JP3064276B1 - Apparatus for producing porous preform for optical fiber and glass rod for optical fiber - Google Patents
Apparatus for producing porous preform for optical fiber and glass rod for optical fiberInfo
- Publication number
- JP3064276B1 JP3064276B1 JP11010197A JP1019799A JP3064276B1 JP 3064276 B1 JP3064276 B1 JP 3064276B1 JP 11010197 A JP11010197 A JP 11010197A JP 1019799 A JP1019799 A JP 1019799A JP 3064276 B1 JP3064276 B1 JP 3064276B1
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- glass
- glass rod
- target material
- burner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Manufacture, Treatment Of Glass Fibers (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
【要約】
【課題】 効率が良く、特性の良好な光ファイバ用多孔
質母材および光ファイバ用ガラスロッドの製造装置およ
び加工装置を提供する。
【解決手段】 本発明の光ファイバ用多孔質母材の製造
装置は、バーナーの火炎中にガラス原料を投入し、火炎
加水分解反応または酸化反応により生成したガラス微粒
子を、バーナーとターゲット材とを相対的に回転かつ移
動させながらターゲット材に付着、堆積させてガラス微
粒子堆積体を製造する装置であって、ターゲット材を把
持する部分の温度上昇を抑制する機構を備えていること
を特徴としている。Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing apparatus and a processing apparatus for an optical fiber porous base material and an optical fiber glass rod which are efficient and have good characteristics. SOLUTION: The apparatus for manufacturing a porous preform for an optical fiber of the present invention is characterized in that a glass material is charged into a flame of a burner, and glass fine particles generated by a flame hydrolysis reaction or an oxidation reaction are mixed with the burner and the target material. An apparatus for manufacturing a glass fine particle deposit by depositing and depositing on a target material while relatively rotating and moving, and having a mechanism for suppressing a temperature rise in a portion where the target material is gripped. .
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光ファイバ用多孔
質母材、特には、これを焼結、透明化して得られる光フ
ァイバ用母材および光ファイバ用ガラスロッドの製造装
置に関する。 BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a porous preform for an optical fiber, in particular, a preform for an optical fiber obtained by sintering and making it transparent, and a glass rod for an optical fiber.
About the installation.
【０００２】[0002]
【従来の技術】光ファイバの製造方法としては、例えば
ＶＡＤ法（気相軸付け法）、ＯＶＤ法（外付け法）やＭ
ＣＶＤ法（ modified ＣＶＤ法）がある。ＯＶＤ法で
は、バーナーと可燃性ガス（Ｈ2 、ＣＨ4 、Ｃ2 Ｈ6
等）、助燃性ガス（Ｏ2 等）、不活性ガス（Ｈｅ、Ａｒ
等）等を燃焼してなる火炎中にガラス原料ガスを投入
し、火炎加水分解反応あるいは酸化反応により発生した
ガラス微粒子をチャックで把持された石英系ターゲット
材の外周に、バーナーと相対的に石英系ターゲット材を
回転、移動させながら付着堆積させてガラス微粒子堆積
体を形成する。このとき火炎の温度は通常数百〜千数百
℃に達するため、高温加熱による装置の変形を抑制する
ことが重要である。通常、石英系ターゲット材は、ＶＡ
Ｄ法で作製されたコアとクラッドの一部を有するものが
使用される。次いで加熱炉で焼結、透明化し、必要に応
じて所定の径に延伸して光ファイバ用プリフォームを作
製し、その後プリフォームを加熱線引きして光ファイバ
とされる。2. Description of the Related Art As a method of manufacturing an optical fiber, for example, a VAD method (gas phase shafting method), an OVD method (external method), and an M
There is a CVD method (modified CVD method). In the OVD method, a burner and a combustible gas (H 2 , CH 4 , C 2 H 6
), A combustible gas (such as O 2 ), an inert gas (He, Ar
The glass raw material gas is injected into the flame that burns, etc., and the fine glass particles generated by the flame hydrolysis reaction or oxidation reaction are quarted on the outer periphery of the quartz-based target material held by the chuck, relative to the burner. A glass particulate deposit is formed by depositing and depositing while rotating and moving the system target material. At this time, since the temperature of the flame usually reaches several hundreds to several hundreds of degrees Celsius, it is important to suppress deformation of the apparatus due to high-temperature heating. Usually, the quartz target material is VA
A material having a part of the core and the clad manufactured by the method D is used. Next, it is sintered and transparentized in a heating furnace, and if necessary, stretched to a predetermined diameter to produce a preform for an optical fiber. Thereafter, the preform is drawn by heating to obtain an optical fiber.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら従来の装
置は、ターゲット材を把持し回転させる把持部の温度上
昇に対して、何ら方策が講じられていなかったため、ガ
ラス微粒子堆積中あるいはガラスロッド加工中に把持部
の温度が大きく上昇し、把持部に材質固有の熱膨張係数
に応じた変形を生じる。However, in the conventional apparatus, no measures have been taken to increase the temperature of the gripping portion for gripping and rotating the target material. The temperature of the gripping portion greatly increases, and the gripping portion is deformed according to the thermal expansion coefficient inherent to the material.
【０００４】その結果、ターゲット材あるいはガラスロ
ッドを回転させる駆動力の伝達精度が低下し、これによ
って回転数の変動を引き起こす。このようにして製造さ
れたガラス微粒子堆積体を透明ガラス化し、加熱、線引
きして得られる光ファイバは、コアのクラッドに対する
偏心率や外径値の変動が大きく、伝送特性に悪影響を与
えていた。また、ガラスロッド加工の場合は、加熱むら
が生じ、外径値が変動する等、加工精度を低下させてい
た。さらに把持部の温度が上昇し変形が進むと、把持力
が変動したり低下して、ターゲット材やガラスロッドが
把持部から脱落し、反対に把持力が増大すると、ターゲ
ット材やガラスロッドの表面にキズや圧壊を発生して不
良となり、いずれも工程を完了できない。[0004] As a result, the transmission accuracy of the driving force for rotating the target material or the glass rod is reduced, thereby causing a change in the rotation speed. The optical fiber obtained by transforming the glass fine particle stack manufactured in this manner into a transparent glass, heating and drawing the wire, the eccentricity of the core with respect to the cladding and the fluctuation of the outer diameter value are large, which adversely affects the transmission characteristics. . Further, in the case of glass rod processing, unevenness in heating occurs, and the processing accuracy is reduced, for example, the outer diameter value fluctuates. Furthermore, when the temperature of the gripping portion rises and the deformation progresses, the gripping force fluctuates or decreases, and the target material or the glass rod falls off from the gripping portion. Conversely, when the gripping force increases, the surface of the target material or the glass rod increases. In addition, scratches and crushing occur, resulting in failure, and none of the processes can be completed.
【０００５】また、ガラス微粒子の堆積が完了した後、
あるいはガラスロッドの加工が終了した後、把持部から
取り外そうとしても、熱変形して把持部が動作不良を起
こして取り外せないことがある。そこで本発明は、上記
課題を解決するためになされたものであって、効率が良
く、特性の良好な光ファイバ用多孔質母材および光ファ
イバ用ガラスロッドの製造装置を提供することを目的と
している。After the deposition of the glass particles is completed,
Alternatively, after the processing of the glass rod is completed, there is a case where even if an attempt is made to remove the glass rod from the gripping part, the gripping part is not able to be removed due to thermal deformation due to thermal deformation. The present invention was made to solve the above problems, good efficiency, for the purpose of providing an apparatus for manufacturing a good optical fiber porous preform and the glass rod for optical fiber characteristics I have.
【０００６】[0006]
【課題を解決するための手段】すなわち、本発明の光フ
ァイバ用多孔質母材の製造装置は、バーナーの火炎中に
ガラス原料を投入し、火炎加水分解反応または酸化反応
により生成したガラス微粒子を、バーナーとターゲット
材とを相対的に回転かつ移動させながらターゲット材に
付着、堆積させてガラス微粒子堆積体を製造する装置で
あって、ターゲット材を把持する部分の温度上昇を抑制
する機構を備えていることを特徴としている。That is, the apparatus for producing a porous preform for an optical fiber according to the present invention is characterized in that a glass raw material is charged into a flame of a burner and glass fine particles produced by a flame hydrolysis reaction or an oxidation reaction are removed. An apparatus for manufacturing a glass fine particle deposit by depositing and depositing on a target material while relatively rotating and moving a burner and a target material, and having a mechanism for suppressing a rise in temperature of a portion where the target material is gripped. It is characterized by having.
【０００７】本発明の光ファイバ用ガラスロッドの製造
装置は、バーナーの火炎により加熱された中空のガラス
ロッド中にガラス原料ガスを含むガスを供給し、酸化反
応により生成したガラス微粒子を、ガラスロッドとバー
ナーとを相対的に回転かつ移動させながら、ガラスロッ
ドの内周に、付着、堆積させつつ透明ガラス化して光フ
ァイバ用ガラスロッドを製造する装置であって、ガラス
ロッドを把持する部分の温度上昇を抑制する機構を備え
ていることを特徴としている。The apparatus for manufacturing a glass rod for an optical fiber according to the present invention supplies a gas containing a glass raw material gas into a hollow glass rod heated by the flame of a burner, and converts glass fine particles generated by an oxidation reaction into a glass rod. A device for manufacturing a glass rod for an optical fiber by forming a transparent glass while adhering and depositing on the inner periphery of the glass rod while relatively rotating and moving the glass rod and the burner. It is characterized by having a mechanism for suppressing the rise.
