JP2001114984A - Sealing resin composition and semiconductor device sealed therewith - Google Patents

Sealing resin composition and semiconductor device sealed therewith

Info

Publication number
JP2001114984A
JP2001114984A JP29310699A JP29310699A JP2001114984A JP 2001114984 A JP2001114984 A JP 2001114984A JP 29310699 A JP29310699 A JP 29310699A JP 29310699 A JP29310699 A JP 29310699A JP 2001114984 A JP2001114984 A JP 2001114984A
Authority
JP
Japan
Prior art keywords
resin composition
resin
sealing
dimercapto
anilino
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29310699A
Other languages
Japanese (ja)
Inventor
Hirofumi Suda
裕文 須田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Chemical Corp
Original Assignee
Toshiba Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Chemical Corp filed Critical Toshiba Chemical Corp
Priority to JP29310699A priority Critical patent/JP2001114984A/en
Publication of JP2001114984A publication Critical patent/JP2001114984A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a sealing resin composition that can give a high-reliability sealed semiconductor device improved in the adhesion of the resin composition and a pre-plated frame, especially, a frame pre-plated with Pd, Pd-Au, or the like and therefore in reflow resistance and made proof against moisture deterioration after reflow. SOLUTION: Provided are a sealing resin composition essentially consisting of (A) an epoxy resin, (B) a novolac phenolic resin, (C) 2-anilino-4,6-dimercapto-s- triazine, and (D) an inorganic filler and containing 0.004-0.2 wt.%, based on the resin composition, component C and 25-95 wt.%, based on the resin composition, component D and a sealed semiconductor device prepared by sealing a semiconductor chip with the composition.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、Pd、Au、Ag
メッキを施したフレームを用いた半導体パッケージにお
いて耐リフロークラック性等の信頼性に優れたエポキシ
樹脂組成物および半導体封止装置に関する。
[0001] The present invention relates to Pd, Au, Ag
The present invention relates to an epoxy resin composition excellent in reliability such as reflow crack resistance in a semiconductor package using a plated frame and a semiconductor sealing device.

【0002】[0002]

【従来の技術】最近の半導体装置では、半田メッキに換
えて、PdやPd−Au等のプレプレーティングを施し
たフレームを採用した半導体パッケージが増加してい
る。
2. Description of the Related Art In recent semiconductor devices, the number of semiconductor packages employing a frame plated with Pd or Pd-Au instead of solder plating is increasing.

【0003】従来のエポキシ樹脂、ノボラック型フェノ
ール樹脂及び無機質充填剤からなる樹脂組成物によって
封止したPdやPd−Au等のプレプレーティングフレ
ームを採用した半導体装置は、該プレプレーティングフ
レームと封止樹脂との接着性が著しく悪いという欠点が
あった。特に吸湿した半導体装置を赤外線(IR)リフ
ロー方式で表面実装すると、封止樹脂とリードフレー
ム、あるいは封止樹脂と半導体チップとの間の剥がれが
生じて著しい耐湿劣化を起こし、電極の腐食による断線
や水分によるリーク電流を生じ、その結果、半導体装置
は、長期間の信頼性を保証することができないという欠
点があった。このため、耐湿性の影響が少なく、半導体
装置全体のIRリフローによる表面実装を行っても耐湿
劣化の少ない成形性のよい材料の開発が強く要望されて
いた。
[0003] Conventional semiconductor devices employing a pre-plating frame of Pd or Pd-Au sealed with a resin composition comprising an epoxy resin, a novolak-type phenol resin and an inorganic filler, are sealed with the pre-plating frame. There was a drawback that the adhesion to the resin was extremely poor. In particular, when a semiconductor device that has absorbed moisture is surface-mounted by an infrared (IR) reflow method, peeling occurs between the sealing resin and the lead frame or between the sealing resin and the semiconductor chip, causing remarkable moisture resistance deterioration and disconnection due to corrosion of the electrode. Leakage current due to moisture or moisture, and as a result, the semiconductor device has a drawback that long-term reliability cannot be guaranteed. For this reason, there has been a strong demand for the development of a material which has little influence on moisture resistance and has good moldability with little moisture resistance deterioration even if surface mounting of the entire semiconductor device is performed by IR reflow.

