JPH10259453A - Base stock for shadow mask free from generation of unevenness in stripe at the time of etching - Google Patents

Base stock for shadow mask free from generation of unevenness in stripe at the time of etching

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Publication number
JPH10259453A
JPH10259453A JP6863597A JP6863597A JPH10259453A JP H10259453 A JPH10259453 A JP H10259453A JP 6863597 A JP6863597 A JP 6863597A JP 6863597 A JP6863597 A JP 6863597A JP H10259453 A JPH10259453 A JP H10259453A
Authority
JP
Japan
Prior art keywords
shadow mask
unevenness
standard deviation
etching
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6863597A
Other languages
Japanese (ja)
Inventor
Takahiro Fujii
孝浩 藤井
Katsumi Ishii
勝己 石井
Hisao Iwamoto
久雄 岩本
Toshihiko Takemoto
敏彦 武本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Nisshin Co Ltd
Original Assignee
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshin Steel Co Ltd filed Critical Nisshin Steel Co Ltd
Priority to JP6863597A priority Critical patent/JPH10259453A/en
Publication of JPH10259453A publication Critical patent/JPH10259453A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a base stock for a shadow mask having an etching face free from the generation of unevenness in stripes at the time of piercing many electron beam passing pores by etching. SOLUTION: This base stock for a shadow mask is composed of a sheet material using an Fe-Ni series alloy contg. 30 to 50% Ni, 0.01 to 1.0% Cr, <=0.015% C, <=0.2% Si, <=0.5% Mn, <=0.02% Al and <=0.0040% B, and in which the standard deviation σ Ni of the concn. of Ni in the cross-section vertical to the rolling direction of the stock is regulated to be <=1.076. By the standard deviation σ Ni of the concn. of Ni in the cross-section vertical to the rolling direction of the stock, the generation of the unevenness in stripes can be grasped with high precision, so that the obtd stock for shadow mask can be a high grade.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、多数の電子ビーム通過
孔をエッチングで穿孔する際にスジむらの発生がないシ
ャドウマスク用素材に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a material for a shadow mask which does not cause uneven stripes when a large number of electron beam passage holes are formed by etching.

【0002】[0002]

【従来の技術】カラーテレビ用ブラウン管やOA機器の
ディスプレイ等の受像管には、多数の電子ビーム通過孔
が形成されたシャドウマスクが組み込まれている。電子
銃から射出された電子ビームは、特定のビーム通過孔を
通過し、各色調に応じてそれぞれの蛍光部にビームスポ
ットを投影する。シャドウマスク用素材としては、正確
な電子ビーム通過孔が形成されるようにエッチング性に
優れていることが要求され、低炭素Alキルド鋼が従来
から使用されている。しかし、シャドウマスクは、電子
ビームの衝突によって加熱され、熱膨張する。このとき
の熱膨張が大きいと電子ビーム通過孔が変位し、電子ビ
ームが所定の蛍光面に当らなくなるドーミング現象が発
生する。
2. Description of the Related Art A picture tube such as a cathode ray tube for a color television or a display of an office automation apparatus incorporates a shadow mask having a large number of electron beam passage holes formed therein. The electron beam emitted from the electron gun passes through a specific beam passage hole, and projects a beam spot on each fluorescent part according to each color tone. As a material for a shadow mask, it is required that the material has excellent etching properties so that an accurate electron beam passage hole is formed, and a low-carbon Al-killed steel is conventionally used. However, the shadow mask is heated by the collision of the electron beam and thermally expands. If the thermal expansion at this time is large, the electron beam passage hole is displaced, and a doming phenomenon occurs in which the electron beam does not hit a predetermined phosphor screen.

【0003】ドーミング現象は、カラーテレビ,ディス
プレイ等の高精度化,高輝度化に伴って大きな問題とな
っている。低熱膨張特性をもつ素材の使用によりドーミ
ング現象が抑制されることから、熱膨張率が小さいFe
−Ni系合金がシャドウマスク用素材として使用される
ようになってきている。しかし、Fe−Ni系合金は、
多量のNiを含むため低炭素Alキルド鋼に比較して素
材価格が高いことは勿論、低炭素Alキルド鋼よりも大
きな強度を持ち、プレス成形性に劣る。また、ヤング率
が低くシャドウマスクとしての剛性に劣ること、エッチ
ング速度が遅くエッチング穿孔性に劣ることも問題であ
る。
[0003] The doming phenomenon has become a serious problem as color televisions, displays and the like have become more precise and have higher luminance. Since the doming phenomenon is suppressed by using a material having a low thermal expansion characteristic, Fe having a low coefficient of thermal expansion is used.
-Ni-based alloys have been used as materials for shadow masks. However, Fe-Ni-based alloys
Since it contains a large amount of Ni, the material price is higher than that of the low-carbon Al-killed steel, and of course, it has greater strength than the low-carbon Al-killed steel and is inferior in press formability. In addition, there are also problems that the Young's modulus is low and the rigidity of the shadow mask is inferior, and the etching rate is low and the etching piercing property is inferior.