【０００８】上記各装置において、温度上昇を抑制する
機構は、遮熱部材および／または気体もしくは液体の冷
却媒を使用する構成からなっている。[0008] In each of the above devices, the mechanism for suppressing the rise in temperature is configured to use a heat shielding member and / or a gas or liquid cooling medium.
【０００９】上記構成としたことにより、棒状のターゲ
ット材またはガラスロッドを把持する把持部の温度上昇
は抑制され、把持部の変形がなくなる。このため、ター
ゲット材やガラスロッドを回転させる駆動力の伝達精度
は低下せず、ガラス微粒子を堆積させた堆積体の真円度
が良好になり、形状精度がアップした。また、熱変形に
よる棒状のターゲット材やガラスロッドの把持力の変動
がなくなり、工程中に把持部から脱落することがなく、
表面のキズや圧壊の発生を防止することができるととも
に、熱変形による把持部の動作不良による工程の遅延も
ない。With the above configuration, the temperature rise of the gripper for gripping the rod-shaped target material or the glass rod is suppressed, and the gripper is not deformed. For this reason, the transmission accuracy of the driving force for rotating the target material and the glass rod does not decrease, the roundness of the deposited body on which the glass fine particles are deposited is improved, and the shape accuracy is improved . Also, there is no change in the gripping force of the rod-shaped target material or the glass rod due to thermal deformation, and it does not fall off from the gripping part during the process,
It is possible to prevent the occurrence of scratches and crushing on the surface, and there is no delay in the process due to malfunction of the gripping portion due to thermal deformation.
【００１０】[0010]
【発明の実施の形態】以下、本発明の実施形態を具体的
な例により図面に基づき説明する。図１は、本発明の遮
熱部材をＶＡＤ法の装置に適用した例を示す概略断面図
である。バーナー１の火炎中にガラス原料を投入し、火
炎加水分解反応または酸化反応により生成したガラス微
粒子をターゲット材の先端に堆積させてガラス微粒子堆
積体２を形成し、この上部に遮熱部材３を設置し、遮熱
部材３によりこの上方に設けられた把持部４の温度上昇
を抑制している。ターゲット材は、ガラス微粒子の堆積
中、バーナーに対して相対的に回転かつ移動される。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings using specific examples. FIG. 1 is a schematic sectional view showing an example in which the heat shielding member of the present invention is applied to a VAD method device. A glass raw material is charged into the flame of the burner 1, and glass fine particles generated by a flame hydrolysis reaction or an oxidation reaction are deposited on the tip of a target material to form a glass fine particle deposit 2, on which a heat shielding member 3 is placed. It is installed, and the temperature rise of the grip portion 4 provided above the heat insulating member 3 is suppressed. The target material is rotated and moved relative to the burner during the deposition of the glass particles.
【００１１】図２は、ＯＶＤ法による装置のターゲット
材把持部４に本発明の冷却装置５を設置した例を示す概
略断面図である。バーナー１の火炎中にガラス原料ガス
を投入し、反応により生じたガラス微粒子を棒状の石英
系ターゲット材６の外周に、バーナー１に対して相対的
に回転、移動させながら付着堆積させ、ガラス微粒子堆
積体２を成長させる。石英系ターゲット材６の両端はそ
れぞれ把持部４により把持され、把持部４はエアーを冷
媒とする冷却装置５により冷却されている。FIG. 2 is a schematic cross-sectional view showing an example in which the cooling device 5 of the present invention is installed on the target material gripping portion 4 of the device according to the OVD method. A glass raw material gas is introduced into the flame of the burner 1, and glass fine particles generated by the reaction are deposited on the outer periphery of the rod-shaped quartz-based target material 6 while rotating and moving relative to the burner 1. The deposit 2 is grown. Both ends of the quartz-based target material 6 are gripped by gripping portions 4 respectively, and the gripping portions 4 are cooled by a cooling device 5 using air as a coolant.
【００１２】図３は、ＭＣＶＤ装置の把持部４に本発明
の遮熱部材３および冷却装置５を設置した例を示す概略
正面図である。この装置は、内部が中空の石英系ガラス
ロッド７に燃焼ガスとともにガラス原料ガスを供給し、
ガラスロッド７とバーナー１とを相対的に回転、移動さ
せながら、反応で生じたガラス微粒子をガラスロッド７
の内周面に付着堆積させるものであり、装置の把持部４
は遮熱部材３で保護され、同時にエア吹き付け管からな
る冷却装置５により冷却されている。FIG. 3 is a schematic front view showing an example in which the heat shielding member 3 and the cooling device 5 according to the present invention are installed on the holding portion 4 of the MCVD device. This apparatus supplies glass raw material gas together with combustion gas to a quartz glass rod 7 having a hollow inside,
While rotating and moving the glass rod 7 and the burner 1 relatively, glass fine particles generated by the reaction are removed from the glass rod 7.
