JP2001136758A - Cooling apparatus for pulse power supply - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve cooling capability, achieve miniaturization and low cost, and prevent leakage of a coolant. SOLUTION: Oil 6 is contained in an oil-tight tank 21, made of a nonmagnetic material, and a heating object 8 comprising circuit elements and a radiator 9 are soaked in the oil 6. A magnet 22, provided inside the side of the tank 21 and a magnetic connecting means 23 facing the magnet 22, is provided outside the side of the tank 21 and coupled to a motor 27. This motor 27 is driven to rotate the magnetic connecting means 23, which in turn rotates the connected magnet 22 and stirs the oil 6.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse power supply that combines a pulse generation circuit using a power semiconductor switch and a magnetic pulse compression circuit using a saturable reactor and a capacitor to generate a large current pulse having a narrow width at high repetition. The present invention relates to an apparatus, particularly to cooling of a circuit element housed in an oil-tight tank, and is used for a high-voltage pulse generating circuit such as an excimer laser.

[0002]

2. Description of the Related Art FIG. 11 shows a circuit diagram of a conventional pulse power supply device. A pulse generating circuit 1 is provided with a first-stage capacitor CO for electric power, and the first-stage capacitor CO is initially charged by a high-voltage charger 2; With the ON control of the semiconductor switch SW, a pulse current I0 is supplied from the first stage capacitor CO to the pulse transformer PT via the saturable reactor SI0.
The saturable reactor SI0 performs a saturation operation after the semiconductor switch SW is completely turned on to generate a pulse current I0, thereby reducing the duty of the semiconductor switch SW and reducing the switching loss.

A magnetic pulse compression circuit 3 is connected to the secondary side of the pulse transformer PT. The pulse current I0 is boosted by the pulse transformer PT to become a pulse current I1, charges the capacitor C1 with high voltage, and charges the capacitor C1 with a high voltage. When the saturable reactor SI1 operates as a magnetic switch, the narrow pulse current I2 compressed by the magnetic pulse is applied to the capacitor C2 in the direction shown in the drawing to charge the capacitor C2 at high voltage. Further, the magnetic switch operation of the saturable reactor SI2 with the charging voltage of the capacitor C2 causes a further narrower pulse current I3 to flow in the direction shown in the figure, and a narrower and higher voltage pulse to the load 4 such as the chamber of the laser head. The current I3 is repeatedly supplied.

Here, the saturable reactors SI0 to SI2
In the core used in the pulse transformer PT, hysteresis loss and eddy current loss occur due to a high repetition pulse current flowing through the winding, and the temperature rises. Further, the semiconductor switch SW also generates heat due to a loss during the switching operation. These heat-generating circuit elements are stored in an oil-tight tank for cooling (the semiconductor switch SW may be water-cooled or air-cooled outside the oil-tight tank). In addition, capacitors C1 and C
2 are collectively housed in an oil-tight tank because they are arranged close to each other so that a narrow pulse current can flow between them and the saturable reactors SI0 and SI1. As a refrigerant for this oil-tight tank,
Highly insulating liquids such as insulating oil and florinate are used.

FIGS. 12 and 13 show a conventional cooling device for a pulse power supply device. FIG. 12 is a cross-sectional view of a natural convection type cooling device. An oil 6 is stored in an oil-tight tank 5, and air 7 exists in an upper part of the oil-tight tank 5. The heating element 8 composed of the above-described circuit element is immersed in the lower part of the oil 6, the radiator 9 is immersed in the upper part of the oil 6, and the cooling device inserted from above the oil-tight tank 5 in the radiator 9. A water inflow pipe 10 and an outflow pipe 11 are connected, and a baffle 12 for adjusting an oil flow is provided between the heating element 8 and the radiator 9.

In the cooling device shown in FIG. 12, the oil 6 around the heat generating material 8 removes heat from the heat generating material 8, and the oil moves upward due to a decrease in specific gravity. On the other hand, the radiator 9
, Cooling water flows in from an inflow pipe 10 and flows out from an outflow pipe 11. The heated oil is cooled by coming into contact with the radiator 9, the specific gravity increases, and the oil moves downward. Such an oil flow is adjusted so as to flow efficiently by a guide called a baffle 12, and the heat generating material 8 is cooled by such natural convection.

