JP2001075609A - Method and device for production line batch constitution - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a lot waiting time in batch facilities, and to improve a batch packing rate, and to improve the operation rate of product wafer manufacture. SOLUTION: A manufacturing device controlling part 7 receives the request of carriage of the next lot prior to the several processes of batch facilities from a manufacturing device 10. At the time of receiving the request, a lot carriage controlling part 1 applies the shipping instruction of a lot to a shelf controlling part 5 based on a dispatch rule master on a master managing part 8 by referring to a shelf inventory table to ship the lot from a shelf 8. An AGV (self-traveling carriage) controlling part 6 allows an AGV 9 to carry the lot shipped from the shelf 8 to the manufacturing device, and to warehouse the lot after the end of the work from the manufacturing device 10 to the shelf 8 in the opposite order. Then, a shaft inventory updating part 2 updates the shelf inventory table in the warehousing and shipping timing of the lot for the shaft 8, and a process progress managing part 4 preserves the process progress data of the dispatch rule master or the lot for each facility.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a batch equipment for transferring a lot to a batch apparatus in a production line, by performing dispatching in consideration of working conditions in the next batch equipment several steps before the batch equipment. In addition to reducing the lot waiting time for batch configuration at the same time, raising the batch filling rate and reducing the number of dummy wafers that compensate for the shortage of product wafers in the batch by transporting batch units in units of wafers. The present invention relates to a method and an apparatus for configuring a production line batch, which improve an operation rate for manufacturing product wafers of a batch facility.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process including a processing step of collecting a plurality of lots and processing them in batches, a production line batch configuration for organizing and dividing lots in a batch has been conventionally performed automatically. Have been done. As an apparatus for knitting and dividing such lots, for example, Japanese Unexamined Patent Publication No. 07-22490 (lot automatic knitting apparatus and method) discloses a system in which a plurality of lots are arranged and arranged on the front of a stocker capable of storing a plurality of lots. One transfer robot is installed, and a lot is put in and taken out from the front of the stocker. A second transfer robot is installed on the back of the stocker, and the robot is moved in and out from the back of the stocker.

[0003] The lot identification information on the station is read by a lot identification device, and a plurality of first and second transfer robots are loaded and unloaded into and out of the stocker. And transferred to the first and second transfer robots. In addition, the stocker,
The station and the first to third transfer robots are collectively controlled to store the lot on the station in a predetermined position of a predetermined stocker based on the identification information of the lot identified by the lot identification device. It is disclosed that lots in a batch are automatically formed and classified according to lot forming conditions such as apparatus load and processing priority.

In the automatic lot forming method according to this publication,
In a semiconductor production process that includes multiple processing steps in which a plurality of lots are collected and processed in batches, the lot formation process determines the number of batches in the batch according to the lot formation conditions such as processing conditions for the next process, equipment refusal, processing priority, etc. It is disclosed that the lot formation and division work are automatically performed.
However, in the case of this publication, for example, in a batch process of four lot processing, four batches are to be performed in lot units, and when the number of each lot is small, four or more lots must be assembled. There is a disadvantage that you can not. Furthermore, even if the knitting within the batch is automatically performed in consideration of the next process condition of the batch, it does not control the arrival of the lot to the batch equipment. Since the lot flow is not performed so as to minimize the batch composition waiting time, the improvement of the batch filling rate cannot be expected, and the improvement of the processing efficiency and the operation rate in the batch equipment cannot be expected.

On the other hand, Japanese Patent Application Laid-Open No. 08-31708 (manufacturing process start instruction system) discloses a data input unit and a main control unit for inputting predetermined data to a main control unit for controlling progress management and process start instruction. A plurality of control means consisting of a display means for displaying data input and output by the data input means are connected by a line, and production result data for each manufacturing process updated by the data input means is managed by the main control means. By doing so, a first table indicating the number of in-process semiconductor wafers for each manufacturing process is created, and predetermined inquiry data is input from data input means before processing the semiconductor wafers in the batch processing process,
A second data table showing the number of in-process semiconductor wafers in the batch processing step and the number of in-process semiconductor wafers in the steps before and after the batch processing step based on the table and the predetermined data by the main control means, It is disclosed that display is performed on the display means so that the semiconductor wafer having the longest stagnation time in the second table is preferentially processed.

