JP2015126557A - Electrostatic motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve smooth rotation by correcting deviation between a center of a stator and a rotation center of a mover and suppressing torque fluctuation with a simple structure.SOLUTION: An electrostatic motor 1 includes: a stator 2 having first electrodes 5 made from conductive members, which are insulated from each other, extended in a radiation direction X toward a center P thereof and arranged in a circumference direction R at predetermined intervals; a mover 3 having second electrodes 6 made from electret materials, which are insulated from each other, extended in a radiation direction toward a rotation center P1 thereof, and arranged in a circumference direction at intervals; third electrodes 7 that are annularly arranged with the same center as the rotation center of the second electrodes and made from conductive members to be applied with voltage; and fourth electrodes 8, at least parts of which are arranged to face the third electrodes, which are annularly arranged with the same center as the center of the first electrodes and made from conductive members to be applied with voltage identical in polarity with the voltage applied to the third electrodes.

Description

  The present invention relates to an electrostatic motor.

An electrostatic motor is known as an example of an electrostatic motor that does not use a magnet. Electrostatic motors have the merits of being light, thin, and simple in structure, but have not yet been put into practical use because they have a smaller torque and require a higher voltage than electromagnetic motors using magnets. Therefore, there are a method of forming a plurality of patterned electrodes on a film using semiconductor process technology, laminating the films, taking out a large torque, and a method of lowering the motor driving voltage using a permanently charged substance called an electret as an electrode. Already known.
Thus, since the electrostatic motor originally has a small torque, the shift between the center of the stator and the rotation center of the mover has a large influence on the rotation, and there is a problem that smooth rotation cannot be obtained due to torque fluctuation. Patent Document 1 (Japanese Patent No. 2850413) discloses that rotational torque fluctuations are suppressed by providing a gap holding mechanism and a moving direction holding mechanism for holding a gap between a stator and a mover. However, the structure of Patent Document 1 has a complicated structure.

  The present invention corrects the deviation between the center of the stator and the center of rotation of the mover with a simple structure and suppresses torque fluctuation to obtain smooth rotation.

In order to achieve the above object, an electrostatic motor according to the present invention includes a first conductive member that is insulated from each other, extends in a direction of radiating with respect to the center thereof, and is disposed at intervals in the circumferential direction. A stator having electrodes, and a mover having a second electrode made of an electret material that is insulated from each other, extends in a direction of radiating with respect to the center of rotation, and is arranged at intervals in the circumferential direction. The stator and the mover are arranged to face each other, a predetermined voltage pattern is applied to the first electrode, and the mover is rotated by a Coulomb force due to static electricity between the stator and the mover. An electric motor, which is annularly arranged at the same center as the center of rotation of the second electrode and is made of a conductive member to which an arbitrary pole voltage is applied, and the same center as the center of the first electrode Arranged in a ring and at least on the third electrode Some are arranged to face the is characterized in that a fourth electrode voltage and the voltage of the same polarity to the third electrode is made of conductive member is applied.
In order to achieve the above object, an electrostatic motor according to the present invention includes a first conductive member that is insulated from each other, extends in a direction of radiating with respect to the center thereof, and is disposed at intervals in the circumferential direction. A stator having electrodes, and a mover having a second electrode made of an electret material that is insulated from each other, extends in a direction of radiating with respect to the center of rotation, and is arranged at intervals in the circumferential direction. An electrostatic motor in which the stator and the mover are arranged to face each other, a predetermined voltage pattern is applied to the first electrode, and the mover is rotated by a Coulomb force due to static electricity between the stator and the mover. A third electrode made of an electret material charged to an arbitrary pole and arranged in an annular shape at the same center as the center of the first electrode. And at least the third electrode Parts are arranged so as to face, it is characterized in that a fourth electrode made of electret material which is charged to the third electrode and the same polarity.

According to the present invention, the same polarity voltage is applied to the third electrode arranged on the mover and the fourth electrode arranged on the stator so that at least a part of the third electrode faces the third electrode. Then, a repulsive force due to static electricity is generated between the third and fourth electrodes. For this reason, when the center of the stator and the center of rotation of the mover are shifted, the stator and the mover move relatively independently in a direction in which the center of the stator and the center of rotation of the mover coincide. Therefore, it is possible to obtain a smooth rotation by correcting the deviation between the center of the stator and the center of rotation of the mover with a simple structure and suppressing torque fluctuation.
According to the present invention, an electret in which the third electrode disposed on the mover and the fourth electrode disposed on the stator so that at least a part of the third electrode faces the third electrode are charged to the same polarity. Since it is made of a material, repulsion due to static electricity is generated without applying a voltage between the third and fourth electrodes. For this reason, when the center of the stator and the center of rotation of the mover are shifted, the stator and the mover move relatively independently in a direction in which the center of the stator and the center of rotation of the mover coincide. Therefore, it is possible to obtain a smooth rotation by correcting the deviation between the center of the stator and the center of rotation of the mover with a simple structure and suppressing torque fluctuation.

The perspective view which shows schematic structure of 1st Embodiment of the electrostatic motor which concerns on this invention. The top view which shows the structure of the 1st form of the stator with which an electrostatic motor is equipped. The top view which shows the structure of the 1st form of the needle | mover with which an electrostatic motor is provided. The partial expanded sectional view which shows the opposing state of the stator and mover which concern on 1st Embodiment. The perspective view which shows schematic structure of 2nd Embodiment of the electrostatic motor which concerns on this invention. The top view which shows the structure of the 2nd form of the stator with which an electrostatic motor is provided. The top view which shows the structure of the 2nd form of the needle | mover with which an electrostatic motor is equipped. The partial expanded sectional view which shows the opposing state of the stator and mover which concern on 2nd Embodiment. Sectional drawing which shows the more detailed structure of 1st Embodiment of the electrostatic motor which concerns on this invention. Sectional drawing which shows the structure of 2nd Embodiment of the electrostatic motor which concerns on this invention. The partially broken top view which shows the structure of 2nd Embodiment. The partial expanded sectional view which shows the structure of 2nd Embodiment. Sectional drawing which shows the structure of 3rd Embodiment of the electrostatic motor which concerns on this invention. Sectional drawing which shows the structure of 4th Embodiment of the electrostatic motor which concerns on this invention. The partial expanded sectional view which shows the structure of 4th Embodiment. Sectional drawing which shows the structure of 5th Embodiment of the electrostatic motor which concerns on this invention. 1 is a schematic configuration diagram of a corona charging device used for charge injection. The drive control when the ratio of the number of electrodes of the stator and the mover is 3 to 2 is shown. (A) is a diagram schematically showing the voltage switching and the moving state of the mover, and (b) is the diagram showing the movement to the stator. Diagram showing switching pattern of applied voltage It is a figure which shows another embodiment of a 3rd electrode and a 4th electrode, (a) is a top view of a stator, (b) is a top view of a needle | mover. It is a figure which shows another embodiment of a 3rd electrode and a 4th electrode, (a) is a top view of a stator, (b) is a top view of a needle | mover. It is a figure which shows another embodiment of a 3rd electrode and a 4th electrode, (a) is a top view of a stator, (b) is a top view of a needle | mover.

Hereinafter, a plurality of embodiments according to the present invention will be sequentially described with reference to the drawings.
(First embodiment)
An electrostatic motor 1 as an electrostatic motor shown in FIG. 1 includes a stator 2 and a mover 3. The stator 2 and the mover 3 have a disk shape and are disposed so as to face each other. At the center of the mover 3, it is fixed to a rotating shaft 4 that penetrates in a direction perpendicular to the horizontal plane of the mover 3. For this reason, when the needle | mover 3 rotates, the rotating shaft 4 is also comprised so that it may rotate integrally. That is, the mover 3 is rotatable about the rotation axis 4 a of the rotation shaft 4. The centers of the disk-shaped stator 2 and the movable element 3 are arranged so as to be located on the same axis. Here, the center of the stator 2 is the center P, and the center of the mover 3 is the rotation center P1. The same axis is the rotation axis 4a. For this reason, the center P of the stator 2 and the rotation center P1 of the mover 3 are made to coincide on the rotation axis 4a. In each figure, symbol R indicates a circumferential direction, symbol X indicates a radiation direction (hereinafter referred to as “radiation direction”), symbol Y indicates an orthogonal direction, and symbol Z indicates an axial direction.

  Here, it is assumed that the rotating shaft 4 extends in the vertical direction, and the use of the electrostatic motor 1 in which the disk-shaped stator 2 and the movable element 3 are horizontally arranged is assumed. However, as a usage form of the electrostatic motor 1, the rotating shaft 4 extends in the horizontal direction, and the electrostatic motor 1 may be used by arranging the disk-shaped stator 2 and the movable element 3 vertically. is there. In this case, the rotating shaft 4 is penetrated in a direction perpendicular to the vertical plane of the mover 3. In addition, the rotating shaft 4 extends in an oblique direction, and the electrostatic motor 1 may be used by arranging the disk-shaped stator 2 and the mover 3 perpendicular to the rotating shaft 4. In this case, the rotating shaft 4 is penetrated in a direction orthogonal to the inclined surface of the mover 3.

