JP2000085961A - Clean working device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To carry out working by favourably maintaining a clean environment of a clean module or while returning it to an original clean environment at an early stage even when it is slipped off from the clean environment at the time of carrying out working such as inspection etc., by each of the clean modules constituting a clean tunnel. SOLUTION: A clean space 4 in which a conveyor 8 is arranged and which is communicated to an air supply duct 13 through an air supply port 5 of a ceiling partis provided inside a casing 2 of each clean module 1, and an opening part to be opened and closed by a door is formed on a front wall of the casing 2. At the time of working with each of the clean modules 1, clean air supply quantity to the clean space 4 is increased by communicating the clean space 4 to the clean spaces 4, 4 of the adjacent modules 1, 1 to each other and blocking them by closing shutter devices 26, 26 on both sides and opening an air supply adjustment valve 19. Working is carried out in the clean space 4 by the opening part by opening this door in this state, and air in the clean space 4 is made to flow outside out of the opening part.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean working apparatus, and more particularly to a technical field related to a clean tunnel in which a plurality of clean modules are connected to each other so as to perform operations such as maintenance of a conveyor by using the clean modules. Belong.

[0002]

2. Description of the Related Art Conventionally, a clean module in which a transfer conveyor is installed in a clean space in a casing and an air supply opening communicating with an air supply duct for supplying clean air is formed in a ceiling portion of the clean space is provided. A plurality of clean modules are connected in series so that the respective clean spaces communicate with each other in a substantially airtight manner, and the conveyed articles are conveyed while sequentially passing between the conveyers of the plurality of clean modules, thereby improving the cleanliness. Clean tunnels adapted to carry the required goods are known.

[0003] As one example, for example, Patent No. 2
As shown in Japanese Patent No. 517112 or the like, a separation plate is detachably provided at a connection portion of each clean module, and when performing maintenance or repair work of a conveyor or the like in the clean module, the clean space in the clean module is replaced with another clean space. There has been proposed an apparatus in which a clean space of a clean module is connected and cut off by a dividing plate so that operations such as maintenance can be performed without destroying the clean environment of the entire clean tunnel.

[0004]

However, in the above-mentioned proposal, the dividing plates on both sides of the clean module to be inspected or the like are closed, and communication between the clean space in the clean module and the clean space in another module is performed. Inspections are performed while the clean space is open to the general air outside the clean module, so the clean environment of the entire clean tunnel is maintained. Can not be maintained. Moreover, if the clean space of the clean module deviates from the clean environment as described above, there is a problem that it takes time to return the clean space to the original clean environment after the inspection or the like.

[0005] The present invention has been made in view of the above points, and the object thereof is not limited to a clean tunnel in which a plurality of clean modules are connected as described above, but is divided into a plurality of clean modules. By improving the structure of each clean module in a clean tunnel, when performing inspections and other tasks at each clean module, the clean environment of the clean module can be maintained well, or the clean module can be used. An object of the present invention is to make it possible to perform work while returning to the original clean environment as soon as possible even if it comes off the clean environment.

[0006]

In order to achieve the above object, according to the present invention, a work opening which is normally closed by an opening / closing body is formed in a casing of a clean module. With the body open and working from the outside of the clean module through the opening, the air in the clean space is forcibly discharged from the open opening to prevent general air from entering the clean space from the opening. .

More specifically, according to the first aspect of the present invention, the clean tunnel is divided into a plurality of clean modules in the length direction, and each of the clean modules has at least a clean space in which a conveyor is arranged. The casing includes a casing, a working opening formed on a side portion of the casing and communicating the clean space outside the casing, and an opening / closing body that opens and closes the working opening. Then, an air supply duct is provided for supplying clean air to the clean space of each of the above-mentioned clean modules via an air supply port at the ceiling of the clean space. In addition, a shutter unit is provided at a boundary between each clean module and another clean module to block communication between the clean spaces of the two clean modules. Further, an air supply adjusting means for adjusting the supply amount of clean air from the air supply duct to the clean space is provided.

