JP2001170827A - Work carrying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a work carrying device capable of highly precisely carrying out delivery of a work, 90 deg. revolving treatment against the work and positioning treatment while having simple constitution with a small number of parts. SOLUTION: A work carrying device carries a work 12 from a supply stage 20 to a receiving stage 21 of the work 12. The work carrying device is furnished with carrier arms 52a, 52b to hold the work 12 and a cylinder 39 for revolution to revolve the carrying arms 52a, 52b around a shaft 36 at roughly the same distance from the supply stage 20 and the receiving stage 21 as its center, revolves the carrying arms 52a, 52b by 90 deg. around a revolution axis 36 as its center by the cylinder 39 for revolution after holding the work 12 by the carrying arms 52a, 52b at the supply stage 20, releases the work 12 from the carrying arms 52a, 52b at the receiving stage 21 and changes a position of the work 12 by 90 deg. by the supply stage 20 and the receiving stage 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work transfer device, and more particularly, to a work transfer device that transfers a work by changing the posture of the work by 90 degrees.

[0002]

2. Description of the Related Art When assembling an optical semiconductor device, a work on which an optical semiconductor element is mounted may need to be transferred to a next process after changing a posture in a previous process. For example, in the case where the horizontal posture of the work in the previous process is turned by 90 ° to be erect and then transferred to the next process, the process of turning the work by 90 ° and the work after the rotation correspond to the next process And a process of positioning at a proper position. FIG. 7 shows a conventional work transfer device that performs such processing.

In the work supply device, a plurality of works 12 mounted on a supply tray 11 are sequentially conveyed by a conveyance hand 14 and once placed on a positioning stage 15 for positioning. The work 12 is made of, for example, a ceramic substrate on which the optical semiconductor element 13 is mounted in the previous step, and has a substantially rectangular parallelepiped shape. Next, the positioning stage 15 is moved by the transport hand 16 moving in a direction orthogonal to the transport direction of the transport hand 14.
The upper work 12 is gripped and placed in a horizontal state on a rotating member 17a supported by a 90 ° position mechanism 17. From this state, the rotating member 17a moves 90
゜ The work 12 is turned upright. Further, the upright work 12 is moved by the transfer hand 16 to the positioning stage 1
9 and is positioned while standing.

[0004]

In the above-mentioned conventional work supply apparatus, the first mechanism for performing the positioning process on the work 12 in the horizontal state and the rotating mechanism for rotating the work 12 in the horizontal state by 90 ° are provided. A second mechanism for positioning the workpiece 12 in a standing state, a transport hand 16 for transporting the workpiece 12 from the first mechanism to the rotating mechanism, releasing the workpiece 12 once, and transporting the workpiece 12 again after rotating 90 °; In addition, a circuit or the like for controlling a complicated operation of gripping, releasing, and re-grip of the work 12 by the transport hand 16 is required, and the apparatus configuration is complicated. For this reason, interference is likely to occur between the mechanisms on the workpiece supply side and the workpiece receiving side, and it has been difficult to perform high-accuracy, high-speed transport positioning processing.

In view of the above, the present invention has a simple configuration with a small number of parts, and yet facilitates the delivery on the supply side and the reception side of the work, the 90 ° rotation process with respect to the work, and the positioning process. It is an object of the present invention to provide a work transfer device capable of performing the work with high accuracy.

[0006]

In order to achieve the above object, a work transfer device according to the present invention is a work transfer device for transferring a work from a work supply stage to a work reception stage, and holds the work. A gripping tool, comprising a rotating device for rotating the gripping tool about a rotation axis substantially equidistant from the supply stage and the receiving stage, and after the workpiece is gripped by the supply stage by the gripping tool, The gripper is rotated by 90 ° about the rotation axis by a rotation device, the work is released from the gripper in the receiving stage, and the posture of the work is changed by 90 ° between the supply stage and the receiving stage. And

In the work transfer apparatus of the present invention, when the work placed on the supply stage is transferred to the receiving stage, the same gripping tool is used to rotate the work by 90 ° to raise the work. The positioning process can be performed on the receiving stage in a state of being held. This eliminates the need for a conventional complicatedly operating transfer hand, a circuit for controlling complicated transfer timing of the transfer hand, and the like. Therefore, for example, when transporting a work on which an optical semiconductor element is mounted, it is possible to transfer the work from the supply side to the receiving side and to perform high-accuracy and high-speed positioning processing on the work without damaging the optical semiconductor element. A device that can be executed smoothly can be obtained with a simple configuration with a small number of parts.

