JPS63180452A - Computer group management transport system - Google Patents

Abstract

PURPOSE:To improve the faculty in process management and product transport faculty by allowing a host computer to be equipped with a process flow data file and a lot management data file and allowing a local computer to be equipped with a lot information file. CONSTITUTION:A host computer 30 consists of a calculation part.data processing part 31, process flow data file 32, lot management data file 33, and an input/output part 34, and performs searching of file, data processing, and communication with local computers 35 (351-35n) and a product transport vehicle controller 41. Further, also the local computer 35 is equipped with the input/ output part and the calculation part data processing part. The managed data is a lot information file 36 corresponding to a shelf No. into which the product in a warehouse is accommodated. With such constitution, the product can be transported to the warehouse corresponding to the next process through the delivery processing, receiving, and next process corresponding warehouse transport processing.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application) The present invention relates to a computer group management transportation method, and in particular,
This relates to a group management transport system that aims to automate the semiconductor manufacturing process.

(Conventional technology) In the semiconductor manufacturing process, the number of steps is extremely large.
Furthermore, although silicon wafers are processed in a predetermined order and under predetermined processing conditions, it is almost impossible to check the progress of the process by looking at the work in progress during the processing process. For this reason, individual products (lot units)
This requires strict process control. Conventionally, various computer systems have been constructed to perform process control of such products (lots), one of which is group control. An example of a conventional group management system is Japanese Patent Application Laid-Open No. 181996/1983.

FIG. 6 is a block diagram of such a conventional group management system. This is an example of application of group management to a financial terminal, and using this example, the system configuration of the management group and its functions will be explained below.

In FIG. 6, reference numeral 1 denotes a host computer, including a safe counting management section 2 for managing the flow of all currency within this system, a conveyance device control section 3 for instructing a cash conveyance control device to move money; It has the functions of an input/output section 4 for communicating with a terminal and a cash carrier control device. 6I~
6. , represents a cash storage safe and the computer and terminal that manage it, and is collectively referred to as a terminal. Further, reference numeral 5 denotes a cash conveyance vehicle control device, which has a function of operating the cash conveyance vehicle 7 upon receiving instructions from the host computer 1. Further, 81 to 811 are communication lines connecting the host computer 1 and the terminals, and the host combinator 1 and the cash carrier control device 5, and 9 is a communication line and track rail between the cash carrier control device 5 and the cash carrier 7. It is.

Next, the operation of this system will be explained.

When the customer deposits or withdraws money from the terminal, the money is deposited into or taken out from the safe, and at that time, the host computer 1 is notified of the amount. In the host computer 1, the money is passed through the input/output unit 4 to the safe counting management unit 2, where the cash in each terminal is totaled to make the total amount of money in each safe the appropriate amount. Instructs the cash transport vehicle control device 5 to transport cash as follows. In this way, the money that moves within the system is managed.

On the other hand, there are similar examples of the application of this group management to the semiconductor manufacturing process, but in the past, its main function was to exchange process data mainly for process control, and the actual transportation of products was It was managed by a system separate from this group management.

FIG. 7 is a diagram showing an example of application of such group management to an IC process.

In this figure, 10 is a host computer, and this host computer 1o has a process flow data file in which a process flow in which the order of processing of the product indicated by a is arranged is associated with data on processing conditions to be performed in each process. 12
It contains a lot management data file 13 in which product attribute data (lot number, etc.) indicated by and b corresponds to the in-process process of the product. And 15. ~15n is a 0-Cal:11/human computer that manages each processing device, and has a function of exchanging process data with the host computer 10 and a function of controlling the processing device; 16 is a product transport vehicle controller; This product carrier controller 1
6 is a plurality of product transport vehicles 17. -17. Tracking management (management of where the same machine is located on the conveyance route). Also, 18. -18n are terminals of the product transport vehicle controllers 16 placed at each warehouse location. Products are transported between warehouses by this product transport vehicle system. 19°～19. is the host computer 10 and the local computer 15. 15n, and 20 is a communication line between the product carrier controller 16 and the product carriers 171-17. Communication line between and track rail, 2L
-217 are the product transport vehicle controller 16 and its terminal 18. This line connects 18n to 18n. Also, 22. ~
22. indicates a warehouse for storing products. Note that 11 is an arithmetic unit/data processing unit.