According to the above-described configuration, when a work such as inspection of the transport conveyor is performed in each clean module, first, the clean module is located at the boundary between the target clean module and a pair of clean modules adjacent to the clean module. The two shutter means are respectively closed to shut off the communication between the clean space in the clean module and the clean space in the other clean modules. Then, the supply amount of the clean air from the air supply duct to the clean space is increased by the air supply adjusting means at a normal time, that is, when the opening / closing body is closed and the conveyer conveys the conveyed material, and the opening / closing body is moved in that state. The operator may open the work opening by performing the opening operation, and the operator may put his hand or the like into the clean space through the work opening to perform necessary work.

At this time, the communication between the clean space and the clean space of the other clean module is interrupted, and in this state, the amount of clean air supplied from the air supply duct to the clean space increases. Is higher than the outside of the casing, and even if the opening / closing body is opened, the air in the clean space only flows out of the clean module from the working opening. For this reason, it is suppressed that general air outside the clean module enters the clean space from the working opening, and it is possible to prevent dust from being brought in by the general air. Therefore, even during the operation in the clean module, the inside thereof can be maintained in the same good clean environment as during the transfer.

Further, since the work is performed in a state where the supply amount of the clean air from the air supply duct to the clean space of the clean module is increased and the pressure in the clean space is increased, if the work is performed during this work, etc. Even if the clean environment of the clean module comes off for some reason, the return to the clean environment is quickly performed by the increased amount of the clean air supply, and the clean environment can be stably maintained.

In the invention of claim 2, an exhaust port for discharging air from the clean space is provided on the floor of the clean space of each of the clean modules, and the amount of air discharged from the clean space is adjusted by opening and closing the exhaust port. Exhaust adjustment means is provided.

In this case, when the opening / closing body is opened for work in the clean module, the supply amount of clean air from the air supply duct to the clean space is increased by the air supply adjusting means, and at the same time, the exhaust air adjusting means is used. The exhaust port on the floor of the clean space may be closed more than usual to reduce the amount of air discharged from the clean space. This makes it difficult for the air in the clean space to be exhausted from the exhaust port, thereby further increasing the pressure in the clean space, further promoting the discharge of air from the working opening, and maintaining the clean environment. The effect can be obtained even more effectively.

According to the third aspect of the present invention, the shutter means is of a winding type that extends and contracts a shutter from a winding section, and the winding section is located below the transport section of the transport conveyor. In this case, in the clean space, a downflow occurs due to the supply of clean air from the air supply port on the ceiling to the clean space, so that dust is generated from the winding unit when the shutter expands and contracts due to the opening and closing operation of the shutter means. However, it is possible to prevent the dust from moving to the transport conveyor on the upper side of the take-up unit by the clean air of the downflow, and it is possible to maintain a good cleanness of the transported material transported by the transport conveyor. .

According to a fourth aspect of the present invention, the shutter means is held in a closed state by a magnet catch. Thus, a structure for keeping the shutter means in the closed state can be easily obtained.

According to the fifth aspect of the present invention, a tool storage portion for storing a work tool is provided at a position below the transfer portion of the transfer conveyor in the clean space of the clean module and at a position corresponding to the work opening. I do. As a result, the working tools in the tool storage section are placed in a clean environment, and contamination by tools can be prevented compared to a case where tools are brought in from outside the clean module and work is performed. A clean environment can be maintained more favorably.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) FIGS. 1 to 4 show a clean tunnel A according to a first embodiment of the present invention. It is used for transporting in a clean environment, and is formed by connecting a plurality of clean modules 1, 1,.

The plurality of clean modules 1, 1,...
Are the same as each other, and each has a casing 2 made of a transparent material in the form of a rectangular tube opened in the left-right direction (the transport direction of the clean tunnel A). Inside the casing 2, a clean space 4 and an exhaust duct space 17 located below the clean space 4 and separated from the clean space 4 by a partition 7 are formed. An air supply port 5 is opened in a ceiling portion, that is, an upper wall portion of the casing 2, and an exhaust port 6 is opened in a floor portion, that is, a partition wall 7, respectively. That is, the clean space 4 communicates with the exhaust duct space 17 via the exhaust port 6 on the floor, and the air in the clean space 4 is discharged to the exhaust duct space 17 via the exhaust port 6.

