JP2001172039A - Method for producing quartz glass preform for optical fiber - Google Patents
Method for producing quartz glass preform for optical fiberInfo
- Publication number
- JP2001172039A JP2001172039A JP35440899A JP35440899A JP2001172039A JP 2001172039 A JP2001172039 A JP 2001172039A JP 35440899 A JP35440899 A JP 35440899A JP 35440899 A JP35440899 A JP 35440899A JP 2001172039 A JP2001172039 A JP 2001172039A
- Authority
- JP
- Japan
- Prior art keywords
- rod
- base material
- quartz glass
- sintering
- preform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01486—Means for supporting, rotating or translating the preforms being formed, e.g. lathes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、石英ガラス、特に
は、紡糸して光通信用光ファイバを得るのに好適な光フ
ァイバ用石英ガラス母材の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing silica glass, and more particularly to a method for producing a silica glass preform suitable for obtaining an optical fiber for optical communication by spinning.
【０００２】[0002]
【従来の技術】光ファイバ用石英ガラス母材の製造は、
四塩化ケイ素ＳｉＣｌ4などのガラス原料を酸水素火炎
中で火炎加水分解させ、生成したガラス微粒子（スー
ト）を、回転している耐熱性の種棒またはダミー部を有
するターゲット棒上に堆積し、成長させて多孔質母材を
製造し、脱水・焼結するという方法で行われている。種
棒またはターゲット棒には、通常、石英ガラスが用いら
れ、図４の（ａ）〜（ｄ）に示すように、製造装置に取
り付けるための切り込み凹部１または穴部２の加工が施
されている。なお、図４の（ａ），（ｂ）は、ＶAＤ法
で生じたスートを種棒３上に堆積させたものであり、
（ｃ），（ｄ）は、ＯＶＤ法でスートを石英ガラス製の
ターゲット棒４上に堆積させてスート堆積体すなわち多
孔質母材５を形成したものである。ターゲット棒４の両
端にはダミー部６が設けられている。2. Description of the Related Art Quartz glass preforms for optical fibers are manufactured by:
Glass raw materials such as silicon tetrachloride SiCl 4 are flame-hydrolyzed in an oxyhydrogen flame, and the generated glass fine particles (soot) are deposited on a rotating heat-resistant seed rod or a target rod having a dummy part, It is performed by a method of producing a porous base material by growing it, followed by dehydration and sintering. Usually, quartz glass is used for the seed rod or the target rod, and as shown in FIGS. 4A to 4D, the cut recess 1 or the hole 2 for attachment to the manufacturing apparatus is processed. I have. 4 (a) and 4 (b) show the soot generated by the VAD method deposited on the seed rod 3.
(C) and (d) show a soot deposited body, that is, a porous base material 5 formed by depositing soot on a target rod 4 made of quartz glass by the OVD method. Dummy parts 6 are provided at both ends of the target rod 4.
【０００３】製造した多孔質母材を次の脱水・焼結工程
あるいは保管場所に搬送する際のハンドリングは、多孔
質母材の破損および汚れを防止するために、種棒または
ターゲット棒の部分を把持して行っている。しかし、多
孔質母材が短尺で軽量の場合は、人手によるハンドリン
グにて対応できるが、大型化に伴い多孔質母材が長尺で
重量物になると、人手によるハンドリングは困難とな
り、専用の搬送装置が必要である。この搬送装置は設備
コストが高く、しかも種棒やターゲット棒の外径が不均
一な場合や曲りがある場合には滑らせて多孔質母材を落
下させてしまう、という欠点がある。In handling the manufactured porous base material in the next dehydration / sintering step or in a storage place, in order to prevent breakage and contamination of the porous base material, a portion of a seed rod or a target rod is removed. I am holding it. However, if the porous base material is short and lightweight, it can be handled by hand.However, if the porous base material becomes long and heavy due to the increase in size, it becomes difficult to handle by hand, and a special transport Equipment is required. This transfer device has the drawback that the equipment cost is high, and when the outer diameter of the seed rod or the target rod is uneven or bent, the porous base material is dropped by sliding.