【0004】[0004]

【発明が解決しようとする課題】本発明は、上記の欠点
を解消し、上記要望に応えるためになされたもので、P
d、Pd−Au、Ag等のプレプレーティングフレーム
との接着性が高く、特に耐リフロー性とリフロー後の信
頼性に優れた、成形性のよい、封止用樹脂組成物および
半導体封止装置を提供しようとするものである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned drawbacks and to meet the above-mentioned demands.
d, Pd-Au, Ag, etc., high adhesiveness to a pre-plating frame, particularly excellent in reflow resistance and reliability after reflow, good moldability, sealing resin composition and semiconductor sealing device It is intended to provide.

【0005】[0005]

【課題を解決するための手段】本発明者は、上記の目的
を達成しようと鋭意研究を重ねた結果、樹脂組成物に2
−アニリノ−4,6−ジメルカプト−s−トリアジンを
配合することによって、Pd、Pd−Au、Ag等のプ
レプレーティングフレームとの接着性を大幅に向上し、
上記目的が達成されることを見いだし、本発明を完成し
たものである。
Means for Solving the Problems The present inventor has conducted intensive studies to achieve the above object, and as a result, has found that the resin composition has 2
By blending -anilino-4,6-dimercapto-s-triazine, the adhesion to a pre-plating frame such as Pd, Pd-Au, Ag, etc. is greatly improved,
The inventors have found that the above objects have been achieved and completed the present invention.

【0006】即ち、本発明は、(A)エポキシ樹脂、
(B)ノボラック型フェノール樹脂、(C)2−アニリ
ノ−4,6−ジメルカプト−s−トリアジンおよび
(D)無機質充填剤を必須成分とし、樹脂組成物に対し
て、前記(C)の2−アニリノ−4,6−ジメルカプト
−s−トリアジンを0.004〜0.2重量%、また前
記(D)の無機質充填剤を25〜95重量%の割合で含
有してなることを特徴とする封止用樹脂組成物である。
またこの封止用樹脂組成物の硬化物によって、半導体チ
ップを封止してなることを特徴とする半導体封止装置で
ある。
That is, the present invention provides (A) an epoxy resin,
(B) Novolak type phenolic resin, (C) 2-anilino-4,6-dimercapto-s-triazine and (D) an inorganic filler are essential components. A seal comprising 0.004 to 0.2% by weight of anilino-4,6-dimercapto-s-triazine and 25 to 95% by weight of the inorganic filler (D). It is a resin composition for stopping.
Further, there is provided a semiconductor encapsulating apparatus characterized in that a semiconductor chip is encapsulated with a cured product of the encapsulating resin composition.

【0007】以下、本発明を詳細に説明する。Hereinafter, the present invention will be described in detail.

【0008】本発明に用いる(A)エポキシ樹脂として
は、その分子中にエポキシ基を少なくとも2個有する化
合物である限り、分子構造、分子量など特に制限はな
く、一般に封止用材料として使用されているものを広く
包含することができる。例えば、ビフェニル型、ビスフ
ェノール型の芳香族系、シクロヘキサン誘導体等脂肪族
系、また、次の一般式で示されるエポキシノボラック系
のエポキシ樹脂等が挙げられる。
The epoxy resin (A) used in the present invention is not particularly limited in molecular structure, molecular weight, etc., as long as it is a compound having at least two epoxy groups in the molecule, and is generally used as a sealing material. Can be widely encompassed. For example, biphenyl type, bisphenol type aromatic type, aliphatic type such as cyclohexane derivative, and epoxy novolak type epoxy resin represented by the following general formula can be used.

【0009】[0009]

【化1】 (但し、式中、R1 は水素原子、ハロゲン原子又はアル
キル基を、R2 は水素原子又はアルキル基を、nは1以
上の整数をそれぞれ表す) これらのエポキシ樹脂は、単独もしくは2種以上混合し
て用いることができる。
Embedded image (Wherein, R 1 represents a hydrogen atom, a halogen atom or an alkyl group, R 2 represents a hydrogen atom or an alkyl group, and n represents an integer of 1 or more.) These epoxy resins may be used alone or in combination of two or more. They can be used in combination.