To be deposited on the inner peripheral surface of the device.
Is protected by the heat shielding member 3 and at the same time is cooled by the cooling device 5 composed of an air blowing tube.
【００１３】[0013]
【実施例】（実施例１） 図１の装置を用いて光ファイバ用多孔質母材の製造を行
った。バーナーに燃焼ガス、原料ガスとして、Ｏ2 ＝２
０ＳＬＭ、Ｈ2 ＝３０ＳＬＭ、Ａｒ＝５ＳＬＭ、ＳｉＣ
ｌ4 ＝３ＳＬＭおよびＧｅＣｌ4 ＝０．１ＳＬＭを供給
し、火炎加水分解反応および酸化反応によりガラス微粒
子を生成させ、１０ｒｐｍで回転している棒状ターゲッ
ト材の先端付近に、棒状ターゲット材を約１．０ｍｍ／
ｍｉｎで移動させながらガラス微粒子を堆積させ、長さ
８００ｍｍ、外径８０ｍｍの光ファイバ用多孔質母材を
作製した。棒状ターゲット材の把持部は遮熱部材により
バーナーの輻射熱から保護されている。製造中、把持部
の温度を測定し、この結果を図４に示した。把持部を覆
うように遮熱部材を設けたことにより、後述する比較例
１に比べて把持部の温度は約５０℃と極めて低温に保持
され、把持部の熱変形による棒状ターゲット材を回転さ
せる駆動力の変動もなく、製造されたガラス微粒子堆積
体を透明ガラス化して光ファイバ用母材とし、この母材
を線引きして製造された光ファイバは、偏心率が０．０
３％と極めて小さいものであった。EXAMPLES (Example 1) A porous preform for an optical fiber was manufactured using the apparatus shown in FIG. O 2 = 2 as combustion gas and raw material gas in burner
0 SLM, H 2 = 30 SLM, Ar = 5 SLM, SiC
By supplying l 4 = 3 SLM and GeCl 4 = 0.1 SLM, glass fine particles are generated by a flame hydrolysis reaction and an oxidation reaction, and the rod-shaped target material is rotated at about 10 rpm near the tip of the rod-shaped target material for about 1. 0mm /
The glass microparticles were deposited while moving at a minimum speed to produce a porous preform for an optical fiber having a length of 800 mm and an outer diameter of 80 mm. The holding portion of the rod-shaped target material is protected from the radiant heat of the burner by a heat shielding member. During manufacture, the temperature of the grip was measured, and the results are shown in FIG . By providing the heat shielding member so as to cover the grip portion, the temperature of the grip portion is maintained at an extremely low temperature of about 50 ° C. as compared with Comparative Example 1 described later, and the rod-shaped target material is rotated by thermal deformation of the grip portion. The driving force is not changed, and the manufactured glass fine particle deposit is transparently vitrified to be a base material for an optical fiber, and the optical fiber manufactured by drawing the base material has an eccentricity of 0.0.
It was extremely small at 3%.
【００１４】（実施例２） 図２の装置を用いて光ファイバ用多孔質母材の製造を行
った。バーナーに燃焼ガス、原料ガスとして、Ｏ2 ＝２
００ＳＬＭ、Ｈ2 ＝３００ＳＬＭ、Ａｒ＝５０ＳＬＭ、
ＳｉＣｌ4 ＝３０ＳＬＭを供給し、火炎加水分解反応お
よび酸化反応によりガラス微粒子を生成し、１０ｒｐｍ
で回転しているガラスロッドの外周にバーナーを約５０
ｍｍ／ｍｉｎの速さで相対的に移動させながら、ガラス
微粒子を堆積させ、外径１６０ｍｍの光ファイバ用多孔
質母材を作製した。使用したガラスロッドは、先の実施
例１で作製した光ファイバ用母材を外径２５ｍｍ、長さ
８００ｍｍに加工したものである。棒状ターゲット材の
把持部は、図５に示すように、冷却装置によりバーナー
の輻射熱から保護されているため、後述する比較例２に
比べて把持部の温度は約８０℃と低温に保持され、把持
部の熱変形による棒状ターゲット材を回転させる駆動力
の変動もなく、製造されたガラス微粒子堆積体を透明ガ
ラス化して光ファイバ用母材とし、この母材を線引きし
て製造された光ファイバは、偏心率が０．０２％と極め
て小さいものであった。Example 2 A porous preform for optical fiber was manufactured using the apparatus shown in FIG. O 2 = 2 as combustion gas and raw material gas in burner
00 SLM, H 2 = 300 SLM, Ar = 50 SLM,
SiCl 4 = 30 SLM was supplied, glass fine particles were generated by a flame hydrolysis reaction and an oxidation reaction, and 10 rpm
Burner around the glass rod rotating at 50
Glass particles were deposited while relatively moving at a speed of mm / min to produce a porous preform for an optical fiber having an outer diameter of 160 mm. The glass rod used was obtained by processing the optical fiber preform prepared in Example 1 to an outer diameter of 25 mm and a length of 800 mm. As shown in FIG. 5 , since the holding portion of the rod-shaped target material is protected from the radiant heat of the burner by the cooling device, the temperature of the holding portion is maintained at a low temperature of about 80 ° C. as compared with Comparative Example 2 described below. There is no change in the driving force for rotating the rod-shaped target material due to thermal deformation of the gripping part, and the manufactured glass fine particle deposit is made into a transparent glass to be a base material for an optical fiber, and an optical fiber manufactured by drawing this base material. Has an extremely small eccentricity of 0.02%.