【０００４】そこで、この問題を解決するために、特開
平７−４１３３０号公報は、ＶＡＤ法で多孔質母材を製
造するに際し、種棒またはターゲット棒の２箇所以上に
突起部を設けて多孔質母材を製造した後、上方の突起部
に第１の受部材を嵌合させて固定し、次に、下方の突起
部に、搬送装置に取り付けられた第２の受部材を嵌合さ
せてから、製造装置に取付けられた支持棒と種棒との接
続を切り離し、さらに第１、第２の受部材を取り外した
後、多孔質母材を搬送する方法を提案している。これに
より多孔質母材のハンドリングが簡易となり、スート堆
積体を破損することなく、容易に搬送できるようにな
り、さらに、突起部及び凹部を２箇所以上設けたことで
ハンドリングの際の掴み替えが容易であるとしている。In order to solve this problem, Japanese Patent Laid-Open Publication No. Hei 7-41330 discloses a method of manufacturing a porous base material by the VAD method by providing protrusions at two or more places of a seed rod or a target rod. After the base material is manufactured, the first receiving member is fitted and fixed to the upper protrusion, and then the second receiving member attached to the transfer device is fitted to the lower protrusion. After that, a method has been proposed in which the connection between the support rod and the seed rod attached to the manufacturing apparatus is disconnected, the first and second receiving members are removed, and then the porous preform is transported. As a result, the handling of the porous base material is simplified, so that the soot deposit can be easily transported without being damaged, and furthermore, by providing two or more projections and recesses, it is possible to change the grip at the time of handling. Easy to do.
【０００５】[0005]
【発明が解決しようとする課題】しかし、ターゲット棒
の２箇所以上に突起部を設けると、以下の問題が生じ
る。図５は、ターゲット棒４の有効ターゲット部７に突
起部８を設けてＯＶＤ法により、火炎加水分解で生じた
スートを有効ターゲット部７上に堆積させて多孔質母材
５を製造する場合の概略図を示している。図５に示すよ
うに、突起部８の数が増すにつれて、矢印線で示すよう
に、スートの堆積領域である有効ターゲット部７が減少
して行くことが分かる。なお、符号９はターゲット棒の
ダミー部を支持する支持棒を把持し回転させるためのチ
ャックである。However, if the projections are provided at two or more locations on the target bar, the following problems occur. FIG. 5 shows a case where the projection 8 is provided on the effective target portion 7 of the target rod 4 and soot generated by flame hydrolysis is deposited on the effective target portion 7 by the OVD method to produce the porous base material 5. FIG. As shown in FIG. 5, as the number of protrusions 8 increases, the effective target portion 7, which is the soot deposition region, decreases as indicated by the arrow line. Reference numeral 9 denotes a chuck for holding and rotating a support rod for supporting the dummy portion of the target rod.
【０００６】このように多孔質母材のハンドリングの面
から考えると、ターゲット棒に複数の突起物が必要であ
るが、その反面、装置の支持スパンが限られているた
め、多孔質母材の堆積領域が減少し、生産性が低下す
る。そこで、本発明の目的は、上記課題を解決するため
に、種棒またはターゲット棒上へのスートの堆積領域を
大きく確保することができ、簡易に多孔質母材をハンド
リングすることのできる光ファイバ用石英ガラス母材の
製造方法を提供することにある。In view of the handling of the porous base material as described above, a plurality of projections are required on the target rod, but on the other hand, the support span of the apparatus is limited, so that the target base rod is limited. The deposition area is reduced and productivity is reduced. Therefore, an object of the present invention is to solve the above-mentioned problem, to provide a large soot deposition area on a seed rod or a target rod, and to easily handle a porous preform. It is an object of the present invention to provide a method for producing a quartz glass base material for use.
