JP2001144147A - Device and method for inspecting surface-mounted package junction part - Google Patents

Device and method for inspecting surface-mounted package junction part

Info

Publication number
JP2001144147A
JP2001144147A JP32574099A JP32574099A JP2001144147A JP 2001144147 A JP2001144147 A JP 2001144147A JP 32574099 A JP32574099 A JP 32574099A JP 32574099 A JP32574099 A JP 32574099A JP 2001144147 A JP2001144147 A JP 2001144147A
Authority
JP
Japan
Prior art keywords
light
circuit board
package
unit
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32574099A
Other languages
Japanese (ja)
Inventor
Shigeyuki Takayama
茂之 高山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Platforms Ltd
Original Assignee
NEC AccessTechnica Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC AccessTechnica Ltd filed Critical NEC AccessTechnica Ltd
Priority to JP32574099A priority Critical patent/JP2001144147A/en
Publication of JP2001144147A publication Critical patent/JP2001144147A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Wire Bonding (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for inexpensively inspecting a surface-mounted package junction part, which can judge the quality of a solder junction part between the ball grid of a surface-mounted package and the pad part of a circuit board, even if electronic components are mounted on both faces of the circuit board, without the special need for safety measures. SOLUTION: A BGA-type LSI11 is loaded on a circuit board 10. The respective ball grids of BGA-type LSI11 are irradiated with light beams 17 from a projection part 15. The quantity of light passing between the ball grids 12 is detected by a light reception part. Passing light quantity 18 is measured by a measuring part 20 and is inputted to a decision part 21 as a measured result 19. The quality of the solder junction part of the ball grids 12 in BGA- type LSI, which are loaded on the circuit board 10, is decided.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は表面実装型パッケー
ジ接合部検査装置及び方法に関し、特にBGA(Bal
l Grid Array)型の表面実装型パッケージ
接合部検査装置及び方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for inspecting a joint of a surface mount type package, and more particularly to a BGA (Bal Bal).
The present invention relates to an apparatus and a method for inspecting a junction part of a surface mount package of a (Grid Array) type.

【0002】[0002]

【従来の技術】従来、BGA(Ball Grid A
rray)型のLSI(LargeScale Int
egration)等の表面実装型のパッケージを回路
基板にはんだ接続したときの接合部の検査装置として、
特開平04−359447号に記載された「半導体装置
のハンダ接合部検査装置」がある。この装置は半導体装
置のボールグリッドと回路基板のパッドとの接合部をX
線透過画像を用いて接合状態を検査する装置である。す
なわち、回路基板に表面実装型パッケージをはんだ接続
した後、回路基板の裏面からX線を照射し、はんだ接合
部のX線写真撮影を行い、撮影結果を目視により良否判
定を行うものである。
2. Description of the Related Art Conventionally, BGA (Ball Grid A)
(rray) LSI (LargeScale Int)
As a device for inspecting the joint when soldering a surface-mount type package such as an emulsion) to a circuit board,
There is a "solder joint inspection apparatus for semiconductor devices" described in Japanese Patent Application Laid-Open No. 04-35947. In this device, the joint between the ball grid of the semiconductor device and the pad of the circuit board is X
This is an apparatus for inspecting a bonding state using a line transmission image. That is, after the surface mounting type package is solder-connected to the circuit board, X-rays are irradiated from the back side of the circuit board, an X-ray photograph of the solder joint is taken, and the quality of the photographed result is visually judged.

【0003】一方では、近年、高密度実装により表面実
装用パッケージが実装されている回路基板の反対側にも
電子部品が実装されるケースが増えてきている。
On the other hand, in recent years, the number of cases where electronic components are mounted on a side opposite to a circuit board on which a surface mounting package is mounted by high-density mounting has been increasing.

【0004】[0004]

【発明が解決しようとする課題】従来の表面実装型パッ
ケージの回路基板とのはんだ接合部の検査にはX線装置
を使用するため、検査装置が高価であり、安全上の対策
が必要であるという問題点があった。
Since an X-ray apparatus is used for inspecting a solder joint of a conventional surface mount type package with a circuit board, the inspection apparatus is expensive, and safety measures are required. There was a problem.