A through hole 2c having a diameter larger than the diameter of the rotating shaft 4 is formed on the center P of the stator 2, and the rotating shaft 4 shown in FIG. 1 is configured not to interfere with the through hole 2c. A first electrode 5 is provided on a surface 2 a of the stator 2 facing the mover 3. As shown in FIG. 2, the first electrode 5 includes a plurality of strip-like electrodes 5 </ b> A that extend in the radial direction X with respect to the center P and are arranged at intervals in the circumferential direction R. Each strip electrode 5A (first electrode 5) is formed of a metal made of a conductive member. The width of each strip electrode 5A in the circumferential direction R, the length in the radial direction X, and the distance between the electrodes are formed and arranged so as to be constant. Each strip electrode 5A is connected to a wiring (not shown) that can apply a voltage.
The stator 2 has a fourth electrode 8 made of a conductive member to which an arbitrary pole voltage is applied. The fourth electrode 8 has a ring shape, and is closer to the center P than the inner end portion 5a of the strip electrode 5A (first electrode 5) in the radial direction X, and the strip electrode 5A (first electrode 5) in the radial direction X. ) Are formed on the opposing surface 2a closer to the outer peripheral surface 2b than the outer end portion 5b. That is, the fourth electrode 8 is disposed on the inner side and the outer side of the band-like electrode 5A (first electrode 5) in the stator 2, respectively. In the present embodiment, the fourth electrode 8 is disposed on the inner side and the outer side of the electrode 5A (first electrode 5) in the stator 2, but may be formed on at least one of the inner side and the outer side. . An arbitrary voltage is applied to each fourth electrode 8 at a time different from the voltage used for rotational driving. The first electrode 5 and the fourth electrode 8 may be covered with a protective film that passes an electric field to prevent exposure of the electrode surface to the air or damage. This is to prevent a decrease in electrostatic force due to the electrode surface being damaged.

  As shown in FIG. 1, a fixed hole 3c that penetrates is formed on the rotation center P1 of the mover 3, and a rotary shaft 4 is inserted and fixed in the fixed hole 3c. A second electrode 6 is formed on the facing surface 3 a of the mover 3 that faces the facing surface 2 a of the stator 2. As shown in FIG. 3, the second electrode 6 includes a plurality of strip-like electrodes 6 </ b> A that extend in the radial direction X with respect to the rotation center P <b> 1 and are arranged at intervals in the circumferential direction R. Each strip electrode 6A (second electrode 6) is formed of a conductive member or electret material. The width of each strip electrode 6A in the circumferential direction R, the length in the radial direction X, and the distance between the electrodes are formed and arranged so as to be constant. When each strip electrode 6A is formed of a conductive member, a wiring configuration (not shown) is provided so that a voltage can be applied to each strip electrode 6A. When each strip electrode 6A is formed of an electret material, the electret material is a substance that is permanently charged as is well known. Therefore, if each strip electrode 6A is formed of this material, wiring for applying a voltage is not necessary. . When each strip electrode 6A is formed of an electret material, either one of the positive electrode or the negative electrode is charged in advance to form each strip electrode 6A. In the present embodiment, each strip electrode 6A is formed of an electret material.

  The mover 3 has a third electrode 7 made of a conductive member to which a voltage of an arbitrary pole is applied. The third electrode 7 has a ring shape, and is closer to the center P than the inner end 6a of the strip electrode 6A (second electrode 6) in the radial direction X, and the strip electrode 6A (second electrode 6) in the radial direction X. ) Are formed and arranged on the opposing surface 3a closer to the outer peripheral surface 3b than the outer end 6b. That is, the third electrode 7 is disposed on the inner side and the outer side of the belt-like electrode 6 </ b> A (second electrode 6) in the mover 3. In the present embodiment, the third electrode 7 is disposed on the inner side and the outer side of the electrode 6A (first electrode 6) in the movable element 3, but it is only necessary to be formed on at least one of the inner side and the outer side. . A voltage is applied to each third electrode 7 at a time different from the voltage used for rotational driving. The second electrode 6 and the third electrode 7 may be covered with a protective film that passes magnetic force to prevent the electrode surface from being exposed to the air or damaged.

That is, as shown in FIG. 4, the third electrode 7 and the fourth electrode 8 are arranged to face each other. Each of the third electrodes 7 includes a region 3d closer to the center P than the inner end 6a of the strip electrode 6A (second electrode 6) and an outer end 6b of the strip electrode 6A (second electrode 6). Is also formed and arranged in a region 3e near the outer peripheral surface 3b. Each of the fourth electrodes 8 includes a region 2d closer to the center P than the inner end 5a of the strip electrode 5A (first electrode 5) and an outer end 5b of the strip electrode 5A (first electrode 5). The third electrode 7 and the fourth electrode 8 are arranged and arranged in the region 2e nearer to the outer peripheral surface 3b than the third electrode 7 and the fourth electrode 8 are opposed to each other in the radial direction X so as to coincide with each other. Or, although the centers of each other are deviated in the radiation direction X, a part of the electrodes facing each other is included.
The third electrode 7 and the fourth electrode 8 are formed of a metal as a conductive member. The voltages applied to the third electrode 7 and the fourth electrode have the same polarity. That is, the fourth electrode 8 is configured to be applied with a voltage having the same polarity as the voltage applied to the third electrode. The annular shape of the third electrode 7 and the fourth electrode 8 indicates a donut shape that is continuous in the circumferential direction R and has no gap in the middle.

Next, centering adjustment of the stator 2 and the mover 3 will be described.
As shown in FIG. 4, a first electrode 5 composed of a plurality of strip electrodes 5A and an annular fourth electrode 8 are formed on the stator 2, and a second electrode composed of a plurality of strip electrodes 6A is formed on the mover 3. 6 and an annular third electrode 7 are formed. Then, after the stator 2 and the mover 3 are assembled so as to face each other, a voltage having the same polarity is applied to the fourth electrode 8 and the third electrode 7 of the mover 3. Then, a repulsive force due to static electricity is generated between the third electrode 7 and the fourth electrode 8, and when the fourth electrode 8 and the third electrode 7 are arranged so as to be shifted, the center of the stator 2 is The stator 2 and the mover 3 move autonomously to a position where P and the rotation center P1 of the mover 3 coincide. The stator 2 is assembled and fixed to the motor casing or the like in the state of the alignment adjustment so that the positional deviation between the center P of the stator 2 and the rotation center P1 of the movable element 3 is corrected. Can be attached. For this reason, the rotation of the center of the stator 2 and the center of rotation of the mover 3 can be corrected with a simple structure to suppress torque fluctuations and smooth rotation can be obtained.

(Second Embodiment)
An electrostatic motor 20 as an electrostatic motor shown in FIG. 5 includes a stator 22 and a mover 23. The stator 22 and the mover 23 have a disk shape and are arranged so as to face each other. A central axis of the mover 23 is fixed to a rotating shaft 24 that penetrates in a direction perpendicular to the horizontal plane of the mover 23. For this reason, when the needle | mover 3 rotates, the rotating shaft 24 is also comprised so that it may rotate integrally. That is, the mover 23 is rotatable about the rotation axis 4 a of the rotation shaft 4. The centers of the disk-shaped stator 22 and the movable element 3 are arranged so as to be located on the same axis. Here, the center of the stator 22 is the center P, and the center of the mover 23 is the rotation center P1. The same axis is the rotation axis 24a. For this reason, the center P of the stator 22 and the rotation center P1 of the mover 23 are made to coincide on the rotation axis 24a.

  Here, it is assumed that the rotary shaft 24 extends in the vertical direction, and the electrostatic motor 20 is used in which the disk-shaped stator 22 and the mover 23 are horizontally arranged. However, as a usage form of the electrostatic motor 20, the rotating shaft 24 extends in the horizontal direction, and the electrostatic motor 20 may be used by arranging the disk-shaped stator 22 and the movable element 23 vertically. is there. In this case, the rotating shaft 24 penetrates in a direction orthogonal to the vertical plane of the mover 23. In addition, the rotating shaft 24 extends in an oblique direction, and the electrostatic motor 20 may be used by arranging the disk-shaped stator 22 and the mover 23 orthogonal to the rotating shaft 24. In this case, the rotating shaft 24 penetrates in a direction perpendicular to the inclined surface of the mover 23.

A through hole 22c having a diameter larger than the diameter of the rotating shaft 24 is formed on the center P of the stator 22, and the rotating shaft 24 is configured not to interfere with the through hole 22c. A first electrode 25 is provided on a surface 22 a of the stator 22 facing the mover 3. As shown in FIG. 6, the first electrode 25 is composed of a plurality of strip-like electrodes 25 </ b> A that extend in the radial direction X with respect to the center P and are arranged at intervals in the circumferential direction R. Each strip electrode 25A (first electrode 25) is formed of a metal made of a conductive member. The width of each strip electrode 25A in the circumferential direction R, the length in the radial direction X, and the interval between the electrodes are formed and arranged so as to be constant. Each strip electrode 25A is connected to a wiring (not shown) that can apply a voltage.
The stator 22 has a fourth electrode 28. The fourth electrode 28 has an annular shape, and is closer to the center P than the inner end 25a of the strip electrode 25A (first electrode 25) in the radial direction X, and the strip electrode 25A (first electrode 25) in the radial direction X. ) Are formed on the opposing surface 22a closer to the outer peripheral surface 22b than the outer end portion 25b. That is, the fourth electrode 28 is disposed on the inner side and the outer side of the strip electrode 25A (first electrode 25) in the stator 22, respectively. In the present embodiment, the fourth electrode 28 is disposed on the inner side and the outer side of the electrode 25A (first electrode 25) in the stator 22, but it is sufficient that the fourth electrode 28 is formed on at least one of the inner side and the outer side. . An arbitrary voltage is applied to each fourth electrode 28 at a time different from the voltage used for rotational driving. The first electrode 25 and the fourth electrode 28 may be covered with a protective film or the like that passes an electric field to prevent the electrode surface from being exposed to air or damaged. This is to prevent a decrease in electrostatic force due to the electrode surface being damaged.

