JP2001254147A - Fe-Ni SERIES ALLOY SHEET FOR SHADOW MASK WITH SUPPRESSED STRIPE-LIKE UNEVENNESS AND ITS PRODUCING METHOD - Google Patents

Fe-Ni SERIES ALLOY SHEET FOR SHADOW MASK WITH SUPPRESSED STRIPE-LIKE UNEVENNESS AND ITS PRODUCING METHOD

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Publication number
JP2001254147A
JP2001254147A JP2000066283A JP2000066283A JP2001254147A JP 2001254147 A JP2001254147 A JP 2001254147A JP 2000066283 A JP2000066283 A JP 2000066283A JP 2000066283 A JP2000066283 A JP 2000066283A JP 2001254147 A JP2001254147 A JP 2001254147A
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JP
Japan
Prior art keywords
mass
less
shadow mask
unevenness
alloy sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000066283A
Other languages
Japanese (ja)
Inventor
Takahiro Fujii
孝浩 藤井
Hiroshi Morikawa
広 森川
Takashi Yamauchi
隆 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Nisshin Co Ltd
Original Assignee
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshin Steel Co Ltd filed Critical Nisshin Steel Co Ltd
Priority to JP2000066283A priority Critical patent/JP2001254147A/en
Publication of JP2001254147A publication Critical patent/JP2001254147A/en
Withdrawn legal-status Critical Current

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  • Electrodes For Cathode-Ray Tubes (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an Fe-Ni series alloy sheet improved in the grade of the stripe-like unevenness. SOLUTION: This Fe-Ni series alloy sheet for a shadow mask has a composition containing 30 to 50% Ni, <=0.015% C, <=0.20% Si, <=0.5% Mn, <=0.02% Al and <=0.0040% B and the balance substantially Fe and has the accumulating degree of the (200) plane in the cross-section vertical to the rolling direction of >=40%. The alloy sheet is produced by subjecting an Fe-Ni series alloy sheet to cold rolling in such a manner that the rolling ratio directly before finish annealing is controlled to >=75%. By enlarging the ruggedness in the etching face caused by crystal orientation, optical light and dark patterns (the stripe-like unevenness) caused by microruggedness due to segregation are canceled.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、カラーテレビ用ブラウ
ン管,OA機器用ディスプレイ等の受像管に組み込まれ
るシャドウマスクに適したFe−Ni系合金板及びその
製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Fe--Ni alloy plate suitable for a shadow mask incorporated in a picture tube such as a cathode ray tube for a color television, a display for OA equipment, and a method for producing the same.

【0002】[0002]

【従来の技術】カラーテレビ用ブラウン管,OA機器用
ディスプレイ等の受像管には、多数の電子ビーム通過孔
が形成されたシャドウマスクが組み込まれている。電子
銃から放射された電子ビームは、特定の電子ビーム通過
孔を通過し、各色調に応じてそれぞれの蛍光部にビーム
スポットを投影する。シャドウマスク用素材としては、
正確な電子ビーム通過孔が形成されるようにエッチング
性に優れていることが要求され、従来から低炭素Alキ
ルド鋼が使用されている。しかし、シャドウマスクは、
電子ビームの衝突によって過熱され熱膨張する。このと
きの熱膨張が大きいと、電子ビーム通過孔が変位し、ビ
ームスポットが所定の蛍光面に当たらなくなる、いわゆ
るドーミング現象が発生する。ドーミング現象は、カラ
ーテレビ,ディスプレイパネル等の高精度化,高輝度化
に伴って大きな問題になっている。
2. Description of the Related Art A picture tube such as a cathode ray tube for a color television and a display for OA equipment incorporates a shadow mask in which a large number of electron beam passage holes are formed. The electron beam emitted from the electron gun passes through a specific electron beam passage hole, and projects a beam spot on each fluorescent part according to each color tone. As a material for shadow masks,
It is required to have excellent etching properties so that an accurate electron beam passage hole is formed, and a low-carbon Al-killed steel has been conventionally used. However, shadow masks
It is overheated and thermally expanded by the collision of the electron beam. If the thermal expansion at this time is large, the electron beam passage hole is displaced, and a so-called doming phenomenon occurs in which the beam spot does not hit a predetermined phosphor screen. The doming phenomenon has become a serious problem as color televisions, display panels, and the like have been improved in accuracy and luminance.