Next, the operation of this system will be explained.

The person performing the work (operator) selects and takes out the products to be processed from the warehouse and loads them into the processing equipment. Then, product attribute data (lot number,
) will be notified to the host computer IO. The host computer 10 searches the lot management data file 13 using the product attribute data (lot number) as a key and learns the in-process process of the product. Furthermore, the process flow data file I2 is searched using the in-progress process as a key, and data on the process conditions is extracted. Then, the data is notified to the local computer. This local computer receives the data and starts processing the product (lot). After that, when the processing in that device is finished, the operator
1) By inputting a code indicating the end of processing into the local computer, the host computer 10 is notified of the end of processing for the product (lot). In response to this, the host computer IO searches the lot management data file 13 to know the current in-process process of the product (lot), and further searches the process flow data file 1.
2, extract the next process of the in-process process and write it in the in-process process column corresponding to the product attribute data (lot number) of the product (lot) in the lot management data file 13. The in-process process for the product (lot) has been updated (.

In addition, at that time, the product can be shipped by instructing the destination warehouse No. 2 from the terminal of the product transport vehicle controller.
The product is transported by a product transport vehicle to the warehouse corresponding to the next process.

(Problems to be solved by the invention) However, in the conventional system shown in FIG.
If a plurality of transport vehicles is used in order to improve the transport capacity, the host computer 1 or the product transport vehicle controller 5 will need a tracking management function. In addition, there is a lack of versatility in controlling the flow of money between warehouses.For example,
With the current function, it is impossible to carry out control such as transporting currency received at terminal ■ on what month and day to terminal ■.

Furthermore, in the conventional system shown in Figure 7, the movements of the product itself and product attribute data are independent, and both depend on operator input from each terminal.
In some cases, such as forgetting to send a product, there may be a mismatch between the product and its attribute data. Furthermore, in this system, the products in the warehouse are managed by the operator, so if the warehouse contains products in various processes, selecting the products to be processed is complicated.

The present invention eliminates all the drawbacks of the two systems described above and provides a computer group management transport system that is optimal from the aspects of both process control and product transport.

(Means for Solving the Problems) In order to solve the above problems, the present invention provides a host computer (hereinafter referred to as
C), warehouse number or local computer (
A process flow data file in which the (hereinafter referred to as LC) number, process code (symbolization of the manufacturing process name), and process processing condition data are associated, as well as product attribute data (lot number, product name, etc.) and its attachments. A built-in lot management data file that corresponds to data (in-process process and storage warehouse number, etc.) is included, while the LC supports product attribute data and its attached data (in-process process, process processing condition data, product storage shelf number, etc.) By incorporating a built-in lot information file, simply by inputting product attribute data from the LC terminal, the product will be transported to the warehouse corresponding to the next process to proceed, and related data of the product will also be transferred to the corresponding warehouse. In addition, when a product is shipped from the warehouse, it can be processed simply by inputting the attributes or process data of the product to be processed from the LC terminal.

(Function) According to the present invention, as shown in FIG. 1, a process flow data file 32 in which a warehouse number or LC number, a process code, and process processing condition data are associated with an IC 30 in a computer group management transportation system. and a lot management data file 33 in which product attribute data and associated data are associated with each other. On the other hand, lot information file 3 corresponds to product attribute data and its attached data in LC35.
Have 6. Therefore, by simply inputting the attributes of a product from the terminal of the LC35, the product will be transported to the warehouse corresponding to the next process, and data related to the product will also be sent to the LC35 that manages the corresponding warehouse. Furthermore, when a product is shipped from the warehouse, it can be accomplished by simply inputting the attribute data or process data of the product to be processed from the terminal of the LC 35.

Furthermore, for transport between warehouses, multiple transport vehicles can be efficiently operated by defining work numbers between the IC 30 and the product transport vehicle controller 41 (hereinafter referred to as TC).

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

FIG. 1 is an overall configuration diagram of a combinator group management conveyance system showing an embodiment of the present invention.