Here, it is preferable that the supply stage and the receiving stage are substantially in the same plane. in this case,
The rotation of the gripper facilitates the process of transferring the work between the two stages.

It is preferable that the apparatus further includes a first position fine adjustment device for finely adjusting the relative position between the supply stage and the gripping tool. In this case, the work on the supply stage can always be gripped by the gripper in an appropriate state.

It is preferable that the apparatus further includes a second position fine adjustment device for finely adjusting the relative position between the receiving stage and the gripping tool. This makes it possible to always transfer the work on the receiving stage to the next step in an appropriate state.

Preferably, both the first and second position fine adjustment devices are driven by common driving means. In this case, the number of components of the mechanism required for the work positioning processing can be reduced.

Alternatively, instead of the above, the first and second
It is also a preferable embodiment that the position fine adjustment device is driven by separate driving means. In this case, the work positioning process
Since the supply stage and the receiving stage can be performed independently, the work positioning process can be performed more quickly.

Further, the gripping tool can be driven by an actuator having a cylinder member and a piston rod projecting / retreating from the cylinder member. Alternatively, the gripper may be driven by a motor having a rotation axis coinciding with the rotation axis.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail based on embodiments of the present invention with reference to the drawings. FIG.
1 is a perspective view showing a work transfer device and the like according to a first embodiment of the present invention, and FIG.
(B) shows a work placed in a horizontal state, and (c) shows a work placed in an upright state.

As shown in FIG. 1A, the work transfer device has support members 31a and 31b fixedly supported on a base 30 at predetermined intervals. Support member 31
a and 31b, a supporting member 32 is fixedly supported and a pair of positioning members 29 which move integrally with each other.
a and a pair of positioning members 29b that move integrally with each other
And are arranged. These positioning members 29a, 29
b performs a positioning process in the work transport direction Y.

A stage forming member 33 is fixedly supported at the upper end of the supporting member 32. The stage forming member 33 has a substantially U-shape, and a supply stage 20 and a transfer stage 21 are formed at both ends having a rectangular shape.

The supply stage 20 moves the work 12 fed from the previous process and placed in a horizontal state along the work transfer direction (indicated by an arrow Y) and a direction orthogonal to the work transfer direction Y (indicated by an arrow X). To make a fine movement for positioning.
The transfer stage 21 positions the work 12 which has been rotated 90 ° from the supply stage 20 and sent in an upright state by finely moving the work 12 in the work transfer direction Y and the orthogonal direction X, and positioning the work 12 in a subsequent semiconductor assembling apparatus (not shown). Hand over to the mounting head, etc.

At the center of each of the stages 20, 21, there are formed suction holes 26, 27 for sucking and fixing the work 12 with suction force by negative pressure from a pressure reducing pump (not shown). On each of the stages 20 and 21, the positioning members 29a and 29b are disposed, respectively. The suction holes 26 and 27 communicate with a decompression pump (not shown) via communication passages (not shown) formed in the main body of the stage forming member 33 and the bearing member 32, respectively.

Below the stages 20 and 21, a positioning actuator 35 and a clamping actuator 37 are provided.
And are arranged. The clamping actuator 37 is located at an equal distance from both stages 20 and 21, and has an angle of 90 ° between the two stages 20 and 21 about a rotation shaft 36 whose one end is rotatably supported by the support member 32. Rotate. A rotation cylinder 39 is disposed at a position adjacent to the support member 31b on the base 30, and the clamp actuator 37 receives the rotation power from the rotation cylinder 39.