【０００７】[0007]
【課題を解決するための手段】本発明は、ガラス原料を
酸水素火炎中に供給し、火炎加水分解反応により生成し
たガラス微粒子を、回転している種棒またはダミー部を
有するターゲット棒上に堆積して得た多孔質母材を脱
水、焼結する石英ガラス母材の製造方法において、ガラ
ス微粒子を堆積して得た多孔質母材を脱水・焼結工程に
搬送する際に、種棒またはターゲット棒のダミー部に設
けられた穴部または凹部に搬送用部材を取り付け、該搬
送用部材を搬送装置の受け部材に嵌合させて搬送を行
い、搬送後、該搬送用部材を取り外しまたは取り付けた
状態で、脱水、焼結して透明ガラス化することを特徴と
している。According to the present invention, a glass raw material is supplied into an oxyhydrogen flame, and fine glass particles produced by the flame hydrolysis reaction are placed on a rotating seed rod or a target rod having a dummy part. In a method for producing a quartz glass preform for dehydrating and sintering a porous preform obtained by deposition, a seed rod is used when a porous preform obtained by depositing glass fine particles is transported to a dehydration / sintering step. Alternatively, a transfer member is attached to a hole or a concave portion provided in the dummy portion of the target rod, the transfer member is fitted to a receiving member of the transfer device to perform transfer, and after transfer, the transfer member is removed or It is characterized in that it is dehydrated and sintered to form a transparent glass in the attached state.
【０００８】このように本発明の製造方法は、製造工程
から脱水・焼結工程へ、多孔質母材を搬送するのに、種
棒またはターゲット棒に設けられた突起部または凹部と
搬送装置の受け部材とを嵌合させて搬送する従来の方法
とは異なり、多孔質母材の製造または焼結装置へ取り付
ける際に用いていた、種棒またはターゲット棒の切り込
み凹部または穴部に搬送用部材を取り付け、この搬送用
部材と搬送装置の受け部材とを嵌合させ、この嵌合状態
のままで多孔質母材の搬送を行うものである。As described above, according to the manufacturing method of the present invention, the transfer of the porous base material from the manufacturing process to the dewatering / sintering process is performed by using the protrusions or recesses provided on the seed rod or the target rod and the transfer device. Unlike the conventional method in which the receiving member is fitted and transported, the transporting member is inserted into the cut recess or the hole of the seed rod or the target rod, which has been used when manufacturing the porous base material or attaching it to the sintering apparatus. Is attached, the transfer member and the receiving member of the transfer device are fitted, and the porous base material is transferred in the fitted state.
【０００９】[0009]
【発明の実施の形態】以下、本発明の態様を図を用いて
さらに詳細に説明する。従来、ガラス微粒子を堆積させ
る耐熱性の種棒またはダミー部を有するターゲット棒に
は、装置に取り付けるために図４に示したような、切り
込み凹部１または穴部２が設けられているが、本発明で
は、図１の（ａ）〜（ｄ）に示すように、凹部１または
穴部２が複数箇所に設けられた耐熱性の種棒３またはダ
ミー部６を有するターゲット棒４を用いて多孔質母材５
の製造が行われる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings. Conventionally, a heat-resistant seed rod for depositing glass fine particles or a target rod having a dummy portion is provided with a notch recess 1 or a hole 2 as shown in FIG. In the present invention, as shown in FIGS. 1A to 1D, a porous material is formed by using a heat-resistant seed rod 3 having a plurality of concave portions 1 or holes 2 or a target rod 4 having a dummy portion 6. Quality base material 5
Is manufactured.
【００１０】ガラス微粒子の堆積を終えた多孔質母材の
凹部１または穴部２に搬送用部材を取り付ける。図２の
（ａ）〜（ｄ）に搬送用部材１０の例を示す。（ａ）
は、搬送用部材１０である球状部材に、種棒３またはダ
ミー部６を通すための貫通穴１１を設け、さらにこれと
直交する方向にピン貫通穴１２を設けたものであり、
（ｂ）は、円柱状部材に同様に貫通穴１１とピン貫通穴
１２を設けたものであり、（ｃ）は、一部が円錐状をな
す部材に同様に貫通穴１１とピン貫通穴１２を設けたも
のである。なお、搬送用部材およびピンの材質は、高温
の腐食性雰囲気に耐えることのできるＳｉ3Ｎ4、Ｓｉ
Ｃ、Ａｌ2Ｏ3等の耐熱性セラミックスが挙げられる。な
お、焼結工程で取り外す場合には、ＳＵＳ材またはアル
ミ材でもよい。A transport member is attached to the concave portion 1 or the hole portion 2 of the porous base material on which the deposition of the glass particles has been completed. FIGS. 2A to 2D show examples of the transfer member 10. (A)
Is provided with a through-hole 11 for passing the seed rod 3 or the dummy portion 6 in a spherical member as the conveying member 10, and further provided with a pin through-hole 12 in a direction orthogonal to this.