【0003】低熱膨張特性をもつシャドウマスク用素材
の使用によってドーミング現象が抑制されることから、
鮮明な画像が要求される受像管には熱膨張率の小さなF
e−Ni系合金板がシャドウマスク用素材として使用さ
れ始めている。しかし,Fe−Ni系合金板は,Niを
多量に含んでいるため低炭素Alキルド鋼よりも素材コ
ストが高い。また、低炭素Alキルド鋼に比較して、機
械的強度が高いためプレス成形性に劣り、ヤング率が低
いため剛性に劣る。エッチング性に関しては、エッチン
グ速度が低炭素鋼よりも遅く、エッチング穿孔性に劣る
ことも欠点である。なかでも、エッチング後のシャドウ
マスクに現れるすじむらは、ブラウン管の品位を低下さ
せるため大きな問題になっている。
[0003] Since the doming phenomenon is suppressed by using a shadow mask material having a low thermal expansion characteristic,
For a picture tube requiring a clear image, F
An e-Ni alloy plate has begun to be used as a shadow mask material. However, since the Fe-Ni-based alloy plate contains a large amount of Ni, the material cost is higher than that of the low-carbon Al-killed steel. Further, as compared with a low carbon Al-killed steel, the mechanical strength is high and the press formability is poor, and the Young's modulus is low and the rigidity is poor. Concerning the etching properties, it is a disadvantage that the etching rate is lower than that of the low carbon steel and the etching piercing property is inferior. Above all, stripes appearing in a shadow mask after etching are a serious problem because the quality of a cathode ray tube is deteriorated.

【0004】すじむらを解消するため従来から種々の方
策が提案されている。たとえば、Niや他の元素の成分
偏析がすじむら発生の原因であるとの前提で、成分偏析
を解消するための鋳造方法,熱間加工方法,熱処理方法
等が知られている(特開昭60−56053号公報,特
開昭60−128253号公報,特開平2−54743
号公報,特開平1−252725号公報等)。
[0004] Various measures have conventionally been proposed in order to eliminate streaks. For example, a casting method, a hot working method, a heat treatment method, and the like for eliminating component segregation are known on the premise that component segregation of Ni and other elements is a cause of stripe unevenness (Japanese Patent Application Laid-open No. Sho. JP-A-60-56053, JP-A-60-128253, JP-A-2-54743.
JP, JP-A 1-225225, etc.).

【0005】[0005]

【発明が解決しようとする課題】カラーテレビやOA機
器ディスプレイパネルの大型化,マルチメディア化が急
速に進められている最近の傾向に伴って、従来に比較し
て小さな孔径の電子ビーム通過孔を高密度で穿孔し、且
つ孔と孔との間のピッチを細かくしたシャドウマスクに
対する要求が強くなってきている。小孔径の電子ビーム
通過孔を細かなピッチで穿孔するシャドウマスクでは、
従来から提案されているすじむら改善方策がさほど有効
でなく、すじむらが十分に解消されていない。
With the recent tendency of color televisions and OA equipment display panels to be larger and more multimedia, the electron beam passage hole having a smaller hole diameter than the conventional one is required. There is an increasing demand for shadow masks that are perforated at a high density and that have a fine pitch between holes. In a shadow mask that drills electron beam passage holes with a small diameter at a fine pitch,
Conventionally proposed measures for improving stripe unevenness are not so effective, and the stripe unevenness has not been sufficiently eliminated.

【0006】[0006]

【課題を解決するための手段】本発明は、このような問
題を解消すべく案出されたものであり、圧延方向に垂直
な断面における(200)面集積度を増加させることに
より、偏析起因の凹凸よりも大きな凹凸をエッチング面
に形成し、エッチング面からの反射光をランダム化する
ことですじむらの発生を抑制したシャドウマスクを提供
することを目的とする。
SUMMARY OF THE INVENTION The present invention has been devised to solve such a problem, and increases the degree of (200) plane integration in a cross section perpendicular to the rolling direction. An object of the present invention is to provide a shadow mask in which unevenness is suppressed by forming irregularities larger than irregularities on the etched surface and randomizing reflected light from the etched surface.

