JP3969947B2 - 真空排気システム - Google Patents
真空排気システム Download PDFInfo
- Publication number
- JP3969947B2 JP3969947B2 JP2000305116A JP2000305116A JP3969947B2 JP 3969947 B2 JP3969947 B2 JP 3969947B2 JP 2000305116 A JP2000305116 A JP 2000305116A JP 2000305116 A JP2000305116 A JP 2000305116A JP 3969947 B2 JP3969947 B2 JP 3969947B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- exhaust
- vacuum
- pipe
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 description 8
- 125000006850 spacer group Chemical group 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000012265 solid product Substances 0.000 description 4
- 230000004323 axial length Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 235000013399 edible fruits Nutrition 0.000 description 2
- 230000005489 elastic deformation Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Images
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000305116A JP3969947B2 (ja) | 1999-10-04 | 2000-10-04 | 真空排気システム |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28336799 | 1999-10-04 | ||
| JP11-283367 | 1999-10-04 | ||
| JP2000305116A JP3969947B2 (ja) | 1999-10-04 | 2000-10-04 | 真空排気システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001173558A JP2001173558A (ja) | 2001-06-26 |
| JP2001173558A5 JP2001173558A5 (https=) | 2004-11-25 |
| JP3969947B2 true JP3969947B2 (ja) | 2007-09-05 |
Family
ID=26555010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000305116A Expired - Lifetime JP3969947B2 (ja) | 1999-10-04 | 2000-10-04 | 真空排気システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3969947B2 (https=) |
-
2000
- 2000-10-04 JP JP2000305116A patent/JP3969947B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001173558A (ja) | 2001-06-26 |
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