【0010】本発明に用いる(B)ノボラック型フェノ
ール樹脂としては、フェノール、アルキルフェノール等
のフェノール類とホルムアルデヒド、パラホルムアルデ
ヒド等のアルデヒド類とを反応させて得られるノボラッ
ク型フェノール樹脂およびこれらの変性樹脂、例えばエ
ポキシ化もしくはブチル化ノボラック型フェノール樹脂
等が挙げられ、これらの樹脂は、単独もしくは2種以上
混合して用いる。ノボラック型フェノール樹脂の配合割
合は、前述したエポキシ樹脂のエポキシ基(a)とノボ
ラック型フェノール樹脂のフェノール性水酸基(b)と
の当量比[(a)/(b)]が0.1〜10の範囲内で
あることが望ましい。当量比が0.1未満もしくは10
を超えると、耐熱性、耐湿性、成形作業性および硬化物
の電気特性が悪くなり、いずれの場合も好ましくない。
従って上記の範囲内に限定するのが良い。
The (B) novolak-type phenolic resin used in the present invention includes a novolak-type phenolic resin obtained by reacting a phenol such as phenol or alkylphenol with an aldehyde such as formaldehyde or paraformaldehyde, or a modified resin thereof. For example, an epoxidized or butylated novolak type phenol resin is used, and these resins are used alone or in combination of two or more. The mixing ratio of the novolak type phenol resin is such that the equivalent ratio [(a) / (b)] between the epoxy group (a) of the epoxy resin and the phenolic hydroxyl group (b) of the novolak type phenol resin is 0.1 to 10; Is preferably within the range. Equivalent ratio is less than 0.1 or 10
Exceeding the above range deteriorates heat resistance, moisture resistance, molding workability and electrical properties of the cured product.
Therefore, it is better to limit to the above range.

【0011】本発明に用いる(C)2−アニリノ−4,
6−ジメルカプト−s−トリアジンは、次の構造式に示
されるものである。
The (C) 2-anilino-4,
6-dimercapto-s-triazine is represented by the following structural formula.

【0012】[0012]

【化2】 2−アニリノ−4,6−ジメルカプト−s−トリアジン
の配合割合は、全体の樹脂組成物に対して0.004〜
0.2重量%含有することが望ましい。この割合が0.
004重量%未満では、Pd、Pd−Au、Ag等のプ
レプレーティングフレームとの接着力の向上に効果な
く、また、0.2重量%を超えると、封止樹脂の硬化等
に悪影響を与え、実用に適さず好ましくない。
Embedded image The mixing ratio of 2-anilino-4,6-dimercapto-s-triazine is 0.004 to 0.004 to the entire resin composition.
It is desirable to contain 0.2% by weight. This ratio is 0.
If the amount is less than 004% by weight, there is no effect on the improvement of the adhesive strength of Pd, Pd-Au, Ag or the like to the pre-plating frame. Is not suitable for practical use and is not preferred.

【0013】本発明に用いる(D)無機質充填剤として
は、シリカ粉末、アルミナ粉末、三酸化アンチモン、タ
ルク、炭酸カルシウム、チタンホワイト、クレー、マイ
カ、ベンガラ、ガラス繊維等が挙げられ、これらは単独
又は2種以上混合して使用することができる。これらの
中でも特にシリカ粉末やアルミナ粉末が好ましく、よく
使用される。無機質充填剤の配合割合は、全体の樹脂組
成物に対して25〜95重量%の割合で含有することが
望ましい。その割合が25重量%未満では、耐熱性、耐
湿性、半田耐熱性、機械的特性および成形性が悪くな
り、また、95重量%を超えるとカサバリが大きくな
り、成形性に劣り実用に適さない。
The inorganic filler (D) used in the present invention includes silica powder, alumina powder, antimony trioxide, talc, calcium carbonate, titanium white, clay, mica, red iron oxide, glass fiber and the like. Alternatively, two or more kinds can be used in combination. Among these, silica powder and alumina powder are particularly preferable and are often used. The inorganic filler is desirably contained in a proportion of 25 to 95% by weight based on the whole resin composition. If the proportion is less than 25% by weight, heat resistance, moisture resistance, solder heat resistance, mechanical properties and moldability deteriorate, and if it exceeds 95% by weight, burrs increase and the moldability deteriorates, which is not suitable for practical use. .

