JP2001324276A5 - - Google Patents

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Publication number
JP2001324276A5
JP2001324276A5 JP2000141824A JP2000141824A JP2001324276A5 JP 2001324276 A5 JP2001324276 A5 JP 2001324276A5 JP 2000141824 A JP2000141824 A JP 2000141824A JP 2000141824 A JP2000141824 A JP 2000141824A JP 2001324276 A5 JP2001324276 A5 JP 2001324276A5
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JP
Japan
Prior art keywords
semiconductor
manufacturing apparatus
induction heating
heating furnace
refining
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Pending
Application number
JP2000141824A
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English (en)
Japanese (ja)
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JP2001324276A (ja
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Publication date
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Priority to JP2000141824A priority Critical patent/JP2001324276A/ja
Priority claimed from JP2000141824A external-priority patent/JP2001324276A/ja
Publication of JP2001324276A publication Critical patent/JP2001324276A/ja
Publication of JP2001324276A5 publication Critical patent/JP2001324276A5/ja
Pending legal-status Critical Current

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JP2000141824A 2000-05-15 2000-05-15 誘導加熱炉および熱処理装置 Pending JP2001324276A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000141824A JP2001324276A (ja) 2000-05-15 2000-05-15 誘導加熱炉および熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000141824A JP2001324276A (ja) 2000-05-15 2000-05-15 誘導加熱炉および熱処理装置

Publications (2)

Publication Number Publication Date
JP2001324276A JP2001324276A (ja) 2001-11-22
JP2001324276A5 true JP2001324276A5 (https=) 2007-06-14

Family

ID=18648890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000141824A Pending JP2001324276A (ja) 2000-05-15 2000-05-15 誘導加熱炉および熱処理装置

Country Status (1)

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JP (1) JP2001324276A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9316078B2 (en) * 2012-10-23 2016-04-19 Transocean Innovation Labs Ltd Inductive shearing of drilling pipe
JP2014154388A (ja) * 2013-02-08 2014-08-25 Sanki Dengyo Kk 高周波誘導コイル一体型坩堝および該坩堝を用いた金属シリコンからボロンおよびリンを除去する方法

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