【００１５】（実施例３） 図３に示す装置を用い、バーナーで加熱したガラスロッ
ド内にＯ2 ＝１５０ＳＬＭ、ＳｉＣｌ4 ＝３ＳＬＭを供
給し、酸化反応によりガラス微粒子を生成し、５ｒｐｍ
で回転している外径５０ｍｍ、長さ８００ｍｍのガラス
ロッドの内周面に相対的にバーナーを約２０ｍｍ／ｍｉ
ｎで移動させながらガラス微粒子を堆積させた後、透明
ガラス化して光ファイバ用母材を作製した。把持部の温
度を測定した結果は図６に示すとおりであった。このと
き把持部は約６０℃と極めて低い温度に保持され、把持
部の熱変形による棒状ターゲット材を回転させる駆動力
の変動もなく、製造されたガラス微粒子堆積体を透明ガ
ラス化して光ファイバ用母材とし、この母材を線引きし
て製造された光ファイバは、偏心率が０．０３％と極め
て小さいものであった。Example 3 Using the apparatus shown in FIG. 3, O 2 = 150 SLM and SiCl 4 = 3 SLM were supplied into a glass rod heated by a burner, and glass particles were generated by an oxidation reaction.
The burner is about 20 mm / mi relatively to the inner peripheral surface of the glass rod having an outer diameter of 50 mm and a length of 800 mm rotating at
The glass fine particles were deposited while moving with n, and then vitrified to produce an optical fiber preform. The result of measuring the temperature of the grip portion was as shown in FIG . At this time, the gripping part is maintained at an extremely low temperature of about 60 ° C., and there is no change in the driving force for rotating the rod-shaped target material due to thermal deformation of the gripping part. The optical fiber manufactured by drawing the base material as a base material had an extremely small eccentricity of 0.03%.
【００１６】（比較例１） 図１の装置から把持部の遮熱部材を取り外した以外は、
実施例１と同様の条件で製造を行ったところ、把持部の
温度は図４に示すように１００℃を超え、把持部の変形
が確認された。その結果、棒状ターゲット材を回転させ
る駆動力が変動し、作製されたガラス微粒子堆積体を透
明ガラス化して光ファイバ用母材とし、この母材から製
造した光ファイバの偏心率は最大で０．８％に達した。(Comparative Example 1) [0016] Except for removing the heat shield member of the grip portion from the apparatus of Fig. 1,
When manufacturing was performed under the same conditions as in Example 1, the temperature of the gripper exceeded 100 ° C. as shown in FIG. 4 , and deformation of the gripper was confirmed. As a result, the driving force for rotating the rod-shaped target material fluctuates, and the produced glass fine particle deposit is transparently vitrified to obtain a base material for an optical fiber. Reached 8%.
【００１７】（比較例２） 図２の装置から把持部の冷却装置を取り外した以外は、
実施例２と同様の条件で製造を行ったところ、把持部の
温度は図５に示すように、約１８０℃に達し、把持部が
変形した。この把持部の変形によりガラスロッドの把持
力が大きく変化し、ガラスロッドが圧壊して落下し、製
造を完了することができなかった。(Comparative Example 2) [0017] Except for removing the cooling device for the grip portion from the device in Fig. 2,
When manufacturing was performed under the same conditions as in Example 2, the temperature of the gripper reached about 180 ° C. as shown in FIG. 5 , and the gripper was deformed. Due to the deformation of the gripping portion, the gripping force of the glass rod greatly changed, and the glass rod was crushed and dropped, so that the production could not be completed.
【００１８】（比較例３） 図３の装置から把持部の遮熱部材および冷却装置を取り
外した以外は、実施例３と同様の条件で製造を行ったと
ころ、把持部の温度は図６に示すように１００℃を超
え、把持部の変形が確認された。このため、製造終了
後、把持している光ファイバ用母材を取り外そうとした
ところ、把持部が熱変形で動作しなくなり、やむを得ず
把持部より内側の光ファイバ用母材部分で破壊して取り
外したため、収率が６５％になった。さらに、取り外し
た光ファイバ用母材から製造した光ファイバの偏心率は
最大で０．９％に達した。Comparative Example 3 Production was performed under the same conditions as in Example 3 except that the heat shield member and the cooling device of the grip were removed from the apparatus of FIG. 3, and the temperature of the grip was changed to that of FIG. As shown, the temperature exceeded 100 ° C., and deformation of the gripping portion was confirmed. For this reason, after the end of the production, when trying to remove the optical fiber preform that is being gripped, the gripping part stops operating due to thermal deformation, and it is unavoidable to break at the optical fiber preform part inside the gripping part. Removal yielded a yield of 65%. Further, the eccentricity of the optical fiber manufactured from the detached optical fiber preform reached 0.9% at the maximum.
【００１９】[0019]
【発明の効果】本発明の装置は、光ファイバ用多孔質母
材や光ファイバ用ガラスロッドを製造する際、棒状ター
ゲット材またはガラスロッドを把持する把持部の温度上
昇を抑制し、把持部の変形を防止する。このため、ター
ゲット材やガラスロッドを回転させる駆動力の伝達精度
は低下せず、ガラス微粒子を堆積させた堆積体の真円度
が良好になった。また、熱変形による棒状ターゲット材
やガラスロッドの把持力の変動が抑制され、把持部から
の脱落がなくなり、表面のキズや圧壊の発生を防止する
ことができた。さらに、熱変形による把持部の動作不良
による工程の遅延もない。この結果、ガラス微粒子堆積
体を焼結し、透明ガラス化して得られる光ファイバ用母
材や光ファイバ用ジャケット管の偏心および外径変動幅
が小さくなり、良好な光ファイバを得ることができた。According to the apparatus of the present invention, when manufacturing a porous preform for an optical fiber or a glass rod for an optical fiber, it is possible to suppress a rise in the temperature of the gripping portion for gripping the rod-shaped target material or the glass rod and to reduce the temperature of the gripping portion. Prevent deformation. For this reason, the transmission accuracy of the driving force for rotating the target material and the glass rod did not decrease, and the roundness of the deposited body on which the glass particles were deposited was improved . Further, the fluctuation of the gripping force of the rod-shaped target material or the glass rod due to the thermal deformation was suppressed, the falling off from the gripping portion was prevented, and the occurrence of surface scratches and crushing could be prevented. Further, there is no process delay due to malfunction of the gripping portion due to thermal deformation. As a result, the eccentricity and outer diameter variation width of the optical fiber base material and the optical fiber jacket tube obtained by sintering the glass fine particle deposit and turning it into a transparent glass were reduced, and a good optical fiber was obtained. .
【図１】 本発明の光ファイバ用多孔質母材の製造装置
をＶＡＤ法に適用した例を示す図である。FIG. 1 is a diagram showing an example in which a manufacturing apparatus for a porous preform for optical fibers of the present invention is applied to a VAD method.
【図２】 本発明の光ファイバ用多孔質母材の製造装置
をＯＶＤ法に適用した例を示す図である。FIG. 2 is a diagram showing an example in which an apparatus for manufacturing a porous preform for optical fibers of the present invention is applied to an OVD method.
【図３】 本発明の光ファイバ用ガラスロッドの製造装
置をＭＣＶＤ法に適用した例を示す図である。FIG. 3 is a diagram showing an example in which the apparatus for manufacturing a glass rod for an optical fiber of the present invention is applied to an MCVD method.
【図４】 実施例１および比較例１における把持部の温
度変化を示すグラフである。 FIG. 4 is a graph showing a change in temperature of a grip portion in Example 1 and Comparative Example 1.
【図５】 実施例２および比較例２における把持部の温
度変化を示すグラフである。 FIG. 5 is a graph showing a temperature change of a grip portion in Example 2 and Comparative Example 2.
【図６】 実施例３および比較例３における把持部の温
度変化を示すグラフである。 FIG. 6 is a graph showing a temperature change of a grip portion in Example 3 and Comparative Example 3.