  As shown in FIG. 5, a fixed hole 23c that penetrates is formed on the rotation center P1 of the mover 23, and a rotary shaft 24 is inserted into and fixed to the fixed hole 23c. A second electrode 26 is formed on the facing surface 23 a of the mover 23 that faces the facing surface 22 a of the stator 22. As shown in FIG. 7, the second electrode 26 includes a plurality of strip-like electrodes 26 </ b> A that extend in the radial direction X with respect to the rotation center P <b> 1 and are arranged at intervals in the circumferential direction R. Each strip electrode 26A (second electrode 26) is formed of a conductive member or electret material. The width in the circumferential direction R, the length in the radial direction X, and the distance between the electrodes of each strip electrode 26A are formed and arranged so as to be constant. When each strip electrode 26A is formed of a conductive member, a wiring configuration (not shown) is provided so that a voltage can be applied to each strip electrode 26A. When each belt-like electrode 26A is formed of an electret material, the electret material is a substance that is permanently charged as is well known. Therefore, if each belt-like electrode 26A is formed of this material, wiring for applying a voltage becomes unnecessary. . When each strip electrode 26A is formed of an electret material, either one of the positive electrode or the negative electrode is charged in advance to form each strip electrode 26A. In the present embodiment, each strip electrode 26A is formed of an electret material. The annular shape of the third electrode 27 and the fourth electrode 28 indicates a donut shape that is continuous in the circumferential direction R and has no gap in the middle.

  The mover 23 has a third electrode 27. The third electrode 27 has a ring shape, and is closer to the center P than the inner end portion 26a of the strip electrode 26A (second electrode 26) in the radial direction X, and the strip electrode 26A (second electrode 26) in the radial direction X. ) Are formed and arranged on the opposing surface 23a closer to the outer peripheral surface 23b than the outer end portion 26b. That is, the third electrode 27 is disposed on the inner side and the outer side of the belt-like electrode 26 </ b> A (second electrode 26) in the mover 23. In the present embodiment, the third electrode 27 is disposed on the inner side and the outer side of the electrode 26A (first electrode 26) in the mover 23, but may be formed on at least one of the inner side and the outer side. . The second electrode 26 and the third electrode 27 may be covered with a protective film that passes an electric field to prevent exposure of the electrode surface to the air or damage.

  That is, as shown in FIG. 8, the third electrode 27 and the fourth electrode 28 are arranged to face each other. Each third electrode 27 includes a region 23d closer to the center P than the inner end 26a of the strip electrode 26A (second electrode 26) and an outer end 26b of the strip electrode 26A (second electrode 26). Is also formed and arranged in a region 23e near the outer peripheral surface 23b. Each of the fourth electrodes 28 includes a region 22d closer to the center P than the inner end 25a of the strip electrode 25A (first electrode 25) and an outer end 25b of the strip electrode 25A (first electrode 25). The third electrode 27 and the fourth electrode 28 are arranged in the region 22e closer to the outer peripheral surface 23b than the state where the third electrode 27 and the fourth electrode 28 face each other so that their centers in the radiation direction X coincide with each other. Or, although the centers of each other are deviated in the radiation direction X, a part of the electrodes facing each other is included.

The difference between the first embodiment and the second embodiment is the power supply configuration and the materials of the third electrode and the fourth electrode, and the other configurations are the same in each embodiment. In the first embodiment, metal is used for the third electrode 7 and the fourth electrode 8, and the center position of the stator 2 and the mover 3 is applied by applying a voltage having the same polarity to both electrodes during centering adjustment. Combined. However, a wiring structure for applying a voltage to the fourth electrode 8 of the stator 2 and the third electrode 7 of the mover 3 is necessary, and the wiring becomes complicated. In particular, in order to wire the movable element 3, an energizing brush is necessary, and fluctuations in driving torque are expected due to the complexity of the structure and the contact resistance with the energizing brush.
Therefore, the third electrode 27 and the fourth electrode 28 according to the second embodiment are formed of an electret material like the second electrode. The third electrode 27 and the fourth electrode 28 formed of an electret material are formed by being charged so as to have the same polarity.

For this reason, when the stator 22 and the mover 23 are assembled so as to face each other, the ring-shaped fourth electrode 28 disposed on the stator 22 and the ring-shaped third electrode 27 disposed on the mover 23 are the same. A repulsive force due to static electricity is generated between the third electrode 27 and the fourth electrode 28 without applying a polar voltage. For this reason, the stator 22 and the mover 23 move autonomously to a position where the center P of the stator 22 and the rotation center P1 of the mover 23 coincide. The stator 22 is assembled and fixed to the motor housing or the like with the alignment adjusted, so that the positional deviation between the center P of the stator 22 and the rotation center P1 of the movable element 23 is corrected. Can be attached. For this reason, the rotation of the center of the stator 2 and the center of rotation of the mover 3 can be corrected with a simple structure to suppress torque fluctuations and smooth rotation can be obtained.
That is, in the second embodiment, it is not necessary to apply a voltage to the third electrode 27 and the fourth electrode 28 when centering the stator 22 and the mover 23, and the first embodiment In comparison, a wiring structure such as an energizing brush or wiring is unnecessary and simplification can be achieved. Further, since there is no contact resistance with the energizing brush, torque fluctuation can be further reduced and smooth rotation can be obtained more easily.

A more detailed configuration of the first embodiment will be described with reference to FIG.
The electrostatic motor 1 shown in FIG. 9 includes a stator 2 having a first electrode 5 and a fourth electrode 8, a mover 3 having a second electrode 6 and a third electrode 7, and a mover 3. A fixed rotation shaft 4 is provided. The drive motor 1 includes a bottomed cylindrical housing 9 having a housing space for housing the stator 2 and the movable member 3 therein, and a housing 10 that closes the housing 9. The stator 2 and the mover 3 are placed in the housing 9, and the housing 10 is fastened and fixed to the housing 9 with a plurality of screws 16, so that the stator 2 and the mover 3 are accommodated in the first housing 9. doing.

Boss portions 9 a and 10 a protruding in the axial direction Z are formed at the center of the housing 9 and the center of the housing 10. The boss portions 9a and 10a are formed with holes 9g and 10g that penetrate in the axial direction Z and have the same axial line. In these holes 9g and 10g, bearings 13 and 14 for rotatably supporting the rotary shaft 4 are fitted.
In the housing 9, a first support portion 11 for fixing the stator 2 is disposed on a flat bottom surface 9c. The donut-shaped first support portion 11 having an opening 11b formed in the center is made of a flat glass substrate, and is fixed by attaching the stator 2 to the mounting surface 11a which is one surface thereof. Then, it is placed on the bottom surface 9 c of the housing 9 so as to be movable in the radial direction X. An ultraviolet curable adhesive 19 is applied as an adhesive member between the first support portion 11 and the bottom surface 9c of the housing 9 as indicated by a dotted line. The diameter of the central opening 11b is formed larger than the outer peripheral diameter of the inner cylindrical projection 9e of the boss 9a. When the first support 11 is placed on the bottom surface 9c, The inner cylindrical projection 9e is positioned on the bottom surface 9c so as to be movable in the radial direction X. For this reason, the 1st support part 11 is mounted in the bottom face 9c to which the ultraviolet curable adhesive 19 was apply | coated so that it could move only the difference of the outer peripheral diameter of the opening part 11b and the inner side cylindrical projection part 9e. The radiation direction X is also a direction Y orthogonal to the rotation center P1 of the mover 3.

The assembly and center adjustment of the electrostatic motor 1 having such a configuration will be described.
A stator in a direction in which the facing surface 2a having the first electrode 5 and the fourth electrode 8 is located on the opposite side of the mounting surface 11a on the mounting surface 11a of the first support portion 11 located on the opposite side of the bottom surface 9c. 2 is fixed.
The first support portion 11 to which the stator 2 is fixed is placed on the bottom surface 9c to which the ultraviolet curable adhesive 19 is applied by inserting the central opening portion 11b into the inner cylindrical projection portion 9e.
The rotary shaft 4 has a movable element 3 having a second electrode 6 and a third electrode 7 on the opposed surface 3a, and a fixed ring as a fixed member so that the opposed surface 3a faces the opposed surface 2a of the stator 2. The end portion 4 b of the rotating shaft 4 to which the movable element 3 is fixed is inserted into the bearing 13. At this time, the mover 3 is fixed by a fixing ring 15 at a predetermined position of the rotating shaft 4 so that the stator 2 and the mover 3 have a predetermined distance H. The rotation shaft 4 is fixed so that the rotation axis 4 a is positioned on the rotation center P <b> 1 of the mover 3. The predetermined interval H is an interval at which an attractive force or a repulsive force can be generated as a driving torque due to static electricity acting between electrodes facing each other on the stator 2 side and the mover 3 side.
With the stator 2 and the mover 3 facing each other at a predetermined interval H, voltages having the same polarity are applied to the fourth electrode 8 of the stator 2 and the third electrode 7 of the mover 3, respectively. Then, when the center positions of the stator 2 and the mover 3 are shifted, the stator 2 moves in the radial direction X (orthogonal direction Y) on the bottom surface 9c by electrostatic repulsion so that the stator 2 matches the center of the mover 3. The center P of the stator 2 coincides with the rotation axis 4a (rotation center P1) of the mover 3. In this state, the ultraviolet curable adhesive 19 is irradiated with ultraviolet rays using an optical fiber (not shown) to solidify the ultraviolet curable adhesive 19, and the first support portion 11 is made to have a bottom surface 9 </ b> C (first housing 9). Adhere to and fix.
After the first support portion 11 is fixed to the first housing 9, the other end portion 4 c of the rotating shaft 4 is inserted into the bearing 14, and the second housing 10 is placed on the first housing 9. The electrostatic motor 1 is assembled by being fastened and fixed to the first housing 9 with screws 16. Since the center P of the stator 2 and the rotation center P1 of the mover 3 are positioned on the rotation axis 4a of the rotation shaft 4 by such a configuration and assembly procedure, the center P of the stator 2 and the rotation center P1 of the mover 3 are located. Assembling can be performed in a state where the positional deviation is corrected. For this reason, torque fluctuation can be suppressed and smooth rotation can be obtained.

