JP2001142008A - 光学的スイッチング素子 - Google Patents

光学的スイッチング素子

Info

Publication number
JP2001142008A
JP2001142008A JP2000294499A JP2000294499A JP2001142008A JP 2001142008 A JP2001142008 A JP 2001142008A JP 2000294499 A JP2000294499 A JP 2000294499A JP 2000294499 A JP2000294499 A JP 2000294499A JP 2001142008 A JP2001142008 A JP 2001142008A
Authority
JP
Japan
Prior art keywords
waveguide
waveguides
groove
optical
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000294499A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001142008A5 (de
Inventor
Julie E Fouquet
ジュリー・イー・フォークェット
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2001142008A publication Critical patent/JP2001142008A/ja
Publication of JP2001142008A5 publication Critical patent/JP2001142008A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2000294499A 1999-09-28 2000-09-27 光学的スイッチング素子 Pending JP2001142008A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/407542 1999-09-28
US09/407,542 US6195478B1 (en) 1998-02-04 1999-09-28 Planar lightwave circuit-based optical switches using micromirrors in trenches

Publications (2)

Publication Number Publication Date
JP2001142008A true JP2001142008A (ja) 2001-05-25
JP2001142008A5 JP2001142008A5 (de) 2007-09-27

Family

ID=23612519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000294499A Pending JP2001142008A (ja) 1999-09-28 2000-09-27 光学的スイッチング素子

Country Status (4)

Country Link
US (1) US6195478B1 (de)
EP (1) EP1089108B1 (de)
JP (1) JP2001142008A (de)
DE (1) DE60040584D1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003057569A (ja) * 2001-06-07 2003-02-26 Sumitomo Electric Ind Ltd 光スイッチ及び光スイッチアレイ
KR20040047327A (ko) * 2002-11-29 2004-06-05 엘지전자 주식회사 광스위치
WO2004086119A1 (ja) * 2003-03-27 2004-10-07 Ntt Electronics Corporation 可変光減衰器
US7010200B2 (en) 2001-12-26 2006-03-07 Nikon Corporation Light-beam switching/adjusting apparatus and manufacturing method thereof
US7177065B2 (en) 2002-01-09 2007-02-13 Nikon Corporation Optical element, thin film structure, optical switch, and method of manufacturing optical element