【0005】また、高密度実装により、表面実装用パッ
ケージが実装されている回路基板の反対側にも電子部品
が実装されているため、X線撮影によるはんだ接合部の
検査が困難であるという問題点もある。
Also, due to the high-density mounting, since electronic components are also mounted on the opposite side of the circuit board on which the surface mounting package is mounted, it is difficult to inspect the solder joint by X-ray photography. There are points.

【0006】本発明の目的は、安価で安全対策を特に必
要とすることなく、また、回路基板の両面に電子部品が
実装されていても、表面実装型パッケージのボールグリ
ッドと回路回板のパッド部のはんだ接合部の良否が判定
可能な表面実装型パッケージ接合部検査装置及び方法を
提供することを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a ball grid of a surface mount type package and a pad of a circuit board even when electronic components are mounted on both sides of a circuit board at low cost without requiring special safety measures. It is an object of the present invention to provide an apparatus and a method for inspecting a surface-mounted package bonding portion, which can determine the quality of a solder bonding portion of a portion.

【0007】[0007]

【課題を解決するための手段】本発明の表面実装型パッ
ケージ接合部検査装置は、回路基板のパッド上に搭載さ
れた表面実装型パッケージのボールグリッドの各格子間
に光線を照射する投光部と、ボールグリッドの各格子間
を通過してくる光量を受光する受光部と、受光部で検知
した通過光量を計測する計測部と、計測部で計測された
計測結果を基準光量と比較して回路基板のパッドと表面
実装型パッケージのボールグリッドとの接合部の良否を
判定する判定部と、を備えたことを特徴とする。
According to the present invention, there is provided a surface mount type package joint inspection apparatus which irradiates a light beam between respective grids of a ball grid of a surface mount type package mounted on a pad of a circuit board. And a light receiving unit for receiving the amount of light passing between the respective grids of the ball grid, a measuring unit for measuring the amount of passing light detected by the light receiving unit, and comparing the measurement result measured by the measuring unit with a reference light amount. A determination unit configured to determine the quality of a joint between the pad of the circuit board and the ball grid of the surface mount package.

【0008】本発明の表面実装型パッケージ接合部検査
装置は、投光部の光源としてレーザ光を用い回路基板に
搭載された表面実装型パッケージのボールグリッドの格
子間に光線を分岐したことを特徴とする。
The surface mount type package joint inspection apparatus according to the present invention is characterized in that a laser beam is used as a light source of a light projecting unit, and a light beam is branched between lattices of a ball grid of a surface mount type package mounted on a circuit board. And

【0009】本発明の表面実装型パッケージ接合部検査
装置は、投光部の光源として回路基板に搭載された表面
実装型パッケージのボールグリッドの各格子間に対応し
たLED光源を用いたことを特徴とする。
The surface mount type package bonding portion inspection apparatus of the present invention is characterized in that an LED light source corresponding to each space between ball grids of a surface mount type package mounted on a circuit board is used as a light source of a light emitting unit. And

【0010】本発明の表面実装型パッケージ接合部検査
装置は、投光部の光源を光ファイバアレイを用いて回路
基板に搭載された表面実装型パッケージのボールグリッ
ドの各格子間に光線を分岐して照射することを特徴とす
る。
In the surface mount type package joint inspection apparatus according to the present invention, the light source of the light projecting unit is branched using an optical fiber array between the respective grids of the ball grid of the surface mount type package mounted on the circuit board. Irradiation.

【0011】本発明の表面実装型パッケージ接合部検査
方法は、回路基板のパッド上に搭載された表面実装型パ
ッケージのボールグリッドの各格子間に投光部から光線
を照射し、前記ボールグリッドの各格子間を通過してく
る光量を受光部で検出し、検出した光量を計測部で計測
し、計測部からの計測結果で前記回路基板のパッド上に
搭載されたボールグリッドの接合部の良否を判定するこ
とを特徴とする。
According to the surface mount type package joint inspection method of the present invention, a light beam is emitted from a light projecting portion between the respective grids of a ball grid of a surface mount type package mounted on a pad of a circuit board. The amount of light passing between the lattices is detected by the light receiving unit, the detected amount of light is measured by the measuring unit, and the quality of the joint of the ball grid mounted on the pad of the circuit board is determined based on the measurement result from the measuring unit. Is determined.

