JP2001325913A - Electron beam biprism device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electron beam biprism device which can far simply and speedily perform a replacement operation of a line electrode and thrat the line electrode more easily. SOLUTION: Second contact point members 22, 23 are fit-inserted movably into cylindrical electric insulating members 16, 17 each, each fitted and fixed into a pair of round holes 9f, 9g of a rotor 9. The second contact pint members 22, 23 are connected with first contact point members 18, 19 through conductive wires 20, 21, and lead plates 13, 14 for applying voltage contact from above the contact point members 18, 19. A circular insulating member 26, a pair of line electrode holding members 11, 12, and a disc-shaped insulating member 27 are integrated as a cartridge beforehand, which is detachably fixed to a bottom face of the rotor 9, and the second contact point members 22, 23 come in contact with the line electrode holding members 11, 12. With this, a line electrode 4a is detachably fixed to the rotor 9.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of forming an image by superposing interference fringes formed by an electron beam transmitted through a sample and an electron beam passing through a space without the sample and not transmitting the sample on a sample image. Observed image (hereinafter also referred to as hologram) is used in an electron microscope to obtain information such as the thickness distribution of a sample, an electric field or a magnetic field, and an electron biprism device for forming the hologram described above. Belongs to the technical field.

[0002]

2. Description of the Related Art Conventionally, in an electron microscope, an electron beam is irradiated to a sample to obtain interference fringes between an electron beam transmitted through the sample and an electron beam not transmitted through the sample, and the interference fringes are sampled. There is an electron microscope such as an electron beam holographic interference microscope equipped with an electron biprism device that obtains information such as a thickness distribution of a sample, an electric field or a magnetic field by observing a hologram formed by being superimposed on an image. .

FIG. 3 is a view for explaining an example of an electron beam holographic interference microscope, which is one of the conventional electron microscopes equipped with such an electron beam biprism device.
Is a diagram for explaining the electron biprism at the time of OFF,
(B) is a figure explaining an electron beam biprism at the time of ON. In the figure, 1 is an electron beam, 2 is a sample, 2i is a transmission electron beam image of the sample 2, 3 is an objective lens, 4 is an electron beam biprism device, 4a is a diameter 1 stretched perpendicular to the electron beam path.
a wire electrode made of a conductive wire such as platinum
b is a voltage power supply for applying a positive voltage of, for example, about 100 V to the line electrode 4a, 4c is a switch, 4d and 4e are grounds parallel to the line electrode 4a and opposed to each other with the line electrode 4a interposed therebetween. Electrodes, 5 a fluorescent plate, O an electron beam optical axis, S
Is the shadow of the line electrode 4a.

As shown in FIG. 3A, the electron biprism device 4 of the electron beam holographic interference microscope is turned off.
Sometimes, the switch 4c is moved to the ground side and the voltage power supply 4b
Is not applied to the line electrode 4a, and the line electrode 4a is supplied with the ground potential. In this state, an electron beam 1 generated by an electron gun (not shown) irradiates the sample 2, and an electron beam transmitted through the sample 2 or an electron beam not transmitted through the sample 2 is focused by the objective lens 3. Further, the electron beam focused by the objective lens 3 passes through the electron beam biprism device 4 arranged below the objective lens 3, and at this time, the line electrode 4
Since a is supplied with the ground potential, each electron beam from the objective lens 3 is not deflected by the line electrode 4a when passing through the electron beam biprism device 4. Therefore, the transmission electron beam image 2i of the sample 2 and the line electrode 4 are placed on the fluorescent screen 5 disposed below the electron beam biprism device 4.
The shadow S of a is formed. In that case, the position adjustment of the sample 2 and the rotation adjustment of the line electrode by the rotation mechanism are performed so that the transmission electron beam image of the sample 2 is formed only on one side on one side of the shadow S of the line electrode. .

As shown in FIG. 3 (b), when the electron biprism device 4 of the electron beam holographic interference microscope is turned on, the switch 4c is turned to the voltage power supply 4b side, and the positive voltage of the voltage power supply 4b is applied. Applied to the electrode 4a. In this state, each electron beam focused by the objective lens 3 and incident on both sides of the line electrode 4a in the same manner as described above is drawn to the center by the positive voltage of the voltage power supply 4b applied to the line electrode 4a and superimposed below. Then, interference fringes of the electron beam are formed on the fluorescent screen 5. Further, the interference fringes are superimposed on the sample image to form a hologram. The electron beam holographic interference microscope obtains information such as the thickness distribution of the sample 2, an electric field or a magnetic field by observing the hologram.