FIG. 13 is a schematic configuration diagram of a forced convection type cooling device, in which a heating substance is immersed in oil stored in an oil-tight tank 5. The oil-tight tank 5 is provided with an inflow pipe 13 and an outflow pipe 14 for oil, and a pipe 17 is connected to the inflow pipe 13 and the outflow pipe 14 via joints 15 and 16.
7 is provided with a pump 18 and a heat exchanger 19, and a cooling water pipe 20 is inserted into the heat exchanger 19.

In the cooling device shown in FIG. 13, the oil forcedly circulated between the oil-tight tank 5 and the pipe 17 by the pump 18 is cooled by heat exchange with the cooling water in the heat exchanger 19 to be cooled. The oil that has flowed into the oil-tight tank 5 from the inflow pipe 13 is sprayed on the heating material. This allows
As the heating material is cooled, the oil is heated, and the heated oil flows out of the oiltight tank 5 from the outflow pipe 14 and is circulated again.

[0009]

However, FIG.
In the cooling device described in (1), since the convection is caused by a physical phenomenon of a change in the specific gravity of oil, the flow is weak and the cooling capacity is low. For this reason, if the amount of heat generated by the circuit element increases due to the high repetition of the pulse power supply or the short pulse due to the multi-stage compression, the cooling cannot be completed. Further, the cooling device shown in FIG. 13 has a high cooling capacity, but requires the pump 18 and the like, so that the device becomes large and the cost is increased. Also, the number of joints (actually not only those indicated by reference numerals 15 and 16) of the pipe 17 for circulating oil increases, and the reliability for preventing oil leakage decreases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a cooling device for a pulse power supply device having a high cooling capacity, a small size, a low cost, and no occurrence of refrigerant leakage. Aim.

[0011]

According to a first aspect of the present invention, there is provided a cooling apparatus for a pulse power supply, comprising a tank containing a refrigerant in which a circuit element of the pulse power supply is immersed. A radiator immersed in this refrigerant and through which cooling water flows from outside the tank, and provided in the tank,
A stirrer that stirs the refrigerant and a magnetic coupling unit that is connected to the motor so as to face the stirrer outside the tank and that is magnetically coupled to the stirrer are provided.

According to a second aspect of the present invention, there is provided a cooling device for a pulse power supply device, comprising: a tank containing a refrigerant in which a circuit element is immersed; a radiator immersed in the refrigerant and flowing cooling water from outside the tank; A non-metallic insulating plate closely attached to a hole provided in the tank, a stirring member provided inside the insulating plate for stirring the refrigerant, and connected to the motor so as to face the stirring member outside the insulating plate; And a magnetic coupling means magnetically coupled to the stirring member.

According to a third aspect of the present invention, there is provided a cooling device for a pulse power supply device, which is made of a non-magnetic material and has a tank in which a refrigerant in which circuit elements are immersed is stored, and cooling water is immersed in the refrigerant, and cooling water is supplied from outside the tank. It is provided with a radiator to be passed, a motor comprising a stator provided outside the tank and a rotor provided inside, and a stirring member connected to the rotor in the tank and stirring the refrigerant.

According to a fourth aspect of the present invention, there is provided a cooling device for a pulse power supply device, comprising: a tank containing a refrigerant in which a circuit element is immersed; a radiator immersed in the refrigerant and through which cooling water flows from outside the tank; A motor provided in the tank;
This is provided with a stirring member that is connected to the motor in the tank and stirs the refrigerant.

According to a fifth aspect of the present invention, there is provided a cooling device for a pulse power supply device, comprising a tank containing a refrigerant in which a circuit element is immersed, which is made of a non-magnetic material, and a cooling water immersed in the refrigerant. A radiator to be passed, a stirring member provided in the tank, for stirring the refrigerant, and a magnetic connection unit magnetically connected to the stirring member, connected to the fan so as to face the stirring member outside the tank. It is provided.

According to a sixth aspect of the present invention, in the cooling device for a pulse power supply device, the stirring member is constituted by a magnet or a blade.

In the cooling device for a pulse power supply device according to claim 7, the stirring member is constituted by a magnet and a blade.

In the cooling device of the pulse power supply device according to the present invention, the blades are cross-flow blades for generating a refrigerant flow in a direction perpendicular to the direction of rotation of the magnet.

According to a ninth aspect of the present invention, there is provided a cooling device for a pulse power supply device, wherein a guide for directing a flow of a refrigerant is provided in a tank.

According to a tenth aspect of the present invention, there is provided a cooling device for a pulse power supply device, wherein components other than the tank and the radiator are provided on the side surface of the tank.

