JPH03109231A - Production of optical fiber porous preform - Google Patents
Production of optical fiber porous preformInfo
- Publication number
- JPH03109231A JPH03109231A JP24722589A JP24722589A JPH03109231A JP H03109231 A JPH03109231 A JP H03109231A JP 24722589 A JP24722589 A JP 24722589A JP 24722589 A JP24722589 A JP 24722589A JP H03109231 A JPH03109231 A JP H03109231A
- Authority
- JP
- Japan
- Prior art keywords
- burner
- burners
- optical fiber
- diameter
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000151 deposition Methods 0.000 claims abstract description 29
- 230000008021 deposition Effects 0.000 claims abstract description 24
- 239000011521 glass Substances 0.000 claims abstract description 23
- 239000010419 fine particle Substances 0.000 claims abstract description 10
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 8
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 abstract description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052799 carbon Inorganic materials 0.000 abstract description 3
- 239000010453 quartz Substances 0.000 abstract description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 3
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 3
- 239000005049 silicon tetrachloride Substances 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 16
- 150000003377 silicon compounds Chemical class 0.000 description 5
- 239000005373 porous glass Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003301 hydrolyzing effect Effects 0.000 description 3
- 239000003779 heat-resistant material Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
- C03B2207/52—Linear array of like burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/66—Relative motion
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/70—Control measures
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は光ファイバ多孔質母材、特にはけい素化合物を
複数の酸水素火炎バーナーで加水分解して得たガラス微
粒子を担体上に堆積させる外付けＣＶＤ法により、大型
の光ファイバ多孔質母材を生産性よく製造する方法に関
するものである。Detailed Description of the Invention (Field of Industrial Application) The present invention is an optical fiber porous base material, in particular, a method of depositing glass particles obtained by hydrolyzing a silicon compound with a plurality of oxyhydrogen flame burners on a carrier. The present invention relates to a method for manufacturing a large-sized optical fiber porous base material with good productivity by an external CVD method.
（従来の技術）
光ファイバ母材は、けい素化合物を酸水素火炎バーナー
で加水分解して得たガラス微粒子を耐熱性の担体上に堆
積するという外付けＣＶＤ法によって多孔質母材を作り
、これを焼結し、透明ガラス化することによって作られ
ているが、この多孔質母材の大型化およびその生産性向
上のためにはこのバーナーを複数個使用する方法が汎用
されている。(Prior art) A porous optical fiber base material is made by an external CVD method in which glass particles obtained by hydrolyzing a silicon compound with an oxyhydrogen flame burner are deposited on a heat-resistant carrier. It is made by sintering this porous base material and turning it into transparent glass, and in order to increase the size of this porous base material and improve its productivity, a method of using a plurality of burners is commonly used.
（発明が解決しようとする課題）
しかし、この外付けＣＶＤ法による多孔質母材の製造に
おいて複数のバーナーを用いる場合、通常このバーナー
は一定間隔で設置されており、この間隔が小さくて２つ
のバーナーが近づきすぎると火炎同志が干渉し合うため
にガラス微粒子の堆積効率が低下し、またこの間隔が大
ぎくてバーナー間隔が開きすぎるとガラス微粒子堆積部
の両端テーパー部が大きくなって有効部が短かくなり、
歩留りがわるくなるという不利がある。(Problem to be solved by the invention) However, when a plurality of burners are used in the production of a porous base material by this external CVD method, the burners are usually installed at regular intervals, and if this interval is small, two If the burners are too close together, the flames will interfere with each other, reducing the deposition efficiency of glass particles.If this distance is too large and the burner interval is too wide, the tapered portions at both ends of the glass particle deposition area will become large, reducing the effective area. becomes shorter,
This has the disadvantage of lower yield.