１・・・バーナー ２・・・ガラス微粒子堆積体 ３・・・遮熱部材 ４・・・把持部 ５・・・冷却装置 ６・・・ターゲット材 ７・・・ガラスロッド DESCRIPTION OF SYMBOLS 1 ... Burner 2 ... Glass fine particle deposit body 3 ... Heat shielding member 4 ... Grasping part 5 ... Cooling device 6 ... Target material 7 ... Glass rod
───────────────────────────────────────────────────── フロントページの続き (72)発明者 島田 忠克 群馬県安中市磯部２丁目13番１号 信越 化学工業株式会社 精密機能材料研究所 内 (72)発明者 平沢 秀夫 群馬県安中市磯部２丁目13番１号 信越 化学工業株式会社 精密機能材料研究所 内 (56)参考文献 特開 平７−33463（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C03B 37/00 - 37/16 C03B 8/04 C03B 23/043 - 23/045 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tadakatsu Shimada 2-3-1-1, Isobe, Annaka-shi, Gunma Shin-Etsu Chemical Co., Ltd.Precision Functional Materials Laboratory (72) Inventor Hideo Hirasawa Isobe, Annaka-shi, Gunma 2-13-1 Shin-Etsu Chemical Co., Ltd. Precision Functional Materials Laboratory (56) References JP-A-7-33463 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C03B 37/00-37/16 C03B 8/04 C03B 23/043-23/045
Claims (4)
し、火炎加水分解反応または酸化反応により生成したガ
ラス微粒子を、バーナーとターゲット材とを相対的に回
転かつ移動させながらターゲット材に付着、堆積させて
ガラス微粒子堆積体を製造する装置であって、ターゲッ
ト材を把持する部分の温度上昇を抑制する機構を備えて
いることを特徴とする光ファイバ用多孔質母材の製造装
置。1. A glass raw material is charged into a flame of a burner, and glass fine particles generated by a flame hydrolysis reaction or an oxidation reaction adhere to and deposit on the target material while rotating and moving the burner and the target material relatively. What is claimed is: 1. An apparatus for producing a glass fine particle deposit, comprising: a mechanism for suppressing a rise in temperature of a portion where a target material is gripped.
材および／または気体もしくは液体の冷却媒を使用する
機構からなる請求項１に記載の光ファイバ用多孔質母材
の製造装置。2. The apparatus for producing a porous preform for an optical fiber according to claim 1, wherein the mechanism for suppressing the temperature rise comprises a mechanism using a heat shield member and / or a gas or liquid cooling medium.
ガラスロッド中にガラス原料ガスを含むガスを供給し、
酸化反応により生成したガラス微粒子を、ガラスロッド
とバーナーとを相対的に回転かつ移動させながら、ガラ
スロッドの内周に、付着、堆積させつつ透明ガラス化し
て光ファイバ用ガラスロッドを製造する装置であって、
ガラスロッドを把持する部分の温度上昇を抑制する機構
を備えていることを特徴とする光ファイバ用ガラスロッ
ドの製造装置。3. A gas containing a glass raw material gas is supplied into a hollow glass rod heated by a flame of a burner,
Glass fine particles generated by the oxidation reaction, while rotating and moving the glass rod and the burner relatively, on the inner circumference of the glass rod, adhered, deposited and transparent vitrification to produce a glass rod for optical fiber with an apparatus So,
An apparatus for manufacturing a glass rod for an optical fiber, comprising a mechanism for suppressing a rise in temperature of a portion where the glass rod is gripped.
材および／または気体もしくは液体の冷却媒を使用する
機構からなる請求項３に記載の光ファイバ用ガラスロッ
ドの製造装置。4. The apparatus for manufacturing a glass rod for an optical fiber according to claim 3, wherein the mechanism for suppressing the temperature rise comprises a mechanism using a heat shield member and / or a gas or liquid cooling medium.
Priority Applications (20)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11010197A JP3064276B1 (en) | 1999-01-19 | 1999-01-19 | Apparatus for producing porous preform for optical fiber and glass rod for optical fiber |
| JP30846099A JP4094787B2 (en) | 1999-01-19 | 1999-10-29 | Optical fiber glass rod processing equipment |
| EP03090252A EP1364918B1 (en) | 1998-11-05 | 1999-11-03 | A method and apparatus for manufacturing a preform and optical fibre from the preform |
| EP99250390A EP0999189B1 (en) | 1998-11-05 | 1999-11-03 | Process and apparatus for drawing a preform and for drawing an optical fibre from the drawn preform |
| DE69924447T DE69924447T2 (en) | 1998-11-05 | 1999-11-03 | A method and apparatus for drawing a preform and drawing an optical fiber from the drawn preform |
| EP03090253A EP1364919B1 (en) | 1998-11-05 | 1999-11-03 | Method for manufacturing a preform and optical fibre from the preform |
| DE1999638158 DE69938158T8 (en) | 1998-11-05 | 1999-11-03 | A method of making a preform and an optical fiber from the preform |
| DE69931825T DE69931825T8 (en) | 1998-11-05 | 1999-11-03 | Method and apparatus for producing a preform and an optical fiber from the preform |
| US09/434,280 US6386001B1 (en) | 1998-11-05 | 1999-11-05 | Optical fiber manufacture method including elongating a preform in a vertical direction and a horizontal direction |
| KR1019990048941A KR100551100B1 (en) | 1998-11-05 | 1999-11-05 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
| TW90126005A TW548249B (en) | 1998-11-05 | 1999-12-10 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
| TW90126003A TW548247B (en) | 1998-11-05 | 1999-12-10 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
| TW90126006A TW548250B (en) | 1998-11-05 | 1999-12-10 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
| TW90126004A TW548248B (en) | 1998-11-05 | 1999-12-10 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
| US10/158,904 US6779362B2 (en) | 1998-11-05 | 2002-06-03 | Method of making an optical fiber preform where a second elongation is based on a mark on a glass rod |
