communication between the clean space 2 in the casing 1 of the clean tunnel A and the outside of the casing 1, the clean space is maintained during the work. 2 clean environment is not destroyed. Therefore, both maintenance of the clean environment of the clean tunnel A and improvement of the workability can be achieved.

In each of the above embodiments, the clean space 2
Are provided as one tool storage box 21, but a plurality of tool storage boxes 21, 21,.
.. May be movably arranged in a predetermined range centered on a position substantially corresponding to 6, 16,. In each of the above embodiments, a plurality of transport conveyors 12 are provided.
2 may be one. In that case, when performing the work, it is necessary to stop the entire conveyor 12.

In each of the above embodiments, for example, the working opening 16 corresponding to the work conveyor 12 to be worked.
By increasing the rotation of the nearby blower more than usual, the pressure of the clean space 2 near the conveyor 12 may be increased more partially than other portions. Alternatively, the air supply opening 7 in the ceiling of the clean space 2 is made a large opening, and the air supply opening 7 is opened and closed to adjust the supply amount of clean air from the air supply duct space 4 to the clean space 2. Or, conversely, the exhaust port 8 on the floor of the clean space 2 is used as a similar opening, and the exhaust port 8 is opened and closed to adjust the amount of air discharged from the clean space 2 to the exhaust duct space 6. An exhaust adjustment valve is provided. Normally, the air supply adjustment valve is kept at a moderate opening degree, and the exhaust adjustment valve is kept at a fully open state, while the work on the transport conveyor 12 is close to the target transport conveyor 12. The air supply control valve is switched to the fully open state and the exhaust control valve is switched to the fully closed state to increase the amount of clean air supplied to the clean space 2 through the air supply control valve, or to discharge the clean space 2 from the clean space 2. The amount of air By less than constantly may be partially increase than the pressure of the other portion of the clean space 2 of the conveyor 12 close. With this configuration, the pressure in the clean space 2 near the working opening 16 is partially increased, so that even if the working opening 16 is opened as described above, the air in the clean space 2 is not opened. Since the air is blown out of the casing 1 from the portion 16, it is possible to effectively prevent the general air outside the casing 1 from entering the clean space 2 from the working opening 16.

(Embodiment 3) FIGS. 3 to 5 show Embodiment 3, in which a clean booth movable in the length direction is provided in the middle of a clean tunnel A. FIG. That is, in this embodiment, a part of the clean tunnel A is separated at intervals, and the separated part is a clean booth 2.
6 is arranged so as to be able to approach and separate from other parts. This clean booth 26 has a rectangular box-shaped casing 27,
Wheels 28, 28,... Are supported on the bottom surface, and the clean booth 26 can be moved in the left-right direction by the wheels 28, 28,.

As shown in FIG. 5, a clean space 2 'is formed in the rear half (upper side in FIG. 5) inside the casing 27, and an air shower space 29 is formed in the front half by the partition 30. The partition 30 has, for example, an inner entrance 31 which is opened and closed by a sliding inner door 32, and a tool storage box 21 is installed in an air shower space 29. An outer doorway 33 which is opened and closed by, for example, a slide-type outer door 34 is opened in the front wall of the casing 27.
34 is opened and the clean space 2 'is defined by the entrances 31 and 33.
Alternatively, it enters and exits the air shower space 29.

As shown in FIG. 3, the clean booth 26
The HEPA filter 10 is provided in the upper part of the casing 27 of
Blower 36 for supplying air to the HEPA filter 10
Are provided in the upper side wall of the casing 27 so as to allow the air to be sucked into the blower 36 from outside the casing 27. The air flows into the clean space 2 'and the air shower space 29 as a down flow.

In the rear half portions of the left and right side walls of the casing 27 of the clean booth 26, rectangular connection ports 39, which are substantially the same size and substantially the same height as the openings of the casing 1 in other parts of the clean tunnel A, respectively. 39 is opened so as to communicate with the clean space 2, and a connection cylinder portion 40 is protruded around each connection port 39. Then, the left and right connection cylinders 40, 40 and the casing 1, 1, of the clean tunnel A located on the left and right sides of the clean booth 26, respectively.
1 is a bellows member 42 of a rectangular tubular shape that can be extended and contracted.
The clean booth 26 constitutes a part of the clean tunnel A, and the clean space 2 'of the clean booth 26 and the clean space of the other part of the clean tunnel A are connected. 2 and 2 are communicated via a space (clean space) in the bellows member 42.

Further, as shown in FIG.
One of 2, 12,... Is installed over the clean space 2 'in the clean booth 26 and the clean spaces 2, 2 in the casings 1, 1 of the clean tunnel A located on both sides of the clean booth 26. I have. That is, the rollers 15, 15 of the conveyor 12 are supported in the clean spaces 2, 2 at the ends of the clean tunnel A located on both sides of the clean booth 26, respectively, and the conveyor belt 14 is interposed between these left and right rollers 15, 15. The clean booth 26 extends through the clean space 2 ′ inside the clean booth 26 or the space inside each bellows member 42.
Only the casing 27 is movable in the length direction of the clean tunnel.