【0007】本発明のシャドウマスク用Fe−Ni系合
金板は、その目的を達成するため、Ni:30〜50質
量%,C:0.015質量%以下,Si:0.20質量
%以下,Mn:0.5質量%以下,Al:0.02質量
%以下,B:0.0040質量%以下,残部が実質的に
Feの組成をもち、圧延方向に垂直な断面における(2
00)面集積度が40%以上であることを特徴とする。
このシャドウマスク用Fe−Ni系合金板は、前述した
組成をもつFe−Ni系合金板を仕上げ焼鈍直前の圧延
率を75%以上として冷間圧延することにより製造され
る。
In order to achieve the object, the Fe—Ni-based alloy plate for a shadow mask according to the present invention includes Ni: 30 to 50% by mass, C: 0.015% by mass or less, Si: 0.20% by mass or less, Mn: 0.5% by mass or less, Al: 0.02% by mass or less, B: 0.0040% by mass or less, the balance being substantially Fe, and (2) in a section perpendicular to the rolling direction.
00) The degree of surface integration is 40% or more.
This Fe—Ni-based alloy sheet for a shadow mask is manufactured by cold-rolling the Fe—Ni-based alloy sheet having the above-described composition at a rolling reduction of 75% or more immediately before finish annealing.

【0008】[0008]

【作用】本発明者等は、Fe−Ni系合金板素材に発生
したすじむらの発生形態と成分偏析との関係を詳細に調
査検討した。すじむらが発生したシャドウマスクを詳細
に観察した結果、すじむらのないシャドウマスクと比較
すると、穿孔部3のエッチング面に凹凸が多いことが判
った。そこで、圧延方向Dに垂直な断面1についてNi
の分布状態をX線マイクロアナライザで分析したとこ
ろ、Ni欠乏層2が層状に分布していた(図1)。Ni
欠乏層2は、鋳造時に発生したデンドライト樹間に生じ
るミクロ負偏析が分塊熱延以降の工程における圧延加工
及び熱処理を経ても解消されず残存したものである。凝
固過程における残溶鋼の流動等によってマクロ的な成分
偏析が生じることもあるが、このような大きな濃度変動
も最終製品段階でほとんど解消されていない。これら鋳
造時の負偏析は、圧延加工によって板厚方向に圧縮さ
れ、圧延方向に沿って長く伸ばされた形態で残存する。
The present inventors have studied in detail the relationship between the form of streaks generated in the Fe-Ni alloy sheet material and the component segregation. As a result of closely observing the shadow mask in which the stripes were generated, it was found that the etched surface of the perforated portion 3 had more irregularities than a shadow mask having no stripes. Therefore, for the cross section 1 perpendicular to the rolling direction D, Ni
Was analyzed by an X-ray microanalyzer. As a result, the Ni deficiency layer 2 was distributed in a layered manner (FIG. 1). Ni
The deficiency layer 2 is one in which the micro-negative segregation generated between the dendrite trees generated at the time of casting remains without being eliminated even after the rolling process and the heat treatment in the processes after the hot-rolling. Although macro component segregation may occur due to the flow of residual molten steel in the solidification process, such large fluctuations in concentration are hardly eliminated in the final product stage. The negative segregation at the time of casting is compressed in the thickness direction by the rolling process, and remains in a form elongated in the rolling direction.

【0009】板厚方向に沿ったNiの濃度変動は、エッ
チング速度に差を生じさせる原因となり、形成されたエ
ッチング穿孔部3に微小な凹凸を発生させる。凹凸形態
は、Ni欠乏層2の分布形態に従い、圧延方向Dに連な
るエッチング穿孔部3に連続性をもって現れると共に、
圧延方向Dに垂直な幅方向に関して不連続的に変化す
る。その結果、シャドウマスクを透過又は反射する光の
行路が偏り、圧延方向Dに平行な明暗差としてすじむら
が観察される。
A change in the Ni concentration along the thickness direction causes a difference in the etching rate, and causes minute irregularities in the formed etching perforated portion 3. According to the distribution form of the Ni-deficient layer 2, the irregularities appear in the etching perforations 3 connected in the rolling direction D with continuity.
It changes discontinuously in the width direction perpendicular to the rolling direction D. As a result, the path of light transmitted or reflected by the shadow mask is deviated, and streaking is observed as a light-dark difference parallel to the rolling direction D.

