JP2001200886A5 - - Google Patents

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Publication number
JP2001200886A5
JP2001200886A5 JP2000009355A JP2000009355A JP2001200886A5 JP 2001200886 A5 JP2001200886 A5 JP 2001200886A5 JP 2000009355 A JP2000009355 A JP 2000009355A JP 2000009355 A JP2000009355 A JP 2000009355A JP 2001200886 A5 JP2001200886 A5 JP 2001200886A5
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JP
Japan
Prior art keywords
vibration
acceleration
compensation value
mode
signal
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Pending
Application number
JP2000009355A
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English (en)
Japanese (ja)
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JP2001200886A (ja
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Priority to JP2000009355A priority Critical patent/JP2001200886A/ja
Priority claimed from JP2000009355A external-priority patent/JP2001200886A/ja
Publication of JP2001200886A publication Critical patent/JP2001200886A/ja
Publication of JP2001200886A5 publication Critical patent/JP2001200886A5/ja
Pending legal-status Critical Current

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JP2000009355A 2000-01-18 2000-01-18 能動除振装置 Pending JP2001200886A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000009355A JP2001200886A (ja) 2000-01-18 2000-01-18 能動除振装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000009355A JP2001200886A (ja) 2000-01-18 2000-01-18 能動除振装置

Publications (2)

Publication Number Publication Date
JP2001200886A JP2001200886A (ja) 2001-07-27
JP2001200886A5 true JP2001200886A5 (enExample) 2004-12-09

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ID=18537520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000009355A Pending JP2001200886A (ja) 2000-01-18 2000-01-18 能動除振装置

Country Status (1)

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JP (1) JP2001200886A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7817243B2 (en) 2004-04-12 2010-10-19 Asml Netherlands B.V. Vibration isolation system
JP4802838B2 (ja) * 2006-04-18 2011-10-26 シンフォニアテクノロジー株式会社 アクティブ制振装置及びアクティブ制振装置の制御方法
JP4802839B2 (ja) * 2006-04-18 2011-10-26 シンフォニアテクノロジー株式会社 アクティブ制振装置及びアクティブ制振装置の制御方法
JP5163798B2 (ja) * 2011-10-07 2013-03-13 三菱電機株式会社 免振装置

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