【0012】本発明の表面実装型パッケージ接合部検査
方法は、回路基板に搭載された表面実装型パッケージの
縦横のボールグリッドの各格子間を通過してくる通過総
光量を計測部で計測し、計測結果を判定部に入力し、あ
らかじめ正常なはんだ接合状態の時に受光される通過光
量の基準値と比較して接合部の良否を判定すること、を
特徴とする。
According to the surface mount type package joint inspection method of the present invention, the measuring unit measures the total amount of light passing through each of the vertical and horizontal ball grids of the surface mount type package mounted on the circuit board. It is characterized in that the measurement result is input to a determination unit, and the pass / fail of the bonded portion is determined in advance by comparing with a reference value of the amount of transmitted light received in a normal solder bonding state.

【0013】[0013]

【発明の実施の形態】次に、本発明の実施の形態につい
て図面を参照して詳細に説明する。
Next, embodiments of the present invention will be described in detail with reference to the drawings.

【0014】図1は本発明による表面実装型パッケージ
接合部検査装置の基本構成図である。
FIG. 1 is a diagram showing the basic configuration of a surface mount type package joint inspection apparatus according to the present invention.

【0015】図1を参照すると、回路基板10に搭載さ
れる表面実装型パッケージ、すなわちBGA型LSI1
1がボールグリッド12によりはんだ接合されている。
Referring to FIG. 1, a surface mount type package mounted on a circuit board 10, ie, a BGA type LSI 1
1 is soldered by a ball grid 12.

【0016】図1においては、回路基板10にはんだ接
合されるBGA型LSI11の断面図を示しているが、
ボールグリッド12はBGA型LSI11の底面に格子
状に複数個有り、回路基板10のパッド部にそれぞれは
んだ接続されている。
FIG. 1 is a sectional view of a BGA type LSI 11 soldered to a circuit board 10.
A plurality of ball grids 12 are provided in a lattice pattern on the bottom surface of the BGA type LSI 11, and are soldered to pad portions of the circuit board 10, respectively.

【0017】はんだ接続部検査ユニット13はBGA型
LSI11の片側側面に位置する投光部15と、投光部
15に対向するBGA型LSIの片側側面に位置する受
光部16及びそれらを連結するサポート14から構成さ
れている。BGA型LSI11の形状により、投光部1
5と受光部16の間隔がサポート14により所定の間隔
に設定されている。
The solder joint inspection unit 13 includes a light projecting unit 15 located on one side surface of the BGA type LSI 11, a light receiving unit 16 located on one side surface of the BGA type LSI facing the light projecting unit 15, and a support for connecting them. 14. Depending on the shape of the BGA type LSI 11,
The support 14 sets the interval between the light receiving unit 5 and the light receiving unit 16 at a predetermined interval.

【0018】受光部16で検出されたボールグリッド1
2の格子間を通過した通過光量18は計測部20で計測
され、計測結果19として判定部21に入力される。
The ball grid 1 detected by the light receiving section 16
The amount of passing light 18 that has passed between the two grids is measured by the measurement unit 20 and is input to the determination unit 21 as the measurement result 19.

【0019】投光部15の光源として直進性のあるレー
ザ光やLED等が利用するのが良い。光源は光ファイバ
等により、BGA型LSI11の投光方向の検査するボ
ールグリッド12の格子間の数に分岐される。対向する
受光部16はそれぞれの格子間を通過してくる光量を検
出するセンサーを備えている。
As the light source of the light projecting unit 15, it is preferable to use a laser beam, an LED, or the like having a straight traveling property. The number of light sources is branched by an optical fiber or the like into a number between the lattices of the ball grid 12 to be inspected in the light projection direction of the BGA type LSI 11. The opposing light receiving units 16 include sensors for detecting the amount of light passing between the respective lattices.

【0020】次に、図1に示す本発明による表面実装型
パッケージ接合部検査装置の動作について、図を参照し
て説明する。
Next, the operation of the surface mount type package joint inspection apparatus according to the present invention shown in FIG. 1 will be described with reference to the drawings.

