JP2001351910A5 - - Google Patents

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Publication number
JP2001351910A5
JP2001351910A5 JP2000168425A JP2000168425A JP2001351910A5 JP 2001351910 A5 JP2001351910 A5 JP 2001351910A5 JP 2000168425 A JP2000168425 A JP 2000168425A JP 2000168425 A JP2000168425 A JP 2000168425A JP 2001351910 A5 JP2001351910 A5 JP 2001351910A5
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JP
Japan
Prior art keywords
steam
water vapor
gas
oxygen gas
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000168425A
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English (en)
Japanese (ja)
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JP2001351910A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000168425A priority Critical patent/JP2001351910A/ja
Priority claimed from JP2000168425A external-priority patent/JP2001351910A/ja
Publication of JP2001351910A publication Critical patent/JP2001351910A/ja
Publication of JP2001351910A5 publication Critical patent/JP2001351910A5/ja
Pending legal-status Critical Current

Links

JP2000168425A 2000-06-06 2000-06-06 基板処理装置 Pending JP2001351910A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000168425A JP2001351910A (ja) 2000-06-06 2000-06-06 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000168425A JP2001351910A (ja) 2000-06-06 2000-06-06 基板処理装置

Publications (2)

Publication Number Publication Date
JP2001351910A JP2001351910A (ja) 2001-12-21
JP2001351910A5 true JP2001351910A5 (enrdf_load_stackoverflow) 2005-10-13

Family

ID=18671432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000168425A Pending JP2001351910A (ja) 2000-06-06 2000-06-06 基板処理装置

Country Status (1)

Country Link
JP (1) JP2001351910A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007129240A (ja) * 1997-03-05 2007-05-24 Renesas Technology Corp 半導体集積回路装置の製造方法
JP4263206B2 (ja) 2005-11-15 2009-05-13 東京エレクトロン株式会社 熱処理方法、熱処理装置及び気化装置
KR20230135517A (ko) 2022-03-16 2023-09-25 도쿄엘렉트론가부시키가이샤 열처리 장치 및 열처리 방법

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