【0004】そこで、シャドウマスク用素材として要求
される特性を満足するように、Fe−Ni系合金を改質
する試みが種々検討されている。なかでも、エッチング
穿孔後のシャドウマスクに現れるスジむらは、ブラウン
管の品位を低下させる。特開昭60−56053号公報
では、スジむらの原因がNiの成分偏析にあり、偏析部
と母材部との間におけるエッチング性の差に起因してス
ジむらが発生するとの前提でNiの成分偏析率を規制す
ることにより、スジむらの発生を抑制することを紹介し
ている。すなわち、Niが紐状に濃化した偏析部が素材
中に存在するとして、紐状偏析物の容積率及び長さを規
制し、且つ偏析率を10%以下に規制している。
[0004] Various attempts have been made to modify Fe-Ni-based alloys so as to satisfy the characteristics required as a material for shadow masks. Above all, streak unevenness appearing in the shadow mask after the etching perforation lowers the quality of the CRT. In Japanese Patent Application Laid-Open No. 60-56053, the unevenness of the stripes is caused by the segregation of the Ni component, and the unevenness of the Ni is presumed to be caused by the difference in the etching property between the segregated portion and the base material. The introduction of suppressing the occurrence of streak unevenness by regulating the component segregation rate is introduced. That is, assuming that a segregated portion in which Ni is concentrated in a string shape exists in the material, the volume ratio and the length of the string-like segregated material are regulated, and the segregation ratio is regulated to 10% or less.

【0005】特開昭60−128253号公報では、1
ヒート又は2ヒート以上で断面減少率40%以上の鍛造
を鋳塊に施すNi偏析の解消方法を紹介している。特開
平2−54743号公報では、C,Si,Mn,Cr等
の不純物元素の成分偏析及び鋳造時に生じる特定方位を
もつ柱状組織の残存がスジむらの主原因であるとし、等
軸晶率が規制された連鋳スラブを950℃又は1100
℃以上の温度に1時間以上保持することによりスジむら
を防止する方法を提案している。特開平1−25272
5号公報でも、スジむらの支配的原因が成分偏析にある
とし、スラブ又は熱延コイルを特定条件下で均質化処理
することによりスジむらを軽減する方法を紹介してい
る。具体的には、鋳片中のNi濃度範囲に対する薄板製
品中のNi濃度範囲の比率をNiの偏析レベルとし、こ
の数値が0.7以下であると実用上で問題ない程度まで
スジむらが抑制されるとしている。
[0005] In Japanese Patent Application Laid-Open No. Sho 60-128253, 1
It introduces a method for eliminating Ni segregation in which ingot is subjected to forging with a cross section reduction rate of 40% or more with heat or two or more heats. In Japanese Patent Application Laid-Open No. 2-54743, the segregation of impurity elements such as C, Si, Mn, and Cr and the retention of a columnar structure having a specific orientation which occur during casting are the main causes of streak unevenness. Controlled continuous cast slab at 950 ° C or 1100
A method for preventing streak unevenness by maintaining the temperature at not less than 1 ° C. for at least one hour has been proposed. JP-A-1-25272
No. 5 also discloses a method of reducing streak unevenness by homogenizing a slab or a hot-rolled coil under specific conditions, assuming that the dominant cause of streak unevenness is component segregation. Specifically, the ratio of the Ni concentration range in the thin plate product to the Ni concentration range in the slab is defined as the Ni segregation level, and when this value is 0.7 or less, the line unevenness is suppressed to a practically acceptable level. It is going to be.

【0006】[0006]

【発明が解決しようとする課題】以上に掲げたように、
従来では、Ni又はその他の不純物元素の成分偏析がス
ジむらの原因とし、成分偏析を解消するための鋳造方
法,熱間加工方法,均質化熱処理等が検討されている。
しかしながら、最近のカラーテレビ,ディスプレイの大
型化,画像の高輝度化に対する要求は苛酷である。この
要求に対応して、従来以上に小さい孔径の電子ビーム通
過孔を高密度で穿孔し、孔と孔との間のピッチも細かく
したシャドウマスクが要求されるようになってきてい
る。そのため、従来提案されている方法で製造される素
材は、高品位が要求されるシャドウマスクとしての用途
では、スジむらが十分に解消されていない現状である。
SUMMARY OF THE INVENTION As stated above,
Conventionally, the segregation of components of Ni or other impurity elements causes uneven stripes, and a casting method, a hot working method, a homogenizing heat treatment, and the like for eliminating the segregation of components have been studied.
However, recent demands for color televisions, large-sized displays, and high-luminance images are severe. In response to this demand, there has been a demand for a shadow mask in which electron beam passing holes having a smaller hole diameter than before are formed at a high density, and the pitch between the holes is reduced. Therefore, in a material manufactured by a conventionally proposed method, unevenness of stripes is not sufficiently eliminated in a shadow mask requiring high quality.