Further, as shown in FIG. 3, a plate-like partition member 44 is provided at the upper edge of the connection port 39 in the casing 27 of the clean booth 26, that is, at both ends of the clean space 2 'in the length direction of the clean tunnel. , 44 are dropped,
The lower end of each partition member 44 and the conveyor belt 14
A space through which the conveyed articles can pass is provided between the upper space 14a and the upper span 14a. The flow to the clean space 2 is regulated.

Therefore, in this embodiment, when trouble such as catching of a conveyed object or trouble occurs in the conveyor 12 penetrating the clean booth 26, the operation of the conveyor 12 is stopped. The clean booth 26 is moved to a trouble occurrence location (for example, a location where a conveyed product is caught). Next, the worker operates the outside door 34 on the front wall of the casing 27 of the clean booth 26.
The air shower space 29 is opened to enter the air shower space 29 from the outside entrance 33, and the outside door 34 is closed to seal the air shower space 29, and then the tool storage box 2 of the air shower space 29 is opened.
The work implement is taken out of the apparatus 1 and the cleansing air of the downflow is taken in the air shower space 29 to remove dust adhering to the body. Then, after opening the inner door 32 of the partition wall 30 and entering the clean space 2 'from the inner doorway 31, the inner door 32 is closed to seal the clean space 2', and it is necessary to solve the trouble in the clean space 2 '. Just do the work. When this work is completed, the work space is returned from the clean space 2 'to the air shower space 29, the work tools are returned to the tool storage box 21, and the outer door 34 is opened to open the casing 2
Exit 7

As described above, when a trouble such as the catch of a conveyed object occurs in the conveyer 12 installed through the clean booth 26, the clean space 2 in the clean tunnel A is maintained. The clean booth 26 may be moved to the place where the trouble occurs, and the worker may enter the clean space 2 'therein to perform the work.
Can be performed with good operability while maintaining a clean environment, and both maintenance of a clean environment and improvement of operability can be achieved.

Further, since the partition members 44, 44 are provided at both ends of the clean space 2 'in the clean booth 26 in the length direction of the clean tunnel, the worker can clean the clean space 2 in the clean booth 26 as described above. Even if the cleanness of the air in the clean space 2 'is reduced while the work is being performed in the clean space 2', the air hardly flows into the clean spaces 2 and 2 in other parts of the clean tunnel A. Thus, the cleanness of the entire clean tunnel A can be kept good.

Further, since the air shower space 29 is provided in the casing 27 of the clean booth 26 so as to be separated from the clean space 2, the air shower space 29 is provided before the worker enters the clean booth 26 and works. Take a clean air shower to remove dust etc.
The cleanness of the clean space 2 can be maintained.

(Embodiment 4) FIG. 6 shows Embodiment 4.
In the third embodiment, the worker enters the clean space 2 'in the clean booth 26 to perform the work, whereas the work is performed from outside the clean booth 26.

That is, in this embodiment, a work opening 16 similar to that in the first embodiment and a maintenance door 17 for sealing the same are provided on the front wall of the casing 27 of the clean booth 26, 3, the air shower space 29, the partition 30, and the like are not provided. The tool storage box 21 is fixed to the casing 27 so as to be movable and integral with the floor of the clean space 2 'in the casing 27. Other configurations are the same as those of the third embodiment.

In this embodiment, the clean booth 2
When the work for solving the trouble of the conveyor 12 which penetrates the cleaning booth 6 is performed, the casing 27 of the clean booth 26 is moved to the trouble occurrence location, and the maintenance of the front side of the casing 27 is performed as in the first embodiment. The operation door 16 is opened to open the work opening 16, and the operator puts his hand into the clean space 2 ′ through the work opening 16, takes the work tools in the tool storage box 21, and places the work tools on the conveyor 12. It is only necessary to carry out an operation for eliminating troubles such as catching of a conveyed object and failure of the conveyor 12. Again,
The tool storage box 21 for storing work tools is the clean booth 2
6, the workability can be improved.

In the fourth embodiment, the work opening 16 in the front wall of the casing 27 may be sealed by the glove 23 as in the second embodiment. Further, in each of the above embodiments, the air supply duct space 4 and the exhaust duct space 6 are respectively formed in the casing 1 of the clean tunnel A, but at least one of the air supply duct space 4 and the exhaust duct space 6 is formed. It may be provided as a duct outside the casing 1 of the clean tunnel A.

[0054]

As described above, according to the first aspect of the present invention, the work is performed in the clean space of the clean tunnel provided with the transport means for transporting the transported material in the clean space to which the down-flow clean air is supplied. In this case, a tool storage section for storing work tools is provided in the clean space so as to be movable along the transport path of the transport means, and the work tools of the tool storage section are placed on the wall of the clean tunnel from outside the clean tunnel. By providing a work opening that can be closed and used for work, tools can be moved along the transport path of the transport means while working in the clean tunnel while maintaining a clean environment in the clean tunnel. It is possible to perform the work with good workability by using the work tool of the part, and it is possible to maintain the clean environment and improve the workability at the same time.

