JP2001148534A5 - - Google Patents
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- JP2001148534A5 JP2001148534A5 JP2000270989A JP2000270989A JP2001148534A5 JP 2001148534 A5 JP2001148534 A5 JP 2001148534A5 JP 2000270989 A JP2000270989 A JP 2000270989A JP 2000270989 A JP2000270989 A JP 2000270989A JP 2001148534 A5 JP2001148534 A5 JP 2001148534A5
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- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000270989A JP4627850B2 (ja) | 1999-09-09 | 2000-09-07 | Ｉｉｉ族窒化物半導体の電極形成方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25526899 | 1999-09-09 | ||
| JP11-255268 | 1999-09-09 | ||
| JP2000270989A JP4627850B2 (ja) | 1999-09-09 | 2000-09-07 | Ｉｉｉ族窒化物半導体の電極形成方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001148534A JP2001148534A (ja) | 2001-05-29 |
| JP2001148534A5 true JP2001148534A5 (enExample) | 2007-10-25 |
| JP4627850B2 JP4627850B2 (ja) | 2011-02-09 |
Family
ID=26542109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000270989A Expired - Lifetime JP4627850B2 (ja) | 1999-09-09 | 2000-09-07 | Ｉｉｉ族窒化物半導体の電極形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4627850B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0302580D0 (en) * | 2003-02-05 | 2003-03-12 | Univ Strathclyde | MICRO LEDs |
| JP4703198B2 (ja) * | 2005-01-24 | 2011-06-15 | 三菱電機株式会社 | 半導体レーザ装置およびその製造方法 |
| JP2007027164A (ja) * | 2005-07-12 | 2007-02-01 | Rohm Co Ltd | 半導体発光装置の製造方法及び半導体発光装置 |
| WO2009072526A1 (ja) * | 2007-12-04 | 2009-06-11 | Rohm Co., Ltd. | 発光素子およびその製造方法 |
| JP4486701B1 (ja) | 2008-11-06 | 2010-06-23 | パナソニック株式会社 | 窒化物系半導体素子およびその製造方法 |
| CN102511085A (zh) | 2009-12-25 | 2012-06-20 | 松下电器产业株式会社 | 氮化物系半导体元件及其制造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3274271B2 (ja) * | 1994-03-09 | 2002-04-15 | 株式会社東芝 | 半導体発光素子 |
| JP2950192B2 (ja) * | 1995-04-07 | 1999-09-20 | 日亜化学工業株式会社 | 窒化物半導体の電極 |
| JP3303711B2 (ja) * | 1997-01-27 | 2002-07-22 | 豊田合成株式会社 | 素子の電極及びその製造方法 |
| JPH11126758A (ja) * | 1997-10-24 | 1999-05-11 | Pioneer Electron Corp | 半導体素子製造方法 |
| JP3509514B2 (ja) * | 1997-11-13 | 2004-03-22 | 豊田合成株式会社 | 窒化ガリウム系化合物半導体の製造方法 |
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2000
- 2000-09-07 JP JP2000270989A patent/JP4627850B2/ja not_active Expired - Lifetime