In the cooling device for a pulse power supply device according to the present invention, constituent members other than the tank and the radiator are provided on the bottom surface of the tank.

[0022]

Embodiment 1 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view of a cooling device of a pulse power supply device according to a first embodiment. An oil-tight tank 21 is formed of a nonmagnetic material such as stainless steel or aluminum, and contains oil 6 therein. The air 7 exists in the upper part inside. A heating element 8 composed of a circuit element of a pulse power supply device is stored in a lower portion of the oil 6, and a radiator 9 is stored in an upper portion of the oil 6. The radiator 9 has a cooling water inserted in an upper portion of an oil-tight tank 21. The inflow pipe 10 and the outflow pipe 11 are connected, and the cooling water flows.

A magnet 22 serving as a stirring member is provided inside the side surface of the oil-tight tank 21, and magnetic coupling means 23 is provided outside the side surface of the oil-tight tank 21 so as to face the magnet 22. The means 23 includes two magnets 2 on the magnet mounting plate 24.
5 and 26 are attached to opposite polarities. The magnet mounting plate 24 is mounted on the rotating shaft 27a of the motor 27,
The motor 27 is connected to an AC power supply 28. Motor 2
7 may be an AC type or a DC type. Further, the magnet 22 does not require a bearing.

In the above configuration, when the motor 27 is driven, the magnetic coupling means 23 rotates, and the magnet 22 magnetically coupled to the magnetic coupling means 23 via the side wall of the oil-tight tank 21 also rotates. Stirred.

In the first embodiment, the oil 6 heated by the heating element 8 rises and is cooled by the radiator 9,
Descend. Further, the oil 6 is stirred by the rotation of the magnet 22,
The heat exchange is promoted by mixing the cold oil 6 and the heated oil 6. Therefore, the cooling efficiency can be improved. Further, since the magnet 22 in the oil-tight tank 21 is rotated by a magnetic force from the outside, a member penetrating the oil-tight tank 21 is unnecessary, and seamless and high reliability can be achieved for preventing oil leakage. . Further, the oil-tight tank 21 is formed of a nonmagnetic metal such as stainless steel or aluminum, and the magnetic force from the magnetic coupling means 23 to the magnet 22 is somewhat weakened. Since no device is required, the device can be made compact and inexpensive. In addition, since the magnet 22, the magnetic coupling means 23, and the motor 27 are provided on the side surface of the oil-tight tank 21, the heat generating material 8 can be arranged so that the oil 6 is easily cooled by the flow from the side of the oil 6. There is no problem when components are arranged on the bottom surface of the dense tank 21 without gaps or when input / output terminals are provided on the bottom surface.

When the radiator 9 is provided between the magnet 22 and the heating element 8 as shown by a two-dot chain line, the radiator 9
The cooled oil 6 can be sprayed on the heat-generating material 8 by the rotation of the magnet 22, and the cooling efficiency can be further enhanced. Embodiment 2 FIG. 2 is a cross-sectional view of a cooling device of a pulse power supply device according to Embodiment 2, wherein a hole 21a is provided in a side wall of an oil-tight tank 21 made of a nonmagnetic material such as stainless steel or aluminum, and an O-ring is provided in the hole 21a. Non-metallic insulating plate 30 through 29
Are closely attached. Other configurations are the same as those of the first embodiment.

In the second embodiment, since a part of the oil-tight tank 21 is made of a non-metallic insulating plate 30 and the magnets 22 and the magnetic connecting means 23 are provided on both sides thereof, the magnetic connection between the two is established. Can be strengthened. Other effects are the same as those of the first embodiment. Third Embodiment FIG. 3 is a cross-sectional view of a cooling device of a pulse power supply device according to a third embodiment, in which a magnet 22 provided inside an insulating plate 30 has a rotating shaft 31, and the rotating shaft 31 It is rotatably supported by a bearing 32 erected on the bottom surface. A blade 33 is attached to the tip of the rotating shaft 31 so that the magnet 22
The blade 33 forms a stirring member. The wings 33
It has angles like fan blades, ship screws, airplane propellers, etc. Other configurations are described in Embodiment 2.
Is the same as