【0010】次いで、素材の集合組織がエッチング面の
形態に及ぼす影響を調査したところ、エッチング穿孔部
3のサイドエッチ面における凹凸の程度が素材の集合組
織によっても異なることを見出した。フォトエッチング
でシャドウマスクを穿孔するとき、深さ方向、換言する
と板厚方向へのエッチング進行と同時に、板厚方向に直
交する方向に沿ったサイドエッチが進行する。本発明者
等による調査・研究によるとき、サイドエッチ面の形態
が結晶粒単位で異なり、特にサイドエッチ面に対する各
結晶粒の面方位による影響が大きく現れることが判っ
た。
Next, when the influence of the texture of the material on the morphology of the etched surface was investigated, it was found that the degree of unevenness on the side-etched surface of the etched hole 3 was different depending on the texture of the material. When a shadow mask is pierced by photoetching, etching proceeds in the depth direction, in other words, in the plate thickness direction, and at the same time, side etching proceeds in a direction orthogonal to the plate thickness direction. According to investigations and studies by the present inventors, it has been found that the morphology of the side-etched surface differs for each crystal grain, and that the influence of the plane orientation of each crystal grain on the side-etched surface is particularly large.

【0011】電子ビーム通過孔の大きさや形状に及ぼす
集合組織の影響は従来からも知られているところであ
り、たとえば特開昭59−40443号公報は板表面の
(200)面集積度を35%以上とすることにより均一
形状の電子ビーム通過孔が得られることを報告してい
る。また、特開平5−9658号公報では、板厚中央に
板表面に平行な面における(200)面集積度を30%
以上とし、且つ板表面よりも大きくすることにより、サ
イドエッチを抑制している。しかし、何れの方法も板表
面又は板表面に平行な面に対する集合組織を規制してい
るのに留まり、穿孔部のエッチング面に生じる凹凸に及
ぼす影響については明らかにされていない。
The effect of the texture on the size and shape of the electron beam passage hole has been known in the art. For example, Japanese Patent Application Laid-Open No. S59-40443 discloses that the degree of (200) plane integration of a plate surface is 35%. It is reported that a uniform shape electron beam passage hole can be obtained by the above. In Japanese Patent Laid-Open Publication No. Hei 5-9658, the degree of integration of the (200) plane in the plane parallel to the plate surface at the center of the plate thickness is 30%.
By making the above, and making it larger than the plate surface, the side etching is suppressed. However, none of these methods regulates the texture of the plate surface or a plane parallel to the plate surface, and does not clarify the effect of the method on irregularities generated on the etched surface of the perforated portion.

【0012】穿孔部のエッチング面の形態は、サイドエ
ッチングの進行方向、すなわち板厚方向に垂直な方向へ
のエッチング挙動に影響される。したがって、前述した
板厚方向のNiの濃度変動と共に、板表面に垂直な面の
結晶面方位の影響がエッチング面に大きく現れる。そこ
で、本発明者等は、更に検討を進めたところ、圧延方向
に垂直な断面における(200)面方位の集積度が大き
な材料ほど、エッチング面に生じる凹凸が大きくなるこ
とを見出した。そして、(200)面集積度を40%以
上にすると、偏析に起因する微小な凹凸を上回る程度の
凹凸が形成される。その結果、透過光の行路がランダム
化され、偏析起因の細かいピッチの凹凸で引き起こされ
る光学的な偏りが打ち消され、すじむらが観察されなく
なるものと推察される。
The form of the etched surface of the perforated portion is affected by the etching behavior in the direction of side etching, that is, in the direction perpendicular to the thickness direction. Therefore, the influence of the crystal plane orientation of the plane perpendicular to the plate surface appears largely on the etched surface together with the above-described fluctuation of the Ni concentration in the plate thickness direction. Therefore, the present inventors have further studied and found that as the material has a higher degree of integration of the (200) plane orientation in a cross section perpendicular to the rolling direction, the unevenness generated on the etched surface increases. When the degree of integration of the (200) plane is set to 40% or more, irregularities more than minute irregularities caused by segregation are formed. As a result, it is presumed that the path of the transmitted light is randomized, the optical deviation caused by the fine pitch unevenness due to segregation is canceled out, and no stripes are observed.

