JP2001515275A - マルチカラーセンサー - Google Patents

マルチカラーセンサー

Info

Publication number
JP2001515275A
JP2001515275A JP2000509116A JP2000509116A JP2001515275A JP 2001515275 A JP2001515275 A JP 2001515275A JP 2000509116 A JP2000509116 A JP 2000509116A JP 2000509116 A JP2000509116 A JP 2000509116A JP 2001515275 A JP2001515275 A JP 2001515275A
Authority
JP
Japan
Prior art keywords
layers
layer
diode
sensor
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000509116A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001515275A5 (enExample
Inventor
シュティービヒ・ヘルムート
クニップ・ディートマル
フェルシュ・ヨーアヒム
ヴァーグナー・ヘーリベルト
Original Assignee
フォルシュングスツェントルム・ユーリッヒ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by フォルシュングスツェントルム・ユーリッヒ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング filed Critical フォルシュングスツェントルム・ユーリッヒ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング
Publication of JP2001515275A publication Critical patent/JP2001515275A/ja
Publication of JP2001515275A5 publication Critical patent/JP2001515275A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/14Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/041Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in subclass H10F
    • H01L25/043Stacked arrangements of devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/17Photovoltaic cells having only PIN junction potential barriers
    • H10F10/172Photovoltaic cells having only PIN junction potential barriers comprising multiple PIN junctions, e.g. tandem cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182Colour image sensors
    • H10F39/1825Multicolour image sensors having stacked structure, e.g. NPN, NPNPN or multiple quantum well [MQW] structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/548Amorphous silicon PV cells

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
JP2000509116A 1997-08-28 1998-08-28 マルチカラーセンサー Pending JP2001515275A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19737561A DE19737561C1 (de) 1997-08-28 1997-08-28 Mehrfarbensensor
DE19737561.8 1997-08-28
PCT/DE1998/002598 WO1999012206A1 (de) 1997-08-28 1998-08-28 Mehrfarbensensor

Publications (2)

Publication Number Publication Date
JP2001515275A true JP2001515275A (ja) 2001-09-18
JP2001515275A5 JP2001515275A5 (enExample) 2007-11-08

Family

ID=7840482

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000509115A Pending JP2001515274A (ja) 1997-08-28 1998-08-28 マルチカラーセンサー
JP2000509116A Pending JP2001515275A (ja) 1997-08-28 1998-08-28 マルチカラーセンサー

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2000509115A Pending JP2001515274A (ja) 1997-08-28 1998-08-28 マルチカラーセンサー

Country Status (5)

Country Link
US (2) US6310382B1 (enExample)
EP (2) EP1016141A1 (enExample)
JP (2) JP2001515274A (enExample)
DE (3) DE19737561C1 (enExample)
WO (2) WO1999012205A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007027462A (ja) * 2005-07-19 2007-02-01 Sharp Corp 積層型カラーセンサ
JP2008288404A (ja) * 2007-05-18 2008-11-27 Olympus Corp 光電変換膜積層型固体撮像素子
KR101116448B1 (ko) * 2003-05-06 2012-03-07 소니 주식회사 고체 촬상 소자

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6373117B1 (en) * 1999-05-03 2002-04-16 Agilent Technologies, Inc. Stacked multiple photosensor structure including independent electrical connections to each photosensor
US6731397B1 (en) * 1999-05-21 2004-05-04 Foveon, Inc. Method for storing and retrieving digital image data from an imaging array
WO2001018585A1 (en) * 1999-09-08 2001-03-15 Olympus Optical Co., Ltd. Image pickup optical system for endoscope
DE10131608B4 (de) * 2001-06-29 2004-02-05 Forschungszentrum Jülich GmbH Photosensor für ein Durchlichtverfahren zur Detektion der Bewegungsrichtung von Intensitätsmaxima und Intensitätsminima einer optischen stehenden Welle
US6646318B1 (en) 2002-08-15 2003-11-11 National Semiconductor Corporation Bandgap tuned vertical color imager cell
US6727530B1 (en) 2003-03-04 2004-04-27 Xindium Technologies, Inc. Integrated photodetector and heterojunction bipolar transistors
US6958194B1 (en) 2003-10-21 2005-10-25 Foveon, Inc. Imager with improved sensitivity
DE10352741B4 (de) * 2003-11-12 2012-08-16 Austriamicrosystems Ag Strahlungsdetektierendes optoelektronisches Bauelement, Verfahren zu dessen Herstellung und Verwendung
JP5017989B2 (ja) * 2006-09-27 2012-09-05 ソニー株式会社 撮像装置、撮像方法
US7947941B2 (en) * 2006-11-01 2011-05-24 Finisar Corporation Photodiode having rounded edges for high electrostatic discharge threshold
US8203071B2 (en) 2007-01-18 2012-06-19 Applied Materials, Inc. Multi-junction solar cells and methods and apparatuses for forming the same
JP5498670B2 (ja) * 2007-07-13 2014-05-21 株式会社半導体エネルギー研究所 半導体基板の作製方法
US20090104733A1 (en) * 2007-10-22 2009-04-23 Yong Kee Chae Microcrystalline silicon deposition for thin film solar applications
US7741144B2 (en) 2007-11-02 2010-06-22 Applied Materials, Inc. Plasma treatment between deposition processes
US8471939B2 (en) * 2008-08-01 2013-06-25 Omnivision Technologies, Inc. Image sensor having multiple sensing layers
US20110088760A1 (en) * 2009-10-20 2011-04-21 Applied Materials, Inc. Methods of forming an amorphous silicon layer for thin film solar cell application
JP2011135058A (ja) * 2009-11-30 2011-07-07 Honda Motor Co Ltd 太陽電池素子、カラーセンサ、ならびに発光素子及び受光素子の製造方法
US20110317048A1 (en) 2010-06-29 2011-12-29 Aptina Imaging Corporation Image sensor with dual layer photodiode structure
US8872298B2 (en) 2010-07-01 2014-10-28 Samsung Electronics Co., Ltd. Unit pixel array of an image sensor
US8816461B2 (en) * 2011-09-13 2014-08-26 The Boeing Company Dichromatic photodiodes
DE102013112882B4 (de) * 2013-11-21 2019-05-09 Osram Opto Semiconductors Gmbh Strahlungsempfängervorrichtung
FR3047002B1 (fr) * 2016-01-21 2020-01-31 Degremont Procede et dispositif de traitement d'eaux residuaires par oxydation