（課題を解決するための手段）
本発明はこのような不利を解決することのできる光ファ
イバ多孔質母材の製造方法に関するものであり、これは
複数のバーナーを用いて外付けＣＶＤ法により担体上に
ガラス微粒子を堆積させて光ファイバ多孔質母材を製造
する方法において、該バーナーの間隔をガラス微粒子を
堆積の有効堆積部ではバーナー径の４倍以上とし、テー
パー部においてはバーナー径の３倍以上とすることを特
徴とするものである。(Means for Solving the Problems) The present invention relates to a method for manufacturing an optical fiber porous preform that can solve these disadvantages. In a method of manufacturing an optical fiber porous preform by depositing glass particles thereon, the interval between the burners is set to 4 times or more the burner diameter in the effective deposition area for depositing the glass particles, and 3 times the burner diameter in the tapered part. It is characterized by being more than twice as large.
すなわち、本発明者らは酸水素火炎バーナーを複数本使
用する外付けＣＶＤ法によって光ファイバ多孔質母材を
製造する方法において、これを効率よ〈実施する方法に
ついて種々検討した結果、第２図に示すようにここに使
用する複数個のバーナーの間隔を固定化せずにこれを可
動とし、有効堆積部においてはこのバーナー間隔をバー
ナー径の４倍以上とすると各バーナーの火炎同志が干渉
し合うことがなくなるので、この部分でのガラス微粒子
の堆積効率を８５％以上とすることができること、また
第３図に示すようにテーパー部についてはこのバーナー
間隔をバーナー径の３倍以下とするとこのテーパー部を
ほぼ一定で最小値とすることができることを見出し、そ
の結果有効堆積部を最長とすることができるということ
を確認して本発明を完成させた。That is, the present inventors conducted various studies on efficient methods of manufacturing an optical fiber porous base material by an external CVD method using multiple oxyhydrogen flame burners, and as a result, the results shown in FIG. As shown in the figure, if the interval between the multiple burners used here is not fixed but is movable, and the interval between the burners is set to four times or more the burner diameter in the effective deposition section, the flames of each burner will interfere with each other. Since they will not match, the deposition efficiency of glass particles in this part can be increased to 85% or more, and as shown in Figure 3, in the tapered part, if the burner spacing is set to 3 times the burner diameter or less, this can be achieved. The present invention was completed by discovering that the taper portion can be kept almost constant and at a minimum value, and as a result, by confirming that the effective deposition portion can be made the longest.
以下これをさらに詳述する。This will be explained in more detail below.
（作用）
本発明による光ファイバ多孔質母材の製造は外付けＣＶ
Ｄ法で行なわれる。(Function) The production of the optical fiber porous base material according to the present invention is performed using an external CV
This is done using method D.
これは四塩化けい素（ＳｉＣｊ２４）などのけい素化合
物を酸水素火炎バーナーに送り、この酸水素火炎で加水
分解してガラス微粒子を生成させ、これを合成石英、炭
化けい素、炭素などの耐熱性材料からなる担体上に堆積
して多孔質ガラス母材とするのであるが、この担体上へ
のガラス微粒子の堆積を増加させるために本発明の方法
ではこの酸水素火炎バーナーが２個または２個以上の複
数個で行なわれる。In this process, silicon compounds such as silicon tetrachloride (SiCj24) are sent to an oxyhydrogen flame burner, and the oxyhydrogen flame hydrolyzes them to produce glass particles, which are then processed into heat-resistant materials such as synthetic quartz, silicon carbide, and carbon. In order to increase the deposition of glass fine particles on the carrier, in the method of the present invention, two or two oxyhydrogen flame burners are used. This is done in multiple units.