FIG. 4 schematically shows an example of a conventional electron biprism device 4, and FIG. 5 shows an example of a prism portion in the electron biprism device 4.
Is an exploded perspective view, and (b) is an assembled view thereof. As shown in FIG. 4, a conventional electron biprism device 4 includes a prism portion 6 including a line electrode 4a and ground electrodes 4d and 4e.
And a driving unit 7 for moving the prism unit 6 to an arbitrary position, and a cylindrical holder 8 supporting the prism unit 6 at one end and being connected to the driving unit 7 at the other end. . Although not shown, the electron biprism device 4 has a prism portion 6 disposed in a lens barrel of an electron beam holography interference microscope, with its center aligned with the electron beam optical axis O, and a driving portion 7 thereof. Is fixed and mounted outside the lens barrel.

[0007] As shown in FIG.
A cylindrical rotor 9 rotatably supported at the tip end of the holder 8, a circular insulating material 10 fixed to the upper surface of the rotor 9, and fixed to the upper surface of the insulating material 10 at a distance from each other. And arc-shaped contact portions 11a, 12a to which a voltage from the voltage power supply 4b is applied, and legs 11b, 1 projecting downward from these contact portions 11a, 12a, respectively.
2b, a pair of wire electrode holding members 11 and 12, a wire electrode 4a attached to the lower ends of the legs 11b and 12b of the wire electrode holding members 11 and 12, and a tip of the wire electrode holding member 11 and 12, respectively. A pair of voltage-applying lead plates 13 and 14 fixed to the holder 8 so as to always contact the 12 contact portions 11a and 12a and connected to the voltage power supply 4b;
A rotor rotation wire 15 for extending the inside of the holder 8 along the axial direction and being wound around the outer peripheral surface of the rotor 9 and having both ends connected to the drive unit 7 via springs for rotating the rotor 9. Consists of The rotor 9 is also used as a ground electrode (corresponding to the aforementioned ground electrodes 4d and 4e).

Then, the electron beam passing hole 10a at the center of the insulating material 10 is fitted to a cylindrical shaft portion 9a having an electron beam passing hole projecting from the upper surface of the rotor 9, and the insulating material 10 is brought into contact with the rotor 9.
After being integrally assembled on the upper surface of the insulating material 10, the legs 11b and 12b of the pair of wire electrode holding members 11 and 12 are inserted from above the insulating material 10 into circumferential holes 10b and 10c formed in the insulating material 10 and the rotor 9, respectively. 5b, the lower ends of the legs 11b, 12b project into radial grooves 9d formed in the lower part of the rotor 9, as shown in FIG. , 12 are separated from each other and assembled integrally with the insulating material 10, and the voltage applying lead plates 13, 14 are brought into contact with the upper surfaces of the contact portions 11 a, 12 a of these wire electrode holding members 11, 12, respectively. A wire electrode 4a is stretched from below the rotor 9 between the lower ends of the legs 11b and 12b.
The prism portion 6 is assembled by winding the rotor 5 around the outer peripheral surface of the rotor 9.

[0009]

Since the above-mentioned wire electrode 4a is formed of a very thin wire having a wire diameter of 0.6 μm, the wire electrode 4a is easily broken. For this reason, the wire electrode 4
It is conceivable that a may be disconnected during transportation or mounting of the electron beam biprism device 4 or during rotation of the rotor 9. When the wire electrode 4a breaks, the wire electrode 4a must be re-stretched. For this purpose, it is necessary to remove the electron beam biprism device 4 from the lens barrel and re-stretch the wire electrode 4a.

However, the above-mentioned conventional prism unit 6
Then, each leg 11b, 12b of the wire electrode holding members 11, 12
Are respectively penetrated from above into the circumferential holes 9b, 9c of the rotor 9, and the wire electrode 4a is stretched from below the rotor 9 to the lower ends of the legs 11b, 12b of the wire electrode holding members 11, 12, and further contacted. Since the voltage applying lead plates 13 and 14 are in contact with the upper surfaces of the portions 11a and 12a, the wire electrodes 4a are integrally attached to the rotor 9 inseparably. For this reason, it is impossible to simply re-stretch the wire electrode 4a with the rotor 9 attached to the holder 8 after removing the electron biprism device 4 from the lens barrel.