In the third embodiment, the stirring member is a magnet 2
Since it is composed of the blades 2 and the blades 33, the oil flow in the direction of the heating element 8 can be increased, and the heating element 8 can be cooled effectively. Other effects are the same as those of the second embodiment. The magnets 22 may be attached to the blades 33, and the rotating shaft 31 may be rotatably supported by the insulating plate 30. Fourth Embodiment FIG. 4 is a cross-sectional view of a cooling device of a pulse power supply device according to a fourth embodiment, in which a rotating shaft 34 is rotatably supported inside an insulating plate 30, and an iron blade as a stirring member is mounted on the rotating shaft 34. 35 are attached. Other configurations are described in Embodiment 2.
Is the same as

In the fourth embodiment, the magnetic coupling means 23
The blades 35 are magnetically connected to each other, and the blades 35 are also rotated by the rotation of the magnetic connection means 23, so that stirring is performed. Therefore,
Since the magnet 22 is omitted, the configuration is simplified, and the oil flow in the direction of the heating element 8 can be ensured. Other effects are the same as those of the second embodiment. Fifth Embodiment FIG. 5 is a cross-sectional view of a cooling device of a pulse power supply device according to a fifth embodiment. The periphery of a heating element 8 is covered by a cylindrical guide 36, and the guide 36 is arranged in the direction of oil flow by the blade 35. Other configurations are the same as those of the fourth embodiment.

In the fifth embodiment, the oil flow due to the rotation of the blades 35 is guided by the guide 36 and passes around the heat generating material 8, and then rises by being heated, is cooled by the radiator 9, and descends. Return to. Thus, the cooling effect can be improved by directing the oil flow by the guide 36. Other effects are similar to those of the fourth embodiment. Sixth Embodiment FIG. 6 is a cross-sectional view of a cooling device of a pulse power supply device according to a sixth embodiment. The magnet 22, the magnetic coupling unit 23, the motor 27, and the AC provided on the side surface of the oil-tight tank 21 in the first embodiment are shown. In the sixth embodiment, the power supply 28 is provided for the bottom surface of the oil-tight tank 21. Other configurations are the same as those of the first embodiment.

In the sixth embodiment, the magnet 22, the magnetic coupling means 23, and the like are provided on the bottom surface of the oil-tight tank 21. This is effective when the space inside and outside this bottom surface has room. Since the heat flows from the bottom to the top, it is effective when the arrangement of the circuit elements constituting the heating element 8 is easily cooled by such an oil flow. Also, the magnetic coupling means 23 moves the magnet 22
Since the direction of transmission of magnetic force to and the direction of gravity match,
Since the magnetic force transmission efficiency is good and the direction of the rotating shaft 27a also matches the direction of gravity, the friction between the rotating shaft 27a and the bearing is small. Other effects are the same as those of the first embodiment. Seventh Embodiment FIG. 7 is a cross-sectional view of a cooling device of a pulse power supply device according to a seventh embodiment.
In place of the blade 33, a cross flow blade 37 for generating an oil flow in a direction perpendicular to the direction of the rotating shaft 31 is attached. Other configurations are the same as those of the third embodiment.

In the seventh embodiment, the oil flow due to the rotation of the magnet 22 is generated in the lateral direction, and the cross flow blade 37
Since the oil flow is generated in the vertical direction by the rotation of, the inside of the oil-tight tank 21 can be uniformly stirred, and the heat exchange can be promoted to increase the cooling efficiency. Other effects are similar to those of the third embodiment. Eighth Embodiment FIG. 8 is a cross-sectional view of a cooling device of a pulse power supply device according to an eighth embodiment, in which a protrusion 21b is provided on a side surface of an oil-tight tank 21 formed of a non-magnetic material such as stainless steel or aluminum. , A motor rotor 39 made of a permanent magnet is provided inside the protruding portion 21b, and a blade 35 is provided on a rotating shaft 40 of the rotor 39.

In the eighth embodiment, since the blade 35 is directly driven by the motor including the stator 38 and the rotor 39, a powerful and controllable rotational force can be applied to the blade 35, and the stirring can be effectively performed. This improves the cooling efficiency. In addition, since this cooling structure does not penetrate the oil-tight tank 21, reliability for preventing oil leakage is high. Furthermore, since no pump or the like is required, it is small and inexpensive. Ninth Embodiment FIG. 9 is a sectional view of a cooling device of a pulse power supply according to a ninth embodiment. A motor 27 is provided in an oil-tight tank 21, and a blade 35 is connected to the motor 27.