つぎにこれを添付の図面にともづいて説明する。第１図
は本発明の方法による光ファイバ多孔質母材の製造装置
の縦断面図を示したものであり、光ファイバ多孔質母材
１は合成石英、炭化けい素、炭素などのような耐熱性の
担体２の上に、四塩化けい素などのガス状けい素化合物
を送入している酸水素火炎バーナー３−１．３−２・・
・などでけい素化合物を加水分解して得たガラス微粒子
４を堆積させることによって作られるが、このバーナー
３−１．３−２はバーナー台５にバーナー間隔が調整で
きるように載置されており、このものは多孔質母材の直
径を略々均一にするということから担体２またはこのバ
ーナー台５のいずれかまたは両者が左右に一定の速度で
移動できるようにされている。Next, this will be explained based on the attached drawings. FIG. 1 shows a longitudinal cross-sectional view of an apparatus for producing an optical fiber porous preform according to the method of the present invention, and the optical fiber porous preform 1 is made of heat-resistant material such as synthetic quartz, silicon carbide, carbon, etc. An oxyhydrogen flame burner 3-1, 3-2, which feeds a gaseous silicon compound such as silicon tetrachloride onto the chemical carrier 2.
It is made by depositing glass fine particles 4 obtained by hydrolyzing a silicon compound, etc., and this burner 3-1.3-2 is placed on a burner stand 5 so that the burner interval can be adjusted. Since the porous base material has a substantially uniform diameter, either or both of the carrier 2 and the burner table 5 can be moved left and right at a constant speed.
このようにして作られた多孔質母材は図に示されている
ように径が略々均一とされている直胴部（以下これを有
効堆積部と略記する）と三角形状の端末部（以下これを
テーパー部と略記する）とによフて構成されているが、
本発明の方法ではこの多孔質母材１を大型のものとする
こと、またこの生産性を向上させるために酸水素火炎バ
ーナー３が複数個使用されている。As shown in the figure, the porous base material made in this way has a straight body part (hereinafter referred to as the effective deposition part) with a substantially uniform diameter and a triangular end part ( This is hereinafter abbreviated as the taper part).
In the method of the present invention, the porous base material 1 is made large, and a plurality of oxyhydrogen flame burners 3 are used to improve productivity.
しかして、この酸水素火炎バーナーは有効堆積部を形成
させるために少なくとも２本（３−１，３−２）が使用
されるが、この２木の酸水素火炎バーナー３−１．３−
２のバーナー間隔はバーナー径の４倍以上とする必要が
ある。これはバーナー間隔がバーナー径の４倍以下であ
るとバーナー火炎同志が干渉し合ってガラス微粒子４の
担体２への堆積収率が低下してしまうが、これをバーナ
ー径の４倍以上とすればバーナー火炎同志が干渉し合う
ことがなくなるので、ガラス微粒子の有効堆積部への堆
積収率を８５％以上とすることができる。Therefore, at least two of these oxyhydrogen flame burners (3-1, 3-2) are used to form an effective stack, and these two oxyhydrogen flame burners 3-1.3-
The interval between burners in step 2 must be at least four times the burner diameter. This is because if the burner spacing is less than 4 times the burner diameter, the burner flames will interfere with each other and the deposition yield of glass particles 4 on the carrier 2 will decrease, but if the burner spacing is 4 times or more the burner diameter, Since the burner flames do not interfere with each other, the deposition yield of glass fine particles in the effective deposition area can be increased to 85% or more.
また、このテーパー部におけるガラス微粒子の堆積はこ
のテーパー部が最終的には有効堆積部から切り離されて
回収されるもので光ファイバとされるものではなく、シ
たがってできるだけ小さいものとすることがよいので、
酸水素火炎バーナー３−１．３−２が担体２の両末端に
移動してきたときにはこのバーナー間隔をバーナー径の
３倍以下と小さくすることが必要であり、これによれば
この部位ではバーナー火炎同志が干渉し合うのでガラス
微粒子４の担体２への堆積収率がわるくなるが、テーパ
ー部を最小とすることができる。In addition, the accumulation of glass particles in this tapered part is ultimately separated from the effective deposited part and collected, and is not used as an optical fiber, so it is necessary to make it as small as possible. Because it's good,
When the oxyhydrogen flame burners 3-1 and 3-2 move to both ends of the carrier 2, it is necessary to reduce the interval between the burners to three times the burner diameter or less. Since the particles interfere with each other, the deposition yield of the glass particles 4 on the carrier 2 is reduced, but the tapered portion can be minimized.