【0007】また、製品中のどのような位置にどの程度
の偏析が残存した場合にスジむらとなるのかについては
未だ明確にされておらず、偏析解消を目的とした種々の
方法についても目標となる偏析の解消程度について明確
さを欠いている。本発明は、このような問題を解消すべ
く案出されたものであり、シャドウマスク用素材の圧延
方向に垂直な断面におけるNiの偏析分布がスジむらの
発生と密接な関係にあることを見い出し、垂直断面にお
けるNiの偏析濃度を厳しく規制することにより、スジ
むらのない高品質のシャドウマスク用素材を提供するこ
とを目的とする。
Further, it has not been clarified yet what level of segregation remains at what position in a product and the amount of segregation remains, and various methods for eliminating segregation have been set as targets. Lack of clarity about the degree of elimination of segregation. The present invention has been devised in order to solve such a problem, and has found that the segregation distribution of Ni in a cross section perpendicular to the rolling direction of the shadow mask material is closely related to the occurrence of streak unevenness. It is another object of the present invention to provide a high-quality shadow mask material free from uneven stripes by strictly controlling the Ni segregation concentration in a vertical cross section.

【0008】[0008]

【課題を解決するための手段】本発明のシャドウマスク
用素材は、その目的を達成するため、Ni:30〜50
重量%,Cr:0.01〜1.0重量%,C:0.01
5重量%以下,Si:0.2重量%以下,Mn:0.5
重量%以下,Al:0.02重量%以下及びB:0.0
040重量%以下を含むFe−Ni系合金を素材とする
板材であり、素材の圧延方向に垂直な断面におけるNi
濃度の標準偏差σNiが1.076以下であることを特
徴とする。
According to the present invention, there is provided a material for a shadow mask, wherein Ni: 30 to 50 is used.
% By weight, Cr: 0.01 to 1.0% by weight, C: 0.01
5% by weight or less, Si: 0.2% by weight or less, Mn: 0.5
Wt% or less, Al: 0.02 wt% or less and B: 0.0
A plate material made of an Fe-Ni-based alloy containing 040% by weight or less, and Ni in a cross section perpendicular to the rolling direction of the material.
The standard deviation of the concentration σNi is 1.076 or less.

【0009】[0009]

【作用】エッチング穿孔後のスジむらは、線状又は帯状
の明暗差として観察され、なかには300mmの長さに
達するものもある。本発明者等は、シャドウマスクで発
生するスジむらと素材内部に存在する成分偏析の分布形
態との関係について調査・研究した。その結果、スジむ
らが発生した素材では、図1に模式的に示すように、圧
延方向2に垂直な断面1を観察したところ、板厚方向に
ある厚みをもったNiの欠乏域4が圧延方向2と平行し
てスジ状に延びており、Ni欠乏域4が素材内部に多数
分布していることを突き止めた。そこで、本発明者等
は、圧延方向2に垂直な断面1におけるNiの偏析程度
をX線マイクロアナライザで定量分析し、分析結果を統
計的に解析した。すなわち、分布頻度を縦軸としてマッ
ピング定量分析による個々の測定点におけるNi濃度値
をプロットすると、図2の分布曲線が得られる。なお、
図2において標準偏差σNiが小さいほど、濃度変動、
換言すれば偏析程度が小さいことを意味する。
The stripe unevenness after etching perforation is observed as a linear or band-like difference in brightness, and some of them reach a length of 300 mm. The present inventors have investigated and studied the relationship between uneven stripes generated in a shadow mask and the distribution form of component segregation existing inside the material. As a result, as shown schematically in FIG. 1, when the cross section 1 perpendicular to the rolling direction 2 was observed in the material in which the stripe unevenness occurred, the Ni-deficient region 4 having a certain thickness in the plate thickness direction was rolled. It was found to extend in a streak shape in parallel with the direction 2, and it was found that many Ni-deficient regions 4 were distributed inside the material. Then, the present inventors quantitatively analyzed the degree of Ni segregation in the cross section 1 perpendicular to the rolling direction 2 using an X-ray microanalyzer, and statistically analyzed the analysis results. That is, when the Ni concentration value at each measurement point by the mapping quantitative analysis is plotted with the distribution frequency as the vertical axis, the distribution curve in FIG. 2 is obtained. In addition,
In FIG. 2, the smaller the standard deviation σNi is,
In other words, it means that the degree of segregation is small.