Then, after removing the electron biprism device 4 from the lens barrel, the prism portion 6 is once removed from the holder 8 in order to directly stretch the wire electrode 4a on the legs 11b and 11c. The electrode 4a is connected to the wire electrode holding member
It was necessary to re-stretch to the lower end of each leg 11b, 12b of 1,12. For this reason, there has been a problem that the work of re-stretching the wire electrode 4a is troublesome and time-consuming. In addition, not only in the work of extending the wire electrode 4a, but also in the work of restoring the wire electrode 4a due to such disconnection, the wire electrode 4a is directly handled each time.
Since the wire electrode 4a is easily broken, it is necessary to pay sufficient attention to the handling of the wire electrode 4a. For this reason, the wire electrode 4
The work of stretching a is more troublesome and takes much time and effort.

The present invention has been made in view of such circumstances, and an object of the present invention is to make it easier and faster to replace a wire electrode and to make the handling of the wire electrode easier. It is to provide a line biprism device.

[0013]

According to a first aspect of the present invention, there is provided a rotor rotatably supported by a holder, and a line electrode attached to the rotor and irradiated with an electron beam. An electron beam biprism configured to form an interference fringe of an electron beam by irradiating the line electrode with an electron beam, and to superimpose the interference fringe on a sample image to form a hologram The apparatus is characterized in that the wire electrode is detachable from the rotor while the rotor is supported by the holder.

According to a second aspect of the present invention, the wire electrode is held by a wire electrode holding member attached to the rotor, and at least the wire electrode and the wire electrode holding member are integrally formed as a cartridge. The cartridge is detachably attached to the rotor while the rotor is supported by the holder.

Further, according to the invention of claim 3, a voltage applying lead plate for applying a voltage to the wire electrode is provided above the rotor and comes into contact with a contact member electrically connected to the wire electrode from above. And the cartridge is mounted from below the rotor. Further, the invention of claim 4 is characterized in that a large number of the cartridges are prepared as spare parts of the wire electrode, and the cartridges of these spare parts are stored in a vacuum sealed container.

[0016]

In the electron biprism device according to the present invention, the line electrode can be separated from the rotor while the rotor is supported by the holder. Therefore, when the wire electrode is disconnected, it is not necessary to remove the rotor from the holder one by one in the replacement of the wire electrode as in the related art, and the wire electrode can be replaced while the rotor is assembled to the holder.
This reduces the man-hours of replacement work when the wire electrode is broken, and this replacement work is performed easily and quickly, and the cost required for replacement of the wire electrode is reduced.

Further, since the wire electrode and the wire electrode holding member are integrally formed as a cartridge, a large number of wire electrodes and wire electrode holding members can be prepared and stored in advance as simplified spare parts. It becomes possible. As a result, the replacement of the wire electrode is made easier and faster, and the replacement cost of the wire electrode is further reduced. In addition, since the wire electrode and the wire electrode holding member are made into a cartridge, the handling of the wire electrode becomes extremely simple, and the wire electrode and the wire electrode holding member can be easily carried. In this way, maintenance at the time of disconnection of the wire electrode is greatly improved.

Further, since the cartridge is stored in the vacuum sealed container, oxidation of the wire electrode and the wire electrode holding member in the cartridge can be effectively prevented,
The wire electrode and the wire electrode holding member can be stored normally for a long period of time.

[0019]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a prism portion used in an example of the electron biprism device of the present invention.
FIG. 2 is an exploded perspective view similar to FIG. 1A, and FIG. 2 is an assembled cross-sectional view of the prism unit shown in FIG. The same components as those in the above-described conventional example are denoted by the same reference numerals, and detailed description thereof will be omitted.