A transport conveyor 8 extending in the left-right direction (transport direction) is provided on the floor (partition wall 7) of the clean space 4. This conveyor 8 is used for the clean space 4
The left and right ends of the lower part have a pair of rollers 9 and 9 which are respectively supported by the front and rear axes.
A conveyor belt 10 is wound around the conveyor belt 9, and the conveyor belt 10 is rotated by rotation of the left and right rollers 9, 9 to convey articles on an upper span 10 a thereof.

The plurality of clean modules 1
The casings 2, 2,... Are connected in a substantially airtight manner at the left and right ends thereof (specifically, between the openings of the adjacent clean modules 1, 1). The guide sections 30 are hermetically interposed therebetween, whereby the clean spaces 4, 4,... And the exhaust duct spaces 17, 17,. In a series of clean spaces 4, 4,..., The conveyed articles are conveyed while being transferred between the conveyers 8, 8,.

At the upper part of the casing 2 of each of the above-mentioned clean modules 1, a substantially U-shaped air supply duct 13 extending over the plurality of clean modules 1, 1,. Is joined to. That is, the air supply duct 13 is located above the clean space 4 in the casing 2 and communicates with the clean space 4 via the air supply port 5 in the ceiling. Further, HEPA (High Efficient Particle Arrester) filters 14, 14,... Fixed on the upper surface of the air supply duct 13 at predetermined intervals in the length direction are connected, and each of the HEPA filters 14 is connected to a blower 15. And this blower 15
The air discharged from the filter is filtered by a HEPA filter 14 to obtain, for example, clean air of class 100 (a level that allows less than 100 fine particles having a particle size exceeding 0.5 μm per cubic foot). The air is supplied to the clean space 4 of each clean module 1 through the air supply port 5 at the ceiling of the clean space 4. 16 is a blower 15
This is a pre-filter for filtering general air sucked into the air.

The air supply port 5 at the ceiling of the clean space 4 in each of the clean modules 1 is opened and closed to adjust the amount of clean air supplied from the air supply duct 13 to the clean space 4. An air supply adjusting valve 19 is provided. The air supply regulating valve 19 is composed of a plurality of rotary valve units 19a, 19a,... Arranged to cover the air supply port 5, and these valve units 19a, 19a,. It opens and closes synchronously to become.

The exhaust port 6 at the floor of the clean space 4 in each clean module 1 has an exhaust control valve for opening and closing the exhaust port 6 to adjust the amount of air discharged from the clean space 4 to the exhaust duct space 17. 20 are provided. The exhaust control valve 20 is composed of a plurality of rotary valve units 20a, 20a,... Arranged to cover the exhaust port 6, similarly to the air supply control valve 19.
are opened and closed in synchronization with each other so as to have the same opening.

A working opening 22 is formed in the front wall of the casing 2 of each of the clean modules 1 to communicate the clean space 4 in the casing 2 to the outside of the casing 2. Also, on the front surface of the casing 2, the working opening 2 is provided.
A maintenance door 23 as an opening / closing body that opens and closes the maintenance door 2 is disposed in the casing 2 above the work opening 22 in a state supported by hinges 24, 24.
When the work opening 3 is closed, the working opening 22 is closed in a substantially airtight manner, and the communication between the clean space 4 and the outside of the casing 2 by the working opening 22 is cut off.

