JP2001251879A5 - - Google Patents
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- Publication number
- JP2001251879A5 JP2001251879A5 JP2000057119A JP2000057119A JP2001251879A5 JP 2001251879 A5 JP2001251879 A5 JP 2001251879A5 JP 2000057119 A JP2000057119 A JP 2000057119A JP 2000057119 A JP2000057119 A JP 2000057119A JP 2001251879 A5 JP2001251879 A5 JP 2001251879A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000057119A JP2001251879A (ja) | 2000-03-02 | 2000-03-02 | 電動機制御装置とその制御方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000057119A JP2001251879A (ja) | 2000-03-02 | 2000-03-02 | 電動機制御装置とその制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001251879A JP2001251879A (ja) | 2001-09-14 |
| JP2001251879A5 true JP2001251879A5 (enExample) | 2007-04-12 |
Family
ID=18577968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000057119A Pending JP2001251879A (ja) | 2000-03-02 | 2000-03-02 | 電動機制御装置とその制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001251879A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008289291A (ja) * | 2007-05-18 | 2008-11-27 | Ntn Corp | モータ一体型の磁気軸受装置 |
| JP7672837B2 (ja) * | 2020-06-22 | 2025-05-08 | キヤノン株式会社 | ステージ装置、パターン形成装置、及び物品の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0678579A (ja) * | 1992-06-26 | 1994-03-18 | Meidensha Corp | モータイナーシャ推定装置およびオートチューニング方法 |
| JP3095703B2 (ja) * | 1997-03-17 | 2000-10-10 | 株式会社デンソー | 車両用前照灯光軸方向自動調整装置 |
| JPH10177949A (ja) * | 1996-12-16 | 1998-06-30 | Nikon Corp | ステージ制御装置 |
| JPH10268941A (ja) * | 1997-03-24 | 1998-10-09 | Nikon Corp | ステージ移動制御装置 |
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2000
- 2000-03-02 JP JP2000057119A patent/JP2001251879A/ja active Pending