【0010】本発明者等は、このような前提で標準偏差
σNiを小さくすべく、鋳塊の分塊圧延条件,ソーキン
グ条件等の種々の製造条件を検討し、得られた製品素材
の圧延方向に垂直な断面における標準偏差σNiとスジ
むらレベルとの関係を調査した。その結果、標準偏差σ
Niとスジむらレベルとの間に強い相関関係があること
を見い出し、標準偏差σNiを1.076以下にすると
き、肉眼でほとんど観察されない程度にまでスジむらが
軽減されることを解明した。なお、標準偏差σNiを指
標としてスジむらの発生を抑制することに関し、本発明
者等は、ハーフエッチング面における標準偏差σNiを
使用することを特願平8−271490号ですでに提案
している。しかし、ここで提案した方法ではハーフエッ
チング面の標準偏差σNiを指標とするため、素材をサ
ンプリングしてハーフエッチする検査工程が必要にな
る。これに対し、本発明では、圧延方向に垂直な断面を
観察して標準偏差σNiを得ているので、スジむらの発
生防止に有用な指標が容易に得られる。
The present inventors have studied various manufacturing conditions such as ingot rolling and soaking conditions in order to reduce the standard deviation σNi under such a premise, and examined the rolling direction of the obtained product material. The relationship between the standard deviation σNi in the cross section perpendicular to the graph and the uneven stripe level was investigated. As a result, the standard deviation σ
It has been found that there is a strong correlation between Ni and the line streak unevenness level, and it has been clarified that when the standard deviation σNi is 1.076 or less, the line streak unevenness is reduced to such an extent that it is hardly observed with the naked eye. The present inventors have already proposed, in Japanese Patent Application No. 8-271490, to use the standard deviation σNi on the half-etched surface with respect to suppressing the occurrence of streak unevenness using the standard deviation σNi as an index. . However, in the method proposed here, since the standard deviation σNi of the half-etched surface is used as an index, an inspection step of sampling the material and performing half-etching is required. On the other hand, in the present invention, since the standard deviation σNi is obtained by observing a cross section perpendicular to the rolling direction, an index useful for preventing the occurrence of uneven stripes can be easily obtained.

【0011】[0011]

【実施の形態】本発明で使用するFe−Ni系合金の成
分,含有量等について説明する。 Ni:30〜50重量% Fe−Ni系合金の熱膨張係数を低く維持する上で重要
な合金元素であり、熱膨張係数を低く維持するため30
重量%以上が必要とされる。しかし、50重量%を超え
るNi含有量では、耐力の上昇に起因してプレス成形性
が低下する。 Cr:0.01〜1.0重量% Fe−Ni系合金のエッチング速度を増大させるために
有効な合金元素であり、0.01重量%以上の含有量で
Cr添加の作用が顕著になる。しかし、1.0重量%を
超える多量のCrが含まれると、Fe−Ni系合金の熱
膨張係数が大きくなる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The components, contents and the like of the Fe-Ni alloy used in the present invention will be described. Ni: 30 to 50% by weight Ni is an important alloy element for maintaining a low coefficient of thermal expansion of the Fe-Ni alloy.
More than weight percent is required. However, if the Ni content exceeds 50% by weight, press formability is reduced due to an increase in proof stress. Cr: 0.01 to 1.0% by weight Cr is an effective alloying element for increasing the etching rate of the Fe-Ni-based alloy. When the content is 0.01% by weight or more, the effect of adding Cr becomes remarkable. However, when a large amount of Cr exceeding 1.0% by weight is contained, the thermal expansion coefficient of the Fe—Ni-based alloy increases.