However, in the case of this publication, the batch dispatch is not performed in the preceding process of the batch group in consideration of the batch conditions, so that the processing efficiency in the batch facility is reduced.
There is a problem in improving the operation rate, and efficient line operation is impossible. As described above, in any conventional batch configuration method of a production line, when the next processing lot is transported to the batch, when the unloading of the lot from the shelf storing the lot is transported according to the dispatch rule, conventionally, , The maximum number of batches is managed by the number of lots.

[0007]

For this reason, when the number of batch lots is not filled up to the maximum, the operating rate of equipment for product wafers becomes low,
There is a problem that it becomes inefficient. In this case, for example, in the case of a batch facility capable of simultaneously processing 25 wafers per lot up to 4 lots at the same time, if the number of wafers in each lot is all 25, the batch filling rate will be 100%. In the case of the four lots, the batch filling rate becomes 40% for a total of 40 wafers, and the operation rate of the equipment becomes low. In this case, there is also a problem that a large number of dummy wafers are required to make up for the shortage of product wafers.

Further, regarding the management of the number of lots, referring to the shelf inventory table of FIG. 2 and the dispatch rule master shown in FIG. 3, which are applied to the present invention described later, the maximum batch number in the lot number management is 4 (Maximum of 25 wafers per lot), and lots A, C, F, and G are batch configuration targets from the date and time of work in progress. At this time, the number of wafers is 25, 10, and 5, respectively.
And three. Therefore, the total number of batch-constituting lots is up to 43, which is significantly short of 100.

In addition, when dispatching is performed in consideration of working conditions in the next batch facility several steps before the batch facility, if the manufacturing apparatus that issues a load request as a transport request for the next processing lot is the batch facility, If a batch with the same working conditions is searched from the shelf stock table and a batch configuration is performed, and if a lot with the same working conditions does not exist in the shelf stock table, or if there is less than the maximum number of batches, Since the batch efficiency is poor, a certain period of time is waited for a lot under the same working condition to be conveyed to the corresponding shelf. This waiting time causes a decrease in the operation rate of the batch equipment, and if the same condition lot is not conveyed to the corresponding shelf after waiting for a certain period of time, a batch configuration is formed in a state where the maximum number of batches is not satisfied. In addition, there is a problem that the operation efficiency of the batch equipment deteriorates.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and it is possible to reduce a lot waiting time for a batch configuration in a batch facility and improve a batch filling rate. It is an object of the present invention to provide a production line batch configuration method and apparatus capable of reducing the number of dummy wafers that compensate for the shortage of product wafers in a batch and improving the operation rate for manufacturing product wafers in a batch facility. .

[0011]

In order to achieve the above object, according to a production line batch construction method of the present invention, a lot transfer control unit requests a transfer of a next processing lot from a manufacturing apparatus a few steps before batch equipment. A first step of determining a dispatch rule specified for each equipment according to a dispatch rule master on the master management unit with reference to the shelf inventory table upon receiving a load request to be executed, and outputting a transport instruction to the shelf control unit; A second step in which the shelf control section controls the operation of loading and unloading of the lot to and from the shelf in which the lot is stored by receiving the transfer instruction, and the shelf stock table is stored in the shelf according to the timing at which the lot enters and leaves the shelf. In addition to updating by the inventory table update unit, the process progress data of the dispatch rule master and lot for each equipment Controlling the self-propelled transport vehicle, which transports the lot taken out of the shelf by the shelf control unit to the manufacturing apparatus and collects the lot from the manufacturing apparatus to the shelf. And a fourth step performed by the traveling carrier control unit.

