JP2001324276A - 誘導加熱炉および熱処理装置 - Google Patents
誘導加熱炉および熱処理装置Info
- Publication number
- JP2001324276A JP2001324276A JP2000141824A JP2000141824A JP2001324276A JP 2001324276 A JP2001324276 A JP 2001324276A JP 2000141824 A JP2000141824 A JP 2000141824A JP 2000141824 A JP2000141824 A JP 2000141824A JP 2001324276 A JP2001324276 A JP 2001324276A
- Authority
- JP
- Japan
- Prior art keywords
- refining
- boat
- heating furnace
- induction heating
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006698 induction Effects 0.000 title claims abstract description 56
- 238000010438 heat treatment Methods 0.000 title claims abstract description 46
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000004020 conductor Substances 0.000 claims abstract description 7
- 238000001816 cooling Methods 0.000 claims abstract description 6
- 239000011810 insulating material Substances 0.000 claims abstract description 5
- 238000007670 refining Methods 0.000 claims description 52
- 239000004065 semiconductor Substances 0.000 claims description 30
- 239000013078 crystal Substances 0.000 claims description 27
- 238000004519 manufacturing process Methods 0.000 claims description 22
- 239000002994 raw material Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 44
- 229910052710 silicon Inorganic materials 0.000 description 44
- 239000010703 silicon Substances 0.000 description 44
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- 238000003723 Smelting Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000003575 carbonaceous material Substances 0.000 description 2
- 239000002440 industrial waste Substances 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 102100029777 Eukaryotic translation initiation factor 3 subunit M Human genes 0.000 description 1
- 101001012700 Homo sapiens Eukaryotic translation initiation factor 3 subunit M Proteins 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Landscapes
- Furnace Details (AREA)
- General Induction Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000141824A JP2001324276A (ja) | 2000-05-15 | 2000-05-15 | 誘導加熱炉および熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000141824A JP2001324276A (ja) | 2000-05-15 | 2000-05-15 | 誘導加熱炉および熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001324276A true JP2001324276A (ja) | 2001-11-22 |
| JP2001324276A5 JP2001324276A5 (https=) | 2007-06-14 |
Family
ID=18648890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000141824A Pending JP2001324276A (ja) | 2000-05-15 | 2000-05-15 | 誘導加熱炉および熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001324276A (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014154388A (ja) * | 2013-02-08 | 2014-08-25 | Sanki Dengyo Kk | 高周波誘導コイル一体型坩堝および該坩堝を用いた金属シリコンからボロンおよびリンを除去する方法 |
| JP2016503130A (ja) * | 2012-10-23 | 2016-02-01 | トランスオーシャン イノベーション ラブス リミテッド | 掘削パイプの誘導的剪断 |
-
2000
- 2000-05-15 JP JP2000141824A patent/JP2001324276A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016503130A (ja) * | 2012-10-23 | 2016-02-01 | トランスオーシャン イノベーション ラブス リミテッド | 掘削パイプの誘導的剪断 |
| JP2014154388A (ja) * | 2013-02-08 | 2014-08-25 | Sanki Dengyo Kk | 高周波誘導コイル一体型坩堝および該坩堝を用いた金属シリコンからボロンおよびリンを除去する方法 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070416 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070416 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090227 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090602 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20091020 |