(B) is a cylindrical member provided with a through hole 11 and a pin through hole 12 in the same manner, and (c) is a member having a partly conical shape similarly having a through hole 11 and a pin through hole 12. Is provided. The material of the transfer member and the pin is made of Si 3 N 4 , Si that can withstand a high-temperature corrosive atmosphere.
C, heat-resistant ceramics such as Al 2 O 3 . When removing in the sintering step, SUS material or aluminum material may be used.
【００１１】種棒３またはダミー部６への搬送用部材１
０の取り付けは、貫通穴１１に種棒３またはダミー部６
を挿通し、ピン貫通穴１２にピンを通すことにより固定
することができる。その後、種棒またはターゲット棒の
ダミー部に搬送用部材が取り付けられた多孔質母材は、
搬送用部材を搬送装置の受け部材に嵌合させて、次の焼
結工程へと搬送される。[0011] Transfer member 1 to seed rod 3 or dummy section 6
0 is attached to the seed rod 3 or the dummy part 6
Can be fixed by passing a pin through the pin through hole 12. After that, the porous base material with the transfer member attached to the dummy part of the seed rod or target rod,
The transfer member is fitted to the receiving member of the transfer device and transferred to the next sintering step.
【００１２】[0012]
【実施例】次に、実施例および比較例を挙げるが、本発
明はこれらの実施例に限定されるものではない。 （実施例１）酸水素火炎バーナーに四塩化ケイ素ガスを
供給し、ＯＶＤ法により生成したガラス微粒子を、図１
の（ｄ）に示したようなダミー部6に直径５ｍｍφの貫
通穴２が２箇所に設けられたターゲット棒４に堆積させ
て、直径２００ｍｍφで母材としての有効部の長さが１
５００ｍｍの多孔質母材５を製造した。その後、図２の
（ａ）に示すような球状の２つの搬送用部材１０をダミ
ー部６に挿通して取り付け、それぞれダミー部６の貫通
穴２と搬送用部材１０のピン貫通穴１２との位置を合わ
せてピンを通し固定した。ここで搬送用部材１０の取り
付け間隔は１２０ｍｍとした。搬送用部材１０を用いた
ことにより、スートの堆積領域を８．７％増加させるこ
とができた。The following examples and comparative examples are given, but the present invention is not limited to these examples. (Example 1) By supplying silicon tetrachloride gas to an oxyhydrogen flame burner, glass fine particles generated by the OVD method were mixed with each other in FIG.
A through hole 2 having a diameter of 5 mmφ is deposited on a target rod 4 provided at two places in a dummy portion 6 as shown in FIG.
A 500 mm porous preform 5 was produced. Thereafter, two spherical transfer members 10 as shown in FIG. 2A are inserted into and attached to the dummy portion 6, and the through holes 2 of the dummy portion 6 and the pin through holes 12 of the transfer member 10 are respectively connected. The pins were aligned and fixed through a pin. Here, the mounting interval of the transfer member 10 was 120 mm. The use of the transfer member 10 increased the soot deposition area by 8.7%.
【００１３】その後、ダミー部に取り付けた母材から遠
い方の搬送用部材を、搬送装置の受け部に嵌合して焼結
装置まで搬送した後、焼結装置に設けた受け部ともう１
つの搬送用部材とを嵌合させて、多孔質母材を焼結装置
に受け渡した。その後、焼結炉内に多孔質母材を搬入す
るため、焼結装置の受け部とダミー部の搬送用部材とが
嵌合した状態で、回転機能を有する支持用チャックに固
定された支持棒の先端にダミー部の先端を挿入して固定
し、ダミー部に搬送用部材を取り付けたままの状態で焼
結を行ない、光ファイバ用石英ガラス母材を製造した。[0013] Thereafter, the transfer member farther from the base material attached to the dummy portion is fitted into the receiving portion of the transfer device and transferred to the sintering device.
The two carrier members were fitted together and the porous base material was delivered to the sintering device. Thereafter, in order to carry the porous base material into the sintering furnace, the support rod fixed to the support chuck having a rotating function in a state where the receiving portion of the sintering device and the transfer member of the dummy portion are fitted. The tip of the dummy part was inserted and fixed at the tip of, and sintering was performed with the transport member attached to the dummy part to produce a quartz glass preform for optical fibers.