【0012】C:0.015重量%以下 素材中に炭化物を形成し、エッチング性を損なう有害元
素である。本発明では、C起因の弊害を防止するため、
C含有量の上限を0.015重量%に規制した。 Si:0.2重量%以下 脱酸剤として添加される成分であるが、熱膨張係数を大
きくし、エッチング性や黒化膜性を劣化させる傾向を示
す。そこで、本発明においてはSi含有量の上限を0.
2重量%に規制した。 Mn:0.5重量%以下 脱酸剤として有効な成分であるが、熱膨張係数を大きく
する作用をもつ。そのため、Mn含有量は、上限を0.
5重量%に規制した。
C: 0.015% by weight or less C is a harmful element which forms carbides in the raw material and impairs the etching property. In the present invention, in order to prevent the adverse effects caused by C,
The upper limit of the C content was regulated to 0.015% by weight. Si: 0.2% by weight or less This component is added as a deoxidizing agent, but tends to increase the thermal expansion coefficient and deteriorate the etching property and the blackening film property. Therefore, in the present invention, the upper limit of the Si content is set to 0.1.
It was regulated to 2% by weight. Mn: 0.5% by weight or less This component is effective as a deoxidizing agent, but has an effect of increasing the coefficient of thermal expansion. Therefore, the Mn content has an upper limit of 0.1.
Regulated to 5% by weight.

【0013】Al:0.02重量%以下 硬質の介在物を形成し、表面疵の発生等によって表面品
質を劣化させる悪影響を及ぼす。そのため、Al含有量
の上限を0.02重量%に規制した。 B:0.0040重量%以下 エッチング速度を増加させる上では有効な成分である。
しかし、0.0040重量%を超える含有量では、軟化
焼鈍後に焼鈍むらが発生し易くなり、黒化膜の生成むら
を助長させる。本発明が対象とするFe−Ni系合金に
おいては、その他の不可避的成分としてS,P,O,N
等を含む。これらの不可避的成分がFe−Ni系合金に
含まれる量はそれぞれ0.010重量%以下であり、こ
の程度の含有量であればシャドウマスク用素材としての
性能に悪影響を及ぼさない。
Al: not more than 0.02% by weight Hard inclusions are formed and the surface quality is adversely affected by the occurrence of surface flaws. Therefore, the upper limit of the Al content is restricted to 0.02% by weight. B: 0.0040% by weight or less B is an effective component for increasing the etching rate.
However, when the content exceeds 0.0040% by weight, unevenness in annealing tends to occur after softening annealing, which promotes unevenness in formation of a blackened film. In the Fe—Ni-based alloy targeted by the present invention, S, P, O, N
And so on. The amount of each of these unavoidable components contained in the Fe-Ni-based alloy is 0.010% by weight or less, and such a content does not adversely affect the performance as a material for a shadow mask.

【0014】圧延方向に垂直な断面におけるNi濃度の
標準偏差:σNi≦1.076 Niの濃度変動が大きいほど標準偏差σNiが大きくな
り、エッチング加工後にスジむらが明瞭に観察される。
標準偏差σNiが小さいことは、Niの濃度変動が小さ
いこと或いは偏析域そのものが存在しないことを意味す
る。本発明者等の調査・研究によるとき、標準偏差σN
iが1.076以下になると、スジむらが肉眼でほとん
ど観察されず、高品位のシャドウマスク用として使用可
能な素材が得られることが判った。標準偏差σNiは、
たとえばX線マイクロアナライザを用いた定量マッピン
グ分析により次の手順で測定される。素材の圧延方向に
垂直な断面を露出させて試験片を樹脂等に埋め込み、ア
ルミナ粒子,ダイヤモンド粒子等で圧延方向に垂直な断
面を研磨する。得られた研磨面の板厚を一辺とする正方
形の範囲について、X線マイクロアナライザによりNi
を定量マッピング分析する。このとき、1点当りの分析
範囲を約0.4μm径とし、結果として分析表面1辺当
り約250点の分析点をとり、総分析点数を約6250
0点とする。各点の分析値は、平均値を中心として±4
%の範囲を階級幅0.5%で16分割したヒストグラム
に整理する。このとき、マッピングデータにおける全分
析面積内に占める各濃度階級の面積率を度数とする。得
られたヒストグラムから標準偏差を算出し、Ni濃度の
標準偏差σNiを得る。
Standard deviation of Ni concentration in a cross section perpendicular to the rolling direction: σNi ≦ 1.076 The larger the fluctuation of Ni concentration, the larger the standard deviation σNi becomes, and uneven stripes are clearly observed after etching.
A small standard deviation σNi means that the Ni concentration fluctuation is small or the segregation region itself does not exist. According to the research and research by the present inventors, the standard deviation σN
When i was 1.076 or less, it was found that line unevenness was hardly observed with the naked eye, and a material usable for a high-quality shadow mask was obtained. The standard deviation σNi is
For example, it is measured in the following procedure by quantitative mapping analysis using an X-ray microanalyzer. A test piece is embedded in a resin or the like by exposing a cross section perpendicular to the rolling direction of the material, and the cross section perpendicular to the rolling direction is polished with alumina particles, diamond particles, or the like. An X-ray microanalyzer was used to measure Ni in a range of a square having one side of the thickness of the obtained polished surface.
For quantitative mapping analysis. At this time, the analysis range per point was about 0.4 μm in diameter, and as a result, about 250 analysis points were taken per side of the analysis surface, and the total number of analysis points was about 6250.
Score 0. The analysis value at each point was ± 4
The range of% is organized into a histogram obtained by dividing the range into 16 with a class width of 0.5%. At this time, the area ratio of each concentration class in the entire analysis area in the mapping data is defined as a frequency. The standard deviation is calculated from the obtained histogram to obtain the standard deviation σNi of the Ni concentration.