The work 12 has a substantially rectangular parallelepiped shape, and is composed of assembled parts such as ceramics on which the optical semiconductor element 13 is mounted. The work 12 is placed on the supply stage 20 in a horizontal state as shown in FIG. It is transported on the delivery stage 21 in the upright state shown in FIG.

FIG. 2 shows a state in which the mechanism for 90 ° rotation is omitted from FIG. The pair of positioning members 29a are mutually connected by a connecting member 40 extending in the work transport direction Y (FIG. 1), and are urged toward the support member 31a by a tension spring 41a. The pair of positioning members 29b are connected to each other by a connecting member 42 extending in the work transport direction Y, and are urged toward the support member 31b by a tension spring 41b. The connecting member 42 slidably overlaps with the connecting member 40 through a lower portion of the one positioning member 29a.

The positioning actuator 35 includes a fixed member 43 and a moving member 46 that moves with respect to the fixed member 43.
a, 46b. The moving member 46a moves in a direction in which the positioning member 29b is pushed outward from the fixed member 43 or in a direction in which the positioning member 29b is pulled back.
The moving member 46a moves in the opposite direction to the moving member 46a in synchronization with a. Thereby, the pair of positioning members 29a and 29b are respectively
Since the moving members 46b and 46a follow the moving members 46b and 46a and approach or separate integrally, the positioning members 29
a, 29b and positioning member 2 on delivery stage 21
9a and 29b widen or narrow the holding interval with respect to the work 20 at the same timing.

FIG. 3 shows a state in which the positioning mechanism in the work transfer direction is omitted from FIG. The rotation cylinder 39 is rotatably supported via a hinge pin 49 on a support member 47 fixedly supported at the corner of the base 30, and applies the force of a piston rod 39 a projecting / retreating from the cylinder 39 to the link 5.
0 and the clamping actuator 3 via the rotating shaft 36
7

The clamp actuator 37 has a fixed member 51 and a pair of transfer arms 52a and 52b (gripping tools) that move in the direction of arrow X with respect to the fixed member 51.
The transfer arms 52a and 52b selectively move in a direction approaching and moving away from each other, thereby gripping or releasing the work 12 on the supply stage 20 or the transfer stage 21. Also, the transfer arms 52a, 52b
Moves the workpiece 12 finely along the direction of the arrow X on the supply stage 20 or the transfer stage 21 by integrally moving in the same direction to perform positioning processing. Each of the above members operates according to a command from a control unit (not shown).

FIG. 4 shows a state in which the rotation cylinder 39 is extended from the state shown in FIG. 3 and the clamp actuator 37 is rotated clockwise by 90 °.

The operation of the work supply apparatus having the above-described structure will be described with reference to FIGS.
This will be described with reference to FIG. In the initial state, the transfer arm 5
2a and 52b are located on the supply stage 20. At this time, the transfer arms 52a and 52b are wider than one width of the work 12, and the positioning members 29a and 29b are wider than the other width of the work 12. At this time, in the supply stage 20, a suction force is applied to the suction holes 26, and the work 12 having completed the previous process is in a horizontal state (FIG. 1).
(b)) and is adsorbed and fixed.

Next, the positioning actuator 35 is actuated, the distance between the positioning members 29a and 29b is reduced, and the relative position between the supply stage 20 and the transfer arms 52a and 52b is finely adjusted. 2
The outer shape error (tolerance) is absorbed while finely moving in the work transport direction Y against the suction force of No. 6. At this time, the positioning members 29a and 29b on the transfer stage 21 operate in the same manner as the supply stage 20 side.

Here, the pair of positioning members 29a stop when one of the positioning members 29a comes into contact with the end face of the supply stage 20, so that the initial positions of the repetitive operation are always constant. The pair of positioning members 29b absorb the tolerance of the work 12 and stop in a state of contact with the work 12. At this time, the moving member 46a
Since it does not come into contact with the lower part of the positioning member 29b on the upper side, the gripping force on the work 12 at the time of positioning is given by the urging force of the tension spring 41b.

Subsequently, the clamp actuator 37
Operates to grip the work 20 by narrowing the interval between the transfer arms 52a and 52b, and then finely move integrally in one direction or the other direction in the orthogonal direction X to finely move the position of the work 12 in the orthogonal direction X. adjust.