【００１４】（実施例２）酸水素火炎バーナーに四塩化
ケイ素ガスを供給し、ＯＶＤ法で生成したガラス微粒子
を、図３の（ｂ）に示したようなダミー部６に直径５ｍ
ｍφの貫通穴２が１つと、さらに母材よりに石英ガラス
からなる突起部１３が設けられたターゲット棒４に堆積
させて、直径２００ｍｍφで母材としての有効部の長さ
が１５００ｍｍの多孔質母材５を製作した。その後、図
２の（ａ）に示すような球状の搬送用部材１０をダミー
部６に挿通して取り付け、ダミー部６の貫通穴２と搬送
用部材１０のピン貫通穴１２との位置を合わせてピンを
通し固定した。搬送用部材１０と石英ガラスからなる突
起部１３との間隔は１２０ｍｍとした。搬送用部材１０
を用いたことにより、スートの堆積領域を８．７％増加
させることができた。(Example 2) A silicon tetrachloride gas was supplied to an oxyhydrogen flame burner, and glass fine particles generated by the OVD method were placed in a dummy section 6 as shown in FIG.
A single through-hole 2 having a diameter of 200 mm and a target rod 4 having a projection 13 made of quartz glass provided on a base material and having a diameter of 200 mm and an effective portion serving as a base material having a length of 1500 mm. Base material 5 was produced. Thereafter, a spherical transfer member 10 as shown in FIG. 2A is inserted into and attached to the dummy portion 6 and the through hole 2 of the dummy portion 6 and the pin through hole 12 of the transfer member 10 are aligned. And fixed through a pin. The distance between the conveying member 10 and the projection 13 made of quartz glass was 120 mm. Conveying member 10
By using, the soot deposition area could be increased by 8.7%.
【００１５】その後、ダミー部に設けられた突起部を搬
送装置の受け部に嵌合させて焼結装置まで搬送し、ダミ
ー部に取り付けた球状の搬送部材を焼結装置に設けた受
け部に嵌合させて、多孔質母材を焼結装置に受け渡し
た。その後、焼結炉内に多孔質母材を搬入するため、ダ
ミー部に設けられた突起部を焼結装置の受け部に嵌合し
た後、搬送部材をダミー部から取り外し、回転機能を有
する支持用チャックに固定された支持棒の先端にダミー
部の先端を挿入し固定した。本実施例においては、搬送
用部材は、焼結工程で取り外すことが可能であるため、
搬送用部材の材質はＳＵＳ材またはアルミ材とした。Thereafter, the projection provided on the dummy portion is fitted to the receiving portion of the transfer device and transferred to the sintering device, and the spherical transfer member attached to the dummy portion is transferred to the receiving portion provided on the sintering device. After fitting, the porous preform was delivered to the sintering apparatus. Thereafter, in order to carry the porous base material into the sintering furnace, the protrusion provided on the dummy portion is fitted into the receiving portion of the sintering device, and then the transport member is removed from the dummy portion, and the support having the rotation function is provided. The tip of the dummy part was inserted into and fixed to the tip of the support rod fixed to the chuck. In the present embodiment, since the transport member can be removed in the sintering process,
The material of the transfer member was SUS or aluminum.
【００１６】（比較例１）酸水素火炎バーナーに四塩化
ケイ素ガスを供給し、ＯＶＤ法により生成したガラス微
粒子を、図３の（ａ）に示したようなダミー部６の先端
近傍に直径５ｍｍφの貫通穴２が１つと、さらに母材よ
りに石英ガラスからなる突起部８が２つ設けられたター
ゲット棒４に堆積させて、直径２００ｍｍφで母材とし
ての有効部の長さが１３８０ｍｍの多孔質母材５を製作
した。その後、母材から遠い方の突起部８を搬送装置の
受け部に嵌合して焼結装置まで搬送した後、他方の突起
部８を焼結装置の受け部に嵌合し、多孔質母材５を焼結
装置に受け渡した。本比較例においては、ターゲット棒
のダミー部に２つの突起部を設けたため、多孔質母材の
有効部の長さが１３８０ｍｍと短いものであった。(Comparative Example 1) A silicon tetrachloride gas was supplied to an oxyhydrogen flame burner, and glass fine particles generated by the OVD method were placed near the tip of a dummy portion 6 as shown in FIG. Is deposited on a target rod 4 provided with one through hole 2 and two projections 8 made of quartz glass rather than a base material, and a hole having a diameter of 200 mm and an effective portion serving as a base material having a length of 1380 mm. The quality base material 5 was produced. After that, the protrusion 8 farther from the base material is fitted into the receiving portion of the transfer device and transported to the sintering device. Then, the other protrusion 8 is fitted into the receiving portion of the sintering device, and Material 5 was delivered to the sintering apparatus. In this comparative example, the length of the effective portion of the porous base material was as short as 1380 mm because two projections were provided on the dummy portion of the target bar.