【0014】本発明の封止用樹脂組成物は、エポキシ樹
脂、ノボラック型フェノール樹脂、2−アニリノ−4,
6−ジメルカプト−s−トリアジンおよび無機質充填剤
を必須成分とするが、本発明の目的に反しない限度にお
いて、また必要に応じて、例えば天然ワックス類、合成
ワックス類、直鎖脂肪酸の金属塩、酸アミド類、エステ
ル類、パラフィン類等の離型剤、塩素化パラフィン、ブ
ロム化トルエン、ヘキサブロムベンゼン、三酸化アンチ
モン等の難燃剤、カーボンブラック、ベンガラ等の着色
剤、種々の硬化促進剤等を適宜、添加配合することがで
きる。
The sealing resin composition of the present invention comprises an epoxy resin, a novolak type phenol resin, 2-anilino-4,
Although 6-dimercapto-s-triazine and an inorganic filler are essential components, as long as it does not violate the purpose of the present invention, and if necessary, for example, natural waxes, synthetic waxes, metal salts of linear fatty acids, Release agents such as acid amides, esters and paraffins, flame retardants such as chlorinated paraffin, brominated toluene, hexabromobenzene and antimony trioxide, coloring agents such as carbon black and red iron oxide, various curing accelerators, etc. Can be appropriately added and blended.

【0015】本発明の封止用樹脂組成物を成形材料とし
て調製する場合の一般的な方法としては、エポキシ樹
脂、ノボラック型フェノール樹脂、2−アニリノ−4,
6−ジメルカプト−s−トリアジン、無機質充填剤およ
びその他の成分を配合し、ミキサー等によって十分均一
に混合した後、さらに熱ロールによる溶融混合処理又は
ニーダ等による混合処理を行い、次いで冷却固化させ、
適当な大きさに粉砕して成形材料とすることができる。
こうして得られた成形材料は、半導体装置をはじめとす
る電子部品あるいは電気部品の封止、被覆、絶縁等に適
用すれば、優れた特性と信頼性を付与させることができ
る。
As a general method for preparing the encapsulating resin composition of the present invention as a molding material, epoxy resin, novolak type phenol resin, 2-anilino-4,
6-dimercapto-s-triazine, an inorganic filler and other components are blended and sufficiently uniformly mixed by a mixer or the like, and further subjected to a melt mixing treatment with a hot roll or a mixing treatment with a kneader or the like, and then cooled and solidified,
It can be pulverized to an appropriate size to obtain a molding material.
If the molding material thus obtained is applied to sealing, coating, insulating, etc. of electronic parts or electric parts such as semiconductor devices, excellent properties and reliability can be imparted.

【0016】本発明の半導体封止装置は、上記のように
して得られた封止用樹脂を用いて、半導体チップを封止
することにより容易に製造することができる。封止の最
も一般的な方法としては、低圧トランスファー成形法が
あるが、射出成形、圧縮成形、注型等による封止も可能
である。封止用樹脂組成物を封止の際に加熱して硬化さ
せ、最終的にはこの組成物の硬化物によって封止された
半導体封止装置が得られる。加熱による硬化は、150
℃以上に加熱して硬化させることが望ましい。封止を行
う半導体装置としては、例えば集積回路、大規模集積回
路、トランジスタ、サイリスタ、ダイオード等で特に限
定されるものではない。
The semiconductor sealing device of the present invention can be easily manufactured by sealing a semiconductor chip using the sealing resin obtained as described above. The most common sealing method is a low-pressure transfer molding method, but sealing by injection molding, compression molding, casting or the like is also possible. The sealing resin composition is heated and cured at the time of sealing, and finally a semiconductor sealing device sealed with a cured product of this composition is obtained. Curing by heating is 150
Desirably, the composition is cured by heating to a temperature of at least ℃. As a semiconductor device for sealing, for example, an integrated circuit, a large-scale integrated circuit, a transistor, a thyristor, a diode, and the like are not particularly limited.