Families Citing this family (105)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6389189B1 (en) * 1998-10-23 2002-05-14 Corning Incorporated Fluid-encapsulated MEMS optical switch
US6404942B1 (en) * 1998-10-23 2002-06-11 Corning Incorporated Fluid-encapsulated MEMS optical switch
US6445840B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Micromachined optical switching devices
US6453083B1 (en) 1999-05-28 2002-09-17 Anis Husain Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
US6445841B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Optomechanical matrix switches including collimator arrays
US6449406B1 (en) 1999-05-28 2002-09-10 Omm, Inc. Micromachined optomechanical switching devices
CN1423757A (zh) * 1999-11-23 2003-06-11 L3光学公司 具有平面波导和快门致动器的光学开关
TW451093B (en) 1999-11-23 2001-08-21 Nanovation Tech Inc Analog optical switches using an integrated machzehnder interferometer having a movable phase shifter
TW521166B (en) * 1999-11-23 2003-02-21 L3 Optics Inc An optical phase shifter having an integrated planar optical waveguide and phase shifter element
US6363183B1 (en) * 2000-01-04 2002-03-26 Seungug Koh Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof
US6360036B1 (en) * 2000-01-14 2002-03-19 Corning Incorporated MEMS optical switch and method of manufacture
EP1264206B1 (de) * 2000-01-31 2003-12-17 Sercalo Microtechnology Ltd. Schalteranordnung für strahlungsleiter
WO2001059492A2 (en) * 2000-02-04 2001-08-16 L3 Optics, Inc. Optical waveguide and shutter
US6396972B1 (en) * 2000-02-09 2002-05-28 Agilent Technologies, Inc. Thermally actuated optical add/drop switch
US6477290B1 (en) * 2000-02-15 2002-11-05 Optic Net, Inc. Fiber optic switch using MEMS
US6470108B1 (en) * 2000-04-26 2002-10-22 Tini Alloy Company Optical switching device and method
US6490382B1 (en) * 2000-05-05 2002-12-03 Jds Uniphase Corporation MicroElectroMechanical optical cross-connect switches having reduced numbers of reflectors therein and methods of operating same
US7085445B2 (en) * 2000-08-04 2006-08-01 Seungug Koh Micro-opto-electro-mechanical waveguide switches
US7003187B2 (en) * 2000-08-07 2006-02-21 Rosemount Inc. Optical switch with moveable holographic optical element
US6504968B1 (en) * 2000-08-30 2003-01-07 Jds Uniphase Inc. Optical switches including reflectors having associated actuators and latches located adjacent to a surface thereof and methods of operating same
JP3766953B2 (ja) * 2000-09-13 2006-04-19 日本電信電話株式会社 光回路
US6532319B2 (en) * 2000-12-18 2003-03-11 Agilent Technologies, Inc. Ceramic substrate for photonic switching system
US20020086456A1 (en) * 2000-12-19 2002-07-04 Cunningham Shawn Jay Bulk micromachining process for fabricating an optical MEMS device with integrated optical aperture
TW456523U (en) * 2000-12-28 2001-09-21 Hon Hai Prec Ind Co Ltd Optical switch
US6731833B2 (en) 2001-01-16 2004-05-04 T-Rex Enterprises Corp. Optical cross connect switch
US6901180B2 (en) * 2001-01-24 2005-05-31 Adc Telecommunications, Inc. MEMS optical switch on a single chip and method
WO2002068821A2 (en) * 2001-02-28 2002-09-06 Lightwave Microsystems Corporation Microfluidic control using dieletric pumping
US7016560B2 (en) * 2001-02-28 2006-03-21 Lightwave Microsystems Corporation Microfluidic control for waveguide optical switches, variable attenuators, and other optical devices
US6818559B2 (en) * 2001-03-21 2004-11-16 Intel Corporation Method of fabrication to sharpen corners of Y-branches in integrated optical components and other micro-devices
EP1245976A1 (de) * 2001-03-30 2002-10-02 Corning O.T.I. S.p.A. Optische Schalteranordnung
US6760503B1 (en) 2001-04-12 2004-07-06 Eric F. Hermann Scalable optical router/switch and method of constructing thereof
US6477222B1 (en) * 2001-04-30 2002-11-05 Agilent Technologies, Inc. Getter for atmospheric gases in optical switch working fluid
US6647165B2 (en) * 2001-05-31 2003-11-11 Agilent Technologies, Inc. Total internal reflection optical switch utilizing a moving droplet
JP3810768B2 (ja) * 2001-07-13 2006-08-16 エヌティティエレクトロニクス株式会社 光導波路型マトリクス・スイッチおよびその製造方法
US6618519B2 (en) * 2001-07-16 2003-09-09 Chromux Technologies, Inc. Switch and variable optical attenuator for single or arrayed optical channels
AU2002326454A1 (en) * 2001-07-24 2003-02-17 Onix Microsystems Mems element having perpendicular portion formed from substrate
US6813412B2 (en) * 2001-07-24 2004-11-02 Michael J. Daneman Mems element having perpendicular portion formed from substrate
KR20040044965A (ko) * 2001-09-21 2004-05-31 스미토모 덴키 고교 가부시키가이샤 광 스위치 및 광 스위치 어레이
KR100393193B1 (ko) * 2001-09-29 2003-07-31 삼성전자주식회사 광 도파로와 ｍｅｍｓ 액추에이터를 구비한 가변 광 감쇠기
US6890619B2 (en) * 2001-11-13 2005-05-10 Agilent Technologies, Inc. Optical systems and refractive index-matching compositions
US6801679B2 (en) * 2001-11-23 2004-10-05 Seungug Koh Multifunctional intelligent optical modules based on planar lightwave circuits
US6807356B2 (en) * 2001-12-10 2004-10-19 Jds Uniphase Corporation Fiber-coupled optical attenuator
US6760529B2 (en) 2001-12-11 2004-07-06 Intel Corporation Three-dimensional tapered optical waveguides and methods of manufacture thereof
JP3986840B2 (ja) * 2002-02-01 2007-10-03 三菱電機株式会社 光スイッチの製造方法
GB0203343D0 (en) * 2002-02-13 2002-03-27 Alcatel Optronics Uk Ltd Micro opto electro mechanical device
US6728449B2 (en) 2002-02-14 2004-04-27 Agilent Technologies, Inc. Fiber assembly alignment using fiducials
CN1316271C (zh) * 2002-03-01 2007-05-16 柔斯芒特公司 带有三维波导的光学开关
US6710350B2 (en) 2002-03-05 2004-03-23 Ge Medical Systems Information Technologies, Inc. Radiation detector with microphotonic optical switches to route light in an imaging system
US6798939B2 (en) * 2002-03-14 2004-09-28 Agilent Technologies, Inc. Bubble stability in an optical switch
JP2004126503A (ja) * 2002-03-28 2004-04-22 Nikon Corp マイクロアクチュエータ及びこれを用いた光スイッチ
US6732905B2 (en) 2002-04-16 2004-05-11 Agilent Technologies, Inc. Vented cavity, hermetic solder seal
US6958446B2 (en) * 2002-04-17 2005-10-25 Agilent Technologies, Inc. Compliant and hermetic solder seal
US20030202264A1 (en) * 2002-04-30 2003-10-30 Weber Timothy L. Micro-mirror device
US7023603B2 (en) * 2002-04-30 2006-04-04 Hewlett-Packard Development Company, L.P. Micro-mirror device including dielectrophoretic microemulsion
US6954297B2 (en) * 2002-04-30 2005-10-11 Hewlett-Packard Development Company, L.P. Micro-mirror device including dielectrophoretic liquid
US6972882B2 (en) * 2002-04-30 2005-12-06 Hewlett-Packard Development Company, L.P. Micro-mirror device with light angle amplification
US6816648B2 (en) 2002-05-01 2004-11-09 Intel Corporation Integrated waveguide gratings by ion implantation
US6670210B2 (en) * 2002-05-01 2003-12-30 Intel Corporation Optical waveguide with layered core and methods of manufacture thereof
US20030210865A1 (en) * 2002-05-08 2003-11-13 Kjetil Johannessen Method and apparatus for coupling of optically active devices to a planar lightwave circuit
GB2388918A (en) * 2002-05-25 2003-11-26 Alcatel Optronics Netherlands Optical waveguide switch with movable reflector in trench
KR100443670B1 (ko) * 2002-06-19 2004-08-11 (주)엠투엔 마이크로 광 스위치 및 그 제조 방법
US6782185B2 (en) * 2002-07-03 2004-08-24 Sumitomo Electric Industries, Ltd. Optical variable attenuator and optical module
US6807333B2 (en) * 2002-07-15 2004-10-19 Agilent Technologies, Inc. Optical switch using an annular array of optical ports
EP1382984A1 (de) * 2002-07-19 2004-01-21 Avanex Corporation Planarer optischer Schalter und Schaltermatrix
US7221819B2 (en) 2002-08-01 2007-05-22 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Operating an optical switch at a negative pressure differential
US7040323B1 (en) * 2002-08-08 2006-05-09 Tini Alloy Company Thin film intrauterine device
CA2434625A1 (en) * 2002-09-10 2004-03-10 Sumitomo Electric Industries, Ltd. Optical switch
US6876788B2 (en) * 2002-09-11 2005-04-05 Agilent Technologies, Inc. Preventing hydrodynamic crosstalk in an optical switch
US20040091202A1 (en) * 2002-10-24 2004-05-13 Lg Electronics Inc. Optical switch
US6903487B2 (en) * 2003-02-14 2005-06-07 Hewlett-Packard Development Company, L.P. Micro-mirror device with increased mirror tilt
US6844953B2 (en) * 2003-03-12 2005-01-18 Hewlett-Packard Development Company, L.P. Micro-mirror device including dielectrophoretic liquid
JP4295278B2 (ja) 2003-03-31 2009-07-15 日本電信電話株式会社 光半導体素子および光半導体集積回路
US7095913B2 (en) * 2003-04-02 2006-08-22 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Non-active waveguides on planar lightwave circuits
US6897469B2 (en) * 2003-05-02 2005-05-24 Athanasios J. Syllaios Sub-wavelength structures for reduction of reflective properties
US7359523B2 (en) * 2003-06-17 2008-04-15 Avago Technologies Fiber Ip Pte Ltd Fluidic acoustic transducer
US7274840B2 (en) * 2003-07-23 2007-09-25 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Clean and test for fluid within a reflection optical switch system
US7492992B1 (en) * 2003-08-08 2009-02-17 Neophotonics Corporation Bi-directional PLC transceiver device
US7039273B2 (en) * 2003-08-12 2006-05-02 Tyler Sims Solder seals within a switching system
US7422403B1 (en) 2003-10-23 2008-09-09 Tini Alloy Company Non-explosive releasable coupling device
US7031564B2 (en) * 2003-11-05 2006-04-18 Tyler Sims Heat transfer structures
US7465903B2 (en) * 2003-11-05 2008-12-16 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Use of mesa structures for supporting heaters on an integrated circuit
US7172269B2 (en) * 2003-11-13 2007-02-06 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Resistor shapes for heating devices on an integrated circuit
US7024062B2 (en) * 2004-02-25 2006-04-04 John Julian Uebbing Optical switch with low pressure bubble
US7632361B2 (en) * 2004-05-06 2009-12-15 Tini Alloy Company Single crystal shape memory alloy devices and methods
US20060118210A1 (en) * 2004-10-04 2006-06-08 Johnson A D Portable energy storage devices and methods
US20060140569A1 (en) * 2004-12-28 2006-06-29 Intel Corporation Planar waveguides with air thin films used as anti-reflective layers, beam splitters and mirrors
US7763342B2 (en) * 2005-03-31 2010-07-27 Tini Alloy Company Tear-resistant thin film methods of fabrication
US20080044130A1 (en) * 2006-08-16 2008-02-21 Xyratex Technology Limited Optical printed circuit board, a method of making an optical printed circuit board and an optical waveguide
US20080213062A1 (en) * 2006-09-22 2008-09-04 Tini Alloy Company Constant load fastener
US20080075557A1 (en) * 2006-09-22 2008-03-27 Johnson A David Constant load bolt
US8349099B1 (en) 2006-12-01 2013-01-08 Ormco Corporation Method of alloying reactive components
WO2008092028A1 (en) * 2007-01-25 2008-07-31 Tini Alloy Company Frangible shape memory alloy fire sprinkler valve actuator
US8584767B2 (en) * 2007-01-25 2013-11-19 Tini Alloy Company Sprinkler valve with active actuation
US7862056B2 (en) 2007-02-02 2011-01-04 Ford Global Technologies, Llc Steering gear inertia damper
US8007674B2 (en) 2007-07-30 2011-08-30 Tini Alloy Company Method and devices for preventing restenosis in cardiovascular stents
WO2009073609A1 (en) 2007-11-30 2009-06-11 Tini Alloy Company Biocompatible copper-based single-crystal shape memory alloys
US7842143B2 (en) * 2007-12-03 2010-11-30 Tini Alloy Company Hyperelastic shape setting devices and fabrication methods
US8382917B2 (en) * 2007-12-03 2013-02-26 Ormco Corporation Hyperelastic shape setting devices and fabrication methods
US8731343B2 (en) 2011-02-24 2014-05-20 Xyratex Technology Limited Optical printed circuit board, a method of making an optical printed circuit board and an optical waveguide
US20130287336A1 (en) * 2012-04-26 2013-10-31 Shih-Yuan Wang Optical switch
US11040230B2 (en) 2012-08-31 2021-06-22 Tini Alloy Company Fire sprinkler valve actuator
US10124197B2 (en) 2012-08-31 2018-11-13 TiNi Allot Company Fire sprinkler valve actuator
CN107678097B (zh) 2016-08-01 2019-11-12 华为技术有限公司 光开关和光交换系统
DE102019210747B4 (de) * 2019-07-19 2023-11-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optisches system und verfahren zum herstellen eines optischen systems
US11125941B1 (en) * 2019-10-29 2021-09-21 Waymo Llc LIDAR signal system