【００１７】[0017]
【発明の効果】上記したように本発明によれば、多孔質
母材のハンドリングが容易で、ターゲット棒へのスート
の堆積領域が従来よりも長くなり、光ファイバ用石英ガ
ラス母材の製造コストの大幅な削減が可能となった。As described above, according to the present invention, the handling of the porous preform is easy, the soot deposition area on the target rod is longer than before, and the production cost of the quartz glass preform for optical fibers is increased. It became possible to greatly reduce
【図１】 （ａ）〜（ｄ）は、それぞれ異なる態様の種
棒およびターゲット棒を示す縦断面図である。FIGS. 1A to 1D are longitudinal sectional views showing a seed rod and a target rod in different modes, respectively.
【図２】 （ａ）〜（ｃ）は、それぞれ異なる態様の搬
送用部材を示す概略斜視図である。FIGS. 2A to 2C are schematic perspective views showing transport members in different modes.
【図３】 （ａ），（ｂ）は、種棒およびターゲット棒
のそれぞれ異なる態様を示す断面図である。FIGS. 3A and 3B are cross-sectional views showing different modes of a seed rod and a target rod.
【図４】 （ａ）〜（ｄ）は、従来の種棒およびターゲ
ット棒を示す縦断面図である。4A to 4D are longitudinal sectional views showing a conventional seed bar and a target bar.
【図５】 ＯＶＤ法でのターゲット棒に設けた突起部の
数とスートの堆積領域との関係を示す断面図である。FIG. 5 is a cross-sectional view showing a relationship between the number of protrusions provided on a target bar in the OVD method and a soot deposition region.
【符号の説明】 １ 凹部 ２ 穴部 ３ 種棒 ４ ターゲット棒 ５ 多孔質母材 ６ ダミー部 ７ 有効ターゲット部 ８ 突起部 ９ 支持チャック １０ 搬送用部材 １１ 貫通穴 １２ ピン貫通穴[Description of Signs] 1 Concave portion 2 Hole portion 3 Seed bar 4 Target bar 5 Porous base material 6 Dummy portion 7 Effective target portion 8 Projection portion 9 Support chuck 10 Transport member 11 Through hole 12 Pin through hole
───────────────────────────────────────────────────── フロントページの続き (72)発明者 津村 寛 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 (72)発明者 小出 弘行 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 (72)発明者 平沢 秀夫 群馬県安中市磯部２丁目13番１号 信越化 学工業株式会社精密機能材料研究所内 Ｆターム(参考） 4G015 GD00 4G021 BA00 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Hiroshi Tsumura 2-13-1, Isobe, Annaka-shi, Gunma Shin-Etsu Kagaku Kogyo Co., Ltd. Precision Functional Materials Laboratory (72) Inventor Hiroyuki Koide Annaka-shi, Gunma 2-13-1, Isobe Shin-Etsu Chemical Industry Co., Ltd. Precision Functional Materials Research Laboratory (72) Inventor Hideo Hirasawa 2-13-1, Isobe, Annaka-shi, Gunma Prefecture Shin-Etsu Chemical Co., Ltd. Precision Functional Materials Research Laboratory F-term (Reference) 4G015 GD00 4G021 BA00
Claims (1)
炎加水分解反応により生成したガラス微粒子を、回転し
ている種棒またはダミー部を有するターゲット棒上に堆
積して得た多孔質母材を脱水、焼結する石英ガラス母材
の製造方法において、ガラス微粒子を堆積して得た多孔
質母材を脱水・焼結工程に搬送する際に、種棒またはタ
ーゲット棒のダミー部に設けられた穴部または凹部に搬
送用部材を取り付け、該搬送用部材を搬送装置の受け部
材に嵌合させて搬送を行い、搬送後、該搬送用部材を取
り外しまたは取り付けた状態で、脱水、焼結して透明ガ
ラス化することを特徴とする光ファイバ用石英ガラス母
材の製造方法。1. A porous mother material obtained by feeding a glass raw material into an oxyhydrogen flame and depositing glass fine particles generated by a flame hydrolysis reaction on a rotating seed rod or a target rod having a dummy part. In the method of manufacturing a quartz glass base material for dehydrating and sintering a material, when a porous base material obtained by depositing glass fine particles is transported to a dehydration / sintering step, the porous base material is provided on a dummy portion of a seed rod or a target rod. The transfer member is attached to the hole or the recess formed, the transfer member is fitted to the receiving member of the transfer device, and the transfer is performed. After the transfer, the transfer member is removed or attached, and dehydration and burning are performed. A method for producing a quartz glass preform for an optical fiber, the method comprising forming a transparent glass by bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35440899A JP4451527B2 (en) | 1999-12-14 | 1999-12-14 | Method for producing quartz glass preform for optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35440899A JP4451527B2 (en) | 1999-12-14 | 1999-12-14 | Method for producing quartz glass preform for optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001172039A true JP2001172039A (en) | 2001-06-26 |