【0017】[0017]

【作用】本発明の封止用樹脂組成物および半導体封止装
置は、樹脂成分として2−アニリノ−4,6−ジメルカ
プト−s−トリアジンを用いたことによって、目的とす
る特性が得られるものである。即ち、2−アニリノ−
4,6−ジメルカプト−s−トリアジンは樹脂組成物の
Pd、Pd−Au、Ag等のプレプレーティングフレー
ムとの接着力を向上させ、半導体パッケージにおいて耐
リフロークラック性等の信頼性を向上させることができ
る。
The encapsulating resin composition and the semiconductor encapsulating device of the present invention can obtain desired properties by using 2-anilino-4,6-dimercapto-s-triazine as a resin component. is there. That is, 2-anilino-
4,6-dimercapto-s-triazine improves the adhesive strength of the resin composition to a pre-plating frame of Pd, Pd-Au, Ag, etc., and improves the reliability of the semiconductor package, such as reflow crack resistance. Can be.

【0018】[0018]

【発明の実施の形態】次に本発明を実施例によって説明
するが、本発明はこれらの実施例によって限定されるも
のではない。以下の実施例及び比較例において「%」と
は「重量%」を意味する。
Next, the present invention will be described with reference to examples, but the present invention is not limited to these examples. In the following Examples and Comparative Examples, “%” means “% by weight”.

【0019】実施例1 クレゾールノボラックエポキシ樹脂(エポキシ当量21
5)19%に、ノボラック型フェノール樹脂(フェノー
ル当量107)9%、次の化3に示した2−アニリノ−
4,6−ジメルカプト−s−トリアジン0.1%、
Example 1 Cresol novolak epoxy resin (epoxy equivalent 21
5) Novolak type phenol resin (phenol equivalent: 107) 9% to 19%, 2-anilino-
0.1% of 4,6-dimercapto-s-triazine,

【化3】 溶融シリカ粉末71%、硬化促進剤0.3%およびエス
テル系ワックス類0.3%を配合し、常温で混合し、さ
らに90〜95℃で混練してこれを冷却粉砕して成形材
料を製造した。この成形材料を170℃に加熱した金型
内にトランスファー注入し、硬化させて成形品(封止
品)をつくった。この成形品についてPdとPd−Au
のプレプレーティングフレームに対する接着力、耐湿性
を試験したので、その結果を表1に示した。特に接着力
において本発明の顕著な効果が認められた。
Embedded image 71% of fused silica powder, 0.3% of a curing accelerator and 0.3% of ester waxes are blended, mixed at room temperature, kneaded at 90-95 ° C, and cooled and pulverized to produce a molding material. did. This molding material was transfer-injected into a mold heated to 170 ° C. and cured to produce a molded product (sealed product). About this molded product, Pd and Pd-Au
Was tested for adhesion and moisture resistance to a pre-plating frame, and the results are shown in Table 1. In particular, a remarkable effect of the present invention was observed in adhesive strength.

【0020】実施例2 クレゾールノボラックエポキシ樹脂(エポキシ当量21
5)19%に、ノボラック型フェノール樹脂(フェノー
ル当量107)9%、2−アニリノ−4,6−ジメルカ
プト−s−トリアジン0.1%を予め溶融シリカ粉末と
混合しシリカ粉末の表面を処理したもの71%、硬化促
進剤0.3%およびエステル系ワックス類0.3%を実
施例1と同様に混合、混練、粉砕して成形材料を製造し
た。また、実施例1と同様にして成形品をつくり、Pd
とPd−Auのプレプレーティングフレームに対する接
着力、耐湿性の特性試験を行ったのでその結果を表1に
示した。特に接着力において本発明の顕著な効果が認め
られた。
Example 2 Cresol novolak epoxy resin (epoxy equivalent 21
5) 9% of novolak type phenol resin (phenol equivalent: 107) and 0.1% of 2-anilino-4,6-dimercapto-s-triazine were mixed with fused silica powder in advance to 19% to treat the surface of the silica powder. In a manner similar to Example 1, 71% of the mixture, 0.3% of a curing accelerator and 0.3% of an ester wax were mixed, kneaded, and pulverized to produce a molding material. Further, a molded article was prepared in the same manner as in Example 1, and Pd was formed.
Table 1 shows the results of a characteristic test of adhesion strength and moisture resistance of Pd and Au to a pre-plating frame. In particular, a remarkable effect of the present invention was observed in adhesive strength.