【0021】はんだ接続部検査ユニット13の投光部1
5から照射された光線17はBGA型LSI11の回路
基板とのはんだ接合部の良否を判定する為、ボールグリ
ッド12の格子間を通過して受光部16でよって感知さ
れる。受光部16で検出される通過光量18は光線17
のBGA型LSI11の光の投光方向のボールグリッド
12の格子間の光の透過状況により変化する。計測部1
8は受光部16で検出される通過光量18を計測する。
計測部20で計測された計測結果19は判定部21に入
力され、予め設定した基準値の光量と比較され、BGA
型LSI11の光線の投光方向のボールグリッド12の
格子間のハンダブリッジや回路基板のパッド間のはんだ
接合の合否を判定するように構成されている。
Light emitting part 1 of solder connection part inspection unit 13
The light beam 17 emitted from 5 passes through the spaces between the ball grids 12 and is sensed by the light receiving unit 16 in order to determine the quality of the solder joint between the BGA type LSI 11 and the circuit board. The passing light amount 18 detected by the light receiving unit 16 is a light beam 17
Of the ball grid 12 in the light projection direction of the light of the BGA type LSI 11. Measurement unit 1
Numeral 8 measures the passing light amount 18 detected by the light receiving unit 16.
The measurement result 19 measured by the measurement unit 20 is input to the determination unit 21 and compared with the light amount of a preset reference value.
It is configured to determine the success or failure of the solder bridge between the grids of the ball grid 12 in the light projection direction of the light beam of the mold LSI 11 and the solder joint between the pads of the circuit board.

【0022】次に、本発明の表面実装型パッケージ接合
部の検査方法について図面を参照して詳細に説明する。
Next, a method of inspecting a joint portion of a surface mount type package according to the present invention will be described in detail with reference to the drawings.

【0023】図2及び図3は本発明によるBGA型LS
Iのボールグリッドと回路基板のパッドとの接合部の検
査方法を説明するブロック図である。
FIGS. 2 and 3 show a BGA type LS according to the present invention.
It is a block diagram explaining the inspection method of the joining part of the ball grid of I and the pad of a circuit board.

【0024】図2及び図3は共にBGA型LSIのボー
ルグリッドを回路基板のパッドにはんだ接合したときの
接合不良を縦横の格子間を同時に検査できるような装置
構成となっている。すなわちBGA型LSIの対向する
側面にそれぞれ投光部15xと受光部16x及び投光部
15yと受光部16yを配置している。受光部16x及
び16yで検出されたそれぞれの光の投光方向に対する
通過光量18x及び18yは計測部22に入力される。
判定部23はあらかじめ設定した光量の基準値と縦横の
BGA型LSIのボールグリッド12の各格子間を通過
してくる総光量と比較してボールグリッドの各格子間あ
るいは回路基板のパッド間の接合部不良の有無を判定す
るように構成されている。
FIGS. 2 and 3 both have a device configuration that allows simultaneous inspection of vertical and horizontal grids for joint failure when a ball grid of a BGA type LSI is solder-bonded to a pad of a circuit board. That is, the light projecting unit 15x and the light receiving unit 16x, and the light projecting unit 15y and the light receiving unit 16y are arranged on opposing side surfaces of the BGA type LSI, respectively. The passing light amounts 18x and 18y in the light projection direction of the respective lights detected by the light receiving units 16x and 16y are input to the measuring unit 22.
The judging unit 23 compares the reference value of the light quantity set in advance with the total light quantity passing between the grids of the ball grids 12 of the vertical and horizontal BGA type LSI, and joins between the grids of the ball grid or between the pads of the circuit board. It is configured to determine the presence or absence of a part failure.