At the boundary between each of the clean modules 1 and the other clean module 1, there is provided a shutter device 26 for blocking communication between the clean spaces 4 and 4 of the clean modules 1 and 1. As shown in FIGS. 2 and 3, the shutter device 26 is of a winding type in which a sheet-like shutter 27 is extended and retracted with respect to a winding portion 28, and the winding portion 28 transports the transport conveyor 8. Portion, that is, below the upper span 10 a of the conveyor belt 10, specifically, the partition 7 (the clean space 4
The floor 27 is attached and fixed to one of the left and right sides (the right side in the illustrated example) of the lower surface so as to face the inside of the exhaust duct space 17, and the shutter 27 is pulled upward from the winding portion 28 and extends. A rod 29 made of a magnetic material such as iron and extending in the front-rear direction is integrally fixed to a front end (upper end) of the shutter 27. The rod 29 causes the sheet-shaped shutter 27 to move forward and rearward at the front end. It is held in the unfolded state. Incidentally, the winding section 28 winds the shutter 27 by a winding mounting force of a spring or the like.

An opening at the end in the left-right direction of the casing 2 is positioned above the winding portion 28, and a rectangular frame-shaped guide portion 30 is formed around the opening to cut out the end of the casing 2. It is mounted and fixed integrally in a state fitted in the notch. The guide portion 30 is for guiding the shutter 27 pulled out from the winding portion 28 to the upper side together with the rod 29. The lower frame portion 30a is provided with a slit 31 for inserting the retractable shutter 27, and a rear frame. Part 30b
A guide groove 32 for guiding the rear end of the shutter 27 (rod 29) is formed in each of them. A vertical guide slot 33 through which the front end of the rod 29 is inserted is formed through the front frame section 30c of the guide section 30. The front end of the rod 29 is located on the front side of the guide section 30 through the guide slot 33. In other words, an operating portion 34 is attached to the front end of the rod 29 which protrudes to the outside of the casing 2, and the shutter 27 is moved up and down from the outside of the casing 2 by the operating portion 34 so that the shutter 27 is taken up. When the rod 29 is moved up and down with respect to the shutter 28, the shutter 27 is pulled out upward from the winding section 28 to shut off the communication between the clean spaces 4 and 4 of the adjacent clean modules 1 and 1. , When the shutter 27 is moved downward, the shutter 27 is moved downward and
And clean spaces 4 and 4 of both clean modules 1 and 1 communicate with each other.

A magnet catch 35 for attracting the rod 29 at the tip of the shutter 27 by magnetic force is fixed to the upper frame portion 30d of the guide portion 30 in the shutter device 26 (see FIG. 1). Ascend to clean space 4,4 of both clean modules 1,1
When the communication between them is interrupted, the rod 27 at the tip of the shutter 27 is attracted by the magnet catch 35 to hold the shutter 27 in the closed state.

2 and 3, reference numeral 37 denotes a box-shaped cover which is detachably attached to the front surface of the casing 2 so as to close the guide slot 33 of the front frame portion 30c of the guide portion 30. That is, since the guide slot 33 communicates the clean space 4 in the casing 2 to the outside of the casing 2, the guide slot 33 is connected to the rod 2 when the shutter 27 of the shutter device 26 is not moved up and down.
The cover 37 is covered by the cover 37 together with the operation section 34 of FIG.

Next, the operation of the above embodiment will be described. At the normal time when a conveyed object such as a hard disk is conveyed by the clean tunnel A, as shown in FIG.
Numeral 7 is wound around the winding unit 28, and the clean spaces 4, 4 of the adjacent clean modules 1, 1 communicate with each other. Further, the maintenance door 23 of each clean module 1 is closed, and the work opening 22 on the front side of the casing 2 is closed. Further, the air supply control valve 19 is maintained at a medium opening degree, and the exhaust control valve 20 is maintained at a fully open state. The air discharged from the blower 15 is filtered by the HEPA filter 14 into clean air by the opening degrees of the two regulating valves 19 and 20, and this clean air is supplied into the air supply duct 13 and then supplied to the air supply duct 13. From 13, the air is supplied to the clean space 4 via the air supply port 5 (air supply adjustment valve 19) of each clean module 1. Thereafter, the air in the clean space 4 is discharged to the exhaust duct space 17 via the exhaust port 6 (exhaust control valve 20) on the floor of the clean space 4. Such a flow of air causes a downflow of clean air in the clean space 4.