Therefore, when the lot transport control unit receives a load request for transporting the next lot from the manufacturing apparatus several steps before the batch equipment, the lot transport control unit refers to the shelf inventory table and stores the load request in the dispatch rule master on the master management unit. Therefore, the dispatch rule specified for each facility is determined, and a transfer instruction is output to the shelf control unit. When the shelf control unit receives the transfer instruction, it controls the operation of loading and unloading lots to and from the shelves, updates the shelf inventory table by the shelf inventory table update unit at the time when the lot enters and leaves the shelf, and updates the The process progress data of the dispatch rule master and the lot is held in the process progress management unit. Since the self-propelled carrier control unit is controlled by the lot carrier control unit, the lot that has been taken out of the shelf is transported to the equipment by the self-propelled carrier, and the lot is collected from the equipment to the shelf. The batch waiting time for the batch configuration in the batch equipment can be reduced, the batch filling rate can be improved, the dummy wafers to compensate for the shortage of product wafers in the batch can be reduced, and the batch equipment products can be reduced. The operating rate for manufacturing a wafer can be improved.

Further, the production line batch forming apparatus of the present invention determines a lot to be conveyed to a manufacturing apparatus several steps before the batch equipment from among lots in a shelf for storing the lot,
A lot transfer control unit that issues a transfer instruction to the shelf control unit, a shelf stock table update unit that updates the shelf stock table when a lot is put into the shelf or when it is dispatched from the shelf, and a dispatch rule for each equipment A master management unit that manages master data such as master and lot process procedures, work conditions, etc., a process progress management unit that holds lot process progress data, and a lot input from the shelf according to instructions from the lot transfer control unit. A shelf control unit for controlling the unloading operation, and control of a self-propelled transport vehicle for transferring the lot unloaded from the shelf to the manufacturing apparatus according to an instruction from the lot transfer control unit and collecting the lot from the manufacturing apparatus to the shelf. A self-propelled carrier control unit that performs the above process, and a load request for transporting the next lot from the manufacturing equipment is sent to the lot transport control unit a few steps before the batch equipment. And outputs, and characterized by a lot when you are finished with it and a manufacturing device controller for outputting an unload request back to the shelf from the manufacturing apparatus.

[0014] Therefore, when the manufacturing equipment control unit transmits a load request for transporting the next lot to the lot transport control unit from the manufacturing device several steps before the batch equipment, the lot transport control unit transmits the load request to the lot in the shelf. Determines the lot to be transported to the manufacturing equipment, and issues a transport instruction to the shelf control unit.The shelf control unit moves the lot in and out of the shelf, and the self-propelled transport vehicle control unit responds to the instruction from the lot transport control unit. By controlling the self-propelled transport vehicle, the self-propelled transport vehicle transports the lot unloaded from the shelf to the manufacturing equipment, and when the operation of the manufacturing equipment is completed, the unload request is transported from the manufacturing equipment control unit to the lot. The self-propelled carrier control unit controls the self-propelled carrier according to instructions from the lot transport control unit, and the finished lot from the manufacturing equipment is sent to the self-propelled carrier. And put it on the shelf . The shelf inventory table update unit updates the shelf inventory table at the time when a lot is put into the shelf or when the lot is taken out of the shelf, and the master management unit updates the dispatch rule master for each equipment, the process procedure of the lot, the work conditions, etc. Since master data is managed and the process progress data of this lot is held by the process progress management unit, it is necessary to reduce the lot waiting time for batch configuration in batch equipment and improve the batch filling rate. In addition, it is possible to reduce the number of dummy wafers that compensate for the shortage of product wafers in a batch, and to improve the operation rate of batch equipment for manufacturing product wafers.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a production line batch forming method and apparatus according to the present invention will be described with reference to the drawings. FIG. 1 is a functional block diagram for explaining a first embodiment of a production line batch forming apparatus according to the present invention. In FIG. 1, a lot transfer control unit 1 includes a shelf inventory storage table update unit 2, a master management unit 3,
It is connected to the data line 11 together with the process progress management section 4. This data line 11 includes a shelf control unit 5, an AG
A V (self-propelled carrier) control unit 6 and a manufacturing device control unit 7 are also connected.

The lot transfer control unit 1 determines a lot to be transferred to the manufacturing apparatus from the lots in the shelf 8 for storing the lot, and issues a transfer instruction to the shelf control unit 5. The shelf inventory update unit 2 updates the shelf inventory table at a timing when a lot is put into the shelf 8 or at a timing when a lot is taken out from the shelf 8. This shelf inventory table is shown in FIG. As is apparent from FIG. 2, the shelf inventory table stores the work lot No. in each shelf. That is, for the lot A, lot B,..., The lot I, “work condition”, “number of sheets (number of wafers)”, “priority”, “work in process date and time”, “next batch condition”, “until next batch” Is registered in order to manage each information of “number of processes”.