【0025】図2はBGA型LSIのボールグリッド1
2又は回路基板のパッド間にハンダブリッジを発生して
いないBGA型LSIのボールグリッド12と回路基板
のパッド間の接合状態を示している。この場合は、投光
部15x及び15yから照射された光線17は縦横のボ
ールグリッド12の各格子間にハンダブリッジ等のはん
だ接続部の不良による障害物が無いので、投光した光線
17の光量を損失することなく、対向する受光部16
x、16yで所定の光量が検出される。計測部22で計
測された通過光量18xと通過光量18yの総和は計測
結果24として判定部23に入力され、判定部23にあ
らかじめ設定されている基準値と比較される。図2にお
いてはボールグリッド12や回路基板のパッド間の各格
子にハンダブリッジが無い為、BGA型LSIと回路基
板の接合部のはんだ接合部の不良がないと判断される。
FIG. 2 shows a ball grid 1 of a BGA type LSI.
2 shows a bonding state between the ball grid 12 of the BGA type LSI in which no solder bridge is generated between the pads of the circuit board 2 and the pads of the circuit board. In this case, since the light beams 17 emitted from the light projecting portions 15x and 15y have no obstacle between the grids of the vertical and horizontal ball grids 12 due to a defective solder connection portion such as a solder bridge, the amount of the light beams 17 Without loss of light,
A predetermined light amount is detected at x and 16y. The sum of the passing light amount 18x and the passing light amount 18y measured by the measuring unit 22 is input to the determining unit 23 as a measurement result 24, and is compared with a reference value preset in the determining unit 23. In FIG. 2, since there is no solder bridge in each grid between the ball grid 12 and the pads of the circuit board, it is determined that there is no defect in the solder joint at the joint between the BGA LSI and the circuit board.

【0026】図3はBGA型LSIのボールグリッド又
は回路基板のパッド間にハンダブリッジを発生している
接合状態を示している。
FIG. 3 shows a bonding state in which a solder bridge is generated between the ball grid of the BGA type LSI or the pad of the circuit board.

【0027】図3を参照すると、BGA型LSIのボー
ルグリッド12aと12b間にはんだ接合部不良すなわ
ちハンダブリッジ25を発生している。この場合は、投
光部15yから照射された光線の内、ボールグリッド1
2aと12bの格子間を通る光線26はハンダブリッジ
25により遮断され、対応する受光部16yに光線が到
達しないか、受光される光量が減少する。結果として、
計測部22で計測されるトータル光量は、ハンダブリッ
ジが無い場合より減少するので、判定部23であらかじ
め設定した基準値の光量以下と判別され、BGA型LS
Iのボールグリッドと回路基板のパッドのはんだ接合部
の不良を検出することができる。
Referring to FIG. 3, a defective solder joint, that is, a solder bridge 25, occurs between the ball grids 12a and 12b of the BGA type LSI. In this case, of the light beams emitted from the light projecting unit 15y, the ball grid 1
The light beam 26 passing between the gratings 2a and 12b is blocked by the solder bridge 25, and the light beam does not reach the corresponding light receiving portion 16y or the amount of light received decreases. as a result,
Since the total light amount measured by the measuring unit 22 is smaller than the case without the solder bridge, the determining unit 23 determines that the total light amount is equal to or less than the light amount of the preset reference value, and the BGA type LS
Defective solder joints between the ball grid of I and the pads of the circuit board can be detected.

【0028】図4は回路基板にBGA型LSIを実装し
た際に発生するボールグリッド間のハンダブリッジの種
々の形態を示す図である。
FIG. 4 is a view showing various forms of a solder bridge between ball grids generated when a BGA type LSI is mounted on a circuit board.