Next, after the suction force of the suction hole 26 is released, the rotation cylinder 39 is extended, and the clamp actuator 37 is rotated 90 ° clockwise about the rotation shaft 36 to thereby move the transfer arm 52a. , 52b are conveyed to the delivery stage 21 side. At this time, the suction force is given to the suction holes 27 in the transfer stage 21, and the work 1 that is gripped by the transfer arms 52 a and 52 b and changes the posture by 90 ° and moves to the transfer stage 21.
2 is sucked and fixed in a standing state (FIG. 1 (c)).

Subsequently, the clamp actuator 37
Is operated, and the transfer arms 52a and 52b are finely moved integrally in one direction or the other direction in the orthogonal direction X to perform the positioning process in the orthogonal direction X. Further, the transfer arms 52a,
After slightly reducing the gripping force by 52b, the positioning actuator 35 is operated to narrow the interval between the positioning members 29a and 29b on the transfer stage 21. This allows
Since the relative position between the transfer stage 21 and the transfer arms 52a and 52b is finely adjusted, the work 12
The outer shape error is absorbed while finely moving in the work transfer direction Y against the suction force of the semiconductor assembly apparatus, and the semiconductor assembly apparatus is set at an appropriate position to be delivered to a mounting head (not shown).

According to the work supply device of this embodiment,
When the workpiece 12 placed on the supply stage 20 is transported to the delivery stage 21, the process of rotating the workpiece 12 by 90 ° and erecting the workpiece 12 and the process of positioning the workpiece 12 in the orthogonal direction X are performed by the same transport arm 52 a. , 52b, and the positioning process in the work transfer direction Y can be performed by the positioning members 29a, 29b. For this reason,
With a simple configuration realized with a smaller number of parts as compared with the conventional apparatus, it is possible to transfer the work 12 from the supply side to the reception side without damaging the optical semiconductor element 13,
High-precision positioning processing can be performed smoothly.

The work supply apparatus further includes other positioning members 29a and 29b for finely moving the work 12 placed on the supply stage 20 in the work transfer direction Y. The transfer arms 52a and 52b Is also provided on the supply stage 20 in the orthogonal direction X, so that the number of components of the mechanism required for the work positioning process on the transfer stage 21 can be reduced.

Further, mutually corresponding members of the positioning members 29a and 29b on the supply stage 20 and the positioning members 29a and 29b on the delivery stage 21 are connected by connecting members 42 and 40, and one positioning actuator 35 Since the positioning members 29a and 29b can be commonly driven on both the stages 20 and 21, the size of the mechanism is reduced.

Next, a second embodiment of the present invention will be described. FIG. 5 is a perspective view illustrating the work supply device according to the present embodiment. The same reference numerals are given to the common members, and description thereof will be omitted. This work supply device has a configuration in which the positioning members 29a and 29b are operated separately by the supply stage 20 and the transfer stage 21. That is, the positioning actuator 35 integrated in the first embodiment is separated into the supply stage 20 and the delivery stage 21, and the positioning actuator 53 a for the supply stage 20 and the positioning actuator 53 a for the delivery stage 21. This is configured as an actuator 53b.

The positioning actuator 53a has a fixed member 55a and a pair of moving members 56a which move with respect to the fixed member 55a and approach / separate from each other. The positioning actuator 53b has a fixed member 55b and a pair of moving members 56b which move with respect to the fixed member 55b and approach / separate from each other.

According to the work supply device of this embodiment,
Positioning members 29a, 29b are connected to both stages 20, 2
1 can be operated independently. Thus, the positioning on the supply stage 20 side with respect to the next work 12 can be performed before the positioning on the delivery stage 21 side is completed, so that the time from the positioning of the work 12 to the 90 ° rotation can be shortened. The overall processing speed can be further increased, and the throughput can be improved.