The master management unit 3 determines “Equipment A”, “Equipment B”, “Equipment B” in accordance with the dispatch rule master shown in FIG.
Master data such as a "dispatch rule" for each of "equipment C" and "equipment D", a process procedure of a "batch number" lot, and work conditions are managed. As the “dispatch rules” shown in FIG. 3, for example, for each of “equipment A”, “equipment B”, “equipment C”, and “equipment D”,
Correspondingly, the transport lot is determined in the order of “priority order”, “work in process date and time”, “work in process date and time”, and “next patch condition priority”.

The process progress management unit 4 holds the process progress data of the lot, and the shelf control unit 5 operates to store and retrieve the lot from the shelf 8 in response to an instruction from the lot transfer control unit 1. To do. AGV control unit 6
According to an instruction from the lot transfer control unit 1, the lot transferred from the shelf 8 is transferred to the manufacturing apparatus 10 or the manufacturing apparatus 1
From 0, the control of the AGV 9 for collecting the finished lot on the shelf is performed. The manufacturing apparatus control unit 7 includes the lot transfer control unit 1
In response to this, the manufacturing apparatus 10 issues a load request for requesting the conveyance of the next lot several steps before the batch equipment and an unload request for returning the completed lot to the shelf 8.

Next, the operation of the first embodiment of the production line batch forming apparatus according to the present invention configured as described above will be described. First, a case where a lot is transported from the shelf 8 to the manufacturing apparatus 10 will be described. In this case, according to the dispatch rule master shown in FIG. 3, the manufacturing apparatus controller 7 outputs a load request to the lot transport controller 1 to request the next lot to be transported. When the transfer control unit 1 inputs, the lot transfer control unit 1 determines a lot to be transferred to the manufacturing apparatus 10 from the lots stored in the shelf 8 and instructs the shelf control unit 5 to transfer the lot. Is output.

Thus, the shelf control unit 5 takes out the lot designated from the shelf 8 from among the lots in the shelf 8 for storage and issues the lot from the shelf 8. At this time, an instruction is sent from the lot transfer control unit 1 to the AVG control unit 6 to transfer the lot unloaded from the shelf 8 to the manufacturing apparatus 10, whereby the AVG control unit 6 controls the drive of the AVG 9. The AVG 9 conveys the lot discharged from the shelf 8 to the manufacturing apparatus 10. When a lot is delivered from the shelf 8 during the transfer of the lot to the manufacturing apparatus 10, the shelf inventory table updating unit 2 updates the shelf inventory table at the timing of the delivery. Also, if the lot is
The process progress data of the lot corresponding to the progress of the work process of the lot is held by the process progress management unit 4.

Next, a description will be given of an operation in which a lot for which a work process has been completed is stored in the shelf 8 from the manufacturing apparatus 10. As described above, when the lot is conveyed to the manufacturing apparatus 10 and the work is completed, the unload request for returning the completed lot to the shelf 8 from the manufacturing apparatus control unit 7 to the lot transfer control unit 1. Is output. The lot transport control unit 1 inputs the unload request to
An instruction is issued to the G control unit 6 to carry out the lot for which the work process has been completed from the manufacturing apparatus 10.

Upon receiving this command, the AGV control unit 6
Drive control is performed on V9 so that the lot for which the work process has been completed is carried out from the manufacturing apparatus 10. When the AGV 9 unloads the lot from the manufacturing apparatus 10 and transports the lot to the shelf 8, the shelf control unit 5 stores the lot on the shelf 8. Even when a lot enters the shelf 8, the shelf inventory table is updated at that timing.

Next, a second embodiment of the production line batch forming apparatus according to the present invention will be described. In the first embodiment of the production line batch forming apparatus according to the present invention shown in FIG. 1, the shelf control unit 5, the AGV control unit 6, the manufacturing device control unit 7, the shelf 8, the AGV 9, and the manufacturing device 10 are each one. , But each can be expanded to N (N is an integer). When the line is composed of a plurality of floors, a lot transfer control unit 1 and a shelf stock table updating unit 2 are prepared for each floor, and the manufacturing apparatus, the AGV, and the transfer lot of the shelf are controlled for each floor. It is also possible to adopt a configuration in which sharing is performed.