As shown in FIG. 1, the prism section 6 in the electron biprism device of this embodiment has a rotor 9 having an electron beam passage hole 9e at the center and also serving as ground electrodes 4d, 4e. And a pair of cylindrical electrical insulating members 16 and 17 having flanges 16a and 17a at their upper ends, respectively, and a pair of voltage applying lead plates 13 and 17, respectively. 14 and these voltage applying lead plates 1
A pair of first contact members 18 and 19 in the form of circular arc plates, which are always in contact with each other, and a pair of these cylindrical electric insulating members 1 and 2 in a pair of cylindrical electric insulating members 16 and 17 respectively.
A pair of second contact members 22, 23, which are movably inserted by being guided by 6, 17 and are electrically connected to the first contact members 18, 19 by conducting wires 20, 21, respectively. A pair of springs 24 and 25 that constantly urge the second contact members 22 and 23 downward in the figure, an annular insulating member 26, arc-shaped flat contact portions 11a and 12a, and these contact portions 11a and 12a. A pair of wire electrode holding members 11 and 12 composed of legs 11b and 12b projecting upward, a wire electrode 4a stretched at the upper end of each of the legs 11b and 12b, and an annular flange 27 on the periphery.
and a disk-shaped insulating member 27 having an electron beam passage hole 27b at the center.

An annular insulating member 26, a pair of wire electrode holding members 11, 12, a wire electrode 4a, and a disk-shaped insulating member 27
Is mounted on the disk-shaped insulating member 27 by an annular flange 27a.
And a pair of wire electrode holding members 11 and 12 are assembled separately from each other.
An annular insulating member 26 is attached to the upper surface of the pair of wire electrode holding members 11 and 12 so that the peripheral edge of the upper surface of the pair of wire electrode holding members 11 and 12 is sandwiched between the upper surface of the pair of wire electrode holding members 11 and 12. The wire electrode 4a is stretched over the wire, and is integrated in advance to form a cartridge of the wire electrode 4a. And these annular insulating members 2
6, the cartridge in which the pair of wire electrode holding members 11 and 12, the wire electrode 4a, and the disc-shaped insulating member 27 are integrated is provided in a state where the rotor 9 is rotatably supported by the holder 8 from below the holder 8. 8 through a hole 8 (not shown) so as to be removably attached to the lower surface of the rotor 9 by a suitable attaching means. A large number of such cartridges are prepared in advance and stored in a vacuum sealed container.

Also, a pair of second contact members 22, 23
Is constantly urged downward by the spring force of the pair of springs 24 and 25 as described above, and the pair of second contact members 2
The lower ends of the second and third members 23 and 23 can protrude from the lower surface of the rotor 9 by a predetermined amount, but do not protrude beyond the predetermined amount.
3 can be configured with a simple structure such as engaging a protrusion such as a step provided on the outer peripheral surface with a protrusion such as a step provided on the inner peripheral surface of the cylindrical electrical insulating members 16 and 17. (Not shown). This prevents the pair of second contact members 22 and 23 from falling out of the cylindrical electrical insulating members 16 and 17 and the rotor 9 downward.

Next, the assembly of the prism section 6 having such a configuration will be described. As shown in FIGS. 1 and 2, a pair of electric insulating members 16 and 17 are fitted into a pair of circular holes 9 f and 9 g of the rotor 9, and their flanges 16 a and 17 a are located above the upper surface of the rotor 9. It is assembled so that it protrudes. Further, the electric insulating member 1
6 and 17, the first contact members 18 and 19 are connected to the conductors 20 and 2 respectively.
A pair of second contact members 22, 23, which are electrically connected at 1 and have springs 24, 25 disposed between them and the first contact members 18, 19, are inserted. Next, the first contact members 18, 1 are respectively provided on the flanges 16a, 17a of the electrical insulating members 16, 17 projecting from the upper surface of the rotor 9.
9 is assembled.

Further, the cartridge of the annular insulating member 26, the pair of wire electrode holding members 11 and 12, the wire electrode 4 a and the disk-shaped insulating member 27 is assembled to the lower surface of the rotor 9 from below the rotor 9. When this cartridge is assembled on the lower surface of the rotor 9, each leg 9b, 9c and the wire electrode 4a are formed in a radial groove 9 formed in the lower portion of the rotor 9.
d, and a pair of second contact members 22, 23
Are in contact with the upper surfaces of the contact portions 11a and 12a of the corresponding pair of wire electrode holding members 11 and 12, and the springs 24 and 25 are respectively connected to the first contact members 18 and 19 and the second contact members 22 and 23. Will be contracted between. Therefore, the second contact members 22, 23 come into contact with the contact portions 11a, 12a with a predetermined force by the spring forces of the springs 24, 25.

The rotor 9 assembled in this manner is rotatably and insulated attached to the holder 8 and applied to the upper surfaces of the first contact members 18 and 19 in the same manner as in the above-described conventional example. Lead plate 1
It is assembled to the holder 8 so that the members 3 and 14 come into contact with each other. Finally, the rotor rotation wire 15 is wound around the rotor 9. In this way, the prism unit 6 is supported by the holder 8 and the rotation of the rotor 9 is controlled by the operation of the driving unit 7 via the rotor rotation wire 15.
The rotation position of the line electrode 4a is controlled.

Before assembling the cartridge of the annular insulating member 26, the pair of wire electrode holding members 11 and 12, the wire electrode 4a and the disk-shaped insulating member 27 on the lower surface of the rotor 9, the cylindrical electrical insulating members 16 and 17 are provided. , Conductors 20, 21
The first and second contact members 18, 1 connected to each other at
9; 22, 23 and the springs 24, 25 may be mounted on the holder 8 first, and then the cartridge may be mounted on the lower surface of the rotor 9.

As described above, the holder 8 supporting the prism unit 6 is inserted into the lens barrel of the electron microscope in the same manner as in the above-described conventional example, and the driving unit 7 is attached to the lens barrel. When the driving unit 7 is attached to the lens barrel in this manner, the center of the line electrode 4a is located on the electron beam optical axis O.

Observation of a sample with a hologram using an electron beam holographic interference microscope in which the electron biprism device 4 of this embodiment is incorporated is the same as in the case of the above-described conventional example. In this case, the voltage from the voltage power supply 4b is applied to the voltage application lead plates 13 and 14, the first contact members 18 and 1
9, conducting wires 20, 21, second contact members 22, 23, contact portions 11a, 12a and leg portions 1 of wire electrode holding members 11, 12,
The voltage is applied to the line electrode 4a via 1b and 12b.

The holder 8 supporting the prism portion 6
If the wire electrode 4a is broken while the drive unit 7 is assembled to the lens barrel, the prism unit 6, the holder 8 and the drive unit 7 are pulled out of the lens barrel in the same manner as in the above-described conventional case. Next, the cartridge of the disconnected wire electrode 4 a is removed from the rotor 9, and a new cartridge in which the wire electrode 4 a is not disconnected is assembled on the lower surface of the rotor 9.
Thereafter, the holder 8 and the driving unit 7 are attached to the lens barrel with the prism unit 6 positioned in the lens barrel as described above, and the replacement of the line electrode 4a due to the disconnection of the line electrode 4a is completed.

As described above, according to the electron biprism device 4 of this embodiment, since the line electrode 4a can be separated from the rotor 9, the line electrode 4a can be disconnected when the line electrode 4a is disconnected. It is not necessary to remove the rotor 9 from the holder 8 as in the related art, and the wire electrode 4a can be replaced while the rotor 9 is assembled to the holder 8. Thereby, the number of steps of the replacement work when the wire electrode 4a is broken can be reduced, the replacement work can be performed easily and quickly, and the cost required for replacement of the wire electrode 4a can be reduced.

Further, since the wire electrode 4a and the wire electrode holding member are integrated to form a cartridge, a large number of wire electrodes 4a and wire electrode holding members are prepared and stored in advance as simplified spare parts. Can be. Thus, the replacement of the wire electrode 4a can be performed more easily and more quickly, and the wire electrode 4a can be replaced more quickly.
The replacement cost of a can be further reduced. Moreover, by making the wire electrode 4a and the wire electrode holding member into a cartridge, the handling of the wire electrode 4a can be extremely simplified, and the wire electrode 4a and the wire electrode holding member can be easily carried.
In this way, maintenance at the time of disconnection of the wire electrode 4a can be greatly improved.

Further, by storing the cartridge in a vacuum-sealed container, the oxidation of the wire electrode 4a and the wire electrode holding member in the cartridge can be prevented, and the wire electrode 4a and the wire electrode holding member can be normally maintained for a long period of time. It can be stored.

In the above-described example, the electron biprism device of the present invention is described as being incorporated in an electron beam holographic interference microscope. However, the electron biprism device of the present invention generates electron beam interference fringes. In addition, the present invention can be applied to any electron microscope using an electron beam biprism device that forms a hologram of the interference fringes and the sample image.

[0034]

As is apparent from the above description, according to the electron biprism of the present invention, the line electrode can be separated from the rotor while the rotor is supported by the holder. At the time of replacement, it is not necessary to remove the rotor from the holder one by one in the exchange of the wire electrode as in the past,
The wire electrode can be replaced while the rotor is mounted on the holder. This can reduce the number of man-hours for replacement work at the time of disconnection of the wire electrode, and can easily and quickly perform this replacement work and reduce the cost required for replacement of the wire electrode.

Also, by forming the cartridge by integrating the wire electrode and the wire electrode holding member, it is possible to prepare and store a large number of wire electrodes and wire electrode holding members in advance as simplified spare parts. Become. As a result, the replacement of the wire electrode can be performed more easily and more quickly, and the replacement cost of the wire electrode can be further reduced. Moreover, by making the wire electrode and the wire electrode holding member into a cartridge, the handling of the wire electrode becomes extremely simple, and the carrying of the wire electrode and the wire electrode holding member becomes easy. In this way, maintenance at the time of disconnection of the wire electrode can be greatly improved.

Further, by storing the cartridge in a vacuum sealed container, the oxidation of the wire electrode and the wire electrode holding member in the cartridge can be effectively prevented, and the wire electrode and the wire electrode holding member can be normally maintained for a long time. Can be stored.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a prism part used in an example of an electron biprism device of the present invention.

FIG. 2 is an assembled sectional view of a prism unit shown in FIG.

3A and 3B are diagrams illustrating an example of a conventional electron beam holographic interference microscope, wherein FIG. 3A is a diagram illustrating an electron biprism when OFF, and FIG. 3B is a diagram illustrating an electron biprism when ON. FIG.

FIG. 4 is a diagram schematically showing an example of a conventional electron beam biprism device.

5 shows an example of a prism portion in the electron beam biprism device shown in FIG. 4, (a) is an exploded perspective view thereof,
(B) is the assembly drawing.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Electron beam, 2 ... Sample, 2i ... Transmission electron beam image, 3 ... Objective lens, 4 ... Electron beam biprism device, 4a ... Line electrode,
4b: Voltage power supply, 4c: Switch, 4d, 4e: Ground electrode, 5: Fluorescent plate, 6: Prism section, 7: Drive section, 8: Holder, 9: Rotor, 9a: Cylindrical shaft section, 9b, 9c: circumference Direction hole, 9d: radial groove, 9e: electron beam passage hole, 9f, 9
g: circular holes, 11, 12: wire electrode holding members, 11a, 12
a: contact point, 11b, 12b: leg, 13, 14: lead plate for voltage application, 15: wire for rotor rotation, 1
6, 17 ... cylindrical electrical insulating member, 16a, 17a ... flange, 18, 19 ... first contact member, 20, 21 ... lead wire, 2
2, 23 ... second contact member, 24, 25 ... spring, 2
6: annular insulating member, 27: disk-shaped insulating member, 27a
... annular flange, 27b ... electron beam passage hole, O ... electron beam optical axis

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01J 37/04 H01J 37/04 Z

Claims (4)

[Claims] An electronic device comprising: a rotor rotatably supported by a holder; and a line electrode attached to the rotor and irradiated with an electron beam. An electron biprism device configured to form an interference fringe and superimpose the interference fringe on a sample image to form a hologram, wherein the line electrode is connected to the rotor while the rotor is supported by the holder. An electron beam biprism device characterized by being detachable from the device. 2. The line electrode is held by a line electrode holding member attached to the rotor. At least the line electrode and the line electrode holding member are integrally formed as a cartridge, and the rotor is 2. The electron beam biprism device according to claim 1, wherein said cartridge is detachably attached to said rotor while being supported by a holder. 3. The cartridge according to claim 1, further comprising: a voltage applying lead plate for applying a voltage to the wire electrode, which is provided above the rotor and is in contact with a contact member electrically connected to the wire electrode from above. 3. An electron beam biprism device according to claim 2, wherein said device is attached from below said rotor. 4. The electronic device according to claim 2, wherein a large number of the cartridges are prepared as spare parts of the wire electrode, and the cartridges of these spare parts are stored in a vacuum sealed container. Line biprism device.