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131210A (ja) * 1988-11-11 1990-05-21 Nippon Telegr & Teleph Corp <Ntt> 光導波路スイッチ
JPH03215812A (ja) * 1990-01-22 1991-09-20 Nippon Telegr & Teleph Corp <Ntt> マトリクス光スイッチ
JPH0452616A (ja) * 1990-06-21 1992-02-20 Furukawa Electric Co Ltd:The 導波路型光スイッチ
JPH04255804A (ja) * 1991-02-08 1992-09-10 Nippon Telegr & Teleph Corp <Ntt> マトリクス光導波路スイッチ
JPH06308400A (ja) * 1993-04-20 1994-11-04 Nippon Telegr & Teleph Corp <Ntt> 光導波路スイッチ
JPH08201857A (ja) * 1995-01-24 1996-08-09 Hitachi Cable Ltd 磁気駆動導波路型光スイッチとその製造方法
JPH11154447A (ja) * 1997-09-10 1999-06-08 Lucent Technol Inc 光作動微小機械光子スイッチを備える物品
EP0935149A2 (de) * 1998-02-04 1999-08-11 Hewlett-Packard Company Elément de commutation avec guide d'onde à coeur élargi
JP2002528759A (ja) * 1998-10-23 2002-09-03 コーニング インコーポレイテッド 流体が封入されたｍｅｍｓ光スイッチ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4988157A (en) 1990-03-08 1991-01-29 Bell Communications Research, Inc. Optical switch using bubbles
US5699462A (en) 1996-06-14 1997-12-16 Hewlett-Packard Company Total internal reflection optical switches employing thermal activation