In this state, the conveyor 8 in the clean space 4 of each clean module 1 operates synchronously with the conveyors 8, 8,... Of the other clean modules 1, 1,. Clean module 1,1, ...
Are sequentially conveyed by the conveyors 8, 8,....

When a trouble occurs in the conveyor 8 of a certain clean module 1 during conveyance of the conveyed goods by the clean tunnel A, for example, the conveyed goods are caught and are not conveyed, or the conveyer 8 is broken. If so, this is detected through the transparent casing 2. At that time, first, the transport operation itself of the transport conveyor 8 in the target clean module 1 is stopped. Next, as shown in FIG. 3, the shutter device 26 of the target clean module 1 and its shutter device 2
6 and the shutter device 26 of the clean module 1 adjacent to the end opposite to the cover 6, respectively.
The rod 29 is pulled up by the operation of each operation unit 34, the shutter 27 is pulled out from the winding unit 28, and the rod 29 is attracted to the magnet catch 35 of the upper frame 30d of the guide unit 30. With this, both shutters 27,
27 is held in a closed state, and only the clean space 4 in the target clean module 1, which is partitioned by the two shutters 27, 27, communicates with the clean spaces 4, 4,. Will be shut off.

Further, after the cover 37 of each shutter device 26 is reattached to close the guide elongated hole 33, the air supply adjusting valve 19 in the target clean module 1 is set.
Is switched from the middle opening to the fully opened state, and the exhaust adjustment valve 20 is switched from the fully opened state to the fully closed state (see FIG. 1). Then, in a state where the clean space 4 of the target clean module 1 is disconnected from the other clean spaces 4, 4,..., The amount of clean air supplied to the clean space 4 via the air supply adjusting valve 19. Is increased from the above-mentioned normal time, so that the pressure in the clean space 4 is increased. In addition, since the amount of air discharged from the clean space 4 is smaller than that in the normal state, the pressure in the clean space 4 is further increased. In this state, the maintenance door 23 on the front side of the casing 2 is opened and operated to open the work opening 22, and a worker manually inserts a work tool (not shown) into the clean space 4 from the work opening 22. Put conveyor 8
An operation for eliminating troubles such as catching of the upper conveyed object and failure of the conveyor 8 is performed.

At this time, since the internal pressure of the clean space 4 is high, even if the work opening 22 is opened as described above, air in the clean space 4 blows out of the casing 2 from the work opening 22. On the contrary, it is possible to prevent general air outside the casing 2 from entering the clean space 4 from the working opening 22. This can prevent dust in the general air outside the clean module 1 from entering the clean space 4 from the work opening 22 during the work, and the clean space 4 can be brought into a favorable clean environment similar to that during transport. Can be maintained.

Further, since the above operation is performed in a state where the internal pressure of the clean space 4 is increased, even if the clean environment of the clean space 4 of the clean module 1 is disturbed during this operation, the operation is performed. The return to the clean environment is performed promptly as much as the internal pressure of the clean space 4 is increased, so that the clean environment can be stably maintained.

After the above operation is completed, the operation reverse to the above-described operation is performed. Finally, the shutter 27 of each shutter device 26 is wound around the winding section 28 and the cover 37 is attached. 8 may be reactivated for transport.

In this embodiment, since the winding section 28 of each shutter device 26 is disposed below the upper span 10a of the conveyor belt 10 in the conveyor 8, the opening / closing operation of the shutter device 26 is performed. Even if dust is generated from the winding unit 28 when the shutter 27 expands and contracts due to the above, the dust is prevented from moving on the conveyor belt 10 above the winding unit 28 by the clean air of the downflow in the clean space 4. Therefore, it is possible to maintain good cleanliness of the conveyed object conveyed by the conveyor 8.

The shutter 2 of the shutter device 26
Since the front end of the shutter 7 is sucked and held in a closed state by the magnet catch 35, a structure for keeping the shutter 27 in the closed state can be easily obtained.