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6394125A (ja) * 1986-10-08 1988-04-25 Yamatake Honeywell Co Ltd カラ−センサ
JPH0671097B2 (ja) * 1987-03-31 1994-09-07 鐘淵化学工業株式会社 カラ−センサ−
JPH0693519B2 (ja) * 1987-09-17 1994-11-16 株式会社富士電機総合研究所 非晶質光電変換装置
US5352920A (en) * 1988-06-06 1994-10-04 Canon Kabushiki Kaisha Photoelectric converter with light shielding sections
US5311047A (en) * 1988-11-16 1994-05-10 National Science Council Amorphous SI/SIC heterojunction color-sensitive phototransistor
JP2765635B2 (ja) * 1991-01-11 1998-06-18 キヤノン株式会社 光電変換装置
US5298771A (en) * 1992-11-09 1994-03-29 Xerox Corporation Color imaging charge-coupled array with photosensitive layers in potential wells
US5738731A (en) * 1993-11-19 1998-04-14 Mega Chips Corporation Photovoltaic device
US6191465B1 (en) * 1994-01-10 2001-02-20 John Lawrence Freeouf Solid state radiation detector
EP0788661B1 (de) * 1994-10-30 1999-06-16 Böhm, Markus, Prof. Dr.-Ing. Dreifarbensensor
DE19512493A1 (de) * 1995-04-04 1996-10-10 Siemens Ag Farbsensoranordnung
US5923049A (en) * 1995-08-31 1999-07-13 Cohausz & Florack Trichromatic sensor
US6043549A (en) * 1998-03-20 2000-03-28 Trw Inc. Responsivity photodetector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101116448B1 (ko) * 2003-05-06 2012-03-07 소니 주식회사 고체 촬상 소자
JP2007027462A (ja) * 2005-07-19 2007-02-01 Sharp Corp 積層型カラーセンサ
JP2008288404A (ja) * 2007-05-18 2008-11-27 Olympus Corp 光電変換膜積層型固体撮像素子

Also Published As

Publication number Publication date
EP1018162B1 (de) 2006-05-03
EP1018162A1 (de) 2000-07-12
EP1016141A1 (de) 2000-07-05
JP2001515274A (ja) 2001-09-18
WO1999012206A1 (de) 1999-03-11
WO1999012205A9 (de) 1999-09-02
DE19737561C1 (de) 1999-04-15
US6281561B1 (en) 2001-08-28
US6310382B1 (en) 2001-10-30
DE59813530D1 (de) 2006-06-08
DE19881585D2 (de) 2000-10-12
WO1999012205A1 (de) 1999-03-11

Similar Documents

Publication Publication Date Title
JP2001515275A (ja) マルチカラーセンサー
US7436038B2 (en) Visible/near infrared image sensor array
US7276749B2 (en) Image sensor with microcrystalline germanium photodiode layer
Vieira et al. Three transducers embedded into one single SiC photodetector: LSP direct image sensor, optical amplifier and Demux device
JPS63503266A (ja) グレーデッドギャップ反転層フオトダイオードアレイ
EP2786412A1 (fr) Bloc detecteur optique
US4586069A (en) Opto-electrical device made of silicon for detecting infrared light
TW200807701A (en) Pixel having photoconductive layers
JP3236624B2 (ja) 光感応性電子素子、その素子を使用したカラーセンサー、及びその素子の製造方法
US5998806A (en) Three-color sensor with a pin or nip series of layers
Knipp et al. Stacked amorphous silicon color sensors
Eberhardt et al. Three-color sensor based on amorphous nipin layer sequence
Zhu et al. Bias sensitive a-Si (C): H multispectral detectors
FR2683391A1 (fr) Capteur d'images infrarouge.
US5976906A (en) Method for manufacturing a solid state image sensing device
Topic et al. Optimization of a-Si: H-based three-terminal three-color detectors
Knipp et al. Thin film color sensors in multichannel technology
JPH05343661A (ja) カラー光センサ
JPS60192361A (ja) カラ−イメ−ジセンサ
JP3451833B2 (ja) 固体撮像装置及び固体撮像装置の製造方法
Kitamura et al. A High Speed Contact-Type Image Sensor using Amorphous Silicon Alloy Pin Diodes
JPS58115853A (ja) イメ−ジセンサの製造方法
Vieira et al. Large area pin flexible image sensors
JPS61216359A (ja) イメ−ジセンサ
JPS6114748A (ja) カラ−イメ−ジセンサ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050729

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050729

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070420

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070522

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20070813

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20070820

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070921

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20070921

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090120

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20090728