【0015】[0015]

【実施例】表1に示した組成をもつFe−Ni系合金を
溶製し、鋳型を用いて9トンのインゴットを鋳造し、I
M材とした。また、連続鋳造によって10トンのスラブ
を製造し、CC材とした。
EXAMPLE An Fe-Ni alloy having the composition shown in Table 1 was melted, and a 9-ton ingot was cast using a mold.
M material. In addition, a slab of 10 tons was manufactured by continuous casting to obtain a CC material.

【0016】 [0016]

【0017】各鋳塊を表2に示す製造条件下で分塊,ソ
ーキングした。すなわち、IM材では分塊圧延,或いは
更にソーキングを施し、CC材ではそのままソーキング
を施した。次いで、各スラブの表面を手入れし、熱間圧
延により板厚6mmとした。更に、1000℃の焼鈍と
冷間圧延を数回繰り返し、最終的に板厚0.12mmの
冷延鋼帯を得た。各冷延鋼帯から切り出された試験片に
フォトレジストでパターンを印刷した後、比重51ボー
メ,温度60℃の塩化第二鉄溶液でスプレーエッチング
することによりシャドウマスクを作製した。得られたシ
ャドウマスクのスジむら発生状況を観察し、スジむらが
全く観察されなかったものを最高レベルA,スジむらが
ほとんどみられず、これ以上であれば高品位シャドウマ
スク用素材として使用可能なものをレベルB,比較的多
数のスジむらが観察されたものをレベルC,明瞭な多数
のスジむらが現れたものを最低レベルDとする4段階で
スジむら発生状況を評価した。
Each ingot was divided and soaked under the production conditions shown in Table 2. That is, the IM material was subjected to bulk rolling or further soaking, and the CC material was subjected to soaking as it was. Next, the surface of each slab was cared for, and the plate thickness was 6 mm by hot rolling. Further, annealing at 1000 ° C. and cold rolling were repeated several times to finally obtain a cold-rolled steel strip having a thickness of 0.12 mm. A pattern was printed on a test piece cut out from each cold-rolled steel strip with a photoresist, and then spray-etched with a ferric chloride solution having a specific gravity of 51 Baume and a temperature of 60 ° C. to produce a shadow mask. Observation of the occurrence of streak unevenness in the obtained shadow mask. If no streak unevenness was observed, the highest level was A, and no streak unevenness was observed. If it was more than this, it could be used as a material for high quality shadow mask. The level of occurrence of streak unevenness was evaluated in four stages: level B, a level C where a relatively large number of streaks were observed, and a minimum level D where a large number of streaks were observed.

【0018】また、素材の圧延方向に垂直な断面を研磨
により鏡面仕上げし、X線マイクロアナライザによりN
iを定量マッピング分析した。各試験片におけるNi濃
度の標準偏差σNi及びスジむらレベルを、表2に併せ
示す。また、標準偏差σNiとスジむらレベルとの関係
を図3に示す。図3から、標準偏差σNiとスジむらレ
ベルとの間に強い相関関係があることが判る。すなわ
ち、Ni濃度の標準偏差σNiが1.076以下となる
本発明例では、エッチング加工後のスジむらレベルがB
以上であり、高品位が要求されるシャドウマスクに最適
な素材として使用される。他方、標準偏差σNiが1.
076を超えると、スジむらレベルがC又はDとなり、
高品位シャドウマスク用素材としては不適当であった。
Further, a section perpendicular to the rolling direction of the material is mirror-finished by polishing, and N-ray is analyzed by an X-ray microanalyzer.
i was subjected to quantitative mapping analysis. Table 2 also shows the standard deviation σNi of the Ni concentration and the line unevenness level in each test piece. FIG. 3 shows the relationship between the standard deviation σNi and the line unevenness level. FIG. 3 shows that there is a strong correlation between the standard deviation σNi and the line unevenness level. That is, in the example of the present invention in which the standard deviation σNi of the Ni concentration is 1.076 or less, the level of the line unevenness after the etching is B
As described above, it is used as an optimum material for a shadow mask requiring high quality. On the other hand, when the standard deviation σNi is 1.
If it exceeds 076, the line unevenness level becomes C or D,
It was unsuitable as a material for a high-quality shadow mask.