Next, a first embodiment of the production line batch forming method according to the present invention will be described by applying to the production line batch apparatus according to the present invention which operates as described above. As described above, the “work condition”, “wafer number”, “priority”, “work-in-process date”, “next batch condition”, “next batch condition” of the work-in-progress lot in each shelf can be obtained from the shelf inventory table shown in FIG. Each information of "Constant until putting" is managed. When the lot is put on shelf 8 or
The shelf inventory table updating unit 2 updates the shelf inventory table at the timing when the goods are taken out of the shelf 8.

Normally, when a load request for transporting the next processing lot is sent from the manufacturing apparatus 10 to the lot transport control unit 1, the lot transport control unit 1 reads the in-process lot in the shelf 8 from the shelf inventory table. Refer to the priority and work-in-time of
Dispatch rule master on master management unit 3 (Fig. 3)
The transfer lot is determined in accordance with the dispatch rule specified for each facility, for example, “priority order” or “work-in date and time”, and a transfer instruction is issued to the shelf control unit 5.

In the case where the manufacturing apparatus 10 that has transmitted the load request is a batch facility, one lot is determined by the logic described above, and then a lot having the same work condition is searched from the shelf inventory table, and a batch configuration is performed. At this time, this first
In the embodiment, in particular, the maximum batch configuration number of each facility managed by the dispatch table of FIG. 3 is managed by the number of wafers.

For this reason, for example, when the shelf inventory table of the shelf 8 for storing a lot to which a batch manufacturing apparatus (“equipment B” in FIG. 3) that can simultaneously process 100 sheets is in the situation of FIG. "Work condition" of the stock table is "0"
001 "in the first embodiment, since the batch configuration is performed in wafer units, the lot A (the number of lots 25) and the lot C
(Number of lots 10), lot F (number of lots 5), lot G (number of lots 3), lot H (number of lots 25),
Lot I (the number of lots 20) is a batch configuration target.
In this case, the total number of lots is 88, which makes it possible to greatly improve the batch filling rate and reduce the number of dummy wafers as compared with the aforementioned lot number management.

Next, a description will be given of a method of dispatching several steps before the batch equipment in consideration of the working conditions in the next batch equipment. As described above, when the manufacturing apparatus transmitting the load request is a batch facility, a lot having the same operation condition is searched from the shelf stock table, and a batch configuration is performed. At this time, if a lot with the same work condition does not exist in the shelf inventory table, or if there is less than the maximum number of batches, the batch work efficiency is low as described above. It is necessary to wait a certain time for the lot to be conveyed.

As a result, this waiting time causes a reduction in the operation rate of the batch equipment. In addition, if a lot under the same condition is not conveyed to the corresponding shelf after waiting for a certain time, the maximum number of batches is not satisfied. Since the batch configuration is performed in a state where the batch processing is not performed, the operation efficiency of the batch equipment is extremely deteriorated. Therefore, in the first embodiment of the batch configuration method of the present invention, dispatching is performed in consideration of working conditions in the next batch facility several steps before the batch facility,
It is possible to reduce the lot waiting time for the batch configuration and increase the batch filling rate.

For this reason, first, the load request from the manufacturing facility 10 for transporting the next lot is sent to the lot transport controller 1.
Is sent to the master management unit 3 from the in-shelf work lots in the shelf inventory table.
A transfer instruction is issued to the shelf controller 5 in accordance with the dispatch rule master shown in FIG. At this time, if the dispatch rule is “next batch condition priority” as shown by “equipment D” in the dispatch rule master of FIG. 3, refer to the “next batch condition” column in the shelf inventory table, Lots with the same conditions are grouped and lots are dispatched continuously.

In the example of the shelf stock table shown in FIG. 2, the "next batch condition" of lot B, lot C, lot E, and lot G
Are "0002" and the same, so they are grouped and processed continuously. In this way, when each lot becomes the work in process of the next batch facility, the same conditions are prepared, so that batch processing at the facility can be performed without waiting time for batch configuration. It is possible to do.

