JP2001144302A5 - - Google Patents

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Publication number
JP2001144302A5
JP2001144302A5 JP2000260550A JP2000260550A JP2001144302A5 JP 2001144302 A5 JP2001144302 A5 JP 2001144302A5 JP 2000260550 A JP2000260550 A JP 2000260550A JP 2000260550 A JP2000260550 A JP 2000260550A JP 2001144302 A5 JP2001144302 A5 JP 2001144302A5
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JP
Japan
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JP2000260550A
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JP4646368B2 (ja
JP2001144302A (ja
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Priority to JP2000260550A priority Critical patent/JP4646368B2/ja
Priority claimed from JP2000260550A external-priority patent/JP4646368B2/ja
Publication of JP2001144302A publication Critical patent/JP2001144302A/ja
Publication of JP2001144302A5 publication Critical patent/JP2001144302A5/ja
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Publication of JP4646368B2 publication Critical patent/JP4646368B2/ja
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Expired - Fee Related legal-status Critical Current

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JP2000260550A 1999-08-31 2000-08-30 液晶表示装置の作製方法 Expired - Fee Related JP4646368B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000260550A JP4646368B2 (ja) 1999-08-31 2000-08-30 液晶表示装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP24425199 1999-08-31
JP11-244251 1999-08-31
JP2000260550A JP4646368B2 (ja) 1999-08-31 2000-08-30 液晶表示装置の作製方法

Publications (3)

Publication Number Publication Date
JP2001144302A JP2001144302A (ja) 2001-05-25
JP2001144302A5 true JP2001144302A5 (ja) 2007-10-25
JP4646368B2 JP4646368B2 (ja) 2011-03-09

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ID=26536642

Family Applications (1)

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JP2000260550A Expired - Fee Related JP4646368B2 (ja) 1999-08-31 2000-08-30 液晶表示装置の作製方法

Country Status (1)

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JP (1) JP4646368B2 (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6897477B2 (en) 2001-06-01 2005-05-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, manufacturing method thereof, and display device
US6692999B2 (en) * 2001-06-26 2004-02-17 Fujitsu Limited Polysilicon film forming method
JP5201614B2 (ja) * 2001-07-23 2013-06-05 株式会社日本製鋼所 レーザ光の照射方法及びその装置
TW552645B (en) 2001-08-03 2003-09-11 Semiconductor Energy Lab Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device
US7351300B2 (en) 2001-08-22 2008-04-01 Semiconductor Energy Laboratory Co., Ltd. Peeling method and method of manufacturing semiconductor device
JP4584953B2 (ja) * 2001-08-30 2010-11-24 シャープ株式会社 半導体装置の製造方法
JP4663615B2 (ja) * 2001-08-30 2011-04-06 シャープ株式会社 半導体装置
US6700096B2 (en) * 2001-10-30 2004-03-02 Semiconductor Energy Laboratory Co., Ltd. Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment
TWI272666B (en) 2002-01-28 2007-02-01 Semiconductor Energy Lab Semiconductor device and method of manufacturing the same
TWI261358B (en) 2002-01-28 2006-09-01 Semiconductor Energy Lab Semiconductor device and method of manufacturing the same
US7749818B2 (en) * 2002-01-28 2010-07-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
KR100979926B1 (ko) 2002-03-05 2010-09-03 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체소자 및 그것을 사용한 반도체장치
JP2006100661A (ja) * 2004-09-30 2006-04-13 Sony Corp 薄膜半導体装置の製造方法
US8700910B2 (en) 2005-05-31 2014-04-15 Semiconductor Energy Laboratory Co., Ltd. Communication system and authentication card
JP4896588B2 (ja) * 2005-05-31 2012-03-14 株式会社半導体エネルギー研究所 半導体装置
US9312156B2 (en) 2009-03-27 2016-04-12 Semiconductor Energy Laboratory Co., Ltd. Thin film transistor
TW201919130A (zh) * 2017-11-13 2019-05-16 友達光電股份有限公司 畫素結構、半導體結構的製造方法及半導體元件的製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0334576A (ja) * 1989-06-30 1991-02-14 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
JP3204986B2 (ja) * 1996-05-28 2001-09-04 ザ トラスティース オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク 基板上の半導体膜領域の結晶化処理及びこの方法により製造されたデバイス
JPH10289876A (ja) * 1997-04-16 1998-10-27 Hitachi Ltd レーザ結晶化方法及びそれを用いた半導体装置並びに応用機器
JP2000068520A (ja) * 1997-12-17 2000-03-03 Matsushita Electric Ind Co Ltd 半導体薄膜、その製造方法、および製造装置、ならびに半導体素子、およびその製造方法
JP2000122071A (ja) * 1998-10-13 2000-04-28 Toshiba Corp 液晶表示素子及び液晶表示素子の製造方法
JP3838818B2 (ja) * 1999-06-17 2006-10-25 Ｎｅｃ液晶テクノロジー株式会社 液晶表示パネル及びその製造方法

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