【0029】ブリッジ27はボールグリッド12aとボ
ールグリッド12b間が全て埋まった状態を示してい
る。またブリッジ28はボールグリッド12bとボール
グリッド12c間の上側と下側に隙間を残してハンダブ
リッジを発生した状態を示している。さらにまた、ブリ
ッジ29はボールグリッド12cとボールグリッド12
d間の上側に隙間を残してハンダブリッジを発生した状
態を示している。ブリッジ27が発生した場合、ボール
グリッド間を通過する光が完全に遮断されるので、受光
側の光量センサーの有無で容易にハンダブリッジを検出
することができる。ブリッジ28及びブリッジ29の場
合は、完全にボールグリッド間がブリッジしていない
が、あらかじめ受光レベルにしきい値を設けて、受光側
で受光レベルを測定し、前記しきい値の受光レベルと比
較する方法で検出可能である。また、ボールグリッド間
を通過可能な領域の面積をあらかじめ設定し、受光側で
受光面積を前記あらかじめ設定した面積と比較すること
によりハンダブリッジを検出可能である。さらにまたボ
ールグリッド間を通過可能な領域の形状をあらかじめ設
定し、受光側にて受光形状を前記設定した形状と比較す
ることによってもハンダブリッジを検出可能である。
The bridge 27 shows a state in which the space between the ball grids 12a and 12b is completely buried. The bridge 28 shows a state in which a solder bridge is generated with a gap left on the upper side and the lower side between the ball grid 12b and the ball grid 12c. Furthermore, the bridge 29 is connected to the ball grid 12c and the ball grid 12
This shows a state in which a solder bridge is generated with a gap left above d. When the bridge 27 occurs, the light passing between the ball grids is completely blocked, so that the solder bridge can be easily detected by the presence or absence of the light amount sensor on the light receiving side. In the case of the bridge 28 and the bridge 29, the bridge between the ball grids is not completely bridged, but a threshold is provided in advance for the light receiving level, the light receiving level is measured on the light receiving side, and the light receiving level is compared with the threshold. Detectable by method. In addition, it is possible to detect a solder bridge by previously setting the area of a region that can pass between ball grids and comparing the light receiving area with the predetermined area on the light receiving side. Furthermore, it is also possible to detect a solder bridge by previously setting the shape of an area that can pass between the ball grids and comparing the light receiving shape with the set shape on the light receiving side.

【0030】次に本発明による表面実装型パッケージ接
合部検査装置の他の実施例について説明する。
Next, a description will be given of another embodiment of the surface mount type package joint inspection apparatus according to the present invention.

【0031】図5は本発明の表面実装型パッケージの接
合部検査装置の他の実施例の構成を示している。
FIG. 5 shows the configuration of another embodiment of the apparatus for inspecting the joint portion of a surface mount type package according to the present invention.

【0032】一般に回路基板に搭載されるBGA型LS
Iには種々の大きさのものがあるが、これらの大きさの
異なるBGA型LSIのボールグリッドと回路基板のパ
ッドの接合部の検査を可能にするための実施の形態の変
形について説明する。
BGA type LS generally mounted on a circuit board
Although there are various sizes of I, a modification of the embodiment for enabling the inspection of the joint between the ball grid of the BGA type LSI and the pad of the circuit board having different sizes will be described.

【0033】図5を参照すると、投光部15と受光部1
6の間隔をBGA型LSI11の大きさにより可変でき
るように調整部31を備えている。サポート14aに接
続された投光部15と、サポート14bに接続された受
光部16を調整部31により動かし、投光部15と受光
部16の間隔を調整することが可能である。
Referring to FIG. 5, the light projecting unit 15 and the light receiving unit 1
An adjustment unit 31 is provided so that the interval of No. 6 can be changed according to the size of the BGA type LSI 11. The light projecting unit 15 connected to the support 14a and the light receiving unit 16 connected to the support 14b can be moved by the adjusting unit 31 to adjust the distance between the light projecting unit 15 and the light receiving unit 16.

【0034】[0034]

【発明の効果】以上、説明したように本発明による表面
実装型パッケージの接合部検査装置は、安価で安全対策
を特に必要とすることなく、また回路基板の両面に電子
部品が実装されていても、表面実装型パッケージのボー
ルグリッドと回路回板のパッド部のはんだ接合部の良否
が判定可能となる。
As described above, the bonding portion inspection apparatus for a surface mount type package according to the present invention is inexpensive, does not require special safety measures, and has electronic components mounted on both sides of a circuit board. Also, it is possible to determine the quality of the solder joint between the ball grid of the surface mount package and the pad of the circuit board.