(Embodiment 2) FIG. 5 shows Embodiment 2 of the present invention.
(Note that the same parts as those in FIGS. 1 to 4 are denoted by the same reference numerals and detailed description thereof is omitted), and a work tool is arranged in the clean space 4 of each clean module 1. It is.

That is, in this embodiment, at the front end of the floor (partition 7) of the clean space 4 in the clean module 1, that is, at the front side of the transfer conveyor 8 in the clean space 4, it is the transfer section of the transfer conveyor 8. A tool storage box 39 for storing a work tool (not shown) is attached and fixed below the upper span 10a of the conveyor belt 10 and at a position corresponding to the work opening 22. Although not shown, a number of ventilation holes are opened at the bottom. The work tool is used for eliminating troubles such as catching of a conveyed object on the conveyor 8 and failure of the conveyor 8 as described above.
In FIG. 5, reference numeral 11 denotes a conveyor frame that supports the rollers 9 of the conveyor 8. Other configurations are the same as those in the first embodiment.

Therefore, in the case of this embodiment, working tools are arranged and stored in the tool space 39 located below the upper span 10a of the conveyor belt 10 of the conveyor 8 in the clean space 4 of the clean module 1. The work tools in this tool storage box 39 are:
It is always kept under a clean environment in the clean space 4. For this reason, compared to the case where the tool is carried out from outside the clean module 1 as in the first embodiment, the contamination by the tool itself can be prevented, and the clean environment of the clean module 1 is maintained more favorably. be able to.

In each of the above embodiments, the clean tunnel A is formed by connecting a plurality of clean modules 1, 1,... In series. Clean module 1,1,
, And the same operation and effect as in the above embodiment can be obtained.

In each of the above embodiments, the air supply duct 1
Although the space 3 is provided separately from the clean module 1, the space in the air supply duct is provided separately from the clean space 4 in the casing 2 of the clean module 1. The ducts may be joined to form one duct. Further, the exhaust duct space 17 can be provided in an exhaust duct separate from the clean module 1.

Further, in the above embodiment, the rod 29 made of a magnetic material is provided at the tip of the shutter 27 of the shutter device 26, and the magnet catch 35 for attracting the rod 29 is provided at the guide portion 30, respectively. Conversely, the guide portion 30 may be provided with a magnetic material attracting portion, and the rod 29 may be provided with a magnet catch for attracting the magnetic material attracting portion. Further, a closing means other than the magnet catch 35 may be employed.
Further, in the above embodiment, the shutter device 26 is of a winding type including the winding unit 28 and the shutter 27, but a shutter device 26 other than the winding type may be employed.

[0043]

As described above, according to the first aspect of the present invention, each clean module constituting a clean tunnel has a clean space in which a conveyor is disposed,
It shall have a casing with a working opening formed on the side, which is opened and closed by an opening and closing body. At the boundary between each clean module and the other clean module, communication between the clean spaces of both clean modules is cut off. A shutter means for adjusting the amount of clean air supplied from the air supply duct to the clean space via the air supply opening at the ceiling thereof, thereby providing a clean space for each clean module. When performing the work, close the shutter means at the boundary part on both sides of the clean module, and open and close the opening / closing body with the supply amount of clean air from the air supply duct to the clean space increased by the air supply adjustment means as compared with the normal case. Open and work in the clean space through the work opening, and let the air in the clean space flow out from the work opening to the outside. In addition, it is possible to prevent general air outside the module from entering the clean space from the working opening, and to maintain a good clean environment during work with the clean module, and to remove the clean environment during this work. Even if this is the case, it is possible to quickly return to the original clean environment and to maintain the stable clean environment.

According to the second aspect of the present invention, by opening and closing the air exhaust port on the floor of the clean space to adjust the amount of air discharged from the clean space, the opening and closing body is opened for work. At the same time, the amount of clean air supplied from the air supply duct to the clean space is increased, and at the same time, the exhaust port on the floor of the clean space is closed more than usual to reduce the amount of air discharged from the clean space. By further promoting the discharge of air from the section, the effect of maintaining a clean environment can be more effectively obtained.