【0013】圧延方向に垂直な断面における(200)
面集積度は、次のようにして測定される。素材を剪断し
てサイズ20mm四方程度の試験片を多数用意し、各試
験片の圧延方向を揃えて重ね合わせ、樹脂等で固定した
後、圧延方向に垂直な断面を研削・研磨する。次いで、
X線ディフラクトメータを用いて研磨面における回折ピ
ークを測定し、(111),(200),(220),
(311)面それぞれの相対積分強度比を求め、相対積
分強度比の総和を100として(200)面の相対積分
強度比の百分率を(200)面集積度とした。なお、相
対積分強度比は、各面の積分強度をその面の理論積分強
度で割った値である。或いは、同一合金系で結晶面方位
が完全にランダムになっている多結晶体を標準サンプル
とし、これら各面についての積分強度の実測値を理論積
分強度に換えて使用することもできる。
(200) in a section perpendicular to the rolling direction
The surface integration degree is measured as follows. A large number of test pieces having a size of about 20 mm square are prepared by shearing the material, the test pieces are rolled up in the same rolling direction, fixed with a resin or the like, and then a cross section perpendicular to the rolling direction is ground and polished. Then
The diffraction peak on the polished surface was measured using an X-ray diffractometer, and (111), (200), (220),
The relative integrated intensity ratio of each of the (311) planes was determined, and the total of the relative integrated intensity ratios was defined as 100, and the percentage of the relative integrated intensity ratio of the (200) plane was defined as the (200) plane integration degree. Note that the relative integrated intensity ratio is a value obtained by dividing the integrated intensity of each surface by the theoretical integrated intensity of that surface. Alternatively, a polycrystal in which the crystal plane orientation is completely random in the same alloy system may be used as a standard sample, and the measured value of the integrated intensity for each of these surfaces may be used instead of the theoretical integrated intensity.

【0014】以下、本発明で使用するFe−Ni系合金
の成分及び含有量を説明する。Ni:30〜50質量% Fe−Ni系合金板の熱膨張係数を低く維持するうえで
重要な合金成分であり、シャドウマスク用途で要求され
る低熱膨張特性を得るためNi含有量を30〜50質量
%の範囲に規制する。
Hereinafter, the components and contents of the Fe—Ni alloy used in the present invention will be described. Ni: 30 to 50% by mass Ni is an important alloy component for maintaining a low coefficient of thermal expansion of the Fe-Ni-based alloy sheet, and has a Ni content of 30 to 50 to obtain low thermal expansion characteristics required for shadow mask applications. Regulate in the range of mass%.

【0015】C:0.015質量%以下 Fe−Ni系合金板素材中に炭化物を形成し、エッチン
グ性を損なう有害成分である。C含有量を0.015質
量%以下に規制することにより、炭化物によるエッチン
グ性の低下を防止できる。Si:0.20質量%以下 製鋼時に脱酸剤として添加される合金成分であるが、熱
膨張係数を大きくし、エッチング性や黒化膜性を劣化さ
せる傾向を示す。このような悪影響は、Si含有量を
0.20質量%以下とすることにより抑制される。Mn:0.5質量%以下 製鋼時に脱酸剤として添加される合金成分であるが、熱
膨張係数を大きくすることからMn含有量の上限を0.
5質量%に設定した。
C: 0.015% by mass or less C is a harmful component that forms carbides in the Fe—Ni-based alloy sheet material and impairs the etching property. By restricting the C content to 0.015% by mass or less, it is possible to prevent the etching property from being lowered by the carbide. Si: 0.20% by mass or less An alloy component added as a deoxidizing agent during steelmaking, but tends to increase the coefficient of thermal expansion and deteriorate the etching properties and the blackening film properties. Such adverse effects are suppressed by setting the Si content to 0.20% by mass or less. Mn: 0.5% by mass or less An alloy component added as a deoxidizing agent during steelmaking, but the upper limit of the Mn content is set to 0.
It was set to 5% by mass.

