JP2001200886A - 能動除振装置 - Google Patents
能動除振装置Info
- Publication number
- JP2001200886A JP2001200886A JP2000009355A JP2000009355A JP2001200886A JP 2001200886 A JP2001200886 A JP 2001200886A JP 2000009355 A JP2000009355 A JP 2000009355A JP 2000009355 A JP2000009355 A JP 2000009355A JP 2001200886 A JP2001200886 A JP 2001200886A
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- acceleration
- mode
- vibration isolation
- mode generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims abstract description 27
- 238000006073 displacement reaction Methods 0.000 claims abstract description 10
- 238000002955 isolation Methods 0.000 claims description 45
- 238000001514 detection method Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 4
- 238000013461 design Methods 0.000 claims description 3
- 238000012916 structural analysis Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 238000013016 damping Methods 0.000 description 5
- 230000002238 attenuated effect Effects 0.000 description 4
- 238000005339 levitation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Landscapes
- Vibration Prevention Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000009355A JP2001200886A (ja) | 2000-01-18 | 2000-01-18 | 能動除振装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000009355A JP2001200886A (ja) | 2000-01-18 | 2000-01-18 | 能動除振装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001200886A true JP2001200886A (ja) | 2001-07-27 |
| JP2001200886A5 JP2001200886A5 (enExample) | 2004-12-09 |
Family
ID=18537520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000009355A Pending JP2001200886A (ja) | 2000-01-18 | 2000-01-18 | 能動除振装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001200886A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007285429A (ja) * | 2006-04-18 | 2007-11-01 | Shinko Electric Co Ltd | アクティブ制振装置及びアクティブ制振装置の制御方法 |
| JP2007285430A (ja) * | 2006-04-18 | 2007-11-01 | Shinko Electric Co Ltd | アクティブ制振装置及びアクティブ制振装置の制御方法 |
| US7817243B2 (en) | 2004-04-12 | 2010-10-19 | Asml Netherlands B.V. | Vibration isolation system |
| JP2012052666A (ja) * | 2011-10-07 | 2012-03-15 | Mitsubishi Electric Corp | 免振装置 |
-
2000
- 2000-01-18 JP JP2000009355A patent/JP2001200886A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7817243B2 (en) | 2004-04-12 | 2010-10-19 | Asml Netherlands B.V. | Vibration isolation system |
| JP2007285429A (ja) * | 2006-04-18 | 2007-11-01 | Shinko Electric Co Ltd | アクティブ制振装置及びアクティブ制振装置の制御方法 |
| JP2007285430A (ja) * | 2006-04-18 | 2007-11-01 | Shinko Electric Co Ltd | アクティブ制振装置及びアクティブ制振装置の制御方法 |
| JP2012052666A (ja) * | 2011-10-07 | 2012-03-15 | Mitsubishi Electric Corp | 免振装置 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050629 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20051025 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20060307 |