According to the second aspect of the present invention, since the tool storage section is disposed below the transfer section of the transfer means, dust generated in the tool storage section is prevented from moving to the transfer section of the transfer means in a clean space. This can be prevented by the downflow of clean air, and the cleanness of the conveyed object can be maintained in a good condition.

According to the third aspect of the present invention, since the working opening is sealed by the openable and closable opening / closing body, when the opening / closing body is opened and work is performed by the working opening, general air outside the clean tunnel is opened. Can be prevented from entering a clean space through a large amount of working openings, and the interior can be maintained in a clean environment.
Even if the clean environment of the clean space comes off, the work opening can be quickly returned to the clean environment by closing the working opening after the work, and the clean environment can be stably maintained.

According to the fourth aspect of the present invention, since the work opening is sealed with the glove, both improvement of workability and maintenance of a clean environment can be achieved.

According to the fifth aspect of the present invention, when working in a clean space of a clean tunnel provided with a conveying means for conveying a conveyed material in a clean space to which a down-flow clean air is supplied, one of the clean tunnels is provided. The clean booth is separated and separated at intervals, and a clean booth that can move toward and away from other parts is provided in the separated part, and this clean booth and other parts are airtightly sealed by a tubular elastic member that can expand and contract. By connecting, when performing work, it is possible to move the clean booth to the place where the work is required while maintaining the clean space with the clean tunnel, and perform the work, maintaining a clean environment and improving workability Can be achieved.

According to the sixth aspect of the present invention, since the tool storage section for storing the work tools is provided in the clean booth, the work tools can be moved together with the clean booth, and the workability can be improved. .

According to the seventh aspect of the present invention, at both ends of the clean space in the clean booth in the length direction of the clean tunnel, partition members are provided for suppressing air in the clean space from flowing into the clean space other than the clean booth. This makes it difficult for the air in the clean space inside the clean booth to flow into the clean space in other parts of the clean tunnel,
The cleanliness of the entire clean tunnel can be favorably maintained.

According to the invention of claim 8, an air shower space through which clean air flows is provided in the clean booth and is separated from the clean space. It is possible to enter the clean space after removing dust and the like by taking an air shower of clean air, thereby maintaining the cleanness of the clean space.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a clean tunnel according to a first embodiment of the present invention, taken along a direction orthogonal to a transport direction.

FIG. 2 is a view corresponding to FIG. 1 showing a second embodiment.

FIG. 3 is a vertical sectional view of a clean tunnel according to a third embodiment.

FIG. 4 is a front view of a clean tunnel according to a third embodiment.

FIG. 5 is a horizontal sectional view of a clean tunnel according to a third embodiment.

FIG. 6 is a partially cutaway perspective view of a clean tunnel according to a fourth embodiment.

[Explanation of symbols]

 Reference Signs List A Clean tunnel 1 Casing 2, 2 'Clean space 4 Supply duct space 6 Exhaust duct space 7 Supply port 8 Exhaust port 8 Conveyor 10 HEPA filter 12 Conveyor 14 Conveyor belt 14a Upper span (transport part) 16 Working opening Unit 17 Maintenance door (opening / closing body) 20 Guide rail 21 Tool storage box (tool storage unit) 23 Globe 26 Clean booth 29 Air shower space 42 Bellows member (expandable member) 44 Partition member

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tomiwa Yamashita 6-107 Takino-cho, Nishinomiya-shi, Hyogo Shinmeiwa Industry Co., Ltd. 6-107 Shin-Meiwa Industrial Co., Ltd. Development Technology Division (72) Inventor Hiroyuki Makimoto 1-1, Shin-Meiwa-cho, Takarazuka-shi, Hyogo Pref. BF07 BF08 BG05

Claims (8)

[Claims] 1. A clean working device in which a predetermined operation is performed in the clean space of a clean tunnel provided with a conveying means for conveying a conveyed object in a clean space to which down-flow clean air is supplied. A tool storage section movably disposed along the transport path of the transport means in the clean space, for storing work tools, and an opening in a wall of the clean tunnel, for working on the tool storage section from outside the clean tunnel. A clean working device, comprising: a work opening capable of being closed using a tool. 2. The clean working apparatus according to claim 1, wherein the tool storage section is disposed below the transport section of the transport means. 3. The clean working device according to claim 1, wherein the working opening is configured to be closed by an openable and closable body. 4. The clean working device according to claim 1, wherein the working opening is sealed by a glove. 5. A clean working device in which a predetermined operation is performed in the clean space of a clean tunnel provided with a conveying means for conveying a conveyed object in a clean space to which down-flow clean air is supplied. A part of the clean tunnel is separated at intervals, and a clean booth is provided in the separated part so as to be movable toward and away from the other part. A clean working device, which is connected in an airtight manner by an elastic member. 6. The clean working device according to claim 5, wherein a tool storage portion for storing working tools is provided in the clean booth. 7. The clean working device according to claim 5, wherein air in the clean space is prevented from flowing into the clean space other than the clean booth at both ends of the clean space in the clean booth in the length direction of the clean tunnel. A clean working device, comprising a partition member for performing the operation. 8. The clean working device according to claim 5, wherein an air shower space through which clean air flows is separated from the clean space in the clean booth. .