JP2001076989A - 荷電粒子線露光装置及びその制御方法。 - Google Patents

荷電粒子線露光装置及びその制御方法。

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Publication number
JP2001076989A
JP2001076989A JP24672699A JP24672699A JP2001076989A JP 2001076989 A JP2001076989 A JP 2001076989A JP 24672699 A JP24672699 A JP 24672699A JP 24672699 A JP24672699 A JP 24672699A JP 2001076989 A JP2001076989 A JP 2001076989A
Authority
JP
Japan
Prior art keywords
charged particle
control data
particle beam
control
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24672699A
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English (en)
Japanese (ja)
Other versions
JP2001076989A5 (https=
Inventor
Takasumi Yui
敬清 由井
Masato Muraki
真人 村木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP24672699A priority Critical patent/JP2001076989A/ja
Publication of JP2001076989A publication Critical patent/JP2001076989A/ja
Publication of JP2001076989A5 publication Critical patent/JP2001076989A5/ja
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)
JP24672699A 1999-08-31 1999-08-31 荷電粒子線露光装置及びその制御方法。 Pending JP2001076989A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24672699A JP2001076989A (ja) 1999-08-31 1999-08-31 荷電粒子線露光装置及びその制御方法。

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24672699A JP2001076989A (ja) 1999-08-31 1999-08-31 荷電粒子線露光装置及びその制御方法。

Publications (2)

Publication Number Publication Date
JP2001076989A true JP2001076989A (ja) 2001-03-23
JP2001076989A5 JP2001076989A5 (https=) 2006-06-01

Family

ID=17152742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24672699A Pending JP2001076989A (ja) 1999-08-31 1999-08-31 荷電粒子線露光装置及びその制御方法。

Country Status (1)

Country Link
JP (1) JP2001076989A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013062326A (ja) * 2011-09-12 2013-04-04 Canon Inc 描画装置及び物品の製造方法
CN115808853A (zh) * 2021-09-14 2023-03-17 纽富来科技股份有限公司 多带电粒子束描绘方法、多带电粒子束描绘装置以及计算机可读取的记录介质

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013062326A (ja) * 2011-09-12 2013-04-04 Canon Inc 描画装置及び物品の製造方法
CN115808853A (zh) * 2021-09-14 2023-03-17 纽富来科技股份有限公司 多带电粒子束描绘方法、多带电粒子束描绘装置以及计算机可读取的记录介质

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