【0035】その理由は、回路基板に搭載される表面実
装型パッケージの相対向する面にそれぞれ投光部と受光
部を設置し、投光部から直進性のあるレーザやLEDの
光線をボールグリッドの各格子間に照射し、受光部の光
量を計測部で計測し、判定部部で入力された計測結果を
あらかじめ設定した基準光量と比較判定する構成及び方
法を採用したからである。
The reason for this is that a light projecting unit and a light receiving unit are respectively installed on opposing surfaces of a surface mount type package mounted on a circuit board, and a laser beam or LED light having linearity is transmitted from the light projecting unit to a ball grid. This is because a configuration and a method are adopted in which the light is irradiated between the lattices, the light amount of the light receiving unit is measured by the measuring unit, and the measurement result input by the determining unit is compared and determined with a preset reference light amount.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による表面実装型パッケージ接合部検査
装置の基本構成図である。
FIG. 1 is a basic configuration diagram of a surface mount type package joint inspection apparatus according to the present invention.

【図2】本発明によるBGA型LSIのボールグリッド
と回路基板のパッドとの接合部の検査方法を説明するブ
ロック図である。
FIG. 2 is a block diagram illustrating a method for inspecting a joint between a ball grid of a BGA type LSI and a pad of a circuit board according to the present invention.

【図3】本発明によるBGA型LSIのボールグリッド
と回路基板のパッドとの接合部の検査方法を説明するブ
ロック図である。
FIG. 3 is a block diagram illustrating a method of inspecting a joint between a ball grid of a BGA type LSI and a pad of a circuit board according to the present invention.

【図4】回路基板にBGA型LSIを実装した際に発生
するボールグリッド間のハンダブリッジの種々の形態を
示す図である。
FIG. 4 is a view showing various forms of a solder bridge between ball grids generated when a BGA type LSI is mounted on a circuit board.

【図5】本発明の表面実装型パッケージの接合部検査装
置の他の実施例の構成図である。
FIG. 5 is a configuration diagram of another embodiment of the surface inspection type package joint inspection apparatus of the present invention.

【符号の説明】[Explanation of symbols]

10 回路基板 11 BGA型LSI 12、12a、12b、12c、12d ボールグリ
ッド 13 はんだ接続部検査ユニット 14、14a、14b サポート 15、15x、15y 投光部 16、16x、16y 受光部 17 光線 18、18x、18y 通過光量 19 計測結果 20 計測部 21 判定部 22 計測部 23 判定部 24 計測結果 25 ハンダブリッジ 26 光線 27、28、29 ブリッジ
DESCRIPTION OF SYMBOLS 10 Circuit board 11 BGA type LSI 12, 12a, 12b, 12c, 12d Ball grid 13 Solder connection inspection unit 14, 14a, 14b Support 15, 15x, 15y Light emitting part 16, 16x, 16y Light receiving part 17 Light beam 18, 18x , 18y Passing light amount 19 Measurement result 20 Measurement unit 21 Judgment unit 22 Measurement unit 23 Judgment unit 24 Measurement result 25 Solder bridge 26 Light beam 27, 28, 29 Bridge

