JP2001143595A - マイクロ・エレクトロメカニカルｒｆスイッチをベースにした折り返しバネとその製造方法 - Google Patents

マイクロ・エレクトロメカニカルｒｆスイッチをベースにした折り返しバネとその製造方法

Info

Publication number
JP2001143595A
JP2001143595A JP2000269664A JP2000269664A JP2001143595A JP 2001143595 A JP2001143595 A JP 2001143595A JP 2000269664 A JP2000269664 A JP 2000269664A JP 2000269664 A JP2000269664 A JP 2000269664A JP 2001143595 A JP2001143595 A JP 2001143595A
Authority
JP
Japan
Prior art keywords
switch
signal line
bottom electrode
micro
spring suspension
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000269664A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001143595A5 (https=
Inventor
Kuingu San Tsui
ツィ・クィング・サン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of JP2001143595A publication Critical patent/JP2001143595A/ja
Publication of JP2001143595A5 publication Critical patent/JP2001143595A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H13/00—Switches having rectilinearly-movable operating part or parts adapted for pushing or pulling in one direction only, e.g. push-button switch
    • H01H13/70—Switches having rectilinearly-movable operating part or parts adapted for pushing or pulling in one direction only, e.g. push-button switch having a plurality of operating members associated with different sets of contacts, e.g. keyboard
    • H01H13/702—Switches having rectilinearly-movable operating part or parts adapted for pushing or pulling in one direction only, e.g. push-button switch having a plurality of operating members associated with different sets of contacts, e.g. keyboard with contacts carried by or formed from layers in a multilayer structure, e.g. membrane switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
JP2000269664A 1999-09-16 2000-09-06 マイクロ・エレクトロメカニカルｒｆスイッチをベースにした折り返しバネとその製造方法 Pending JP2001143595A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/397,313 US6307452B1 (en) 1999-09-16 1999-09-16 Folded spring based micro electromechanical (MEM) RF switch
US397313 1999-09-16

Publications (2)

Publication Number Publication Date
JP2001143595A true JP2001143595A (ja) 2001-05-25
JP2001143595A5 JP2001143595A5 (https=) 2007-10-25

Family

ID=23570705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000269664A Pending JP2001143595A (ja) 1999-09-16 2000-09-06 マイクロ・エレクトロメカニカルｒｆスイッチをベースにした折り返しバネとその製造方法

Country Status (3)

Country Link
US (1) US6307452B1 (https=)
JP (1) JP2001143595A (https=)
KR (1) KR20010030305A (https=)

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KR100420098B1 (ko) * 2001-09-21 2004-03-02 주식회사 나노위즈 초소형 전기기계 시스템을 이용한 고주파 소자 및 그 제조방법
WO2006011239A1 (ja) * 2004-07-29 2006-02-02 Hitachi Media Electronics Co., Ltd. 容量型ｍｅｍｓ素子とその製造方法、及び高周波装置
WO2006033271A1 (ja) * 2004-09-22 2006-03-30 Advantest Corporation 高周波回路装置
EP1672661A2 (en) 2004-12-17 2006-06-21 Samsung Electronics Co., Ltd. MEMS switch and method of fabricating the same
EP1672662A1 (en) 2004-12-17 2006-06-21 Samsung Electronics Co., Ltd. MEMS switch and method of fabricating the same
US7098517B2 (en) 2003-08-21 2006-08-29 Olympus Corporation Semiconductor device
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US7515023B2 (en) 2004-03-31 2009-04-07 Fujitsu Limited Micro-switching device and method of manufacturing micro-switching device
US7535326B2 (en) 2005-01-31 2009-05-19 Fujitsu Limited Microswitching element
US7540968B2 (en) 2005-03-18 2009-06-02 Fujitsu Limited Micro movable device and method of making the same using wet etching
JP2012038661A (ja) * 2010-08-10 2012-02-23 Nippon Telegr & Teleph Corp <Ntt> Ｍｅｍｓスイッチおよびｍｅｍｓスイッチの製造方法
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US7548144B2 (en) 2004-12-17 2009-06-16 Samsung Electronics Co., Ltd. MEMS switch and method of fabricating the same
US7535326B2 (en) 2005-01-31 2009-05-19 Fujitsu Limited Microswitching element
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US7851976B2 (en) 2005-03-18 2010-12-14 Fujitsu Limited Micro movable device and method of making the same using wet etching
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