Although the assembly of the electrostatic motor 1 of the first embodiment has been described with reference to FIG. 9, the electrostatic motor 20 of the second embodiment can be assembled by the same assembly.
That is, the stator 22 described in the second embodiment is fixed to the mounting surface 11 a of the first support portion 11, and the mover 23 is fixed to the rotating shaft 24 via the fixing ring 15. Nine bearings 14 are mounted. Then, a repulsive force of static electricity acts between the third electrode 27 and the fourth electrode 28 that are already charged to the same polarity, and the stator 22 moves on the bottom surface 9c so as to be aligned with the center of the mover 23. The center P of the stator 22 coincides with the rotation axis 24 a of the mover 23. Then, the ultraviolet curable adhesive 19 is irradiated with ultraviolet rays using an optical fiber (not shown) to solidify the ultraviolet curable adhesive 19, whereby the first support portion 11 to which the stator 22 is fixed is attached to the bottom surface 9C (first 1 is bonded and fixed to the housing 9). And after the 1st support part 11 is fixed to the 1st housing | casing 9, while inserting the other edge part 24c of the rotating shaft 24 in the bearing 14, the 2nd housing | casing 10 is made into the 1st housing | casing 9. FIG. The electrostatic motor 20 is assembled by being put on and fastened and fixed to the first housing 9 with screws 16. Since the center P of the stator 22 and the rotation center P1 of the mover 23 are positioned on the rotation axis 24a of the rotation shaft 24 by such a configuration and assembly procedure, the center P of the stator 22 and the rotation center P1 of the mover 23 are located. Assembling can be performed in a state where the positional deviation is corrected. For this reason, torque fluctuation can be suppressed and smooth rotation can be obtained.

(Third embodiment)
In the present embodiment, as shown in FIGS. 10, 11, and 12, the first and fourth electrodes 7 and 8 are arranged in the same plane in the direction Y (radiation direction X) orthogonal to the rotation center P1 of the mover. It has the adjustment part 40 which adjusts a position. The electrostatic motor 1A shown in FIG. 10, FIG. 11, and FIG. 12 has a configuration in which an adjustment unit 40 and a second support unit 12 are added to the electrostatic motor 1 according to the first embodiment. The form which added the adjustment part 40 and the 2nd support part 12 to the electrostatic motor 20 which concerns on a form may be sufficient.

  In the third embodiment, the first support portion 11 used in the first embodiment is not directly placed and fixed on the bottom surface 9c of the first housing 9, but the second support portion 12 is fixed. And the second support portion 12 is fixed. This is because the position of the stator 2 can be adjusted by the adjusting unit 40 after assembly. The bottomed cylindrical second support portion 12 has an outer diameter smaller than the diameter of the inner peripheral surface 9 b of the first housing 9. The second support portion 12 has a first casing so that a gap is formed between the outer peripheral face 12d and the inner peripheral face 9b of the first casing 9 facing the outer peripheral face 12d. 9 is placed on the bottom surface 9c. An opening 12b formed larger than the outer peripheral diameter of the inner cylindrical protrusion 9e of the boss 9a is formed at the center of the second support part 12, and the outer peripheral surface of the opening 12b and the inner cylindrical protrusion 9e. It is comprised so that a clearance gap may be formed between 9e1. When the second support portion 12 is placed on the bottom surface 9c, the second support portion 12 is placed on the inner cylindrical protrusion 9e in the opening 12b and is placed on the bottom surface 9c so as to be movable in the radial direction X. In the present embodiment, the ultraviolet curable adhesive 19 is applied to the mounting surface 12 a of the second support portion 12 and is used for fixing the first support 11 and the second support 12. That is, the first support 11 is placed on the mounting surface 12a of the second support to which the ultraviolet curable adhesive 19 is applied. The second support portion 12 is held between the first housing 9 and the second housing 10 in the axial direction Z when the second housing 10 is fixed to the first housing 9. It is configured so that it can move in the radial direction X but cannot move in the axial direction Z.

  In this embodiment, the 1st support part 11 to which the stator 2 was fixed is mounted in the attachment surface 12a of the 2nd support part 12 parallel to the bottom face 9c. At this time, the first support portion 11 is mounted on the second support portion 12 so that a gap is formed between the inner peripheral surface 12c of the second support portion 12 and the outer peripheral surface 11c of the first support portion 11. Put.

The assembly and center adjustment of the electrostatic motor 1A having such a configuration will be described.
The first support portion 11 in which the stator 2 having the first electrode 5 and the fourth electrode 8 is fixed to the mounting surface 12a of the second support portion 12 to which the ultraviolet curable adhesive 19 is applied is attached to the first support portion 11. The facing surface 2a on which the first electrode 5 and the fourth electrode 8 are formed is placed in a direction located on the opposite side of the mounting surface 12a.
The second support portion 12 on which the first support portion 11 to which the stator 2 is fixed is placed is placed on the bottom surface 9c by inserting the central opening portion 12b into the inner cylindrical portion 9e.
A movable element 3 having a second electrode 6 and a third electrode 7 is fixed to the rotary shaft 4 via a fixing ring 15 as a fixing member so that the opposing surface 3a faces the opposing surface 2a. One end 4 b side of the rotating shaft 4 to which the mover 3 is fixed is inserted into the bearing 13. At this time, the mover 3 is fixed by a fixing ring 15 at a predetermined position of the rotating shaft 4 so that the stator 2 and the mover 3 have a predetermined distance H.
With the stator 2 and the mover 3 facing each other at a predetermined interval H, voltages having the same polarity are applied to the fourth electrode 8 of the stator 2 and the third electrode 7 of the mover 3, respectively. Then, when the center position of the stator 2 is shifted in the stator 2, the first support 11 is moved on the mounting surface 12a by electrostatic repulsion so that the stator 2 is aligned with the center of the mover 3, The center P of the stator 2 coincides with the rotation axis 4a (rotation center P1) of the mover 3. In this state, the ultraviolet curable adhesive 19 is irradiated with ultraviolet rays using an optical fiber (not shown) to solidify the ultraviolet curable adhesive 19, and the second support portion 12 is attached to the mounting surface 12 a on the first support 11. Adhere and fix.
After the first support portion 11 is fixed to the second support body 12, the other end portion 4 c of the rotating shaft 4 is inserted into the bearing 14 and the second housing 10 is placed on the first housing 9. The electrostatic motor 1 </ b> A is assembled by mounting and fastening and fixing to the first housing 9 with the screws 16. At this time, the second support 12 is sandwiched between the first housing 9 and the second housing 10 from the axial direction Z, and movement in the axial direction Z is prevented. Since the center P1 of the stator 2 and the rotation center P1 of the mover 3 are located on the rotation axis 4a of the rotation shaft 4 by such a configuration and assembly procedure, the center P of the stator 2 and the mover can be formed with a simple structure. 3 to correct the deviation of the rotation center P1 to suppress torque fluctuations and obtain a smooth rotation.

The process of adjusting the center position by applying a voltage to the third electrode 7 and the fourth electrode 8 so far has been performed in the assembling process of the electrostatic motor 1A. Ideally, the positions of the center P of the stator 2 and the center of rotation P1 of the mover 3 are aligned on the rotation axis 4a of the rotation shaft 4 by matching this position. However, in reality, a slight misalignment due to an assembling error in the assembling process after alignment and a variation in accuracy of each member may be found when the assembled electrostatic motor 1A is rotationally driven. is assumed.
Therefore, in the present embodiment, an adjustment unit 40 is provided to enable position adjustment after assembly. The adjustment unit 40 includes a screw hole 41 formed from the outer peripheral surface 9 d of the first housing 9 toward the inner peripheral surface 9 b and an adjustment screw 42 that is screwed into the screw hole 41. In the present embodiment, as shown in FIG. 11, the adjustment unit 40 has a phase of 120 degrees and is arranged at three locations of the first housing 9 that is located outside the second support 12. Yes. The arrangement of the adjustment unit 40 is not limited to three places. For example, the adjustment unit 40 may be arranged at four places with a phase of 90 degrees, or may be arranged at more places, but the adjustment is performed from at least three directions. It is preferable to arrange them in three places.
The adjustment screw 42 protrudes from the inner peripheral surface 9b of the first housing 9 to the inside of the first housing 9 when pressed into the screw hole 41, and presses the outer peripheral surface 12d of the second support portion 12 into pressure contact. Thus, the stator 2 integral with the second support portion 12 is movable in the orthogonal direction Y (radial direction X).

  When such an adjustment unit 40 is disposed at least at three locations outside the second support unit 12, the assembled electrostatic motor 1A is rotationally driven to measure the rotational torque of the rotary shaft 4. The tightening adjustment of the adjusting screw 42 of the adjusting unit 40 is adjusted so that the rotational torque at the time of rotational driving is maximized and the torque fluctuation is reduced. As described above, the position of the stator 2 accommodated in the first housing 9 and the second housing 10 can be moved from the outside of the first housing 9, so that the electrostatic When the motor 1A is inspected, the center of the stator 2 and the mover 3 (the center of the electrode) can be corrected by finely adjusting the positional deviation, and smooth rotation can be obtained while suppressing torque fluctuation. .

(Fourth embodiment)
In the present embodiment, as shown in FIG. 13, the first electrode 25 in the orthogonal direction Y (radiation direction X) in the same plane in the orthogonal direction Y (radiation direction X) with respect to the rotation center P <b> 1 of the mover 23. And it has the holding | maintenance part 60 which hold | maintains the position of the 4th electrode 28 so that a movement is possible. The electrostatic motor 20A shown in FIG. 13 has a configuration in which a holding unit 60 and a second support unit 12 are added to the electrostatic motor 20 according to the second embodiment, but the electrostatic motor according to the first embodiment. The form which adds the holding | maintenance part 60 and the 2nd support part 12 to 1 may be sufficient.