Incidentally, the number of steps up to the next batch facility may be different due to the difference in the process procedure for each lot. In this case, even if the above-described grouping is performed several steps before the batch, there is a case where a time difference occurs when the batch equipment is started, and the batch configuration cannot be performed. For this reason, as shown in FIG. 2, the number of processes up to the next batch is counted when the shelf inventory table is updated, and when the next batch condition is grouped, the processes with the largest number of processes are dispatched.

For example, in the example of FIG. 2, lots that can be grouped with the “next batch condition” being “0002” exist as lot B, lot C, lot E, and lot G.
Among them, dispatch is performed in order from the lot B having the largest number of processes until the next batch is “4”. At this time, information on the priority flag is held for a lot having a larger number of processes than the smallest number of processes among the grouped lots. For example, in the four lots of lot B, lot C, lot E, and lot G, the number of reference processes is “2”, so that the priority flags are held in lot B and lot G.

The lot holding the priority flag information proceeds through a larger number of processes until the next batch facility as compared to the other lots that have been grouped. In these processes, the lot transfer control unit 1 stores the priority flag information in the lot. The held lot is dispatched preferentially, and when there are a plurality of lots holding the priority flag, the lot is dispatched in descending order of the number of processes. As can be seen from the above, the production line batch configuration method according to the present invention reduces the time difference between batch facilities and minimizes the waiting time for batch configuration.

It is needless to say that the production line batch forming method according to the present invention can be applied to the second embodiment of the production line batch forming apparatus according to the present invention.

[0036]

As described above, according to the production line batch construction method of the present invention, dispatching is performed in consideration of working conditions in the next batch facility several steps before the batch facility. In addition to reducing the lot waiting time for batch configuration in the batch, improving the batch filling rate, it is also possible to reduce the number of dummy wafers to compensate for the shortage of product wafers in the batch, and to reduce the number of product wafers in batch equipment. The operating rate for manufacturing can be improved.

Further, according to the production line batch forming apparatus of the present invention, the lot transfer control unit determines the lot to be transferred to the manufacturing apparatus from the lots in the shelf a few steps before the batch equipment, and sends it to the shelf control unit. On the other hand, a lot is taken in and out of the shelf from the shelf, the lot that has been taken out of the shelf by the self-propelled carrier is transported to the manufacturing equipment, the lot is put in the shelf from the manufacturing equipment, and the lot is put in and taken out of the shelf by the master manager Update the shelf inventory table, manage the dispatch rule master of each equipment, master data such as lot process procedures, work conditions, etc., and keep the process progress data of the lot in the process progress management section. In addition to reducing the lot waiting time for batch configuration at the same time, improving the batch filling rate, it is also possible to compensate for the shortage of product wafers in a batch. It possible to reduce the wafer, and it is possible to improve the operation rate for producing a product wafer batch facility.

[Brief description of the drawings]

FIG. 1 is a functional block diagram showing a configuration of a first embodiment of a production line batch configuration device according to the present invention.

FIG. 2 is an explanatory diagram showing a shelf inventory table applied to a production line batch configuration method and apparatus according to the present invention.

FIG. 3 is an explanatory diagram showing a dispatch rule master applied to the production line batch forming method and apparatus according to the present invention.

[Explanation of symbols]

1 lot transfer control unit 2 shelf inventory table update unit 3 master management unit 4 process progress management unit 5
... shelf control unit, 6 ... AGV (self-propelled carrier) control unit, 7
... Manufacturing device control unit, 8 ... Shelves, 9 ... AGV, 10 ...
…manufacturing device.

Claims (16)