Next, a third embodiment of the present invention will be described. FIG. 6 is a perspective view showing the work supply device of the present embodiment. In the present embodiment, an electric motor 57 is used instead of the rotation cylinder 39 in the first embodiment. That is, the rotation axis is attached to the bracket 59 fixed at a predetermined position of the base 30 by the clamp actuator 37.
The main body of the electric motor 57 protruding to the side is fixed, and the rotation shaft is connected to the rotation shaft 36 via the shaft coupling 60.

In this embodiment, by rotating the rotating shaft of the electric motor 57 clockwise or counterclockwise in FIG. 6, the supply stage 2 is rotated in the same manner as in the first and second embodiments.
The clamp actuator 37 can be rotated by 90 ° between 0 and the transfer stage 21. in this case,
By appropriately controlling the speed and acceleration / deceleration of the electric motor 57, a high-speed and stable rotation can be obtained, and the time required for the 90 ° rotation can be reduced.

Although the present invention has been described based on the preferred embodiment, the work transfer device of the present invention is not limited to the configuration of the above-described embodiment, but the structure of the above-described embodiment. Various modifications and changes from the above are also included in the scope of the present invention.

[0041]

As described above, according to the work transfer apparatus of the present invention, while having a simple structure with a small number of parts, the work transfer on the supply side and the reception side and the 90-degree rotation of the work can be performed. The dynamic processing and the positioning processing can be performed smoothly and with high accuracy.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a work transfer device and the like according to a first embodiment of the present invention, wherein FIG.
(B) shows a work placed in a horizontal state, and (c) shows a work placed in an upright state.

FIG. 2 is a perspective view of FIG. 1 with a mechanism for 90 ° rotation omitted.

FIG. 3 is a perspective view of FIG. 1 omitting a positioning mechanism in a work transport direction.

FIG. 4 shows the clamping actuator of FIG.
It is a perspective view showing the state where it turned.

FIG. 5 is a perspective view showing a work supply device according to a second embodiment of the present invention.

FIG. 6 is a perspective view showing a work supply device according to a third embodiment of the present invention.

FIG. 7 is a perspective view showing a conventional work supply device.

[Explanation of symbols]

 12: Work 13: Optical semiconductor element 20: Supply stage 21: Delivery stage 26, 27: Suction hole 29a, 29b: Positioning member 31a, 31b: Support member 32: Support member 33: Stage forming member 35: Positioning actuator 36: Rotating shaft 37: Clamping actuator 39: Rotating cylinder 39a: Piston rod 40, 42: Connecting member 41a, 41b: Tension spring 43, 51: Fixed member 46a, 46b: Moving member 47: Support member 52a, 52b: Transport Arms 53a, 53b: Positioning actuators 55a, 55b: Fixed members 56a, 56b: Moving members 57: Electric motor 60: Shaft coupling

Claims (8)

[Claims] 1. A work transfer device for transferring a work from a work supply stage to a work reception stage, comprising: a holding tool for holding the work; and the holding tool being substantially equidistant from the supply stage and the receiving stage. A rotating device for rotating about a rotation axis, and after the workpiece is gripped on the supply stage by the gripper, the gripper is rotated 90 ° about the rotation axis by the rotating device, In the receiving stage, the work is released from the gripper, and the posture of the work is changed by 90 ° between the supply stage and the receiving stage. 2. The work transfer device according to claim 1, wherein the supply stage and the receiving stage are substantially in the same plane. 3. The work transfer device according to claim 1, further comprising a first position fine adjustment device that finely adjusts a relative position between the supply stage and the gripping tool. 4. The apparatus further includes a second position fine adjustment device for finely adjusting a relative position between the receiving stage and the gripper.
The work transfer device according to claim 3. 5. The work transfer device according to claim 4, wherein both the first and second position fine adjustment devices are driven by a common driving unit. 6. The work transfer device according to claim 4, wherein the first and second position fine adjustment devices are driven by separate driving units. 7. The work transfer device according to claim 1, wherein the gripper is driven by an actuator including a cylinder member and a piston rod that projects / retreats from the cylinder member. 8. The work transfer device according to claim 1, wherein said gripper is driven by a motor having a rotation axis coinciding with said rotation axis.