  The electrostatic motor 20A according to the fourth embodiment does not directly place and fix the first support portion 11 used in the second embodiment on the bottom surface 9c of the first housing 9, but The second support portion 12 is attached and fixed to the second support portion 12. This is because the holding unit 60 holds the stator 22 movably in the orthogonal direction Y (radial direction X) after assembly. The bottomed cylindrical second support portion 12 has an outer diameter smaller than the diameter of the inner peripheral surface 9 b of the first housing 9. The second support portion 12 has a first casing so that a gap is formed between the outer peripheral face 12d and the inner peripheral face 9b of the first casing 9 facing the outer peripheral face 12d. 9 is placed on the bottom surface 9c. An opening 12b formed larger than the outer peripheral diameter of the inner cylindrical protrusion 9e of the boss 9a is formed at the center of the second support part 12, and the outer peripheral surface of the opening 12b and the inner cylindrical protrusion 9e. It is comprised so that a clearance gap may be formed between 9e1. When the second support portion 12 is placed on the bottom surface 9c, the second support portion 12 is placed on the inner cylindrical protrusion 9e in the opening 12b and is placed on the bottom surface 9c so as to be movable in the radial direction X. In the present embodiment, the ultraviolet curable adhesive 19 is applied to the mounting surface 12 a of the second support portion 12 and is used for fixing the first support 11 and the second support 12. That is, the first support 11 is placed on the mounting surface 12a of the second support to which the ultraviolet curable adhesive 19 is applied. The second support portion 12 is held between the first housing 9 and the second housing 10 in the axial direction Z when the second housing 10 is fixed to the first housing 9. It is configured so that it can move in the radial direction X but cannot move in the axial direction Z.

  In this embodiment, the 1st support part 11 to which the stator 22 was fixed is mounted in the attachment surface 12a of the 2nd support part 12 parallel to the bottom face 9c. At this time, the first support portion 11 is mounted on the second support portion 12 so that a gap is formed between the inner peripheral surface 12c of the second support portion 12 and the outer peripheral surface 11c of the first support portion 11. Put.

The assembly and center adjustment of the electrostatic motor 20A having such a configuration will be described.
The first support portion 11 in which the stator 22 having the first electrode 25 and the fourth electrode 28 is fixed to the mounting surface 12a of the second support portion 12 to which the ultraviolet curable adhesive 19 is applied is attached to the first support portion 11. The facing surface 22a on which the first electrode 25 and the fourth electrode 28 are formed is placed in such a direction as to be located on the side opposite to the mounting surface 12a.
The second support portion 12 on which the first support portion 11 to which the stator 22 is fixed is placed is placed on the bottom surface 9c by inserting the central opening portion 12b into the inner cylindrical portion 9e.
A movable element 23 having a second electrode 26 and a third electrode 27 is fixed to the rotary shaft 24 via a fixing ring 15 as a fixing member so that the opposing surface 23a faces the opposing surface 22a. One end 24 b side of the rotating shaft 24 to which the mover 23 is fixed is inserted into the bearing 13. At this time, the movable element 3 is fixed to the predetermined position of the rotating shaft 24 by the fixing ring 15 so that the fixed element 22 and the movable element 23 have a predetermined distance H.
When the stator 22 and the mover 23 face each other at a predetermined interval H, static electricity is generated between the fourth electrode 28 of the stator 22 and the third electrode 27 of the mover 23 formed of electret material. A repulsive force is generated. The first support 11 moves on the mounting surface 12a so that the center P1 of the stator 22 is aligned with the rotation center P1 of the mover 23, and the center P of the stator 22 is the rotation axis 4a (rotation) of the mover 23. Coincides with the center P1). In this state, the ultraviolet curable adhesive 19 is irradiated with ultraviolet rays using an optical fiber (not shown) to solidify the ultraviolet curable adhesive 19, and the second support portion 12 is attached to the mounting surface 12 a on the first support 11. Adhere and fix.
After the first support portion 11 is fixed to the second support body 12, the other end 24 c of the rotating shaft 24 is inserted into the bearing 14 and the second housing 10 is placed on the first housing 9. The electrostatic motor 20A is assembled by mounting and fastening to the first housing 9 with the screws 16. At this time, the second support 12 is sandwiched between the first housing 9 and the second housing 10 from the axial direction Z, and movement in the axial direction Z is prevented. Since the center P1 of the stator 22 and the rotation center P1 of the mover 23 are positioned on the rotation axis 24a of the rotation shaft 24 by such a configuration and assembly procedure, the center P of the stator 22 and the mover can be formed with a simple structure. A smooth rotation can be obtained by correcting the deviation of the rotation center P1 of 23 to suppress the torque fluctuation.

The holding part 60 includes depressions 62 and 63 formed facing the inner peripheral surface 9d of the first housing 9 and the outer peripheral surface 12d of the second support 12 facing each other, A compression coil spring 61 is provided as an adjustment member accommodated in the recess 63. In the present embodiment, the holding portions 60 having such a configuration are arranged at three locations on the first housing 9 that are positioned outside the second support 12 with a phase of 120 degrees. The arrangement of the holding unit 60 is not limited to three places, and may be arranged, for example, at four places with a phase of 90 degrees, or may be arranged at more places, but is supported from at least three directions. It is preferable to arrange them in three places.
Since a gap is formed between the inner peripheral surface 9d of the first housing 9 and the outer peripheral surface 12d of the second support 12, and the compression coil spring 61 is disposed therebetween, the second support portion 12 is supported to be movable in the radial direction X.

  By disposing such holding portions 60 at least at three positions outside the second support portion 12, the fourth electrode 28 and the third electrode 27 are rotated when the assembled electrostatic motor 20A is rotationally driven. The stator 22 is supported so as to be able to move in the radial direction X independently even after the electrostatic motor 20A is assembled so that the centers of the stator 22 and the mover 23 coincide with each other due to repulsive force due to static electricity between them. can do. For this reason, at the time of inspection of the assembled electrostatic motor 20A, the respective centers (centers of the electrodes) of the stator 22 and the mover 23 can be finely adjusted and corrected, and torque fluctuations can be suppressed more smoothly. Rotation can be obtained.

(Fifth embodiment)
As shown in FIGS. 14 and 15, the electrostatic motor 1 </ b> B according to the present embodiment includes the stator 2 and the mover 3 described in the first embodiment as one drive unit, and the axis of the rotary shaft 4. A plurality of layers are stacked in the direction Z and disposed in the first housing 9, and the adjustment unit 40 described in the third embodiment is included. In the present embodiment, three drive units are arranged in the axial direction Z, and are referred to as drive units 100A, 100B, and 100C from the lowermost drive unit toward the upper drive unit for convenience. In the constituent members of each drive unit, those having the same configuration and function as those described above are denoted by the same reference numerals, and detailed description thereof is omitted as appropriate. Moreover, in this embodiment, in order to identify each structural member to the structural member of drive unit 100A-drive unit 100C, A, B, and C are attached | subjected after a numerical code. In the present embodiment, the stators 2A to 2C are fixed to the first supports 11A to 11C and prepared in advance. The first housing 9 and the second support 12 are extended in the axial direction Z so that three drive units 100A, 100B, and 100C can be accommodated with respect to those of the other embodiments.
In the present embodiment, annular spacers 29 </ b> A, 29 </ b> B, and 29 </ b> C are disposed in the second support portion 12 from the lower layer to the upper layer. The height of each support in the axial direction Z is set such that the upper surfaces 29Aa, 29Ba, and 29Ca are higher than the movable bodies 3A, 3B, and 3C that are fixed to the rotary shaft 4.

The assembly of the drive unit 100A located in the first layer that is the lowest layer will be described.
In the case of this embodiment, the stator 2A of the drive unit 100A is fixed by being attached to the mounting surface 11Aa of the first support 11A by adhesion or the like. And the 1st support body 11A is mounted in the attachment surface 12a of the 2nd support part 12 which apply | coated the ultraviolet curable adhesive 19A. Further, the spacer 29A is arranged along the inner peripheral surface 12c on the mounting surface 11Aa of the first support 11A located between the outer peripheral surface 2Ab of the stator 2A and the inner peripheral surface 12c of the second support 12. To place.
The movable element 3A of the drive unit 100A is fixed to a fixing ring 15A as a fixing member, and the bearing 13 is moved on the rotating shaft 4 with one end 14b inserted so as to have a predetermined distance HA from the stator 2A. The fixing ring 15A is fixed to the rotary shaft 4 at that position. At this stage, the same voltage is applied to the fourth electrode 8A of the stator 2A and the third electrode 7A of the mover 3A, and the first support portion 11A to which the stator 2A is fixed by the repulsive force due to static electricity. It moves in the radial direction X with respect to the second support part 12, and the center position of the stator 2A and the mover 3A of the drive unit 100A is aligned. After the center position adjustment, the first support 11 </ b> A having the stator 2 </ b> A is fixed on the mounting surface 12 a of the second support 12 by irradiating the ultraviolet curable adhesive 19 </ b> A with ultraviolet rays. With such a configuration, the drive unit 100A is assembled to the second support 12.

The assembly of the drive unit 100B located in the second layer serving as the intermediate layer will be described.
The first support 11B of the drive unit 100B located in the intermediate layer is placed on the upper surface 29Aa of the spacer 29A and fixed so that a gap is formed between the outer peripheral surface 11Ba and the inner peripheral surface 12c. The mounting surface 11Ba of the support 11B is coated with an ultraviolet curable adhesive 19B, and the stator 2B on the mounting surface 11Ba can be moved in the radial direction X until it is cured. The spacer 29B is arranged along the inner peripheral surface 12c on the mounting surface 11Ba of the first support 11B located between the outer peripheral surface 2Bb of the stator 2B and the inner peripheral surface 12c of the second support 12. To do.