すなわち、本発明による光ファイバ多孔質母材の製造は
、前記したように複数のバーナーを用いて外付けＣＶＤ
法で光ファイバ多孔質母材の製造する方法において、該
バーナーの間隔を有効堆積部ではバーナー径の４倍以上
とし、テーパー部ではバーナー径の３倍以下とするもの
であるが、これによれば最長の有効堆積部を得ることが
でき、ここでのガラス微粒子の堆積収率を８５％以上と
することができるので大口径の光ファイバ多孔質母材を
生産性よく製造することができるし、テーパー部は少さ
くすることができるのでこの面からも生産性を向上させ
ることができるという有利性が与えられる。That is, the optical fiber porous preform according to the present invention is manufactured by external CVD using a plurality of burners as described above.
In the method for manufacturing an optical fiber porous base material by the method, the interval between the burners is set to be at least 4 times the burner diameter in the effective stacking part and not more than 3 times the burner diameter in the tapered part. In this case, the longest effective deposition section can be obtained, and the deposition yield of glass particles can be increased to 85% or more, so that a large-diameter optical fiber porous base material can be manufactured with high productivity. Since the taper portion can be made smaller, this also provides an advantage in that productivity can be improved.
（実施例） つぎに本発明の実施例をあげる。(Example) Next, examples of the present invention will be given.
実施例
担体軸方向に平行に左右に往復運動できるように口径２
５ｍｍの可動性酸水素バーナ−２個を設置した第１図に
示した外付ＣＶＤ法装置を使用し、これに担体として直
径４０ｍｍφ、長さ８００ｍｍのコア用石英ガラスロッ
ドを設置し、４０ｒｐｍで回転させた。Example: The diameter of the carrier is 2 so that it can reciprocate from side to side parallel to the axial direction of the carrier.
Using the external CVD method shown in Fig. 1 equipped with two 5 mm movable oxyhydrogen burners, a quartz glass rod for the core with a diameter of 40 mmφ and a length of 800 mm was installed as a carrier. Rotated.
ついで装置中央に２本の酸水素火炎バーナーをバーナー
間隔がバーナー径の５倍である１２５ｍｍとなすように
設置する（図中の（Ｂ））と共に、これらを担体と平行
に左右に１００ｍｍ／分の速度で往復運動するようにし
、このバーナーに四塩化けい素（ＳｉＣ１４）を３００
ｇ／時、酸素ガスを４ｍ３／時、水素ガスを４ｍ３７時
で供給して着火し、この火炎中での５ｉＣｊ２４の加水
分解で発生したシリカ微粒子を担体上に堆積させ、この
バーナーが担体の両端に近づいたとき（図中の（Ａ）、
（Ｃ））にはこの２木のバーナー間隔をバーナー径の３
倍以下である４０ｍｍになるようにし、１０時間ガラス
微粒子の担体上への堆積を行なったところ、有効堆積部
９２％、テーパー部８％の直径が１５０ｍｍφである多
孔質ガラス母材が得られ、このものの平均堆積収率は７
５％であった。Next, install two oxyhydrogen flame burners in the center of the device so that the burner spacing is 125 mm, which is 5 times the burner diameter ((B) in the figure), and rotate them parallel to the carrier at a rate of 100 mm/min from side to side. The burner was made to reciprocate at a speed of
ignited by supplying oxygen gas at 4 m3/h and hydrogen gas at 4 m3/h, and depositing silica fine particles generated by hydrolysis of 5iCj24 in this flame on the carrier. When approaching ((A) in the figure,
In (C)), the burner spacing between these two trees is 3 of the burner diameter.
When the glass particles were deposited on the carrier for 10 hours, a porous glass base material with a diameter of 150 mmφ in 92% of the effective deposited part and 8% of the tapered part was obtained. The average deposition yield of this is 7
It was 5%.