【0016】Al:0.02質量%以下 製鋼時に脱酸剤として添加される合金成分であるが、表
面傷の発生を助長し、Fe−Ni系合金板の表面品質を
劣化させることから、上限を0.02質量%に設定し
た。B:0.0040質量%以下 エッチング性を向上させる上で有効な合金成分である
が、0.0040質量%を超えるBが含まれると軟化焼
鈍後に焼鈍ムラが発生しやすくなり、黒化膜の生成ムラ
も助長される。そのため、B含有量は、上限を0.00
40質量%に規定する。本発明が対象とするFe−Ni
系合金は、その他の不可避的成分としてS,P,O,N
等を含むが,不可避的成分の含有量をそれぞれ0.01
0質量%以下に規制するときシャドウマスク用素材とし
ての特性に悪影響を及ぼさない。
Al: 0.02 mass% or less Al is an alloy component added as a deoxidizing agent during steelmaking, but promotes generation of surface flaws and degrades the surface quality of the Fe—Ni-based alloy sheet. Was set to 0.02% by mass. B: 0.0040% by mass or less B is an effective alloy component for improving the etching property. However, if B exceeds 0.0040% by mass, annealing unevenness is likely to occur after softening annealing, and the blackening film Generation unevenness is also promoted. Therefore, the B content has an upper limit of 0.00
It is defined as 40% by mass. Fe-Ni targeted by the present invention
Alloys include S, P, O, N as other unavoidable components.
Etc., but the content of unavoidable components is 0.01
When the content is regulated to 0% by mass or less, the characteristics as a material for a shadow mask are not adversely affected.

【0017】圧延方向に垂直な断面における(200)
面集積度:40%以上 圧延方向に垂直な断面における(200)面集積度は、
板厚方向に直角な全方向に等方的に進むサイドエッチの
進行状況を的確に表す有効な指標である。(200)面
集積度が40%以上(好ましくは、60%以上)になる
と、偏析に起因する凹凸による影響が打ち消され、すじ
むらが観察されないエッチング面が得られる。他方、4
0%未満の(200)面集積度では、偏析起因の凹凸に
よるすじむらが観察され始める。(200)面集積度が
40%以上のFe−Ni系合金板は、具体的には、熱延
以降の冷延・焼鈍時に、仕上げ焼鈍直前の圧延率を75
%以上とし、800℃で仕上げ焼鈍することによって得
られる。また、圧延率を80%以上,仕上げ焼鈍温度を
800℃以上とすると,(200)面集積度が60%以
上になる。
(200) in a section perpendicular to the rolling direction
Surface integration: 40% or more (200) surface integration in a cross section perpendicular to the rolling direction is:
This is an effective index that accurately indicates the progress of side etching that proceeds isotropically in all directions perpendicular to the thickness direction. When the (200) plane integration degree is 40% or more (preferably 60% or more), the influence of unevenness due to segregation is negated, and an etched surface in which no stripes are observed is obtained. On the other hand, 4
When the degree of (200) plane integration is less than 0%, unevenness due to unevenness due to segregation starts to be observed. (200) The Fe—Ni-based alloy sheet having a surface integration degree of 40% or more specifically has a reduction rate of 75 immediately before finish annealing during cold rolling and annealing after hot rolling.
% Or more and obtained by finish annealing at 800 ° C. When the rolling ratio is 80% or more and the finish annealing temperature is 800 ° C. or more, the degree of (200) plane integration becomes 60% or more.

【0018】[0018]

【実施例】電気炉で溶解し,転炉で粗脱炭した後,真空
脱ガス装置でNi:36.07質量%,C:0.005
質量%,Si:0.04質量%,Mn:0.31質量
%,Al:0.010質量%,B:0.0011質量%
を含むFe−Ni系合金溶鋼を溶製し、造塊法でインゴ
ットを製造した。インゴットを1200℃以上の温度に
加熱した後、分塊圧延し、厚み180mmのスラブを製
造した。得られたスラブを表面手入れした後、板厚4m
mの熱延板に熱間圧延した。熱延板を焼鈍・酸洗し、冷
延及び焼鈍を繰り返し、最終的に板厚0.12mmの冷
延板を得た。この製造過程で中間圧延率を種々変更し、
表1に示すように圧延方向に垂直な断面における(20
0)面集積度が異なる材料を作製した。
EXAMPLE After melting in an electric furnace and rough decarburization in a converter, Ni: 36.07% by mass and C: 0.005 in a vacuum degassing apparatus.
% By mass, Si: 0.04% by mass, Mn: 0.31% by mass, Al: 0.010% by mass, B: 0.0011% by mass
Was melted, and an ingot was produced by an ingot-making method. After heating the ingot to a temperature of 1200 ° C. or higher, the ingot was slab-rolled to produce a slab having a thickness of 180 mm. After the surface of the obtained slab is cleaned, the plate thickness is 4m.
m hot-rolled sheet. The hot-rolled sheet was annealed and pickled, cold-rolled and annealed repeatedly to finally obtain a cold-rolled sheet having a thickness of 0.12 mm. Various changes in the intermediate rolling rate during this manufacturing process,
As shown in Table 1, in the section perpendicular to the rolling direction (20
0) Materials with different degrees of surface integration were produced.

【0019】各冷延板から切り出された試験片をフォト
エッチングし,すじむら発生状況を調査した。フォトエ
ッチングでは、高精細シャドウマスク用の所定パターン
でフォトレジストを試験片表面に塗布し、露光・現像し
た後,液比重47ボーメ,液温50℃の塩化第二鉄溶液
をスプレー圧力2kgf/cm2で試験片表面に吹き付
けた。エッチングされた試験片を目視観察し,すじむら
の発生状況を調査した。すじむらが全く観察されなかっ
たものを最高レベルA,すじむらがほとんどなく高精細
シャドウマスク用として使用可能なものをレベルB,比
較的多数のすじむらが観察されたものをレベルC,明瞭
なすじむらが多数表れたものを最低レベルDとしてすじ
むら品位を4段階評価した。
A test piece cut from each cold-rolled plate was subjected to photoetching, and the occurrence of streaking was examined. In the photoetching, a photoresist is applied to the surface of the test piece in a predetermined pattern for a high-definition shadow mask, exposed and developed, and then a ferric chloride solution having a liquid specific gravity of 47 Baume and a liquid temperature of 50 ° C. is sprayed at a pressure of 2 kgf / cm. In 2 the test piece was sprayed on the surface. The etched specimens were visually observed to investigate the occurrence of streaking. The highest level A is that no streaking is observed, the level B is that there is almost no streaking and can be used for a high-definition shadow mask, and the level C is that where a relatively large number of streaks are observed. Those having a large number of streaks were evaluated as the lowest level D, and the streak quality was evaluated on a four-point scale.

【0020】表1の調査結果に見られるように,圧延方
向に垂直な断面における(200)面集積度が40%以
上の冷延板から切り出された試験片1〜4(本発明例)
では、すじむら品位がレベルB以上となっており,高精
細シャドウマスク用として十分使用可能な品位であっ
た。これに対し、圧延方向に垂直な断面における(20
0)面集積度が40%未満の試験片5〜6(比較例)で
は、すじむら品位がレベルC以下となっており、高精細
シャドウマスク用としての要求特性を十分に満足するも
のではなかった。また、(200)面集積度とすじむら
品位との関係をグラフ化した図2にみられるように、
(200)面集積度の増加に応じてすじむら品位が上位
レベルになり、(200)面集積度40%以上ではレベ
ルA,Bのすじむら品位に達することが判る。
As can be seen from the examination results in Table 1, test pieces 1-4 (examples of the present invention) cut out from cold-rolled sheets having a (200) plane integration of 40% or more in a cross section perpendicular to the rolling direction.
In this example, the streak quality was level B or higher, and the quality was sufficiently usable for a high-definition shadow mask. On the other hand, (20) in a cross section perpendicular to the rolling direction
0) In the test pieces 5 to 6 (comparative example) in which the degree of surface integration is less than 40%, the streak quality is lower than or equal to the level C, which does not sufficiently satisfy the characteristics required for a high-definition shadow mask. Was. In addition, as shown in FIG. 2 in which the relationship between the (200) plane integration degree and the streak unevenness is graphed,
It can be seen that the level of the uneven stripes becomes higher as the degree of integration of the (200) plane increases, and reaches the level A and B when the degree of integration of the (200) plane is 40% or more.