  The movable element 3B of the drive unit 100B is fixed to a fixed ring 15B as a fixed member, and is moved on the rotating shaft 4 so as to be opposed to the stator 2B at a predetermined distance HB. Fix to the rotating shaft 4. At this stage, a voltage of the same polarity is applied to the fourth electrode 8B of the stator 2B and the third electrode 7B of the mover 3B, and the stator 2B radiates to the first support portion 11B by repulsive force due to static electricity. Moving in the direction X, the center positions of the stator 2B and the mover 3B are aligned. After the center position adjustment, the stator 2B and the support 29B are fixed to the first support 11B by irradiating the ultraviolet curable adhesive 19B with ultraviolet rays. With such a configuration, the drive unit 100B is assembled to the second support 12.

The assembly of the drive unit 100C located in the third layer as the uppermost layer will be described.
The first support 11C of the drive unit 100C located in the third layer is placed on the upper surface 29Ba of the spacer 29B and fixed so that a gap is formed between the outer peripheral surface 11Ca and the inner peripheral surface 12c. Is done. An ultraviolet curable adhesive 19C is applied to the mounting surface 11Ca of the support 11C, and the stator 2C on the mounting surface 11Ba can be moved in the radial direction X until it is cured. The spacer 29C is arranged along the inner peripheral surface 12c on the mounting surface 11Ca of the first support 11C located between the outer peripheral surface 2Cb of the stator 2C and the inner peripheral surface 12c of the second support 12. To do.

  The movable element 3C of the drive unit 100C is fixed to a fixed ring 15C as a fixing member, and is moved on the rotating shaft 4 so as to be opposed to the stator 2C at a predetermined distance HC. Fix to the rotating shaft 4. At this stage, a voltage having the same polarity is applied to the fourth electrode 8C of the stator 2C and the third electrode 7C of the mover 3C, and the stator 2C radiates to the first support portion 11C by repulsive force due to static electricity. Moving in the direction X, the center positions of the stator 2C and the mover 3C are aligned. After the center position adjustment, the stator 2C and the support 29C are fixed to the first support 11C by irradiating the ultraviolet curable adhesive 19C with ultraviolet rays. With such a configuration, the drive unit 100 </ b> C is assembled to the second support 12.

  After the assembly of all the drive units is completed, the other end 4c of the rotating shaft 4 is inserted into the bearing 14, and the second casing 10 is placed on the first casing 9, and the first screw The electrostatic motor 1B is assembled by being fastened and fixed to the housing 9. At this time, the second support 12 is sandwiched between the first housing 9 and the second housing 10 from the axial direction Z, and movement in the axial direction Z is prevented. In addition, when the second casing 10 is placed on the first casing 9 and fastened and fixed to the first casing 9 with the screws 16, the lowermost spacers 29 </ b> A are supported by the lowermost spacers 29 </ b> A. It is sandwiched from the axial direction Z by 11A and the first support 11B thereon. The intermediate layer spacer 29B is sandwiched from the axial direction Z by the first support 11B and the uppermost first support 11C3, and the uppermost spacer 29C is the first support 11C and the second casing. 10 to be sandwiched from the axial direction Z and fixed.

With this configuration and assembly procedure, the center P1 of the stators 2A, 2B, and 2C and the rotation center P1 of the movers 3A, 3B, and 3C can be positioned on the rotation axis 4a of the rotation shaft 4. That is, by correcting the deviation between the center P of each stator and the rotation center P1 of each mover with a simple structure, torque fluctuation can be suppressed and smooth rotation can be obtained, and a plurality of drive units 100A to 100C can be mounted. As a result, the rotational torque can be increased.
As in the third embodiment, the adjustment unit 40 is disposed one by one at a position (120-degree phase) divided into three equal parts in the circumferential direction, and the position of the second support 12 in the radial direction X is determined. Fine adjustment is possible. Therefore, when the assembled electrostatic motor 1B is rotationally driven and the rotational torque of the rotational shaft 4 is measured, the adjustment screw of the adjustment unit 40 is set so that the rotational torque during the rotational drive is maximized and the torque fluctuation is small. 42 is adjusted. As described above, the position of each stator 2 accommodated in the first housing 9 and the second housing 10 can be moved from the outside of the first housing 9, thereby completing the assembled static. The center of each of the stators 2A to 2C and each of the movers 3A to 3C (the center of the electrode) can be corrected and finely adjusted when the electric motor 1A is inspected. Rotation can be obtained.

(Sixth embodiment)
As shown in FIG. 16, the electrostatic motor 20 </ b> B according to the present embodiment uses the stator 22 and the mover 23 described in the second embodiment as a single drive unit in the axial direction Z of the rotary shaft 24. A plurality of stacked layers are arranged in the first housing 9 and have the holding unit 60 described in the fourth embodiment. In the present embodiment, three drive units are arranged in the axial direction Z, and are referred to as drive units 200A, 200B, and 200C from the lowermost drive unit toward the upper drive unit for convenience. In the constituent members of each drive unit, those having the same configuration and function as those described above are denoted by the same reference numerals, and detailed description thereof is omitted as appropriate. Further, in the present embodiment, A, B, and C are appended to the constituent members of the drive units 200A to 200C to identify each member. In the present embodiment, the stators 22A to 22C are fixed to the first supports 11A to 11C and prepared in advance. The first housing 9 and the second support 12 are extended in the axial direction Z so that three drive units 200A, 200B, and 200C can be accommodated with respect to those of the other embodiments.

The assembly of the drive unit 200A located in the first layer that is the lowest layer will be described.
In the case of this embodiment, the stator 22A of the drive unit 200A is fixed by being attached to the mounting surface 11Aa of the first support 11A by adhesion or the like. And the 1st support body 11A is mounted in the attachment surface 12a of the 2nd support part 12 which apply | coated the ultraviolet curable adhesive 19A. Further, the spacer 29A is arranged along the inner peripheral surface 12c on the mounting surface 11Aa of the first support 11A located between the outer peripheral surface 22Ab of the stator 22A and the inner peripheral surface 12c of the second support 12. To place.
The movable element 23A of the drive unit 200A is fixed to a fixing ring 15A as a fixing member, and is moved on the rotary shaft 24 in which one end 24b is inserted into the bearing 13 so as to have a predetermined distance HA from the stator 22A. The fixing ring 15A is fixed to the rotating shaft 24 at the position. When the stator 22 and the mover 23 face each other at a predetermined interval HA, static electricity is generated between the fourth electrode 28A of the stator 22A and the third electrode 27A of the mover 23A formed of electret material. A repulsive force is generated. Then, the first support portion 11A to which the stator 22A is fixed moves in the radial direction X with respect to the second support portion 12, and the center positions of the stator 22A and the mover 23A of the drive unit 200A are aligned. After the center position adjustment, the first support 11A having the stator 22A is fixed on the mounting surface 12a of the second support 12 by irradiating the ultraviolet curable adhesive 19A with ultraviolet rays. With such a configuration, the drive unit 200 </ b> A is assembled to the second support 12.

The assembly of the drive unit 200B located in the second layer serving as the intermediate layer will be described.
The first support 11B of the drive unit 200B located in the intermediate layer is placed on the upper surface 29Aa of the spacer 29A and fixed so that a gap is formed between the outer peripheral surface 11Ba and the inner peripheral surface 12c. An ultraviolet curable adhesive 19B is applied to the mounting surface 11Ba of the support 11B, and the stator 22B on the mounting surface 11Ba can be moved in the radial direction X until it is cured. The spacer 29B is arranged along the inner peripheral surface 12c on the mounting surface 11Ba of the first support 11B located between the outer peripheral surface 22Bb of the stator 22B and the inner peripheral surface 12c of the second support 12. To do.

  The movable element 3B of the drive unit 100B is fixed to a fixed ring 15B as a fixed member, and is moved on the rotating shaft 4 so as to be opposed to the stator 2B at a predetermined distance HB. Fix to the rotating shaft 4. When the stator 22B and the mover 23B face each other at a predetermined interval HB, static electricity is generated between the fourth electrode 28B of the stator 22B and the third electrode 27B of the mover 23B formed of electret material. A repulsive force is generated. Then, the stator 22B moves in the radial direction X with respect to the first support portion 11B, and the center positions of the stator 22A and the mover 23A of the drive unit 200B are aligned. After the center position adjustment, the stator 22B and the support 29B are fixed to the first support 11B by irradiating the ultraviolet curable adhesive 19B with ultraviolet rays. With such a configuration, the drive unit 200 </ b> B is assembled to the second support 12.

The assembly of the drive unit 200C located in the third layer as the uppermost layer will be described.
The first support 11C of the drive unit 200C located in the third layer is placed on the upper surface 29Ba of the spacer 29B and fixed so that a gap is formed between the outer peripheral surface 11Ca and the inner peripheral surface 12c. Is done. The mounting surface 11Ca of the support 11C is coated with an ultraviolet curable adhesive 19C, and the stator 22C on the mounting surface 11Ba can be moved in the radial direction X until it is cured. The spacer 29C is disposed along the inner peripheral surface 12c on the mounting surface 11Ca of the first support 11C located between the outer peripheral surface 2Cb of the stator 22C and the inner peripheral surface 12c of the second support 12. To do.