In the ninth embodiment, since the blades 35 are directly driven by the motor 27, strong stirring can be performed, and the cooling efficiency can be improved. However, since the motor 27 and the AC power supply 28 are electrically connected, a seal structure is required. In addition, since the motor 27 is immersed in the oil 6, maintenance becomes somewhat difficult. The structure is simple, small and inexpensive. Tenth Embodiment FIG. 10 is a sectional view of a cooling device of a pulse power supply device according to a tenth embodiment. A fan (with a motor) 41 is provided in place of the motor 27 in the first embodiment, and a fan for adjusting the number of rotations is provided. A gear mechanism 42 is provided between the fan 41 and the magnetic coupling means 23. Other configurations are the first embodiment.
Is the same as

In the tenth embodiment, the oil-tight tank 21
The magnetic coupling means 23 is driven by using a fan 41 for cooling the external parts by air.
The cooling of the other parts can be performed simultaneously, which is efficient. Other effects are the same as those of the first embodiment.

In the above embodiments, the oil 6 is used as the refrigerant, but other refrigerants such as Fluorinert can be used. The provision of the components of the cooling device inside and outside the bottom surface of the oil-tight tank 21 as shown in the sixth embodiment can be applied to other embodiments.

[0037]

As described above, according to the first and sixth aspects of the present invention, since the refrigerant in the tank is agitated by the agitating means, heat exchange is promoted and the cooling efficiency can be improved. In addition, since the stirring means is magnetically rotated, no member penetrating the tank is required, and the reliability for preventing oil leakage can be improved. Furthermore, since no pump or oil piping is required, the configuration is simplified, and the size and cost can be reduced.

According to the second aspect, a non-metallic insulating plate is provided in the hole provided in the tank, and the stirring member and the magnetic coupling means are provided on both sides of the insulating plate. The magnetic coupling between the two can be strengthened, and the magnetic coupling means can be downsized.

According to the third aspect, the stator of the motor is provided outside the tank, the rotor of the motor is provided inside the tank, and the rotor is provided with a stirring member. Since the stirring member is directly driven by the motor, the motor can be driven with strong controllability and the cooling efficiency can be improved.

According to the fourth aspect, since the stirring member is directly driven by the motor provided in the tank, in addition to the effect of the first aspect, strong stirring can be performed, and the cooling efficiency is improved. be able to.

According to the fifth aspect, the stirring member in the tank is driven via the magnetic coupling means by the fan for cooling the components outside the tank. Can be simultaneously cooled by a fan, and the cooling efficiency can be improved.

According to the seventh aspect, since the stirring member is constituted by the magnet and the blade, the stirring effect can be enhanced, and the cooling efficiency can be improved.

According to the eighth aspect, the stirring member is constituted by a magnet and a blade, and the blade is a cross-flow blade for generating a flow in a direction perpendicular to the flow of the refrigerant by the magnet, thereby uniformly stirring the refrigerant. And cooling efficiency can be improved.

According to the ninth aspect, the guide for directing the flow of the refrigerant is provided in the tank, and the flow is adjusted, so that the cooling efficiency can be improved.

According to the tenth aspect, since the constituent members are provided on the side surface of the tank, it is possible to prevent trouble from occurring according to the arrangement of circuit elements and the arrangement of components on the bottom surface of the tank.

According to the eleventh aspect, since the constituent members are provided on the bottom surface of the tank, it is possible to prevent trouble from occurring depending on the arrangement of circuit elements and the arrangement of components on the side surface of the tank. Further, since the direction of transmission of the magnetic force from the magnetic coupling means to the stirring member matches the direction of gravity, the efficiency of magnetic force transmission is improved. Furthermore, there is little wear on the rotating shaft.

[Brief description of the drawings]

FIG. 1 is a sectional view of a cooling device of a pulse power supply device according to Embodiment 1 of the present invention.

FIG. 2 is a sectional view of a cooling device of a pulse power supply device according to a second embodiment.

FIG. 3 is a sectional view of a cooling device of a pulse power supply device according to a third embodiment.

FIG. 4 is a sectional view of a cooling device of a pulse power supply device according to a fourth embodiment.

FIG. 5 is a sectional view of a cooling device of a pulse power supply device according to a fifth embodiment.

FIG. 6 is a sectional view of a cooling device of a pulse power supply device according to a sixth embodiment.

FIG. 7 is a sectional view of a cooling device of a pulse power supply device according to a seventh embodiment.

FIG. 8 is a sectional view of a cooling device of a pulse power supply device according to an eighth embodiment.

FIG. 9 is a sectional view of a cooling device of a pulse power supply device according to a ninth embodiment.