【0021】 [0021]

【0022】[0022]

【発明の効果】以上に説明したように、本発明のFe−
Ni系合金板は、圧延方向に垂直な断面における(20
0)面集積度を40%以上とすることにより、偏析起因
の微小な凹凸で引き起こされる光学的な明暗模様(すじ
むら)を解消し、シャドウマスク用として好適な素材と
なる。
As described above, as described above, the Fe-
The Ni-based alloy sheet has a cross section perpendicular to the rolling direction (20
0) By setting the degree of surface integration to 40% or more, an optical bright and dark pattern (striation unevenness) caused by minute unevenness due to segregation is eliminated, and the material is suitable for a shadow mask.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 エッチング穿孔されたFe−Ni系合金板の
Ni偏析を模式的に示す図
FIG. 1 is a diagram schematically showing Ni segregation of an Fe—Ni alloy plate perforated by etching.

【図2】 圧延方向に垂直な断面における(200)面
集積度がすじむら品位に及ぼす影響を表したグラフ
FIG. 2 is a graph showing the effect of (200) plane integration on the stripe quality in a cross section perpendicular to the rolling direction.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山内 隆 山口県新南陽市野村南町4976番地 日新製 鋼株式会社ステンレス事業本部内 Fターム(参考) 4K037 EA01 EA02 EA04 EA05 EA15 EA21 EA27 FG10 FJ05 HA04 JA02 JA06 5C027 HH02 HH03 5C031 EE05 EH08  ────────────────────────────────────────────────── ─── Continued on the front page (72) Takashi Yamauchi 4976 Nomura Minamimachi, Shinnanyo-shi, Yamaguchi Prefecture F-term (reference) 4N037 EA01 EA02 EA04 EA05 EA15 EA21 EA27 FG10 FJ05 HA04 JA02 JA06 5C027 HH02 HH03 5C031 EE05 EH08

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 Ni:30〜50質量%,C:0.01
5質量%以下,Si:0.20質量%以下,Mn:0.
5質量%以下,Al:0.02質量%以下,B:0.0
040質量%以下,残部が実質的にFeの組成をもち、
圧延方向に垂直な断面における(200)面集積度が4
0%以上であるすじむらを抑制したシャドウマスク用F
e−Ni系合金板。
1. Ni: 30 to 50% by mass, C: 0.01
5% by mass or less, Si: 0.20% by mass or less, Mn: 0.
5 mass% or less, Al: 0.02 mass% or less, B: 0.0
040% by mass or less, and the balance substantially has a composition of Fe;
The (200) plane integration degree in the cross section perpendicular to the rolling direction is 4
F for shadow mask which suppresses stripe unevenness of 0% or more
e-Ni alloy plate.
【請求項2】 Ni:30〜50質量%,C:0.01
5質量%以下,Si:0.20質量%以下,Mn:0.
5質量%以下,Al:0.02質量%以下,B:0.0
040質量%以下,残部が実質的にFeの組成をもつF
e−Ni系合金板を、圧延方向に垂直な断面における
(200)面集積度が40%以上となるように仕上げ焼
鈍直前の圧延率を75%以上として冷間圧延することを
特徴とするすじむらを抑制したシャドウマスク用Fe−
Ni系合金板の製造方法。
2. Ni: 30 to 50% by mass, C: 0.01
5% by mass or less, Si: 0.20% by mass or less, Mn: 0.
5 mass% or less, Al: 0.02 mass% or less, B: 0.0
040% by mass or less, with the balance being substantially Fe
The e-Ni-based alloy sheet is cold-rolled by setting the rolling ratio immediately before finish annealing to 75% or more so that the (200) plane integration degree in a cross section perpendicular to the rolling direction is 40% or more. Fe- for shadow mask with reduced unevenness
A method for producing a Ni-based alloy plate.
JP2000066283A 2000-03-10 2000-03-10 Fe-Ni SERIES ALLOY SHEET FOR SHADOW MASK WITH SUPPRESSED STRIPE-LIKE UNEVENNESS AND ITS PRODUCING METHOD Withdrawn JP2001254147A (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
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Publication Number Publication Date
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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107012421A (en) * 2015-11-04 2017-08-04 Jx金属株式会社 Metal mask material and metal mask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107012421A (en) * 2015-11-04 2017-08-04 Jx金属株式会社 Metal mask material and metal mask
CN107012421B (en) * 2015-11-04 2019-08-02 Jx金属株式会社 Metal mask material and metal mask

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