JP2001091474A - 欠陥検査システム - Google Patents
欠陥検査システムInfo
- Publication number
- JP2001091474A JP2001091474A JP26875399A JP26875399A JP2001091474A JP 2001091474 A JP2001091474 A JP 2001091474A JP 26875399 A JP26875399 A JP 26875399A JP 26875399 A JP26875399 A JP 26875399A JP 2001091474 A JP2001091474 A JP 2001091474A
- Authority
- JP
- Japan
- Prior art keywords
- defect
- image
- unit
- inspection
- inspection object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 title claims abstract description 144
- 238000007689 inspection Methods 0.000 title claims abstract description 112
- 238000001514 detection method Methods 0.000 claims abstract description 37
- 230000000007 visual effect Effects 0.000 claims abstract description 19
- 238000012360 testing method Methods 0.000 claims description 37
- 238000003384 imaging method Methods 0.000 claims description 12
- 238000005286 illumination Methods 0.000 description 30
- 238000000605 extraction Methods 0.000 description 20
- 230000003287 optical effect Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 10
- 238000012545 processing Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 230000002950 deficient Effects 0.000 description 7
- 239000000428 dust Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000012937 correction Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000011179 visual inspection Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000004887 air purification Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26875399A JP2001091474A (ja) | 1999-09-22 | 1999-09-22 | 欠陥検査システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26875399A JP2001091474A (ja) | 1999-09-22 | 1999-09-22 | 欠陥検査システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001091474A true JP2001091474A (ja) | 2001-04-06 |
| JP2001091474A5 JP2001091474A5 (https=) | 2006-11-09 |
Family
ID=17462863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26875399A Pending JP2001091474A (ja) | 1999-09-22 | 1999-09-22 | 欠陥検査システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001091474A (https=) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004258035A (ja) * | 2003-02-25 | 2004-09-16 | Leica Microsystems Jena Gmbh | 薄層測定装置及び方法 |
| JP2005218379A (ja) * | 2004-02-06 | 2005-08-18 | Olympus Corp | 培養細胞の状態計測方法及び計測装置 |
| JP2007107945A (ja) * | 2005-10-12 | 2007-04-26 | Olympus Corp | 基板検査装置 |
| JP2008224371A (ja) * | 2007-03-12 | 2008-09-25 | Micronics Japan Co Ltd | インライン自動検査装置及びインライン自動検査システム |
| KR101529260B1 (ko) * | 2013-11-29 | 2015-06-29 | (주) 루켄테크놀러지스 | 자동 셀 검사 장치 |
-
1999
- 1999-09-22 JP JP26875399A patent/JP2001091474A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004258035A (ja) * | 2003-02-25 | 2004-09-16 | Leica Microsystems Jena Gmbh | 薄層測定装置及び方法 |
| JP2005218379A (ja) * | 2004-02-06 | 2005-08-18 | Olympus Corp | 培養細胞の状態計測方法及び計測装置 |
| JP2007107945A (ja) * | 2005-10-12 | 2007-04-26 | Olympus Corp | 基板検査装置 |
| KR101305262B1 (ko) * | 2005-10-12 | 2013-09-09 | 올림푸스 가부시키가이샤 | 기판 검사 장치 |
| JP2008224371A (ja) * | 2007-03-12 | 2008-09-25 | Micronics Japan Co Ltd | インライン自動検査装置及びインライン自動検査システム |
| KR101529260B1 (ko) * | 2013-11-29 | 2015-06-29 | (주) 루켄테크놀러지스 | 자동 셀 검사 장치 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060921 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060921 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090213 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090217 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090616 |