| JP4451527B2 JP4451527B2 (en) | 2010-04-14 |
Family
ID=18437364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35440899A Expired - Fee Related JP4451527B2 (en) | 1999-12-14 | 1999-12-14 | Method for producing quartz glass preform for optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4451527B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004182595A (en) * | 2002-12-04 | 2004-07-02 | Fitel Usa Corp | Rod-in tube optical fiber preform and method of drawing the same |
-
1999
- 1999-12-14 JP JP35440899A patent/JP4451527B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004182595A (en) * | 2002-12-04 | 2004-07-02 | Fitel Usa Corp | Rod-in tube optical fiber preform and method of drawing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4451527B2 (en) | 2010-04-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR970006995B1 (en) | Method and apparatus for production of glass preform for optical fiber | |
| JP3406107B2 (en) | Manufacturing method of quartz glass | |
| JP3191418B2 (en) | Optical fiber manufacturing method | |
| JP2001172039A (en) | Method for producing quartz glass preform for optical fiber | |
| JP2003171137A (en) | Method for manufacturing optical fiber preform | |
| JP3875410B2 (en) | Manufacturing method for quartz glass objects | |
| JP2005263577A (en) | Apparatus for manufacturing glass preform for optical fiber | |
| JP2001172025A (en) | Apparatus for producing quartz glass and method therefor | |
| JPH03109231A (en) | Production of optical fiber porous preform | |
| JP3066230B2 (en) | Method for producing quartz glass preform for optical fiber | |
| US7387000B2 (en) | Method of producing a hollow glass cylinder with suspension during sintering | |
| JPS62256733A (en) | Production of synthetic quartz tube | |
| JP4030919B2 (en) | Optical fiber preform manufacturing method and preform suspension used for hanging | |
| JP3524209B2 (en) | Method for producing glass preform for optical fiber | |
| JP3064276B1 (en) | Apparatus for producing porous preform for optical fiber and glass rod for optical fiber | |
| JPH05147964A (en) | Structure for connecting optical fiber base material | |
| JP2818349B2 (en) | Manufacturing method of quartz glass base material | |
| JP2820212B2 (en) | Manufacturing method of preform for optical fiber | |
| JP3169503B2 (en) | Method for producing porous glass preform for optical fiber | |
| JP2004115289A (en) | Manufacturing process of ingot for optical fiber preform and hanging member used in the process | |
| JPS58161935A (en) | Method and device for production of preform for optical fiber by internal cvd method | |
| JPH05193957A (en) | Device for supporting glass article | |
| JP2002249342A (en) | Glass body and method for manufacturing it | |
| JP2000264666A (en) | Optical fiber preform | |
| JP2000233933A (en) | Production of porous-glass base material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20051117 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080611 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080616 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080815 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081201 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081204 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100125 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100128 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 4451527 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130205 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160205 Year of fee payment: 6 |
|
| LAPS | Cancellation because of no payment of annual fees |