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 表面実装型パッケージの接合部検査装置
において、回路基板のパッド上に搭載された表面実装型
パッケージのボールグリッドの各格子間に光線を照射す
る投光部と、前記ボールグリッドの各格子間を通過して
くる光量を受光する受光部と、受光部で検知した通過光
量を計測する計測部と、計測部で計測された計測結果を
基準光量と比較して回路基板のパッドと表面実装型パッ
ケージのボールグリッドとの接合部の良否を判定する判
定部と、を備えたことを特徴とする表面実装型パッケー
ジの接合検査装置。
1. An apparatus for inspecting a joint of a surface mounted package, comprising: a light projecting unit for irradiating a light beam between respective grids of a ball grid of the surface mounted package mounted on pads of a circuit board; A light receiving unit that receives the amount of light passing between the lattices, a measuring unit that measures the amount of passing light detected by the light receiving unit, and a pad on the circuit board that compares the measurement result measured by the measuring unit with the reference light amount. A bonding unit for determining whether a bonding portion between the surface mounting package and the ball grid is good or bad, the bonding inspection device for a surface mounting package.
【請求項2】 投光部の光源としてレーザ光を用い回路
基板に搭載された表面実装型パッケージのボールグリッ
ドの格子間に光線を分岐したことを特徴とする請求項1
記載の表面実装型パッケージの接合検査装置。
2. A light source according to claim 1, wherein a laser beam is used as a light source of the light projecting unit, and the light beam is branched between lattices of a ball grid of a surface mount type package mounted on a circuit board.
A bonding inspection apparatus for a surface-mounted package according to the above.
【請求項3】 投光部の光源として回路基板に搭載され
た表面実装型パッケージのボールグリッドの各格子間に
対応したLED光源を用いたことを特徴とする表面実装
型パッケージ接合部検査装置。
3. A surface mount type package joint inspection apparatus, wherein an LED light source corresponding to a space between ball grids of a surface mount type package mounted on a circuit board is used as a light source of a light projecting unit.
【請求項4】 投光部の光源を光ファイバアレイを用い
て回路基板に搭載された表面実装型パッケージのボール
グリッドの各格子間に光線を分岐して照射することを特
徴とする請求項1記載の表面実装型パッケージの接合検
査装置。
4. A light source of a light projecting unit for irradiating a light beam by branching between respective grids of a ball grid of a surface mount type package mounted on a circuit board using an optical fiber array. A bonding inspection apparatus for a surface-mounted package according to the above.
【請求項5】 表面実装型パッケージの接合部検査方法
において、回路基板のパッド上に搭載された表面実装型
パッケージのボールグリッドの各格子間に投光部から光
線を照射し、前記ボールグリッドの各格子間を通過して
くる光量を受光部で検出し、検出した光量を計測部で計
測し、計測部からの計測結果で前記回路基板のパッド上
に搭載されたボールグリッドの接合部の良否を判定する
こと、を特徴とする表面実装型パッケージの接合部検査
方法。
5. A method for inspecting a joint of a surface-mounted package, comprising: irradiating a light beam from a light projecting portion between respective grids of a ball grid of the surface-mounted package mounted on pads of a circuit board; The amount of light passing between the lattices is detected by the light receiving unit, the detected amount of light is measured by the measuring unit, and the quality of the joint of the ball grid mounted on the pad of the circuit board is determined based on the measurement result from the measuring unit. And a method for inspecting a joint portion of a surface mount package.
【請求項6】 回路基板に搭載された表面実装型パッケ
ージの縦横のボールグリッドの各格子間を通過してくる
通過総光量を計測部で計測し、計測結果を判定部に入力
し、あらかじめ正常なはんだ接合状態の時に受光される
通過光量の基準値と比較して接合部の良否を判定するこ
とを特徴とする請求項5記載の表面実装型パッケージの
接合部検査方法。
6. A measuring unit measures the total amount of light passing between each of the vertical and horizontal ball grids of a surface mount package mounted on a circuit board, and inputs the measurement result to a judging unit. 6. The method for inspecting a joint of a surface mount package according to claim 5, wherein the quality of the joint is determined by comparing with a reference value of a passing light amount received in a proper solder joint state.
JP32574099A 1999-11-16 1999-11-16 Device and method for inspecting surface-mounted package junction part Pending JP2001144147A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32574099A JP2001144147A (en) 1999-11-16 1999-11-16 Device and method for inspecting surface-mounted package junction part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32574099A JP2001144147A (en) 1999-11-16 1999-11-16 Device and method for inspecting surface-mounted package junction part

Publications (1)

Publication Number Publication Date
JP2001144147A true JP2001144147A (en) 2001-05-25

Family

ID=18180137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32574099A Pending JP2001144147A (en) 1999-11-16 1999-11-16 Device and method for inspecting surface-mounted package junction part

Country Status (1)

Country Link
JP (1) JP2001144147A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015002296A (en) * 2013-06-17 2015-01-05 オリンパス株式会社 Electronic component packaging structure
US9541602B2 (en) 2012-03-08 2017-01-10 Fujitsu Limited Electronic component inspection apparatus and method
JP7419879B2 (en) 2020-03-02 2024-01-23 日本電気株式会社 Bump joint inspection device and bump joint inspection method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9541602B2 (en) 2012-03-08 2017-01-10 Fujitsu Limited Electronic component inspection apparatus and method
JP2015002296A (en) * 2013-06-17 2015-01-05 オリンパス株式会社 Electronic component packaging structure
JP7419879B2 (en) 2020-03-02 2024-01-23 日本電気株式会社 Bump joint inspection device and bump joint inspection method

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