【0021】比較例 クレゾールノボラック型エポキシ樹脂(エポキシ当量2
15)19%に、ノボラック型フェノール樹脂(フェノ
ール当量107)9%、シリカ粉末71%、硬化促進剤
0.3%およびエステル系ワックス類0.3%を混合
し、実施例1と同様にして成形材料を製造した。この成
形材料を用いて成形品とし、成形品の諸特性について実
施例1と同様にして試験を行い、その結果を表1に示し
た。
Comparative Example Cresol novolak type epoxy resin (epoxy equivalent 2
15) To 19%, 9% of novolak type phenol resin (phenol equivalent: 107), 71% of silica powder, 0.3% of hardening accelerator and 0.3% of ester waxes were mixed, and the same as in Example 1 A molding material was produced. A molded article was formed using this molding material, and a test was performed on various characteristics of the molded article in the same manner as in Example 1. The results are shown in Table 1.

【0022】[0022]

【表1】 *1:トランスファー成形によって接着面積4mm2
成形品を、PdまたはPd−Auプレプレーティングさ
れた上に成形し、175℃,8時間放置した後、剪断接
着力を求めた。
[Table 1] * 1: A molded article having an adhesion area of 4 mm 2 was formed by Pd or Pd-Au pre-plating by transfer molding, left at 175 ° C. for 8 hours, and the shear adhesive strength was determined.

【0023】*2:成形材料を用いて、2本以上のアル
ミニウム配線を有するシリコン製チップ(テスト用素
子)をPdプレプレーティングフレームに接着し、17
5℃で2分間トランスファー成形して、QFP−208
P,2.8mmt の成形品をつくり、これを175℃,
8時間の後硬化を行った。こうして得た成形品を予め、
40℃,90%RH,100時間の吸湿処理した後、M
ax240℃のIRリフロー炉を4回通した。その後、
127℃,2.5気圧の飽和水蒸気中でPCTを行い、
アルミニウムの腐食による断線を不良として評価した。
* 2: Using a molding material, a silicon chip (test element) having two or more aluminum wirings was adhered to a Pd pre-plating frame.
Transfer molding at 5 ° C. for 2 minutes, QFP-208
P, a molded product of 2.8 mm t was made,
Post-curing was performed for 8 hours. The molded product obtained in this way is
After moisture absorption treatment at 40 ° C., 90% RH and 100 hours, M
a. Passed through an IR reflow furnace at 240 ° C. four times. afterwards,
Perform PCT in saturated steam at 127 ° C and 2.5 atm.
The disconnection due to aluminum corrosion was evaluated as defective.

【0024】[0024]

【発明の効果】以上の説明および表1から明らかなよう
に、本発明の封止用樹脂組成物および半導体封止装置
は、Pd、Pd−Au、Agメッキのインサートとの接
着性に優れ、IRリフロー後においても剥離することな
く、耐湿性に優れ、その結果、電極の腐食による断線や
水分によるリーク電流の発生等を著しく低減することが
でき、しかも長期間にわたって信頼性を保証することが
できる。
As apparent from the above description and Table 1, the encapsulating resin composition and the semiconductor encapsulating apparatus of the present invention have excellent adhesion to Pd, Pd-Au, and Ag-plated inserts. It does not peel off even after IR reflow, and has excellent moisture resistance. As a result, disconnection due to electrode corrosion and occurrence of leak current due to moisture can be significantly reduced, and reliability can be guaranteed for a long period of time. it can.

フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H01L 23/31 Fターム(参考) 4J002 CC052 CD021 CD051 CD061 DE127 DE137 DE147 DE237 DJ017 DJ037 DJ047 DJ057 DL007 EV346 FD017 GQ05 4J036 AA05 AD01 AD07 AF06 AF08 AF10 AJ08 DC45 FA02 FA05 FA06 JA07 4M109 AA01 BA01 CA21 EA02 EA03 EB03 EB04 EB06 EB07 EB08 EB09 EB12 EB18 EC01 EC03 EC09 Continued on the front page (51) Int.Cl. 7 Identification code FI Theme coat II (Reference) H01L 23/31 F-term (Reference) 4J002 CC052 CD021 CD051 CD061 DE127 DE137 DE147 DE237 DJ017 DJ037 DJ047 DJ057 DL007 EV346 FD017 GQ05 4J036 AA05 AD01 AD07 AF06 AF08 AF10 AJ08 DC45 FA02 FA05 FA06 JA07 4M109 AA01 BA01 CA21 EA02 EA03 EB03 EB04 EB06 EB07 EB08 EB09 EB12 EB18 EC01 EC03 EC09

