JP2001251879A - 電動機制御装置とその制御方法 - Google Patents

電動機制御装置とその制御方法

Info

Publication number
JP2001251879A
JP2001251879A JP2000057119A JP2000057119A JP2001251879A JP 2001251879 A JP2001251879 A JP 2001251879A JP 2000057119 A JP2000057119 A JP 2000057119A JP 2000057119 A JP2000057119 A JP 2000057119A JP 2001251879 A JP2001251879 A JP 2001251879A
Authority
JP
Japan
Prior art keywords
switching
speed
power amplifier
detected speed
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000057119A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001251879A5 (enExample
Inventor
Kenichi Sekioka
賢一 関岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2000057119A priority Critical patent/JP2001251879A/ja
Publication of JP2001251879A publication Critical patent/JP2001251879A/ja
Publication of JP2001251879A5 publication Critical patent/JP2001251879A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Electric Motors In General (AREA)
JP2000057119A 2000-03-02 2000-03-02 電動機制御装置とその制御方法 Pending JP2001251879A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000057119A JP2001251879A (ja) 2000-03-02 2000-03-02 電動機制御装置とその制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000057119A JP2001251879A (ja) 2000-03-02 2000-03-02 電動機制御装置とその制御方法

Publications (2)

Publication Number Publication Date
JP2001251879A true JP2001251879A (ja) 2001-09-14
JP2001251879A5 JP2001251879A5 (enExample) 2007-04-12

Family

ID=18577968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000057119A Pending JP2001251879A (ja) 2000-03-02 2000-03-02 電動機制御装置とその制御方法

Country Status (1)

Country Link
JP (1) JP2001251879A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008146453A1 (ja) * 2007-05-18 2008-12-04 Ntn Corporation モータ一体型の磁気軸受装置
JP2022002292A (ja) * 2020-06-22 2022-01-06 キヤノン株式会社 ステージ装置、パターン形成装置、及び物品の製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0678579A (ja) * 1992-06-26 1994-03-18 Meidensha Corp モータイナーシャ推定装置およびオートチューニング方法
JPH10177949A (ja) * 1996-12-16 1998-06-30 Nikon Corp ステージ制御装置
JPH10250463A (ja) * 1997-03-17 1998-09-22 Denso Corp 車両用前照灯光軸方向自動調整装置
JPH10268941A (ja) * 1997-03-24 1998-10-09 Nikon Corp ステージ移動制御装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0678579A (ja) * 1992-06-26 1994-03-18 Meidensha Corp モータイナーシャ推定装置およびオートチューニング方法
JPH10177949A (ja) * 1996-12-16 1998-06-30 Nikon Corp ステージ制御装置
JPH10250463A (ja) * 1997-03-17 1998-09-22 Denso Corp 車両用前照灯光軸方向自動調整装置
JPH10268941A (ja) * 1997-03-24 1998-10-09 Nikon Corp ステージ移動制御装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008146453A1 (ja) * 2007-05-18 2008-12-04 Ntn Corporation モータ一体型の磁気軸受装置
JP2022002292A (ja) * 2020-06-22 2022-01-06 キヤノン株式会社 ステージ装置、パターン形成装置、及び物品の製造方法
JP7672837B2 (ja) 2020-06-22 2025-05-08 キヤノン株式会社 ステージ装置、パターン形成装置、及び物品の製造方法

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