【0019】 [0019]

【0020】また、表2の製造条件とNi濃度の標準偏
差σNi,スジむらレベルとの関係から、次のことが読
み取れる。IM材において、分塊圧延時に再加熱を施さ
ない比較例7のスジむらレベルがDであるのに対し、1
回以上の再加熱を施した本発明例1,2では標準偏差σ
Niが低減し、スジむらレベルがBに改善されている。
これは、再加熱によりNiの拡散が促進された結果であ
る。しかし、1回の再加熱を施しても、比較例8のよう
に均熱時間が短いと十分な改善効果が現れず、標準偏差
σNiの低減度が小さいためにスジむらが発生する。
Further, the following can be read from the relationship between the manufacturing conditions shown in Table 2, the standard deviation σNi of the Ni concentration, and the line unevenness level. In the IM material, the line unevenness level of Comparative Example 7 in which reheating was not performed during slab rolling was D, whereas 1
In Examples 1 and 2 of the present invention in which reheating was performed more than once, the standard deviation σ
Ni is reduced, and the stripe unevenness level is improved to B.
This is a result of promoting Ni diffusion by reheating. However, even if reheating is performed once, if the soaking time is short as in Comparative Example 8, a sufficient improvement effect does not appear, and streak unevenness occurs because the degree of reduction of the standard deviation σNi is small.

【0021】これらの結果及び他の製造実験から、分塊
圧延時に1250〜1350℃で3時間以上の再加熱を
2回、又は1250〜1350℃で24時間以上の再加
熱を1回施すことにより、標準偏差σNiが1.076
以下になり、スジむらの発生がほとんどないシャドウマ
スク用素材を製造できることが判った。なお、再加熱温
度が高いほどNiの拡散促進により偏析が低減される
が、素材の酸化損失や炉材の寿命等の観点から上限温度
を1350℃に設定した。Ni濃度の標準偏差σNi
は、本発明例3にみられるように、1250〜1350
℃で24時間以上の再加熱を2回施すことにより更に低
減する。また、分塊圧延後のスラブを1250〜135
0℃で24時間ソーキングした比較例4にみられるよう
に、ソーキングによってNiの拡散が十分に進行し、本
発明例及び比較例の中で標準偏差σNiが1.021と
最も低い値を示した。そして、標準偏差σNiの低い本
発明例3,4は、何れもスジむらが全く観察されないレ
ベルAであった。
From these results and other manufacturing experiments, it was found that re-heating at 1250 to 1350 ° C. twice or twice at 1250 to 1350 ° C. for 24 hours or more at the time of slab rolling. , Standard deviation σNi is 1.076
As described below, it was found that a shadow mask material with almost no uneven stripes can be manufactured. The higher the reheating temperature, the lower the segregation due to the promotion of Ni diffusion. However, the upper limit temperature was set to 1350 ° C. from the viewpoints of oxidation loss of the material, life of the furnace material, and the like. Standard deviation of Ni concentration σNi
Are 1250 to 1350, as seen in Example 3 of the present invention.
The temperature is further reduced by performing reheating twice at 24 ° C. for 24 hours or more. In addition, the slab after the slab rolling is 1250-135.
As can be seen from Comparative Example 4 in which soaking was performed at 0 ° C. for 24 hours, diffusion of Ni was sufficiently advanced by soaking, and the standard deviation σNi showed the lowest value of 1.021 in the inventive examples and comparative examples. . In each of Examples 3 and 4 of the present invention having a low standard deviation σNi, the level A was such that no line unevenness was observed.