| US10/158,801 US6848276B2 (en) | 1998-11-05 | 2002-06-03 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
| US10/158,803 US20020144520A1 (en) | 1998-11-05 | 2002-06-03 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
| US10/158,843 US20020139149A1 (en) | 1998-11-05 | 2002-06-03 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
| US10/158,804 US20020152772A1 (en) | 1998-11-05 | 2002-06-03 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
| US11/046,889 US20050132753A1 (en) | 1998-11-05 | 2005-02-01 | Optical fiber manufacture method, preform manufacture method, and preform manufacture apparatus |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11010197A JP3064276B1 (en) | 1999-01-19 | 1999-01-19 | Apparatus for producing porous preform for optical fiber and glass rod for optical fiber |
| JP30846099A JP4094787B2 (en) | 1999-01-19 | 1999-10-29 | Optical fiber glass rod processing equipment |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30846099A Division JP4094787B2 (en) | 1999-01-19 | 1999-10-29 | Optical fiber glass rod processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP3064276B1 true JP3064276B1 (en) | 2000-07-12 |
| JP2000203866A JP2000203866A (en) | 2000-07-25 |
Family
ID=17981300
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11010197A Expired - Fee Related JP3064276B1 (en) | 1998-11-05 | 1999-01-19 | Apparatus for producing porous preform for optical fiber and glass rod for optical fiber |
| JP30846099A Expired - Fee Related JP4094787B2 (en) | 1999-01-19 | 1999-10-29 | Optical fiber glass rod processing equipment |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30846099A Expired - Fee Related JP4094787B2 (en) | 1999-01-19 | 1999-10-29 | Optical fiber glass rod processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP3064276B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101613583B1 (en) | 2014-12-04 | 2016-04-19 | (주)에이스코리아 | Thermos bottle with cubic and method of manufacturing the same |
-
1999
- 1999-01-19 JP JP11010197A patent/JP3064276B1/en not_active Expired - Fee Related
- 1999-10-29 JP JP30846099A patent/JP4094787B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101613583B1 (en) | 2014-12-04 | 2016-04-19 | (주)에이스코리아 | Thermos bottle with cubic and method of manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000211935A (en) | 2000-08-02 |
| JP2000203866A (en) | 2000-07-25 |
| JP4094787B2 (en) | 2008-06-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5674306A (en) | Method and apparatus for drawing glass preform for optical fiber | |
| JPH08208242A (en) | Production of quartz glass | |
| US7437893B2 (en) | Method for producing optical glass | |
| RU2236386C2 (en) | Method of manufacturing optic fiber intermediate product | |
| JP3064276B1 (en) | Apparatus for producing porous preform for optical fiber and glass rod for optical fiber | |
| WO2007054961A2 (en) | Optical fiber preform having large size soot porous body and its method of preparation | |
| JP2793617B2 (en) | Manufacturing method of optical fiber preform | |
| US20080053155A1 (en) | Optical fiber preform having large size soot porous body and its method of preparation | |
| JP2005263577A (en) | Apparatus for manufacturing glass preform for optical fiber | |
| JPS6036344A (en) | Manufacture of optical fiber | |
| JP3148194B2 (en) | Method for producing porous glass base material | |
| JP2003212550A (en) | Method of manufacturing glass tube and target rod for the same | |
| JP2011256069A (en) | Target rod, apparatus for producing porous glass preform, method for producing porous glass preform and method for producing glass member | |
| JP2818349B2 (en) | Manufacturing method of quartz glass base material | |
| JP2003226545A (en) | Method for manufacturing optical fiber preform and device for manufacturing optical fiber preform | |
| JP2011230986A (en) | Manufacturing method for glass preform | |
| JPS58661Y2 (en) | Glass particle synthesis torch | |
| JP3524209B2 (en) | Method for producing glass preform for optical fiber | |
| JP3912528B2 (en) | Glass tube manufacturing method and manufacturing apparatus | |
| JP2000281377A (en) | Production method and apparatus for preform for optical fiber | |
| JPS61168544A (en) | Production of glass tube mainly composed of quartz | |
| JP2022127161A (en) | Method for manufacturing optical fiber preform and method for manufacturing optical fiber | |
| JPH0583499B2 (en) | ||
| JP3998228B2 (en) | Optical fiber porous base material, optical fiber glass base material, and manufacturing methods thereof | |
| JP2003165736A (en) | Method for manufacturing optical fiber preform and device and manufacturing optical fiber preform using it |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100512 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110512 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120512 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130512 Year of fee payment: 13 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140512 Year of fee payment: 14 |
|
| LAPS | Cancellation because of no payment of annual fees |