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 (A)エポキシ樹脂、(B)ノボラック
型フェノール樹脂、(C)2−アニリノ−4,6−ジメ
ルカプト−s−トリアジンおよび(D)無機質充填剤を
必須成分とし、樹脂組成物に対して、前記(C)の2−
アニリノ−4,6−ジメルカプト−s−トリアジンを
0.004〜0.2重量%、また前記(D)の無機質充
填剤を25〜95重量%の割合で含有してなることを特
徴とする封止用樹脂組成物。
1. A resin composition comprising (A) an epoxy resin, (B) a novolak-type phenol resin, (C) 2-anilino-4,6-dimercapto-s-triazine and (D) an inorganic filler as essential components. With respect to 2-
A seal comprising 0.004 to 0.2% by weight of anilino-4,6-dimercapto-s-triazine and 25 to 95% by weight of the inorganic filler (D). A resin composition for stopping.
【請求項2】 (A)エポキシ樹脂、(B)ノボラック
型フェノール樹脂、(C)2−アニリノ−4,6−ジメ
ルカプト−s−トリアジンおよび(D)無機質充填剤を
必須成分とし、樹脂組成物に対して、前記(C)の2−
アニリノ−4,6−ジメルカプト−s−トリアジンを
0.004〜0.2重量%、また前記(D)の無機質充
填剤を25〜95重量%の割合で含有した封止用樹脂組
成物によって、半導体チップを封止してなることを特徴
とする半導体封止装置。
2. A resin composition comprising (A) an epoxy resin, (B) a novolak-type phenol resin, (C) 2-anilino-4,6-dimercapto-s-triazine and (D) an inorganic filler as essential components. With respect to 2-
According to the sealing resin composition containing 0.004 to 0.2% by weight of anilino-4,6-dimercapto-s-triazine and 25 to 95% by weight of the inorganic filler (D), A semiconductor sealing device characterized by sealing a semiconductor chip.
JP29310699A 1999-10-15 1999-10-15 Sealing resin composition and semiconductor device sealed therewith Pending JP2001114984A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29310699A JP2001114984A (en) 1999-10-15 1999-10-15 Sealing resin composition and semiconductor device sealed therewith

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29310699A JP2001114984A (en) 1999-10-15 1999-10-15 Sealing resin composition and semiconductor device sealed therewith

Publications (1)

Publication Number Publication Date
JP2001114984A true JP2001114984A (en) 2001-04-24

Family

ID=17790517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29310699A Pending JP2001114984A (en) 1999-10-15 1999-10-15 Sealing resin composition and semiconductor device sealed therewith

Country Status (1)

Country Link
JP (1) JP2001114984A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004292516A (en) * 2003-03-25 2004-10-21 Sumitomo Bakelite Co Ltd Epoxy resin composition and semiconductor device
JP2007204679A (en) * 2006-02-03 2007-08-16 Nitto Denko Corp Epoxy resin composition for sealing semiconductor, process for its production and semiconductor device using it
JP2007224167A (en) * 2006-02-24 2007-09-06 Nitto Denko Corp Semiconductor-sealing epoxy resin composition and semiconductor device sealed therewith
JP2014031461A (en) * 2012-08-06 2014-02-20 Panasonic Corp Liquid epoxy resin composition and composite member as well as electronic component device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004292516A (en) * 2003-03-25 2004-10-21 Sumitomo Bakelite Co Ltd Epoxy resin composition and semiconductor device
JP2007204679A (en) * 2006-02-03 2007-08-16 Nitto Denko Corp Epoxy resin composition for sealing semiconductor, process for its production and semiconductor device using it
JP2007224167A (en) * 2006-02-24 2007-09-06 Nitto Denko Corp Semiconductor-sealing epoxy resin composition and semiconductor device sealed therewith
JP2014031461A (en) * 2012-08-06 2014-02-20 Panasonic Corp Liquid epoxy resin composition and composite member as well as electronic component device

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