【0022】CC材についてみると、一般的にスラブの
ソーキングによりNi偏析が解消されるといえる。しか
し、1150℃で24時間のソーキングを施した比較例
10では、標準偏差σNiが1.076を超えており、
スジむらの発生が観察されるレベルCであった。他方、
均熱温度を1250〜1350℃に設定した本発明例
5,6では、標準偏差σNiが1.076以下になって
おり、スジむらの発生しないシャドウマスク用素材を製
造することができた。このように、分塊圧延材及び連鋳
材の何れにおいても、分塊条件,ソーキング条件等を適
切に設定することにより、Niの成分偏析が効果的に解
消され、標準偏差σNiが1.076以下のシャドウマ
スク用素材が製造された。このようにして得られた本発
明例1〜6のシャドウマスク用素材は、図3に示すよう
にNi濃度の標準偏差σNiが1.076以下であり、
エッチング加工後のスジむらレベルがB以上で、高品位
が要求されるシャドウマスク用に好適な素材といえる。
Regarding the CC material, it can be generally said that Ni segregation is eliminated by slab soaking. However, in Comparative Example 10 in which soaking was performed at 1150 ° C. for 24 hours, the standard deviation σNi exceeded 1.076,
The level was at a level C at which the occurrence of uneven stripes was observed. On the other hand,
In Examples 5 and 6 of the present invention in which the soaking temperature was set to 1250 to 1350 ° C., the standard deviation σNi was 1.076 or less, and a shadow mask material free from streak unevenness could be manufactured. As described above, in both the slab-rolled material and the continuous cast material, by appropriately setting the sizing condition, the soaking condition, and the like, the component segregation of Ni is effectively eliminated, and the standard deviation σNi is 1.076. The following materials for shadow masks were produced. The thus obtained shadow mask materials of Examples 1 to 6 of the present invention have a Ni concentration standard deviation σNi of 1.076 or less, as shown in FIG.
It can be said that it is a material suitable for a shadow mask that requires a high quality when the level of the uneven stripe after etching is B or more.

【0023】[0023]

【発明の効果】以上に説明したように、本発明のシャド
ウマスク用素材は、圧延方向に垂直な断面におけるNi
濃度の標準偏差σNiを1.076以下と規制している
ので、多数の電子ビーム通過孔をエッチングで穿孔する
際にスジむらの発生がないエッチング面が得られる。そ
のため、高精細な画像品位が要求されるカラーテレビ,
ディスプレイ等のブラウン管用シャドウマスクの素材と
して使用される。
As described above, the shadow mask material of the present invention has a Ni cross section perpendicular to the rolling direction.
Since the standard deviation σNi of the concentration is regulated to 1.076 or less, an etched surface free from uneven stripes when a large number of electron beam passage holes are formed by etching can be obtained. Therefore, color televisions that require high-definition image quality,
Used as a material for shadow masks for cathode ray tubes for displays and the like.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 素材内部におけるNi欠乏域の分布を模式的
に示した図
FIG. 1 is a diagram schematically showing the distribution of a Ni deficiency region inside a material.

【図2】 圧延方向に垂直な断面におけるNi濃度の度
数分布を示したグラフ
FIG. 2 is a graph showing a frequency distribution of Ni concentration in a cross section perpendicular to a rolling direction.

【図3】 Ni濃度の標準偏差σNiとスジむらレベル
との関係を示したグラフ
FIG. 3 is a graph showing the relationship between the standard deviation σNi of the Ni concentration and the level of streak unevenness.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 武本 敏彦 山口県新南陽市野村南町4976番地 日新製 鋼株式会社技術研究所内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Toshihiko Takemoto 4976 Nomura Minamicho, Shinnanyo-shi, Yamaguchi Pref.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 Ni:30〜50重量%,Cr:0.0
1〜1.0重量%,C:0.015重量%以下,Si:
0.2重量%以下,Mn:0.5重量%以下,Al:
0.02重量%以下及びB:0.0040重量%以下を
含むFe−Ni系合金を素材とする板材であり、素材の
圧延方向に垂直な断面におけるNi濃度の標準偏差σN
iが1.076以下であることを特徴とするエッチング
時にスジむらが発生しないシャドウマスク用素材。
1. Ni: 30 to 50% by weight, Cr: 0.0
1 to 1.0% by weight, C: 0.015% by weight or less, Si:
0.2% by weight or less, Mn: 0.5% by weight or less, Al:
A plate made of a Fe—Ni alloy containing 0.02% by weight or less and B: 0.0040% by weight or less, and a standard deviation σN of Ni concentration in a cross section perpendicular to the rolling direction of the material.
A material for a shadow mask which does not cause stripe unevenness during etching, wherein i is 1.076 or less.
JP6863597A 1997-03-21 1997-03-21 Base stock for shadow mask free from generation of unevenness in stripe at the time of etching Pending JPH10259453A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6863597A JPH10259453A (en) 1997-03-21 1997-03-21 Base stock for shadow mask free from generation of unevenness in stripe at the time of etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6863597A JPH10259453A (en) 1997-03-21 1997-03-21 Base stock for shadow mask free from generation of unevenness in stripe at the time of etching

Publications (1)

Publication Number Publication Date
JPH10259453A true JPH10259453A (en) 1998-09-29

Family

ID=13379403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6863597A Pending JPH10259453A (en) 1997-03-21 1997-03-21 Base stock for shadow mask free from generation of unevenness in stripe at the time of etching

Country Status (1)

Country Link
JP (1) JPH10259453A (en)

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