The movable element 23C of the drive unit 200C is fixed to a fixed ring 15C as a fixing member, and the movable element 23C is moved on the rotating shaft 24 so as to be opposed to the fixed element 22C at a predetermined distance HC. It is fixed to the rotating shaft 24. At this stage, a voltage having the same polarity is applied to the fourth electrode 28C of the stator 22C and the third electrode 27C of the mover 23C, and the stator 22C radiates to the first support portion 11C by repulsive force due to static electricity. Moving in the direction X, the center positions of the stator 22C and the mover 23C are aligned. After the center position adjustment, the stator 22C and the support 29C are fixed to the first support 11C by irradiating the ultraviolet curable adhesive 19C with ultraviolet rays. With such a configuration, the drive unit 200 </ b> C is assembled to the second support 12.
After the assembly of all the drive units is completed, the other end 24c of the rotary shaft 24 is inserted into the bearing 14, and the second housing 10 is placed on the first housing 9 and the first screw 16 is used. The electrostatic motor 20B is assembled by being fastened and fixed to the housing 9. At this time, the second support 12 is sandwiched between the first housing 9 and the second housing 10 from the axial direction Z, and movement in the axial direction Z is prevented. In addition, when the second casing 10 is placed on the first casing 9 and fastened and fixed to the first casing 9 with the screws 16, the lowermost spacers 29 </ b> A are supported by the lowermost spacers 29 </ b> A. It is sandwiched from the axial direction Z by 11A and the first support 11B thereon. The intermediate layer spacer 29B is sandwiched from the axial direction Z by the first support 11B and the uppermost first support 11C3, and the uppermost spacer 29C is the first support 11C and the second casing. 10 to be sandwiched from the axial direction Z and fixed.

  With this configuration and assembly procedure, the center P of the stators 22A, 22B, and 22C and the rotation center P1 of the movers 23A, 23B, and 23C can be positioned on the rotation axis 24a of the rotation shaft 24. That is, by correcting the shift between the center P of each stator and the rotation center P1 of each mover with a simple structure, torque fluctuation can be suppressed and smooth rotation can be obtained, and rotation can be achieved by mounting a plurality of drive units. Torque can be increased.

As in the fourth embodiment, the holding units 60 are arranged one by one at positions (120 degrees phase) divided into three equal parts in the circumferential direction, and the position of the second support 12 in the radial direction X is determined. Fine adjustment is possible. For this reason, when the assembled electrostatic motor 20B is driven to rotate, repulsive force due to static electricity between the fourth electrodes 28A to 28C and the third electrodes 27A to 27C causes each stator 22A to 22C and each Even after the electrostatic motor 20B is assembled, the stators 22A to 22C can be independently supported so as to be movable in the radial direction X so that the centers of the movers 23A to 23C coincide.
For this reason, at the time of inspection of the assembled electrostatic motor 20B, the centers (electrode centers) of the stators 22A to 22C and the movers 23A to 23C can be corrected by finely adjusting the positional deviation, and more torque fluctuations can be made. And smooth rotation can be obtained.

  The electrodes of the stators 2, 2A to 2C, 22, 22A to 22C are formed on a polyimide film. At this time, each of the first electrodes 5, 5 </ b> A to 5 </ b> C, 25, 25 </ b> A to 25 </ b> C has a width of 0.4 °, a width between adjacent electrodes in the circumferential direction of 0.4 °, and an inner radius of the electrode Was a radial electrode having a radius of 21 mm, an outer radius of 33 mm, and a total of 450 electrodes. The first electrodes 5, 5 </ b> A to 5 </ b> C, 25, and 25 </ b> A to 25 </ b> C of each stator are each configured as a three-phase electrode so that a three-phase voltage can be applied. The fourth electrodes 8, 8A to 8C, 28, and 28A to 28C of each stator have two rings, an inner ring having a width of 1 mm centered on a radial position of 19 mm and an outer ring having a width of 1 mm centered on a radial position of 35 mm. An annular electrode was used. Cu metal was used for the 1st electrode 5, 5A-5C, 25, 25A-25C and each 4th electrode 8, 8A-8C.

  The electrodes of the movers 3, 3A to 3C, 23, and 23A to 23C were formed on a glass substrate having a diameter of 80 mm. At this time, each of the second electrodes 6, 6 </ b> A to 6 </ b> C, 26, 26 </ b> A to 26 </ b> C has a width of 0.6 °, a space width between adjacent electrodes of 0.6 °, an inner radius of the electrode of 21 mm, A strip-like electrode extending in the radial direction having an outer radius of 33 mm and a total number of 300 electrodes was used. The third electrodes 7, 7A to 7C, 27, 27A to 27C of the movers 3, 3A to 3C, 23, and 23A to 23C are arranged in an annular shape with a width of 1 mm centered on a radial position of 18 mm, and centered on a radial position of 36 mm. As an outer ring having a width of 1 mm, two annular electrodes were formed. As each of the second electrodes 6, 6A to 6C, 26, 26A to 26C, and the third electrodes 27, 27A to 27C, Asoto Glass Cytop (hereinafter referred to as “Cytop”), which is an electret material, was used. . Further, Cu metal was used for the third electrodes 6 and 6A to 6C.

Next, a method for manufacturing each mover will be specifically described.
On the glass substrate, a metal film such as Al is formed to a thickness of about 0.1 to 1 μm by a method such as vapor deposition. An Al pattern having a narrower width than the second and third electrodes is formed by photolithography. Cytops are formed on this Al electrode by spin coating to about 5 to 20 μm. When the thickness of the CYTOP is 10 μm or more, it can be made 10 μm or more by performing spin coating a plurality of times and applying it repeatedly.
Further, a metal film such as Al and a photoresist TSMR-8800 (manufactured by Tokyo Ohka Kogyo Co., Ltd.) are formed on Cytop, and the photoresist is exposed and developed, and the metal film such as Al is etched. A mask pattern for ashing the top is formed. The mask pattern is made to coincide with the Al pattern formed first, and the width of the mask pattern is made wider than the width of the Al pattern formed first. Using the Al metal film and the photoresist pattern as a mask, ash is ashed with ozone plasma, and finally the Al metal film is etched using the mask to form second and third electrodes of Cytop.

  As a method of charging the electret material of the mover, any method can be used as long as it is a method of charging an insulator generally. For example, corona discharge method, electron beam collision method, ion beam collision method, radiation irradiation method, light irradiation method described in GMSessler, Electrets Third Edition, pp20, Chapter 2.2 “Charging and Polarizing Methods” (Laplacian Press, 1998) A contact charging method, a liquid contact charging method, or the like is applicable. In the present invention, it is particularly preferable to use a corona discharge method or an electron beam collision method.

FIG. 17 shows a schematic diagram of a corona charger. In the corona charging device, a corona needle 72 and an electrode 73 are arranged to face each other, and a high voltage is applied between the corona needle 72 and the electrode 73 by a DC high-voltage power supply device 71 (for example, HAR-20R5; manufactured by Matsusada Precision Co., Ltd.). Can be applied. A grid 74 is disposed between the corona needle 72 and the electrode 73, and a grid voltage can be applied to the grid 74 from a grid power supply 75. In order to stabilize the charge injected into the pattern film, the hot plate 76 can heat the pattern film during the charge injection process to a glass transition temperature or higher. Reference numeral 77 is an ammeter. A substrate on which a pattern film is formed is placed on the electrode 73 of the corona device, heated by a hot plate 76, a grid voltage is applied from the grid power supply 75 to the grid 74, and a corona is applied by the DC high voltage power supply device 71. A high voltage is applied between the needle 72 and the electrode 73. As a result, the negative ions discharged from the corona needle 72 are made uniform by the grid 74 and then poured onto the pattern film on the surface of the glass substrate 61 placed on the electrode 73 to inject charges.
A high voltage of about −5 to −20 kV is applied to the corona needle 72 to charge the corona. The electret material on the mover charged by the above method maintains a permanent charge with a surface charge density of −1 to −2 mC / m 2.

A voltage control method for rotating the electrostatic motors 1, 1A, 1B, 20, 20A, and 20B according to the present invention will be described.
FIG. 18A schematically shows the voltage application state to the first and second electrodes and the first and second electrodes of each stator and each mover, and FIG. The switching pattern of the voltage applied to a stator is shown. The second electrode of each mover has a single phase, and the first electrode of each stator feeds a three-phase voltage, as shown in FIG. ), The polarity switching of the electrodes is performed on the +, 0, and − electrodes with respect to the V, W, and U electrodes. The predetermined angle is not limited to 0.1 °.
When the second electrode of each mover is made of a conductive member, for example, a negative pole is supplied as an arbitrary pole, and each second electrode is made of an electret material. In the case of-charged state. Here, for the sake of explanation, an arbitrary pole is referred to as a minus pole (minus pole) for convenience, but may be a plus pole (plus pole).

In the configuration of each of the electrostatic motors described above, the ratio of the number of individual electrodes of each stator and each mover is made different so that the stator side is larger than the mover side. Here, the first electrode of each stator has 450 poles, and the second electrode of each mover has 300 poles. FIG. 18A shows a state where the rotation angle is 0 ° and the rotation position is 0.6 °.
The rotation angle is 0 ° when the U electrode of the three-phase electrode of each stator and the second electrode of each mover coincide. When the rotation angle is 0 °, when a voltage is applied so that the U electrode = 0 V, the V electrode = −400 V, and the W electrode = + 400 V, the repulsive force is applied to the V electrode and the second electrode of each mover, An attractive force is generated between the second electrodes of the mover, and each mover rotates. When a voltage is applied so that the U electrode = −400 V, the V electrode = 0 V, and the W electrode = + 400 V when the rotation angle becomes 0.3 °, an attractive force is generated between the W electrode and the second electrode of each mover. A repulsive force is generated between the U electrode and another second electrode of each mover, and each mover further rotates. When a voltage is applied so that the U electrode = −400 V, the V electrode = + 400 V, and the W electrode = 0 V when the rotation angle becomes 0.6 °, a repulsive force is generated between the V electrode and the second electrode of each mover. , An attractive force is generated between the W electrode and the second electrode of each mover, and each mover further rotates. At this time, the W electrode and the second electrode of each mover coincide with each other, and the state where the rotation angle is 0 ° is shifted from the U electrode to the W electrode. Therefore, each movable element can be continuously rotated by repeating a series of three-phase voltage controls.