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131210A (ja) * 1988-11-11 1990-05-21 Nippon Telegr & Teleph Corp <Ntt> 光導波路スイッチ
JPH03215812A (ja) * 1990-01-22 1991-09-20 Nippon Telegr & Teleph Corp <Ntt> マトリクス光スイッチ
JPH0452616A (ja) * 1990-06-21 1992-02-20 Furukawa Electric Co Ltd:The 導波路型光スイッチ
JPH04255804A (ja) * 1991-02-08 1992-09-10 Nippon Telegr & Teleph Corp <Ntt> マトリクス光導波路スイッチ
JPH06308400A (ja) * 1993-04-20 1994-11-04 Nippon Telegr & Teleph Corp <Ntt> 光導波路スイッチ
JPH08201857A (ja) * 1995-01-24 1996-08-09 Hitachi Cable Ltd 磁気駆動導波路型光スイッチとその製造方法
JPH11154447A (ja) * 1997-09-10 1999-06-08 Lucent Technol Inc 光作動微小機械光子スイッチを備える物品
EP0935149A2 (de) * 1998-02-04 1999-08-11 Hewlett-Packard Company Elément de commutation avec guide d'onde à coeur élargi
JP2002528759A (ja) * 1998-10-23 2002-09-03 コーニング インコーポレイテッド 流体が封入されたｍｅｍｓ光スイッチ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003057569A (ja) * 2001-06-07 2003-02-26 Sumitomo Electric Ind Ltd 光スイッチ及び光スイッチアレイ
US7010200B2 (en) 2001-12-26 2006-03-07 Nikon Corporation Light-beam switching/adjusting apparatus and manufacturing method thereof
US7177065B2 (en) 2002-01-09 2007-02-13 Nikon Corporation Optical element, thin film structure, optical switch, and method of manufacturing optical element
KR20040047327A (ko) * 2002-11-29 2004-06-05 엘지전자 주식회사 광스위치
WO2004086119A1 (ja) * 2003-03-27 2004-10-07 Ntt Electronics Corporation 可変光減衰器