FIG. 10 is a sectional view of a cooling device of a pulse power supply device according to a tenth embodiment.

FIG. 11 is a circuit diagram of a conventional pulse power supply device.

FIG. 12 is a sectional view of a cooling device of a conventional pulse power supply device.

FIG. 13 is a perspective view of a cooling device of another conventional pulse power supply device.

[Explanation of symbols]

 Reference Signs List 6 ... oil 8 ... heating material 9 ... radiator 21 ... oil-tight tank 21a ... hole 22 ... magnet 23 ... magnetic coupling means 27 ... motor 30 ... insulating plate 33, 35 ... blade 36 ... guide 37 ... cross flow blade 38 ... stator 39 ... rotor 40 ... fan

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Takashi Igarashi, Inventor 2-1-1-17 Osaki, Shinagawa-ku, Tokyo Inside the Meidensha Corporation (72) Inventor Toshihiro Nagata 2-1-1-17, Osaki, Shinagawa-ku, Tokyo Stock Company F-term (reference) in Shameidensha 5H790 BA02 BB03 BB08 CC01 EA01 EA02 EA03 EA13 KK07

Claims (11)

[Claims] 1. A cooling device for a pulse power supply for cooling a circuit element of a pulse power supply for generating a pulse, comprising: a tank made of a non-magnetic material and containing a refrigerant in which the circuit element is immersed; A radiator that is immersed in the refrigerant and through which the cooling water flows from outside the tank, a stirring member provided in the tank and agitating the refrigerant, and a stirring member connected to the motor so as to face the stirring member outside the tank. A cooling device for a pulse power supply device, comprising: a magnetic coupling means magnetically coupled to the pulse power supply device. 2. A cooling device for a pulse power supply device for cooling a circuit element of a pulse power supply device for generating a pulse, comprising: a tank containing a refrigerant in which the circuit element is immersed; a tank immersed in the refrigerant; A radiator through which cooling water flows from outside, a non-metallic insulating plate closely attached to a hole provided in the tank, a stirring member provided inside the insulating plate and stirring the refrigerant, and an outside of the insulating plate And a magnetic coupling means magnetically coupled to the stirring member and connected to the motor so as to face the stirring member. 3. A cooling device for a pulse power supply device for cooling a circuit element of a pulse power supply device for generating a pulse, comprising: a tank made of a non-magnetic material and containing a refrigerant in which the circuit element is immersed; A radiator that is immersed in a coolant and through which cooling water flows from outside the tank, a motor consisting of a stator provided outside the tank and a rotor provided inside the tank, and connected to the rotor inside the tank to stir the coolant A cooling device for a pulse power supply device, comprising: 4. A cooling device for a pulse power supply device for cooling a circuit element of a pulse power supply device for generating a pulse, comprising: a tank containing a refrigerant in which the circuit element is immersed; a tank immersed in the refrigerant; A cooling device for a pulse power supply device, comprising: a radiator through which cooling water flows from outside, a motor provided in a tank, and a stirring member connected to the motor in the tank and stirring the refrigerant. 5. A cooling device for a pulse power supply device for cooling a circuit element of a pulse power supply device for generating a pulse, comprising: a tank made of a non-magnetic material and containing a refrigerant in which the circuit element is immersed; A radiator that is immersed in the refrigerant and through which the cooling water flows from outside the tank, a stirring member provided inside the tank and agitates the refrigerant, and a stirring member connected to the fan so as to face the stirring member outside the tank. A cooling device for a pulse power supply device, comprising: a magnetic coupling means magnetically coupled to the pulse power supply device. 6. The cooling device for a pulse power supply device according to claim 1, wherein said stirring member is constituted by a magnet or a blade. 7. The cooling device for a pulse power supply device according to claim 1, wherein the stirring member is constituted by a magnet and a blade. 8. The cooling device for a pulse power supply device according to claim 7, wherein said blades are cross-flow blades for generating a refrigerant flow in a direction perpendicular to the direction of the rotation center of the magnet. 9. The cooling device for a pulse power supply device according to claim 1, wherein a guide for directing the flow of the refrigerant is provided in the tank. 10. The tank according to claim 1, wherein components other than the tank and the radiator are provided on a side surface of the tank.
10. The cooling device for a pulse power supply device according to any one of claims 9 to 9. 11. The tank according to claim 1, wherein components other than the tank and the radiator are provided on the bottom surface of the tank.
10. The cooling device for a pulse power supply device according to any one of claims 9 to 9.