When the first electrode and the second electrode are defined and the voltage is switched as described above, an attractive force is generated between the positive pole of each stator and the negative pole of each movable element. At the same time, repulsive force is generated between the −pole of each stator and the −pole of each mover. An attractive force is generated between 0 of the stator and the negative pole of each mover, but is smaller than an attractive force generated between the positive pole of each stator and the negative pole of each movable element. In the example of FIG. 18A, each mover moves to the right using these attractive force and repulsive force (electrostatic Coulomb force). In this way, by switching the voltage applied to each first electrode of each stator to +, 0, and − for each angle so as to perform polarity switching control, each mover continuously moves in the right direction. That is, in the polarity switching control shown in FIG. 18, since both repulsive force and attractive force are used as driving force, a sufficient driving force can be obtained.
By performing this polarity switching control with each of the electrostatic motors described above, the rotary shafts 4 and 24 can be continuously driven to rotate. By adopting such a driving method of the electrostatic motor, the movable element can be driven even with a single phase, so that it is possible to achieve a practically sufficient driving torque and rigidity, while being small, light and thin. An electrostatic motor can be realized.

Next, combinations of materials of the first electrode, the second electrode, the third electrode, and the fourth electrode will be described.
In the first, third, and fifth embodiments, the first electrode is composed of a conductive member, the second electrode is composed of an electret member, and the third and fourth electrodes are composed of a conductive member. In the second, fourth, and sixth embodiments, the first electrode is constituted by a conductive member, and the second, third, and fourth electrodes are each constituted by an electret member. However, the combination of the electrode materials is not limited to such a combination, and one of the third and fourth electrodes is a conductive member and the other is an electret member. May be. Even in this case, the third or fourth electrode made of the conductive member is applied with a voltage having the same polarity as the charging polarity of the third or fourth electrode made of the electret member, so that the third or fourth electrode is made of the third or fourth electrode. The center position of each stator and each mover can be adjusted by applying a repulsive force between the first electrode and the fourth electrode.

Next, the shapes of the third electrode and the fourth electrode will be described.
In each of the embodiments described above, the annular shape of the third and fourth electrodes has been described as a donut shape that is continuous in the circumferential direction R and has no gap in the middle. However, the annular shape of the third and fourth electrodes Thus, the configuration is not limited. This example will be described below.
As shown in FIGS. 19A and 19B, at least part of the circumferential direction R has partial disconnection portions 301 and 302, and the third and fourth electrodes having a discontinuous shape are also annular. The third and fourth electrodes are included.
As shown in FIGS. 20 (a) and 20 (b), the substantially fan-shaped third and fourth electrodes having breakage portions 303 and 304 in which a part of the circumferential direction R is broken by a certain interval are also annular first. Included in the third and fourth electrodes.
As shown in FIGS. 21A and 21B, arc-shaped electrode members 311, 312, 313, and 314 having the same radius in the circumferential direction R and arc-shaped electrode members 321, 322, 323, and 324 are The third and fourth electrodes that are arranged in the same circular shape are also included in an annular shape. In this case, even if the electrode members 311, 312, 313, 314 and the electrode members 321, 322, 323, 324 are continuously arranged in the circumferential direction R, they are spaced apart from adjacent electrode members, respectively. It may be arranged.

  Each of the third electrodes and each of the fourth electrodes described in each embodiment has been described as having the same number of electrodes facing each other, but are charged to the same voltage or the same polarity. When a repulsive force is generated between the two electrodes, the stator side may be moved in the radial direction X (orthogonal direction Y) with respect to the movable body fixed to the rotating shaft. Therefore, if this moving force is generated, the third electrode and the fourth electrode are arranged so that one of them is a single electrode and the other electrode is a plurality of different electrodes. It may be arranged.

The present invention includes the following embodiments.
(Aspect 1)
A stator having a first electrode made of a conductive member, insulated from each other, extending in a direction of radiating with respect to the center thereof, and arranged at intervals in the circumferential direction;
A mover having a second electrode made of an electret material, insulated from each other, extending in a direction of radiating with respect to the center of rotation, and arranged at intervals in the circumferential direction;
The stator and the mover are arranged opposite to each other, a predetermined voltage pattern is applied to the first electrode, and the mover is rotated by a Coulomb force due to static electricity between the stator and the mover. A method for adjusting the position of an electrostatic motor,
A third electrode made of a conductive member arranged in an annular shape at the same center as the rotation center of the second electrode, and capable of applying a voltage of an arbitrary pole;
It is made of a conductive member that is arranged in an annular shape at the same center as the center of the first electrode, and is arranged so that at least a part thereof faces the third electrode, and can apply a voltage of an arbitrary pole. To the fourth electrode,
An electrostatic motor position adjusting method, wherein a voltage having the same polarity is applied to the third electrode and the fourth electrode in a state where the third electrode and the fourth electrode are opposed to each other.
(Aspect 2)
A stator having a first electrode made of a conductive member, insulated from each other, extending in a direction of radiating with respect to the center thereof, and arranged at intervals in the circumferential direction;
A mover having a second electrode made of an electret material, insulated from each other, extending in a direction of radiating with respect to the center of rotation, and arranged at intervals in the circumferential direction;
The stator and the mover are arranged opposite to each other, a predetermined voltage pattern is applied to the first electrode, and the mover is rotated by a Coulomb force due to static electricity between the stator and the mover. A method for adjusting the position of an electrostatic motor,
A third electrode made of an electret material arranged in an annular shape at the same center as the rotation center of the second electrode and charged to an arbitrary pole;
A fourth electrode made of an electret material, which is circularly arranged at the same center as the center of the first electrode and is charged to an arbitrary pole, is formed by charging the same electrode to each other, and the third electrode A method for adjusting the position of an electrostatic motor, wherein the fourth electrode is arranged to face each other.
(Aspect 3)
In the electrostatic motor position adjustment method according to aspect 1 or 2,
In the same plane perpendicular to the center of rotation of the mover, the third and second electrodes are adjusted using adjustment sections that adjust the positions of the first electrode and the fourth electrode in the orthogonal direction. A position adjustment method for an electrostatic motor, wherein the positions of the first electrode and the fourth electrode are adjusted after position correction (position adjustment) with four electrodes.
(Aspect 4)
In the electrostatic motor position adjustment method according to aspect 1 or 2,
In the same plane perpendicular to the center of rotation of the mover, the third and second electrodes are adjusted using adjustment sections that adjust the positions of the first electrode and the fourth electrode in the orthogonal direction. A position adjustment method for an electrostatic motor, wherein the positions of the first electrode and the fourth electrode are adjusted after position correction (position adjustment) using four electrodes.

1, 1A, 1B Electrostatic motor (electrostatic motor)
20, 20A, 20B Electrostatic motor (electrostatic motor)
2, 2A-2C, 22, 22A-22C Stator 3, 3A-3C, 23, 23A-23C Mover 4, 24 Drive shaft (rotary shaft)
4a, 24a Drive shaft rotation axis 5, 5A to 5C, 25, 25A to 25C First electrode 6, 6A to 6C, 26, 26A to 26C Second electrode 5a, 25a Inside of first electrode 5b, 25b Outside of first electrode 6a, 26a Inside of second electrode 6b, 26b Outside of second electrode 7, 7A-7C, 27, 27A-27C Third electrode 8, 8A-8C, 28, 28A-28C 4th electrode 9 1st housing | casing 10 2nd housing | casing 40 Adjustment part 60 Holding | maintenance part P Center of a stator P1 Rotation center of a movable body X Radiation direction Y Orthogonal direction Z Axis direction

Japanese Patent No. 2850413

Claims (5)

A stator having a first electrode made of a conductive member, insulated from each other, extending in a direction of radiating with respect to the center thereof, and arranged at intervals in the circumferential direction;
A mover having a second electrode made of an electret material, insulated from each other, extending in a direction of radiating with respect to the center of rotation, and arranged at intervals in the circumferential direction;
The stator and the mover are arranged opposite to each other, a predetermined voltage pattern is applied to the first electrode, and the mover is rotated by a Coulomb force due to static electricity between the stator and the mover. An electrostatic motor,
A third electrode made of a conductive member that is annularly arranged at the same center as the center of rotation of the second electrode and to which an arbitrary pole voltage is applied;
A voltage that is annularly arranged at the same center as the center of the first electrode and that at least a part of the third electrode faces the third electrode, and has the same polarity as the voltage to the third electrode And a fourth electrode made of a conductive member to which is applied. A stator having a first electrode made of a conductive member, insulated from each other, extending in a direction of radiating with respect to the center thereof, and arranged at intervals in the circumferential direction;
A mover having a second electrode made of an electret material, insulated from each other, extending in a direction of radiating with respect to the center of rotation, and arranged at intervals in the circumferential direction;
The stator and the mover are arranged opposite to each other, a predetermined voltage pattern is applied to the first electrode, and the mover is rotated by a Coulomb force due to static electricity between the stator and the mover. An electrostatic motor,
A third electrode made of an electret material arranged in an annular shape at the same center as the rotation center of the second electrode and charged to an arbitrary pole;
An electret material that is annularly arranged at the same center as the center of the first electrode and is disposed so that at least a part thereof faces the third electrode and is charged to the same polarity as the third electrode An electrostatic motor having a fourth electrode made of In the electrostatic motor according to claim 1 or 2,
The third electrode is disposed on at least one of the inner side and the outer side in the radial direction of the second electrode,
The fourth electrode is disposed on at least one of the inner side and the outer side in the radial direction of the first electrode, and is arranged so that at least a part thereof faces the third electrode. Electric motor. In the electrostatic motor according to claim 1, 2, or 3,
An electrostatic motor having an adjustment unit that adjusts the positions of the first electrode and the fourth electrode in a direction orthogonal to a direction orthogonal to the rotation center of the mover. In the electrostatic motor according to claim 1, 2, or 3,
An electrostatic electric motor having a holding portion that holds the positions of the first electrode and the fourth electrode in a direction orthogonal to the direction orthogonal to the rotation center of the mover so as to be movable.

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