Also Published As

Publication number Publication date
EP1089108A3 (de) 2004-01-21
DE60040584D1 (de) 2008-12-04
US6195478B1 (en) 2001-02-27
EP1089108A2 (de) 2001-04-04
EP1089108B1 (de) 2008-10-22

Similar Documents

Publication Publication Date Title
JP2001142008A (ja) 光学的スイッチング素子
US5960131A (en) Switching element having an expanding waveguide core
JP4616470B2 (ja) 光スイッチ
US6493482B1 (en) Optical switch having a planar waveguide and a shutter actuator
Lin et al. On the expandability of free-space micromachined optical cross connects
EP1300707A2 (de) Auf Totalreflexion beruhender optischer Schalter
US6483961B1 (en) Dual refraction index collimator for an optical switch
JP4478145B2 (ja) 中空導波路およびｍｅｍｓ反射素子を備える光経路設定装置
US6987901B2 (en) Optical switch with 3D waveguides
JP2005519323A5 (de)
JP2006520925A5 (de)
WO2001059492A2 (en) Optical waveguide and shutter
JP2000193838A (ja) 光導波路構造体
US20040013344A1 (en) Planar optical switch and switch array
US10466422B1 (en) FTIR/TIR optical switch using a moving waveguide
JP2004220013A (ja) ビーム発散を減少させた光スイッチ
Chi et al. Compact 1× 8 MEMS optical switches using planar lightwave circuits
WO2001048532A9 (en) Integrated planar optical waveguide and shutter
US6516108B1 (en) Optically controlled exchange switches within an optical signal network
JP2003344788A (ja) 光スイッチ及びその製造方法
US20050152639A1 (en) Optical switch and fabrication method thereof
US20030048983A1 (en) Fiber optic switching system
Sawada Optical Switch
JP2005172853A (ja) 反射方向可変ミラー装置及びその製造方法、並びに光路可変装置
JP2004302425A (ja) 光ファイバアレイおよびその製造方法、光デバイス

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20060425

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20060706

A072 Dismissal of procedure [no reply to invitation to correct request for examination]

Free format text: JAPANESE INTERMEDIATE CODE: A073

Effective date: 20060905

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20070320

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20070329

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20070329

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20070423

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20070423

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070809

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070809

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20091104

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100402