しかし、比較のためにこの２本のバーナー間隔をバーナ
ー径の３倍である７５ｍｍに固定したほかは上記と同様
に処理したところ、得られた多孔質ガラス母材の有効堆
積部は８４％でテーパー部は１６％であり、このときの
シリカ微粒子の平均堆積収率は５０％となった。However, for comparison, when the process was carried out in the same manner as above except that the distance between these two burners was fixed at 75 mm, which is three times the burner diameter, the effective deposited area of the obtained porous glass base material was 84%. The taper portion was 16%, and the average deposition yield of silica fine particles at this time was 50%.
（発明の効果）
本発明は光ファイバ多孔質ガラス母材の製造法に関する
ものであり、これは前記したように複数の酸水素火炎バ
ーナーを用いるＣＶＤ法において、この２本のバーナー
間隔を有効堆積部においてはバーナー径の４倍以上とし
、テーパー部ではこれをバーナー径の３倍以下とするも
のであるが、これによればテーパー部を最小とすること
ができるし、有効堆積部ではバーナー火炎同志の干渉が
なくなるのでこの堆積収率を８５％以上とすることがで
き、平均堆積収率を上げることができるという工業的な
有利性が与えられる。(Effects of the Invention) The present invention relates to a method for manufacturing an optical fiber porous glass preform, and as described above, in the CVD method using a plurality of oxyhydrogen flame burners, the gap between the two burners can be effectively deposited. The diameter of the burner should be at least 4 times the burner diameter in the section, and the diameter should be at least 3 times the burner diameter in the tapered section. Since interference between particles is eliminated, the deposition yield can be increased to 85% or more, which provides an industrial advantage in that the average deposition yield can be increased.
第１図は本発明の方法に使用されるＣＶＤ法による多孔
質ガラス母材製造装置の縦断面図を示したものであり、
第２図はバーナー間隙と堆積効率との関係図、第３図は
バーナー間隙とテーパー部の長さとの関係図を示したも
のである。
１・・・光ファイバ多孔質母材
２・・・担体
３−１ ３−２・・・酸水素火炎バーナー４・・・ガラ
ス微粒子 ５・・・バーナー台ｌ・・・バーナー間隔
ｄ・・・バーナー径２ｄ
シ
ｄ
ｄ
−一一◆パー７−１１Ｆ４ Ｌ
第２図
ｄ
ｄ
ｄ
ｄ
−一−中バーナー向隔
し
第
図FIG. 1 shows a longitudinal cross-sectional view of a porous glass base material manufacturing apparatus by the CVD method used in the method of the present invention.
FIG. 2 is a diagram showing the relationship between the burner gap and deposition efficiency, and FIG. 3 is a diagram showing the relationship between the burner gap and the length of the tapered portion. 1... Optical fiber porous base material 2... Carrier 3-1 3-2... Oxyhydrogen flame burner 4... Glass particles 5... Burner stand l... Burner interval d... Burner diameter 2d Side d -11◆Par 7-11F4 L Fig. 2d d d d -1-Middle burner spacing diagram
Claims (1)
上にガラス微粒子を堆積させた光ファイバ多孔質母材の
製造方法において、該バーナーの間隔をガラス微粒子堆
積の有効堆積部においてはバーナー径の４倍以上とし、
テーパー部においてはバーナー径の３倍以下とすること
を特徴とする光ファイバ多孔質母材の製造方法。1. In a method for manufacturing an optical fiber porous base material in which glass fine particles are deposited on a carrier by an external CVD method using a plurality of burners, the interval between the burners is adjusted to the diameter of the burner in the effective deposition area for glass fine particle deposition. 4 times or more,
1. A method for manufacturing an optical fiber porous preform, characterized in that the tapered portion has a diameter not more than three times the burner diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1247225A JP2612941B2 (en) | 1989-09-22 | 1989-09-22 | Method for producing porous optical fiber preform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1247225A JP2612941B2 (en) | 1989-09-22 | 1989-09-22 | Method for producing porous optical fiber preform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03109231A true JPH03109231A (en) | 1991-05-09 |
| JP2612941B2 JP2612941B2 (en) | 1997-05-21 |
Family
ID=17160317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1247225A Expired - Lifetime JP2612941B2 (en) | 1989-09-22 | 1989-09-22 | Method for producing porous optical fiber preform |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2612941B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1041048A1 (en) * | 1999-04-01 | 2000-10-04 | Alcatel | Process for the manufacture of a preform for optical fibres, particularly a preform of large diameter |
| WO2002024591A1 (en) * | 2000-09-21 | 2002-03-28 | Heraeus Tenevo Ag | Method and device for producing a cylinder from doped quartz glass |
| WO2002042231A1 (en) * | 2000-11-24 | 2002-05-30 | Sumitomo Electric Industries, Ltd. | Method and device for manufacturing glass particulate sedimented body |
| US6546759B1 (en) * | 1999-07-02 | 2003-04-15 | Shin-Etsu Chemical Co., Ltd. | Glass base material manufacturing apparatus with super imposed back-and-forth burner movement |
| US6837077B2 (en) * | 2001-09-20 | 2005-01-04 | Sumitomo Electric Industries, Ltd. | Method for producing soot body |
| KR100802815B1 (en) * | 2005-12-19 | 2008-02-12 | 엘에스전선 주식회사 | Method for fabricating optical fiber preform with low OH concentration using MCVD process |
| KR101695400B1 (en) * | 2015-11-03 | 2017-01-23 | 주식회사 아론 | Manufacturing device for optical fiber preform |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0383831A (en) * | 1989-08-25 | 1991-04-09 | Fujikura Ltd | Preparation of optical fiber base material |
-
1989
- 1989-09-22 JP JP1247225A patent/JP2612941B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0383831A (en) * | 1989-08-25 | 1991-04-09 | Fujikura Ltd | Preparation of optical fiber base material |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1041048A1 (en) * | 1999-04-01 | 2000-10-04 | Alcatel | Process for the manufacture of a preform for optical fibres, particularly a preform of large diameter |
| FR2791663A1 (en) * | 1999-04-01 | 2000-10-06 | Cit Alcatel | METHOD FOR MANUFACTURING A REFORM FOR OPTICAL FIBER AND MORE PARTICULARLY A PREFORM OF HIGH DIAMETER |
| US6546759B1 (en) * | 1999-07-02 | 2003-04-15 | Shin-Etsu Chemical Co., Ltd. | Glass base material manufacturing apparatus with super imposed back-and-forth burner movement |
| US6672112B2 (en) | 1999-07-02 | 2004-01-06 | Shin-Etsu Chemical Co. | OVD apparatus including air-regulating structure |
| US7055345B2 (en) | 1999-07-02 | 2006-06-06 | Yuuji Tobisaka | Glass base material manufacturing apparatus and glass base material manufacturing method |
| WO2002024591A1 (en) * | 2000-09-21 | 2002-03-28 | Heraeus Tenevo Ag | Method and device for producing a cylinder from doped quartz glass |
| WO2002042231A1 (en) * | 2000-11-24 | 2002-05-30 | Sumitomo Electric Industries, Ltd. | Method and device for manufacturing glass particulate sedimented body |
| US6837077B2 (en) * | 2001-09-20 | 2005-01-04 | Sumitomo Electric Industries, Ltd. | Method for producing soot body |
| KR100802815B1 (en) * | 2005-12-19 | 2008-02-12 | 엘에스전선 주식회사 | Method for fabricating optical fiber preform with low OH concentration using MCVD process |
| KR101695400B1 (en) * | 2015-11-03 | 2017-01-23 | 주식회사 아론 | Manufacturing device for optical fiber preform |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2612941B2 (en) | 1997-05-21 |
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