According to the third aspect of the present invention, the shutter means is of a winding type, and the winding section is disposed below the conveying section of the conveying conveyor in the clean space, thereby opening and closing the shutter means. This prevents dust from the winding section from moving to the transport conveyor due to the downflow of clean air in the clean space, thereby maintaining good cleanliness for the transported object.

According to the fourth aspect of the invention, since the shutter means is held in the closed state by the magnet catch, it is possible to easily realize a structure for keeping the shutter means in the closed state.

According to the fifth aspect of the present invention, the tool storage section for storing the work tool is disposed below the transfer section of the transfer conveyor in the clean space and at a position corresponding to the work opening. In addition, the working tools can be arranged in a clean environment, and contamination by the tools can be prevented, so that the clean environment of the clean module can be more favorably maintained.

[Brief description of the drawings]

FIG. 1 is a sectional view of a clean tunnel according to a first embodiment of the present invention.

FIG. 2 is a perspective view of a main part showing a state where a shutter device of the clean module is opened.

FIG. 3 is a diagram corresponding to FIG. 2, showing a state in which a shutter device is closed.

FIG. 4 is a perspective view showing a clean tunnel with an air supply duct removed.

FIG. 5 is an enlarged cross-sectional view of a clean module of a clean tunnel according to a second embodiment of the present invention, cut along a direction orthogonal to a transport direction.

[Explanation of symbols]

 Reference Signs List A Clean tunnel 1 Clean module 2 Casing 4 Clean space 5 Air supply port 6 Exhaust port 8 Conveyor 10 Conveyor belt 10a Upper span (conveyance section) 13 Air supply duct 14 HEPA filter 19 Air supply adjustment valve (air supply adjustment means) 20 Exhaust adjusting valve (exhaust adjusting means) 22 Working opening 23 Maintenance door (opening / closing body) 26 Shutter device (Shutter means) 27 Shutter 28 Winding unit 35 Magnet catch 39 Tool storage box (Tool storage unit)

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tomiwa Yamashita 6-107 Takino-cho, Nishinomiya-shi, Hyogo Shinmeiwa Industry Co., Ltd. No. 6 107 Shin-Meiwa Industrial Co., Ltd. Development Technology Division (72) Inventor Hiroyuki Makimoto 1-1, Shin-Meiwa-cho, Takarazuka-shi, Hyogo F-term in Shinki Meiwa Co., Ltd. Industrial Machinery Systems Division BF07 BF08

Claims (5)

[Claims] A clean tunnel is divided into a plurality of clean modules in a longitudinal direction. Each of the clean modules is formed at least on a casing having a clean space in which a conveyor is disposed, and on a side of the casing. A working opening communicating the clean space outside the casing; and an opening / closing body for opening and closing the working opening. The clean space of each of the clean modules is provided through an air supply port on a clean space ceiling. An air supply duct for supplying clean air; shutter means provided at a boundary between the clean modules for each of the clean modules to block communication between the clean spaces of the clean modules; Air supply adjusting means for adjusting the amount of clean air supplied to the space. Down the working device. 2. The clean working apparatus according to claim 1, wherein an exhaust port for discharging air from the clean space is provided on a floor of the clean space of each clean module, and the air from the clean space is opened and closed by opening and closing the exhaust port. A clean working device comprising exhaust adjusting means for adjusting an amount of discharge. 3. The clean working apparatus according to claim 1, wherein the shutter means is of a winding type for expanding and contracting a shutter from a winding section, and the winding section is located below a transport section of the transport conveyor. A clean working device, characterized in that it is located in: 4. The clean working device according to claim 1, wherein the shutter means is configured to be held in a closed state by a magnet catch. 5. The clean working device according to claim 1, wherein the clean space of the clean module is located below the transfer section of the transfer conveyor and at a position corresponding to the work opening.
A clean working device, wherein a tool storage portion for storing work tools is provided.