WO2002010651A1 - Pull-up chamber - Google Patents

Pull-up chamber Download PDF

Info

Publication number
WO2002010651A1
WO2002010651A1 PCT/JP2001/006432 JP0106432W WO0210651A1 WO 2002010651 A1 WO2002010651 A1 WO 2002010651A1 JP 0106432 W JP0106432 W JP 0106432W WO 0210651 A1 WO0210651 A1 WO 0210651A1
Authority
WO
WIPO (PCT)
Prior art keywords
pull
installation
chamber
story
temperature
Prior art date
Application number
PCT/JP2001/006432
Other languages
French (fr)
Japanese (ja)
Inventor
Michiaki Oda
Hideaki Matsushima
Kazuya Nakagawa
Toshiro Hayashi
Hidetoshi Seki
Original Assignee
Shin-Etsu Handotai Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Handotai Co., Ltd. filed Critical Shin-Etsu Handotai Co., Ltd.
Publication of WO2002010651A1 publication Critical patent/WO2002010651A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

A pull-up chamber of at least two-story or multistory construction having an air conditioning system of circulation type in which clean air is blown out from a blow-off port in an upper story and is sucked through a return duct in a lower story, characterized in that an apparatus or installation appurtenant to a single-crystal pull-up machine is installed in a lower story, the working temperature is at least 10 ° higher than the temperature of the pull-up chamber, the apparatus or installation is installed in the vicinity of the return duct or a guide duct is installed in the upper region of the apparatus or installation. With this arrangement, generation of upward currents and disturbance in downward currents caused by the apparatus or installation which generates heat on account of its function are eliminated, and the degree of cleanness and temperature of the pull-up chamber are maintained at their optimum values without impairing the maintenance and operability of the apparatus appurtenant to the pull-up machine, thereby enhancing productivity and yield of single crystals; thus, single-crystal rods of high quality can be produced.
PCT/JP2001/006432 2000-07-31 2001-07-26 Pull-up chamber WO2002010651A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000230894A JP2002048370A (en) 2000-07-31 2000-07-31 Lifting chamber
JP2000-230894 2000-07-31

Publications (1)

Publication Number Publication Date
WO2002010651A1 true WO2002010651A1 (en) 2002-02-07

Family

ID=18723791

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/006432 WO2002010651A1 (en) 2000-07-31 2001-07-26 Pull-up chamber

Country Status (3)

Country Link
JP (1) JP2002048370A (en)
TW (1) TW498458B (en)
WO (1) WO2002010651A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002138620A (en) * 2000-10-31 2002-05-17 Shin Etsu Handotai Co Ltd Drawing-up room
JP2008266058A (en) * 2007-04-18 2008-11-06 Shin Etsu Handotai Co Ltd Pulling room
JP2009002634A (en) * 2007-06-25 2009-01-08 Unitec Inc Unit type clean room
CN113048600A (en) * 2021-03-03 2021-06-29 通用空气(辽宁)有限公司 Adjustable indoor air purification device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02161240A (en) * 1988-12-13 1990-06-21 Hitachi Plant Eng & Constr Co Ltd Underfloor two-layer structure for clean room
JPH07263172A (en) * 1994-02-07 1995-10-13 Takasago Thermal Eng Co Ltd Clean room and substrate transporting system
JPH11141938A (en) * 1997-11-13 1999-05-28 Matsushita Electron Corp Clean room

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02161240A (en) * 1988-12-13 1990-06-21 Hitachi Plant Eng & Constr Co Ltd Underfloor two-layer structure for clean room
JPH07263172A (en) * 1994-02-07 1995-10-13 Takasago Thermal Eng Co Ltd Clean room and substrate transporting system
JPH11141938A (en) * 1997-11-13 1999-05-28 Matsushita Electron Corp Clean room

Also Published As

Publication number Publication date
TW498458B (en) 2002-08-11
JP2002048370A (en) 2002-02-15

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