JP2002006494A5 - - Google Patents

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Publication number
JP2002006494A5
JP2002006494A5 JP2000188051A JP2000188051A JP2002006494A5 JP 2002006494 A5 JP2002006494 A5 JP 2002006494A5 JP 2000188051 A JP2000188051 A JP 2000188051A JP 2000188051 A JP2000188051 A JP 2000188051A JP 2002006494 A5 JP2002006494 A5 JP 2002006494A5
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JP
Japan
Prior art keywords
group
acid
resist layer
substituent
resist
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JP2000188051A
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English (en)
Japanese (ja)
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JP2002006494A (ja
JP4217369B2 (ja
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Priority to JP2000188051A priority Critical patent/JP4217369B2/ja
Priority claimed from JP2000188051A external-priority patent/JP4217369B2/ja
Publication of JP2002006494A publication Critical patent/JP2002006494A/ja
Publication of JP2002006494A5 publication Critical patent/JP2002006494A5/ja
Application granted granted Critical
Publication of JP4217369B2 publication Critical patent/JP4217369B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000188051A 2000-06-22 2000-06-22 ２層レジスト Expired - Lifetime JP4217369B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000188051A JP4217369B2 (ja) 2000-06-22 2000-06-22 ２層レジスト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000188051A JP4217369B2 (ja) 2000-06-22 2000-06-22 ２層レジスト

Publications (3)

Publication Number Publication Date
JP2002006494A JP2002006494A (ja) 2002-01-09
JP2002006494A5 true JP2002006494A5 (enExample) 2006-01-12
JP4217369B2 JP4217369B2 (ja) 2009-01-28

Family

ID=18687905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000188051A Expired - Lifetime JP4217369B2 (ja) 2000-06-22 2000-06-22 ２層レジスト

Country Status (1)

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JP (1) JP4217369B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4262516B2 (ja) 2003-05-12 2009-05-13 富士フイルム株式会社 ポジ型レジスト組成物
JP5353469B2 (ja) * 2009-06-22 2013-11-27 Ｊｓｒ株式会社 酸転写樹脂膜形成用組成物及びこれを用いたパターン形成方法
WO2015122293A1 (ja) * 2014-02-13 2015-08-20 富士フイルム株式会社 感光性樹脂組成物、硬化膜の製造方法、硬化膜、液晶表示装置、有機ｅｌ表示装置、タッチパネル表示装置
WO2017056828A1 (ja) * 2015-09-30 2017-04-06 富士フイルム株式会社 パターン形成方法、電子デバイスの製造方法、及び積層体

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