[Claims] When a lot transfer control unit receives a load request requesting transfer of a next processing lot from a manufacturing apparatus several steps before batch equipment, the lot transfer control unit refers to a shelf inventory table and sends a load rule to a dispatch rule master on a master management unit. Therefore, a first step of determining a designated dispatch rule for each equipment and outputting a transfer instruction to the shelf control unit, and a step of receiving and transferring the lot to and from the shelf storing the lot by the shelf control unit receiving the transfer instruction. A second step of performing operation control, and the shelf inventory table updating unit updates the shelf inventory table according to the timing at which the lot enters and leaves the shelf, and transmits the dispatch rule master for each equipment and the process progress data of the lot to the process progress. A third step of holding in the management unit; A fourth step in which a self-propelled carrier control unit controls the self-propelled carrier to convey to the manufacturing apparatus and collect lots from the manufacturing apparatus to shelves. Configuration method. 2. The shelf inventory table manages information on work conditions, the number of wafers, the priority, the work-in-progress date, and the next batch condition of the work-in-process lot in each shelf with respect to the work-in-process lot. The production line batch configuration method as described. 3. In the case of a batch facility, the manufacturing apparatus determines one lot to be conveyed, searches for a lot with the same working condition from the shelf stock table,
2. The production line configuration method according to claim 1, wherein a batch configuration is performed. 4. The production line batch configuration method according to claim 1, wherein said dispatch rule master manages dispatch rules and the number of batches for each facility. 5. The dispatch rules are arranged in order of priority,
5. The production line batch configuration method according to claim 4, wherein the information includes information on the date and time of work in progress and priority on the next batch condition. 6. When the next batch condition is prioritized as the dispatch rule, the lot transfer control unit refers to a next batch condition column in the shelf inventory table to group the same condition and continuously perform the same. 5. The method according to claim 4, wherein the batch is dispatched. 7. The shelf inventory table updating section counts the number of processes up to the next batch when updating the inventory management table, and dispatches the processes with the largest number of processes when grouping the next batch condition. 2. The production line batch configuration method according to claim 1, wherein: 8. A lot transfer control unit which determines a lot to be transferred to the manufacturing apparatus several steps before the batch equipment from among the lots in the shelf storing the lot and issues a transfer instruction to the shelf control unit; A shelf inventory table update unit that updates the shelf inventory table at the time a lot is received in the warehouse or is dispatched from the shelf, and a master that manages master data such as dispatch rule masters for each equipment, lot process procedures, and work conditions A management unit, a process progress management unit that holds the process progress data of the lot, a shelf control unit that controls an operation of loading and unloading a lot from the shelf according to an instruction from the lot transfer control unit, Self-propelled transport that controls a self-propelled transport vehicle that transports lots taken out of shelves to manufacturing equipment in accordance with the instructions of, and collects lots from manufacturing equipment to shelves. A control unit and a load request for requesting the next lot to be transported several steps before the batch equipment from the manufacturing apparatus is output to the lot transport control unit, and the finished lot is output from the manufacturing apparatus to the shelf. A production apparatus control unit for outputting an unload request to return to the production line batch production apparatus. 9. The shelf inventory table manages information on work conditions, the number of wafers, the priority, the work-in-progress date, and the next batch condition of the work-in-process lot in each shelf with respect to the work-in-process lot. The production line batch configuration device as described. 10. In the case of a batch facility, the manufacturing apparatus determines one lot to be conveyed, searches the shelf stock table for a lot with the same working condition, and performs a batch configuration. 9. The production line batch forming apparatus according to claim 8. 11. The apparatus according to claim 8, wherein the dispatch rule master manages dispatch rules and the number of batches for each facility. 12. The production line batch forming apparatus according to claim 11, wherein said dispatch rules include information of priority order, work in process date and time, and next batch condition priority. 13. When the next batch condition is prioritized as the dispatch rule, the lot transfer control unit refers to the next batch condition column in the shelf inventory table to group the same batch conditions and continuously perform the same. The production line batch forming apparatus according to claim 11, wherein the lot is dispatched. 14. The shelf inventory table updating section counts the number of processes up to the next batch when updating the inventory management table, and dispatches the processes with the largest number of processes when grouping next batch conditions. 9. The production line batch forming apparatus according to claim 8, wherein 15. A plurality of each of the shelf control unit, the self-propelled carrier control unit, the manufacturing device control unit, the shelf, the self-propelled carrier, and the manufacturing device are used. 9. The production line batch forming apparatus according to claim 8, wherein: 16. The method according to claim 16, wherein the lot transfer control unit and the shelf inventory table updating unit each include a manufacturing apparatus for each floor when the line includes a plurality of floors.
9. The production line batch forming apparatus according to claim 8, wherein the apparatus is configured to share the transport control of a self-propelled transport vehicle and a lot of shelves.