AU2002326454A1 - Mems element having perpendicular portion formed from substrate - Google Patents

Mems element having perpendicular portion formed from substrate

Info

Publication number
AU2002326454A1
AU2002326454A1 AU2002326454A AU2002326454A AU2002326454A1 AU 2002326454 A1 AU2002326454 A1 AU 2002326454A1 AU 2002326454 A AU2002326454 A AU 2002326454A AU 2002326454 A AU2002326454 A AU 2002326454A AU 2002326454 A1 AU2002326454 A1 AU 2002326454A1
Authority
AU
Australia
Prior art keywords
substrate
portion formed
mems element
perpendicular portion
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002326454A
Inventor
Chuang-Chia Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Onix Microsystems Inc
Original Assignee
Onix Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/915,232 external-priority patent/US6813412B2/en
Priority claimed from US09/915,217 external-priority patent/US6583031B2/en
Application filed by Onix Microsystems Inc filed Critical Onix Microsystems Inc
Publication of AU2002326454A1 publication Critical patent/AU2002326454A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/352—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
    • G02B6/3526—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive the optical element being a lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
    • G02B6/3528—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive the optical element being a prism
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3534—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being diffractive, i.e. a grating
AU2002326454A 2001-07-24 2002-07-23 Mems element having perpendicular portion formed from substrate Abandoned AU2002326454A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/915,232 2001-07-24
US09/915,232 US6813412B2 (en) 2001-07-24 2001-07-24 Mems element having perpendicular portion formed from substrate
US09/915,217 2001-07-25
US09/915,217 US6583031B2 (en) 2001-07-25 2001-07-25 Method of making a MEMS element having perpendicular portion formed from substrate
PCT/US2002/023672 WO2003010878A2 (en) 2001-07-24 2002-07-23 Mems element having perpendicular portion formed from substrate

Publications (1)

Publication Number Publication Date
AU2002326454A1 true AU2002326454A1 (en) 2003-02-17

Family

ID=27129665

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002326454A Abandoned AU2002326454A1 (en) 2001-07-24 2002-07-23 Mems element having perpendicular portion formed from substrate

Country Status (2)

Country Link
AU (1) AU2002326454A1 (en)
WO (1) WO2003010878A2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6195478B1 (en) * 1998-02-04 2001-02-27 Agilent Technologies, Inc. Planar lightwave circuit-based optical switches using micromirrors in trenches
US6360036B1 (en) * 2000-01-14 2002-03-19 Corning Incorporated MEMS optical switch and method of manufacture

Also Published As

Publication number Publication date
WO2003010878A2 (en) 2003-02-06
WO2003010878A3 (en) 2003-11-06

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase