JP2001173558A5 - - Google Patents

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Publication number
JP2001173558A5
JP2001173558A5 JP2000305116A JP2000305116A JP2001173558A5 JP 2001173558 A5 JP2001173558 A5 JP 2001173558A5 JP 2000305116 A JP2000305116 A JP 2000305116A JP 2000305116 A JP2000305116 A JP 2000305116A JP 2001173558 A5 JP2001173558 A5 JP 2001173558A5
Authority
JP
Japan
Prior art keywords
main pump
vacuum chamber
pump
auxiliary pump
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000305116A
Other languages
English (en)
Japanese (ja)
Other versions
JP3969947B2 (ja
JP2001173558A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000305116A priority Critical patent/JP3969947B2/ja
Priority claimed from JP2000305116A external-priority patent/JP3969947B2/ja
Publication of JP2001173558A publication Critical patent/JP2001173558A/ja
Publication of JP2001173558A5 publication Critical patent/JP2001173558A5/ja
Application granted granted Critical
Publication of JP3969947B2 publication Critical patent/JP3969947B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2000305116A 1999-10-04 2000-10-04 真空排気システム Expired - Lifetime JP3969947B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000305116A JP3969947B2 (ja) 1999-10-04 2000-10-04 真空排気システム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP28336799 1999-10-04
JP11-283367 1999-10-04
JP2000305116A JP3969947B2 (ja) 1999-10-04 2000-10-04 真空排気システム

Publications (3)

Publication Number Publication Date
JP2001173558A JP2001173558A (ja) 2001-06-26
JP2001173558A5 true JP2001173558A5 (https=) 2004-11-25
JP3969947B2 JP3969947B2 (ja) 2007-09-05

Family

ID=26555010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000305116A Expired - Lifetime JP3969947B2 (ja) 1999-10-04 2000-10-04 真空排気システム

Country Status (1)

Country Link
JP (1) JP3969947B2 (https=)

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