In this figure, 30 is an IC, and this 1lc30 consists of a calculation section/data processing section 31, a process flow data file 32, a lot management data file 33, and an input/output section 34 that communicates with the LC 35 and TC 41. Its functions include file search, data processing, LC35
and communicates with TC41. In addition, in the process flow data file 32 of this) IC30, as shown by a#, process flow and processing condition data, as well as the warehouse number where the product of that process is stored, are associated, and lot management data The file 33 includes the product attribute data (lot No. 08) and the current in-process process for the product, as indicated by b'.
Furthermore, the warehouse No. 0 where the product is stored is made to correspond.

Next, 35. ~351 is LC, and C35 is also I
Like the C30, it has a calculation section, data processing section, and human output section. The data managed by the LC 35 includes a lot information file 36 in which product attribute data and its attached data (in-process process, condition data) are associated with the shelf number 0 in the warehouse where the product is stored, as shown by C". In addition, this LC 35 is connected to an automatic warehouse controller (hereinafter referred to as As) via communication lines indicated by 37. to 37.l.
38I to 38 are connected, and furthermore, communication lines 40 to 4 are connected to
At 07, each processing device 391 to 397 is connected. The function of the AS 38 is to receive operation commands from the LC 35 and control mechanical operations (transportation of products from shelf to shelf in the warehouse).

Reference numeral 41 denotes a TC that performs tracking management of product transport vehicles and allocates work to each product transport vehicle. This TC4
1 also has a communication function with 1lc30 and each product transport vehicle. This TC41 and the product transport vehicle 42. to 427, actual products are transported between warehouses.

Also, 43I to 4311 are between IC30 and LC35,
The communication line between C30 and TC41, 44 is the communication line between TC41 and product transport vehicle 42 (S line and the track rail of the transport vehicle,
45. ~45. indicates a physical warehouse, and 46 indicates a transport management file.

Furthermore, FIG. 2 shows the equipment configuration of the HC, LC, and TC.

That is, the main body 51 includes a processor, a memory, and an I10 device, and a terminal 52 and a disk 53 as an auxiliary storage device are connected to the main body 51.

Next, the operation of this combinator group management conveyance system will be explained with reference to FIGS. 4 and 5.

In addition, in this flow, the corresponding rod management data is
The flow starts from being transferred to C.

(13 Delivery processing (see Figure 4)) In the LC35, (1) The operator inputs product attribute data (lot number) or processing process data from the terminal of the LC35 in order to take out the product to be processed from the warehouse. .

(2) Upon receiving it, search the lot information file.

In other words, the shelf No. 1 in which the corresponding product is stored is taken out.

(3) Find the shelf number corresponding to the product (lot) or processing process and send a transport command to ^53B (at this time, the product entry/exit port is also considered to be one of the shelves, and in this case, where is the shelf number? (The data format is from the shelf to which shelf.)

(1) In the processing device 39, (1) The operator sets the product in the processing bag W39 and inputs the product attribute data (lot No. 01) manually from the processing device 39 (or the terminal of the LC 35).

(2) Next, the processing device 39 sends a condition data request (product attributes) to the LC 35.

■In LC35, (1) Receive a condition data request.

(2) Search the lot information file again and retrieve the corresponding condition data.

(3) Check the in-process status of the product (before processing).

(4) Send the condition data to the processing device 39.

(5) Rewrite the data in the lot information file.

In other words, the in-process status of the corresponding lot is set to "in process."

■In the processing device 39, (1) Receive condition data.

(2) Start the process.

(3) Thereafter, when the processing in that device is completed, the product attribute data (roso I-No.) and a code indicating the end of the processing are transmitted from the device to the LC 35.

■In LC35, (1) Receive processing completion data.

(2) Rewrite the data in the lot information file.

In other words, the in-process status of the corresponding lot is set to "Processed 1."The LC 35 grasps and manages the pre-processing, processing, and processed statuses of each lot depending on the progress of the process.

In this way, the shipping process ends.

[2] Warehouse transport processing for personnel storage and next process (see Figure 5) ■In the LC35, (1) The operator places the processed product at the warehouse entrance and stores the product attribute data (lot No. 00). Input from the LC35 terminal.

(2) Search the lot information file. In other words, search for information on the corresponding lot.

(3) Check the in-process status of the product. In other words, check whether the process has been completed or not.

(4) Issue a command to the AS 38 to send a warehousing command to temporarily store the product in the warehouse.

(5) Furthermore, a transport request is sent to the HC 30. The data content of this transport request is only product attribute data (lot No. 00).

■In 1lc30, (1) Receive a transport request.

(2) Next, search the lot management data file and retrieve the current in-process process and warehouse number where the product (lot) is currently stored.

(3) Next, search the process flow data file using the in-progress process as a key, and retrieve the process to be performed next for the product, its condition data, and corresponding warehouse number.

(4) Here, based on those data, 1lc30
A transport management file (temporary file) shown in FIG. 3 is created within the process. The contents of this file include product attribute data (lot NO,), requesting warehouse number, current process in process, destination warehouse number, next process, next process condition data, and the transport sequence NO0 and work described later. N
O. The request source warehouse number includes the warehouse number where the product is currently stored.

(5) After this file is created, pay the transportation fee to TC41. The content of this transport command is from the warehouse number (request source warehouse No.) to the warehouse number (destination warehouse No. 01).
The data to and the work number II C30 attaches.

This work NO. is a mutually different number assigned by HC30 or TC41 for each transport command issued by 1(C30 to TC41).
Depending on the case, the LC 35) is used to manage the sequence from the start to the end of the transportation work for a certain product. Although it is possible to substitute the same function with product transport vehicle No. 1, etc., management using product transport vehicle No. 1 has limitations such as only being able to receive transport requests as many as the number of transport vehicles. When trying to improve transport efficiency by issuing multiple transport requests from one warehouse or by transferring work to the product transport vehicle 42 that first arrived at the requesting warehouse after a request is made, multiple transport requests may be requested. This work number is effective for transport management by the product transport vehicle 42.

■In TC4L, (1) Receive the transport command.

(2) Then, the TC 41 assigns the work number to the product transport vehicle 42 that is not in operation and is located closest to the warehouse of the request source, and starts transporting the product.

(3) The product transport vehicle 42 must first proceed to the requesting warehouse and load the product. Then, the empty trolley is driven to the requesting warehouse.

(4) Then, when the product transport vehicle 42 arrives at the requesting warehouse, the TC 41 sends an arrival notification to the 1lc 30. The contents of this arrival notification include the product transport vehicle 42.
It is necessary to include the work number to which the work is assigned.

■In 1lc30, (1) Receive this arrival notification.

(2) Based on the work number in this arrival notification, the corresponding data is extracted from the transport management file 46.

(3) Determine the progress of the transport based on the transport sequence number and decide on the appropriate process. For example, if the transport sequence number is given a meaning as shown in Figure 3, if it is 101, the requester An IC that notifies the LC corresponding to the warehouse No. of product attribute data (lot No.) and rewrites the transport sequence No. to 102.
will be processed.

(4) Send product attribute data to the requesting LC.

(5) Rewrite the data in the transport management file 46.

That is, the transport sequence number of the corresponding lot is updated from 101 to 102.

[Phase] The LC 35: (1) Receives the product attribute data (lot 1-NO,).

(2) A command to deliver the corresponding product to the product transport vehicle 42 is sent to ^S38.

(3) Update the lot information file 36. In other words,
Information regarding that lot is deleted from the lot information file 36.

■In the TC 41, (1) After the product transport vehicle 42 picks up the product, it advances toward the destination warehouse.

(2) Upon arrival at the destination warehouse, transfer from TC41 to HC3 again.
An arrival notification is sent to 0.

@ In HC30, (1) Receive an arrival notification.

(2) Upon receiving the arrival notification, the HC 30 extracts the corresponding data from the transport management file 46 depending on the work number.

(3) Next, the conveyance progress is determined and the corresponding processing is performed.

(4) At this time, the transport sequence number should be 102, so ■C30 sends product attribute data (Lot) No.), next process data, and condition data to the LC35 corresponding to the destination warehouse No. Send.

(5) Next, update the data by moving the next process data and the contents of the destination warehouse No. 0 of the transport management file 46 to the in-process process and storage warehouse columns of the corresponding product (lot) of the lot management data file 33. .

(6) After that, the data in the transport management file 46 is rewritten. That is, the transport sequence number of the corresponding lot is updated from 102 to 103.

(7) The transport management file 46 is updated, that is, the information of the corresponding lot is deleted from the file.

In this way, the transport management for a certain product in 1lc30 is completed.

0 Also, in LC35, (1) Receive the lot information at this time.

(2) Select a shelf to store the product.

(3) Command to receive and take the product from the product transport vehicle 42 ^S3
Send to 8.

(4) Then, the lot information file 36 is updated.

That is, new lot information is added to the lot information file 36 by adding the shelf number 1 in which the product is stored to the data received from the HC 30.

Through the series of sequences described above, the movement of products and product attribute data is synchronized to manage logistics within the system.

Note that the present invention is not limited to the above embodiments,
Various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention.

(Effects of the Invention) As described above in detail, according to the present invention, by having a process flow data file and a lot management data file having the above-mentioned contents in the HC, the operator can perform the next processing. Without being aware of the process that should be done,
By simply inputting product attribute data (such as lot number 0) from the LC terminal, the product will be transported to the corresponding warehouse for the next process, and at the same time, the data associated with the product will also be transferred to the warehouse where the product is destined. (1) In the lot information file prepared on the LC side, data that corresponds to the data passed from the HC and the shelf number of the warehouse where the product is stored is stored. By inputting either the attribute data (lot number, etc.) of the product to be processed or the process to be processed from the LC terminal, the appropriate product can be taken out from the automated warehouse.

(2) By changing the registration order and data content of the HC process flow data file, you can freely change the way products move between warehouses, the warehouse where each process and its corresponding product are stored, or the processing conditions. can.

(3) By providing TC with all product transport control functions such as tracking management of product transport vehicles and allocating work to each product transport vehicle, IIC will be aware of the location and number of product transport vehicles. No.1 warehouse to move to without any hassle
All you have to do is notify the TC.

(4) By specifying the work number in the communication content related to conflict transportation between IIc, LC, and TC, efficient product transportation can be performed.

(5) It is possible to control and manage the logistics of multiple products at the same time.

[Brief explanation of the drawing]

Figure 1 is an overall configuration diagram of a computer group management transport system showing an embodiment of the present invention, Figure 2 is a diagram of the equipment configuration of IC, LC, and TC, Figure 3 is a diagram of the configuration of a transport management file, and Figure 4 is a diagram of the configuration of a transport management file. Figure 5 is a flowchart of warehouse transport processing for warehousing and next process; Figure 6 is a block diagram of a conventional group management system with a financial terminal; Figure 7 is a flowchart of the conventional group management IC manufacturing process. It is a figure showing an example of application. 30... host computer (IIc), 31.
...Calculation unit/data processing unit, 32...Process flow data file, 33...Lot management data file, 3
4... Input/output unit, 35+ to 3511... Local computer (LC), 36... Lot information file, 371 to 37. , 40. 〜4011゜431〜4
3.1... Communication line, 38. ~387... Automatic warehouse controller (AS), 39. ~397... Processing device, 41... Product carrier controller (TC), 421
~42.1... Product transport vehicle, 44... Track rail of transport vehicle, 45. ~457...Warehouse, 46...Transportation management file, 51...Main body, 52...Terminal,
53...disc.

Claims (2)

[Claims] (1) In a computer group management transport system in the manufacture of semiconductor devices, (a) a host computer; (b) a product transport vehicle that is connected to the host computer via a communication line and is capable of tracking and managing multiple product transport vehicles; a controller; (c) connected to the host computer via a communication line;
and (d) a process flow data file and a lot management data file built into the host computer, and a transport management file temporarily built into the host computer. (e) a lot information file built into the local computer, and (f) a work number in management and communication data related to product transportation between the host computer and the product transport vehicle controller and between the host computer and the local computer. A computer group management transport method characterized in that the following is defined. (2) The process flow data file corresponds to the local computer number, process code, process processing condition data, and warehouse number, and the lot management data file contains product attribute data such as lot number or product name, and in-process information. The attached data such as processes and warehouse numbers are made to correspond, and the lot information file is made to correspond to product attribute data and attached data such as in-process processes, process processing condition data, and product storage shelf numbers. A computer group management transport system according to claim 1, characterized in that: