JP3832082B2 - Automatic warehouse shelf management equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a shelf management apparatus for an automatic warehouse for storing workpieces before and after processing in each processing step in a production system that sequentially processes workpieces according to a processing step flow, and in particular, It relates to a configuration for managing so as not to become full.
[0002]
[Prior art]
For example, in a semiconductor device manufacturing factory, a plurality of processing devices are grouped into similar processes to form a plurality of manufacturing lines, and an automatic warehouse is installed in each manufacturing line, and a plurality of wafers (workpieces) are cassettes. A system is adopted in which the wafers are sequentially and automatically transferred to a processing apparatus corresponding to each processing step via an automatic warehouse in cassette units according to the processing step flow.
[0003]
FIG. 6 is a schematic configuration diagram of a wafer process factory for explaining an example of this type of automatic transfer system. As shown in the figure, automatic warehouses 2 are arranged in parallel in the center of the factory so as to correspond to the respective production lines 1, and each automatic warehouse 2 has a ceiling-mounted type in-process conveyance provided for each production line. Roads 3 are connected to each other, and each automatic warehouse 2 is also connected by a ceiling-mounted inter-process transfer path 4. And in these conveyance paths 3 and 4, an overhead traveling type automatic guided vehicle (not shown) is provided.
[0004]
The in-process transfer path 3 is used to transfer workpieces (wafers) between cassettes (generally, one cassette) between a plurality of processing apparatuses 5 arranged in one production line or between the processing apparatus 5 and the automatic warehouse 2. 1 lot). Further, the inter-process transport path 4 is for moving the cassette between the plurality of automatic warehouses 2. As shown in the schematic configuration diagram of FIG. 5, the automatic warehouse 2 includes a large number of storage shelves 6, a cassette loading / unloading port 7, and a cassette moving mechanism 8, and is connected to the in-process transfer path 3. A loading port 9 and an inter-process transfer transfer port 10 connected to the inter-process transfer path 4 are provided.
[0005]
The movement of the cassette in the automatic conveyance system is as follows.
(1) First, the processing device 5 corresponding to the first process to be processed first is selected from the cassette that has been received at the loading / unloading port 7 of an automatic warehouse 2 at the time of loading the workpiece. 5 is transported by the inter-process transport path 4 to the automatic warehouse 2 of the production line having 5, and once stored in the storage shelf 6 of the automatic warehouse 2. At this time, the cassette is carried into the inter-process transport transfer port 10 of the automatic warehouse 2 by the inter-process transport path 4, and then moved from the inter-process transport transfer port 10 to the storage shelf 6 by the cassette moving mechanism 8.
[0006]
(2) The cassette stored in the storage shelf 6 of the automatic warehouse 2 is then moved from the storage shelf 6 to the in-process transport transfer port 9 by the cassette moving mechanism 8 and corresponds to the first process in the production line. It is conveyed to the processing apparatus 5 by the in-process conveyance path 3 and processed.
(3) The finished cassette is carried into the in-process transfer port 9 of the automatic warehouse 2 by the in-process transport path 3 and moved to the storage shelf 6 by the cassette moving mechanism 8.
(4) Next, in order to transport the processed cassette to the automatic warehouse 2 of the production line equipped with the processing apparatus 5 corresponding to the second process, first, the cassette moving mechanism 8 transports the cassette from the storage shelf 6 to the process. It is moved to the transfer port 10 and then conveyed to the automatic warehouse 2 of the next process through the inter-process conveyance path 4.
The series of operations as described in (1) to (4) above are repeated to proceed to the final processing step. That is, in this automatic transfer system, the cassette is automatically transferred to each processing step via the automatic warehouse 2 corresponding to each processing step.
[0007]
[Problems to be solved by the invention]
However, in the automatic conveyance system as described above, every time a cassette to be conveyed is generated, the automatic warehouse may become full. Then, if only some of the processing equipment in a production line satisfies the automatic warehouse, even if some of the processing equipment fills the automatic warehouse, the remaining processing equipment is already full. It cannot be transported to the automated warehouse in the state. As a result, a situation occurs in which the processing apparatus is vacant but the cassette is not carried, and the operating efficiency of the processing apparatus becomes extremely poor.
[0008]
Also, if you want to transport a cassette that contains a short delivery time, that is, a workpiece that has a high priority, but the cassette is already full with a cassette that contains another workpiece, Since it cannot be conveyed, there arises a problem that processing according to the delivery date cannot be performed. In addition, when an automated warehouse of a certain production line becomes full, cassettes that are transported to the automated warehouse are not transported to the automated warehouse. The automatic warehouse at the transfer source becomes full. In this way, there is a problem that the full automatic warehouses multiply in a chain.
[0009]
As a technique for solving such a problem, for example, there is a technique disclosed in JP-A-2-127303. This sets a storage limit for the combination of product type and processing process to be stored, and puts the product that has reached the storage limit into the next process, thereby improving processing efficiency. That's it.
[0010]
However, in the manufacture of semiconductor devices, some of them have undergone complicated processing steps, more than a dozen processes, or a few tens of processes, and more recently more than 300 processes. In order to manufacture a wide variety of semiconductor devices of hundreds or more, a large number of cassettes are flowing. Moreover, new products are generated every day, and at the same time, products that are discontinued and products that are increased or decreased are also generated every day. Yes.
[0011]
In the manufacture of a semiconductor device having the above-described circumstances, the method described in the above publication cannot solve the above problem when the number of products to be stored and the number of combinations of processing steps are larger than the number of shelves. Even if the number of shelves in the automated warehouse is greater than the number of stored product types and the number of combinations of processing steps, the number of shelves in the automated warehouse is distributed to all products in a well-balanced manner in order to set an upper storage limit for each product. This is limited due to the large number of products, frequent occurrence of new products, and drastic changes in product composition.
[0012]
Furthermore, since there is no consideration for the transport priority order, it will not be processed immediately, that is, if a low priority work is transported first and the automatic warehouse becomes full, it will be necessary to transport a high priority work later. However, at that time, the problem that the automatic warehouse at the transfer destination is full and cannot be transferred remains unsolved.
[0013]
The present invention has been made in view of the above circumstances, and its purpose is to transfer workpieces in order from the highest priority, and even if the number of workpieces and the number of processing steps are large, An object of the present invention is to provide an automatic warehouse shelf management device capable of managing an automatic warehouse so as not to become full.
[0014]
[Means for Solving the Problems]
In order to achieve the above object, the present invention
In an apparatus for managing a plurality of automatic warehouse shelves for temporarily storing workpieces that are sequentially processed according to the processing flow and commercialized before and after the processing in each processing step,
Based on the machining process flow, progress management means for managing the progress of machining for each workpiece,
A process start scheduled time calculating means for calculating a process start scheduled time in each machining step for each workpiece;
Based on the fact that the workpiece that has been processed has been received in the automatic warehouse, a transport request generating means that requests unloading to the next processing step,
The generation time of the transfer request obtained based on the information from the progress management unit, the scheduled processing start time calculation unit, and the transfer request generation unit, the transfer start, the transfer destination, and the scheduled process start time in the transfer destination processing step Transport request storage means for storing management information such as for each workpiece,
Constant storage means for storing the maximum number of shelves of each automatic warehouse, the number of empty shelves or the number of shelves in use, and other constants necessary for shelf management,
And a determination means for determining a transport priority based on the transport request occurrence time, the delivery destination, the scheduled processing start time stored in the transport request storage means, and the constant stored in the constant storage means. (Claim 1).
[0015]
According to this structure, when the conveyance request | requirement which conveys a workpiece | work to the following process generate | occur | produces, the priority of a conveyance is calculated by the determination means, and it conveys according to the priority order. For this reason, since the work with higher priority arrives at the automatic warehouse of the next process faster, it can be carried in before it becomes full. For this reason, even if the number of shelves in the automatic warehouse is smaller than the number of combinations of workpiece types and the number of machining processes, it is possible to prevent the occurrence of a problem that it becomes impossible to transport a high priority work to the automatic warehouse of the next process as much as possible. Is.
[0016]
In this case, in the present invention, the determination unit may be configured to determine the transport priority order based on the transport request occurrence time.
With this configuration, as soon as processing is completed, it can be transferred from the previous warehouse to the next automated warehouse, making first-in, first-out management easy, and determining the priority for workpieces with high priority grades. It becomes convenient to do.
[0017]
In the present invention, the determination means determines the transport priority order in the order of the scheduled processing start time, and the scheduled processing start time is a work ahead of the time calculated based on the constant stored in the constant storage means. As for, the conveyance may be suspended (claim 3).
According to this configuration, since the workpieces are conveyed in the order of scheduled processing start times determined based on a certain priority logic, the workpieces can be conveyed in descending order of priority. Since the work whose scheduled processing start time is longer than a certain time is not transported, for example, even if a work that requires 3 days to process stays and the automatic warehouse is likely to be full, for example, the work for the scheduled processing up to 24 hours ahead It is possible to prevent the automatic warehouse from becoming full easily by setting so that only the automatic warehouse is transported to the automatic warehouse.
[0018]
Further, in the present invention, the determination means determines whether the priority of the transfer is determined when the number of empty shelves in the automatic warehouse to which the workpiece is transferred is equal to or less than the number calculated based on the constant stored in the constant storage means. It can be configured to be removed (claim 4).
According to this configuration, the transportation can be stopped shortly before the automatic warehouse at the transportation destination becomes full, and an empty shelf can be secured for the case where urgent transportation is necessary.
[0019]
In the present invention, the determination means is configured to increase the priority when the number of empty shelves in the automatic warehouse from which the workpiece is transferred is equal to or less than the number calculated based on the constant stored in the constant storage means. (Claim 5).
According to this configuration, when the automatic warehouse at the transfer source approaches a full state, the work that has been temporarily held for transfer because the transfer priority is low can be carried out. The number of empty shelves can be increased.
[0020]
Further, in the present invention, the determination unit is configured such that the number of empty shelves in the automatic warehouse to which the workpiece is transferred is equal to or less than the number calculated based on the constant stored in the constant storage unit, and the workpiece transfer source automatic When the number of empty shelves in the warehouse is equal to or less than the number calculated based on the constant stored in the constant storage means, it is possible to avoid and transport to an automatic warehouse other than the destination automatic warehouse.
According to this configuration, when both of the automatic warehouses of the transfer source and the transfer destination are nearly full, the work can be transferred to the third automatic warehouse, and the empty shelves of the transfer source and the transfer destination automatic warehouses. The number can be secured and it can be prevented from becoming full.
[0021]
Further, in the present invention, the determination means may be configured such that the automatic warehouse of the avoidance transport destination is an automatic warehouse having the largest number of empty shelves among the plurality of automatic warehouses.
According to this configuration, it is possible to minimize the possibility that the automatic warehouse at the avoidance conveyance destination will be full, and it is possible to level the number of empty shelves between the automatic warehouses.
[0022]
In the present invention, the transport request storage means may store information for dividing into a plurality of groups according to the priority determination criteria, in addition to the management information.
For example, in the manufacture of semiconductor devices, there is a monitor cassette that stores a monitor wafer for managing the processing state of the processing apparatus in addition to a cassette that stores a wafer that is an actual product. This monitor cassette needs to be transported with the highest priority regardless of the scheduled processing start time. Also, apart from the transfer to the next process that occurs once processing is completed in the processing device and once stored in the automatic warehouse, the operator can automatically transfer a specific cassette to the automatic warehouse at hand by operating the screen. In this case as well, it must be transported as quickly as possible. Such a transport request that requires relatively immediacy can be distinguished from a transport request that requires determination of transport priority, and transport selected from each group can be executed alternately, and immediacy is required. The conveyance can be executed without delay.
[0023]
In the present invention, the constant storage means determines whether a constant used to determine whether or not the automatic warehouse at the transfer source is almost full and whether or not the automatic warehouse at the transfer destination is almost full. Therefore, it is possible to distinguish and store constants used for this purpose (claim 9).
[0024]
According to this configuration, it is possible to separately set a constant used for determining whether the transfer source is full and a constant used for determining whether the transfer destination is full. It is possible to separate a full determination as to whether or not to carry out and a full determination as to whether or not to accept a workpiece from another. As a result, it is possible to perform control such that necessary workpieces are received while maintaining the state where extra workpieces are always carried out.
[0025]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. This embodiment is applied to a case where a plurality of automatic warehouses provided for each production line are managed in a semiconductor manufacturing factory. In addition, in a semiconductor device manufacturing factory, the manufacturing line, a plurality of processing devices constituting each manufacturing line, a configuration of a plurality of automatic warehouses provided for each manufacturing line, an in-process transfer path, an inter-process transfer path, etc. Since it was explained in the section of the prior art based on FIG. 5 and FIG.
[0026]
FIG. 4 is a block diagram showing an automatic warehouse shelf management apparatus 11 composed of one or a plurality of computers. In the figure, a conveyance control device 12 as a conveyance control means includes a cassette moving mechanism 8 of an automatic warehouse 2 installed in each production line 1, and an in-process conveyance machine 13 that travels in an in-process conveyance path 3 of each production line 1. The inter-process transfer machine 14 traveling on the inter-process transfer path 4 provided between the automatic warehouses 2 is controlled.
[0027]
The cassette that has finished the process in the previous process is transported by the inter-process transporter 14 to the inter-process transport transfer port 10 of the automatic warehouse 2 of the production line 1 equipped with the processing device 5 for the next process. The cassette carried into the interprocess transfer / transfer port 10 of the automatic warehouse 2 of the next process is moved from the interprocess transfer / transfer port 10 to the empty storage shelf 6 by the cassette moving mechanism 8 and temporarily stored. The cassette stored in the storage shelf 6 is moved from the storage shelf 6 to the in-process transport transfer port 9 by the cassette moving mechanism 8 when the processing device 5 corresponding to the next process is empty, and the in-process transport machine 13 performs the process. It is conveyed from the inner conveyance transfer port 9 to the processing device 5 corresponding to the next process. The cassette that has been processed is again transported from the processing apparatus 5 to the in-process transport transfer port 9 of the automatic warehouse 2 by the in-process transport machine 13.
[0028]
Thereafter, the cassette is moved from the intra-process transfer port 9 to the empty storage shelf 6 by the cassette moving mechanism 8 and stored therein, and the processed cassette stored in the storage shelf 6 is instructed to transfer to the next process. At a certain point, the cassette moving mechanism 8 moves the storage shelf 6 to the inter-process transport transfer port 10, and the inter-process transport machine 14 moves to the automatic warehouse 2 of the production line 1 equipped with the processing device 5 corresponding to the next process. Be transported.
[0029]
As described above, each cassette is carried into the production line in the order of the processing steps. The progress of the processing is grasped and managed by the progress management device 15 as a progress management means. The progress management device 15 grasps the degree of progress as follows. That is, when a cassette that has been processed in the production line is carried into the automatic warehouse 2 by the in-process transfer machine 13, the transfer control device 12 determines the ID and processing of the automatic warehouse 2 in which the processed cassette has been received. Information such as the ID of the completed cassette is transmitted to the progress management device 15 via the transport instruction control device 16. The progress management device 15 stores the order of processing steps from the process specification storage device 17 storing the processing process flow for each cassette, the processing specifications and delivery times in each processing process, the necessity of express processing determined in relation to the delivery date, and the like. Obtain data, determine which cassette has completed which process from the received cassette ID, automatic warehouse ID, etc., and memorize the progress status of the processing process, the next processing process, etc. for each cassette Store in device 18.
[0030]
The progress management device 15 is connected to a scheduler 21 including a scheduled processing start time computing device 20 as a scheduled processing start time computing means. When the processing of the cassette is completed or a new cassette is inserted into the process specification storage device 17, the scheduler 21 stores the machining process flow, the machining specifications, and the progress storage device 18 stored in the process specification storage device 17. Based on the degree of progress stored in the table, for each cassette, the priority order is determined for each cassette from the delivery date of the semiconductor device to be manufactured and the net processing time of the remaining process, and the scheduled processing start time in each processing process Assign.
[0031]
The processing start time of each machining step for each cassette calculated by the scheduler 21 is transmitted to the progress management device 15, and the progress management device 15 has its ID, the processing device 5 for the next step, and its processing device for each cassette. The progress storage device 15 stores the ID of the manufacturing line 1 in which 5 is installed and the automatic warehouse 2 of the manufacturing line.
[0032]
When the cassette that has finished processing in the processing device 5 is carried into the automatic warehouse 2 by the in-process transfer machine 13, the transfer control device 12 transfers information such as the cassette ID and the ID of the automatic warehouse 2 as described above. In addition to transmitting to the progress management device 15 via the instruction control device 16, a transport request for inquiring about the next transport destination of the cassette is transmitted to the progress management device 15 via the transport instruction control device 16. Accordingly, the transport control device 12 has a function as a carry-out request generating means.
[0033]
In response to the above transport request, the progress management device 15 for the cassette from the progress storage device 18, the automatic warehouse 2 of the production line that has finished processing, that is, the automatic warehouse ID of the transport source, the processing device 5 corresponding to the next processing step. The automatic warehouse 2 of the production line 1 equipped with, that is, the automatic warehouse ID of the transfer destination, the scheduled processing start time in the next processing step, the necessity of the express processing in relation to the delivery date, are read out, and this is transferred to the transfer instruction control device Reply to 16. Then, the transport instruction control device 16 stores the contents transmitted from the progress management device 15 in a table in the transport request storage device 22 as transport request storage means as management information together with the cassette ID and the transport request occurrence time. FIG. 3 schematically shows the contents stored in the transport request storage device 22.
[0034]
The transport instruction control device 16 functions as a determination unit that determines the transport priority order, determines the priority order of the transport request generated cassettes stored in the transport request storage device 22, and instructs the transport control device 12. An instruction is output to convey the paper in the priority order.
[0035]
The determination of the transport priority by the transport instruction control device 16 is performed based on the scheduled processing start time, the status of the automatic warehouse 2 stored in the constant storage device 23, and various constants. As shown schematically in FIG. 2, the constant storage device 23 is used for each automatic warehouse 2 to determine whether the transport source is full in addition to the maximum number of shelves in the automatic warehouse 2 and the number of shelves in use. Constant FUYO, constant TUYO used to determine whether the transport destination is full, constant AKI that defines the number of shelves to be secured as empty shelves, and constant ARI that defines the maximum waiting time at the automatic warehouse at the transport destination .
[0036]
Next, the contents of control in the case of determining the cassette transport priority in the above configuration will be described with reference to the flowchart shown in FIG. The transport instruction control device 16 accesses the transport request storage device 22 and selects the cassette with the earliest scheduled processing start time from among the cassettes requested to be transported, and reads the content of the transport request (step S1). Now, as shown in FIG. 3, assuming that the management information of the five cassettes for which a transport request has been issued is stored in the transport request storage device 22, the transport instruction control device 16 performs the ID (S0021) in step S1. ) Is the earliest scheduled processing start time, the same cassette (S0021) is selected.
[0037]
Next, the transport request instruction control device 16 determines whether or not the automatic warehouse 2 that is the transport destination of the cassette selected in step S1 is almost full (step S2). For this determination, the transport request instruction control device 16 accesses the constant storage device 23, reads the maximum number of shelves, the number of used shelves and the constant AKI of the transport destination automatic warehouse 2, and the transport destination automatic warehouse. Whether or not the automatic warehouse 2 as the transport destination is almost full is determined based on whether or not the current number of empty shelves 2 is less than the constant AKI.
[0038]
For example, the transport destination of the cassette of ID (S0021) is the automatic warehouse 2 of ID (STO 6). From FIG. 2, the maximum number of shelves of this automatic warehouse 2 is 160, the number of used shelves is 150, and the constant AKI is 10 Therefore, the number of empty shelves is the same as the constant AKI. Therefore, in step S2, it is determined "NO", that is, it is not yet full, and the process proceeds to the next step S3.
[0039]
In step S3, the conveyance instruction control device 16 determines whether or not the scheduled processing start time of the cassette selected in step S1 is within the time obtained by adding the constant ARI to the current time. If the scheduled processing start time is within the time obtained by adding the constant ARI to the current time, the transport instruction control device 16 determines “YES” in step S3, and proceeds to step S4.
[0040]
For example, the scheduled processing start time of the cassette of ID (S0021) is 3:12 am on December 1, 1997, but if the current time is now 11:05 pm on November 30, 1997, the transport will be performed. Since the constant ARI of the automatic warehouse 2 of the previous ID (STO6) is 8, the time obtained by adding the constant ARI to the current time is 7:05 am on December 1, 1997, which is earlier than the scheduled processing start time. Since it is late, the conveyance instruction control device 16 determines “YES” in step S3.
[0041]
When “YES” is determined in the step S3 and the process proceeds to the step S4, the transport instruction control device 16 outputs an instruction to the transport control device 12 to transport the cassette selected in the step S1, and the transport request storage device for the cassette. The transport request information stored in 22 is erased, and the process returns to step S1. Then, the transport control device 12 ranks the cassettes that have been instructed to be transported after the cassette group that has already been prioritized and stored in the priority storage unit included in the transport control device 12. Is stored in the priority storage unit. The transport instruction control device 16 deletes the management information of the cassette that has been transported from the transport request storage device 22.
[0042]
After outputting the conveyance instruction in step S4, the conveyance instruction control device 16 determines whether or not all the cassettes stored in the conveyance request storage device 22 have been determined as to whether conveyance is possible. If there is, the process returns to the first step S1. If the number of empty shelves in the automatic warehouse 2 as the transfer destination is less than the constant AKI, the transfer request instruction control device 16 determines “YES” in step S2, and returns to step S1. If the scheduled processing start time of the cassette is not within the time obtained by adding the constant ARI to the current time, the transport request instruction control device 16 determines “NO” in step S3 and returns to step S1.
[0043]
When the determination of whether or not transport is possible is performed for all cassettes stored in the transport request storage device 22, the transport instruction control device 16 determines “YES” in step S5, and proceeds to the next step S6. To do. At this stage, the cassettes that have been instructed to be transported are determined in order of transport in the order in which the transport instructions are issued.
[0044]
Thereafter, the transfer instruction control device 16 proceeds to step S6, and based on the stored contents of the constant storage device 23, whether or not there is an automatic warehouse 2 in which the number of empty shelves is equal to or smaller than the number obtained by adding the constant AKI to the constant FUYO. If YES, “YES” is determined, and the process proceeds to the next step S7. In step S7, the transport instruction control device 16 determines whether there is a cassette that can be transported among the cassettes stored in the automatic warehouse 2 that have been determined in step S6 that the number of empty shelves is equal to or less than the constant FUYO plus the constant AKI. It is determined whether or not there is a cassette stored as a transfer request in the transfer request storage device 22. If there is a cassette that can be transported, the transport instruction control device 16 becomes “YES” in step S 7, and transmits a transport instruction for the cassette to the transport control device 12 in the next step S 8. Then, when there is a transport instruction in step S8, the transport control device 12 sets the order so that the cassette comes after the cassette group stored in the priority storage unit and stores it in the priority storage unit. To do.
[0045]
If it is determined in step S6 that there is no automatic warehouse 2 in which the number of empty shelves is equal to or less than the number obtained by adding the constant AKI to the constant FUYO ("NO"), the transfer instruction control device 16 stores the automatic warehouse 2 in step S8. If it is determined that there is no cassette that can be transported ("NO"), the process proceeds to step S9.
[0046]
In step S9, the transport instruction control device 16 determines whether or not the number of empty storage shelves in the automatic warehouse 2 that is the transport destination of the cassette is equal to or smaller than the constant TUYO plus the constant AKI when actually transporting the cassette. Judging. When the number of empty storage shelves exceeds the number obtained by adding the constant AKI to the constant TUYO, the transport instruction control device 16 determines “NO” and sends a command to the transport destination automatic warehouse 2 to the transport destination. Depart to twelve. As a result, the transfer control device 12 drives the inter-process transfer machine 14 to transfer the cassette from the automatic warehouse 2 that is the transfer source to the automatic warehouse 2 that is the original transfer destination (next process), and returns to the first step S1. . Further, when the number of empty storage shelves is equal to or less than the number obtained by adding a constant AKI to the constant TUYO, the transfer instruction control device 16 transfers the cassette to the automatic warehouse 2 having the largest number of empty storage shelves instead of the automatic warehouse 2 as the transfer destination. Then, the process returns to step S1.
[0047]
By the way, in the above-described steps from Step S1 to Step S4, the order of transport by the inter-process transport machine 14 is basically determined in order of early processing start scheduled time, not in order of early transport request generation time. At this time, even if the scheduled processing start time is early, the automatic warehouse 2 at the transport destination is almost full ("YES" in step S2), or the time for waiting at the automatic warehouse 2 at the transport destination is too long (step In the case of “NO” in S3), it is excluded from the conveyance order determination target.
[0048]
Thus, the earlier the processing start scheduled time, the higher the transport priority, so the higher priority cassette can be transported earlier, so that the automatic warehouse 2 in the next process is transported to the automatic warehouse 2 before it becomes full. be able to.
[0049]
Further, when the automatic warehouse 2 of the transfer destination is almost full, the cassette transferred to the transfer destination is removed from the determination target of the transfer priority (transfer is suspended). The cassette can be stopped from being loaded into the automatic warehouse 2 in a state just before it becomes full, and the storage shelf 6 can be opened for emergency transport.
[0050]
Furthermore, since a cassette whose standby time is too long at the transfer destination is excluded from the transfer order determination target (transfer is suspended), a cassette with a later processing start scheduled time may be transferred to the automatic warehouse 2 at the transfer destination. It is possible to reduce the chances that the automatic destination warehouse 2 becomes full soon.
[0051]
On the other hand, in the stage from step S6 to step S8, if there is an automatic warehouse 2 that is almost full from the standpoint of the automatic warehouse of the transfer source ("YES" in step S6), the next process in the automatic warehouse 2 The cassettes that are in the state of waiting to be transported are determined in order of transport after the cassette group determined in the order of the scheduled processing start time in steps S1 to S4.
[0052]
As described above, in the stage of steps S1 to S4, the cassette that has been excluded from the priority order determination because the automatic warehouse 2 at the transport destination is almost full or the standby time at the transport destination is too long. However, when the currently stored automatic warehouse 2 becomes fully high, it is a target for priority determination, that is, the priority is raised and eventually it is transported to the next process, so it becomes full. It is possible to increase the number of empty shelves in the automatic warehouse 2 before, and it is possible to accept the loading of cassettes from other automatic warehouses 2.
[0053]
Then, when the automatic warehouse 2 of the next process, which is the original transport destination, is almost full (“YES” in step S9), the cassettes whose priorities are determined are other than the automatic warehouse 2 of the transport destination. In the automatic warehouse with a sufficient number of empty shelves, the automatic warehouse 2 having the largest number of empty shelves is loaded (avoidance conveyance), so that the automatic warehouse 2 of the avoidance conveyance destination is less likely to become full. The number of empty shelves between the automatic warehouses 2 can be leveled. The avoiding and transporting cassette is temporarily held in the avoidance destination automatic warehouse 2 and is transferred to the automatic warehouse 2 when the number of empty storage shelves 6 in the original destination automatic warehouse 2 increases.
[0054]
The present invention is not limited to the embodiments described above and shown in the drawings, and can be expanded or changed as follows.
When transporting a cassette, the number of empty shelves in the automatic warehouse 2 to which the cassette is transported is equal to or less than the number obtained by adding the constant AKI to the constant TUYO, and the number of empty shelves in the automatic warehouse 2 from which the cassette is transported is the constant FUYO. When the number is equal to or less than the number obtained by adding a constant AKI, the cassette may be transported to the third automatic warehouse. In this way, it is possible to secure the number of empty shelves in the automatic warehouse of the transfer source and the transfer destination and prevent it from becoming full.
[0055]
Further, if a constant TUYO for determining the full state of the automatic warehouse at the transfer destination is different from a constant FUYO for determining the full state of the automatic warehouse at the transfer source, an extra cassette can be used in one automatic warehouse. It is possible to make a full determination as to whether or not to unload a cassette and a full determination as to whether or not to accept a cassette from outside. In particular, if FUYO> TUYO is set, it is possible to control to receive necessary cassettes while carrying out extra cassettes.
[0056]
For cassettes for which there is a high demand for emergency processing, as shown in FIG. 3, a “special express flag” is provided in the management information as information indicating the priority determination criteria grade, and the cassette for which this express flag is set to “1”. May be preferentially transported in the order of transport request generation time.
[0057]
In the manufacture of a semiconductor device, a cassette that needs to be automatically transported includes a monitor wafer for managing the processing state of the processing apparatus 5 in addition to a normal product wafer. The cassette storing the monitor wafer needs to be preferentially transported regardless of the scheduled processing start time. In addition to the normal transport request generation timing, an operator may automatically transport a specific cassette from one automatic warehouse 2 to a local automatic warehouse 2 by a screen operation. For such a transport request that requires relatively immediacy, the priority criterion is increased to distinguish it from other transport requests that need to determine other transport priorities. You may comprise so that it may convey alternately with a group.
The constant storage device 23 may directly store the number of empty shelves instead of the number of shelves in use.
[Brief description of the drawings]
FIG. 1 is a flowchart of determination contents of a transport priority order according to an embodiment of the present invention.
FIG. 2 is a conceptual diagram showing the usage status of an automatic warehouse and the contents of a constant table.
FIG. 3 is a conceptual diagram showing the contents of a transport request management information table.
FIG. 4 is a block diagram showing a shelf management device.
FIG. 5 is a schematic configuration diagram of an automatic warehouse.
FIG. 6 is a schematic configuration diagram of an automatic conveyance system.
[Explanation of symbols]
In the figure, 2 is an automatic warehouse, 5 is a processing device, 6 is a storage shelf, 8 is a cassette moving mechanism, 12 is a transfer control device (transfer request generating means), 13 is an in-process transfer device, 14 is an inter-process transfer device, 15 is a progress management apparatus (progress management means), 16 is a conveyance instruction control apparatus (determination means), 18 is a progress storage device, 20 is a scheduled processing start time computing device (scheduled processing start time computing means), 21 is a scheduler, 22 Is a transfer request storage device (transfer request storage means), and 23 is a constant storage device (constant storage means).

Claims (9)

In an apparatus for managing a plurality of automatic warehouse shelves for temporarily storing workpieces that are sequentially processed according to the processing flow and commercialized before and after the processing in each processing step,
Based on the machining process flow, progress management means for managing the progress of machining for each workpiece,
A process start scheduled time calculating means for calculating a process start scheduled time in each machining step for each workpiece;
Based on the fact that the workpiece that has been processed has been received in the automatic warehouse, a transport request generating means that requests unloading to the next processing step,
The generation time of the transfer request obtained based on the information from the progress management unit, the scheduled processing start time calculation unit, and the transfer request generation unit, the transfer start, the transfer destination, and the scheduled process start time in the transfer destination processing step Transport request storage means for storing management information such as for each workpiece,
Constant storage means for storing the maximum number of shelves of each automatic warehouse, the number of empty shelves or the number of shelves in use, and other constants necessary for shelf management;
An automatic warehouse comprising: a transfer request generation time stored in the transfer request storage means, a delivery destination, a scheduled processing start time, and a determination means for determining a transfer priority based on a constant stored in the constant storage means Shelf management device. The shelf management apparatus for an automatic warehouse according to claim 1, wherein the determination means determines the transport priority order based on the transport request occurrence time. The determination means determines the transport priority order in the order of the scheduled processing start time, and the workpiece is suspended for a work ahead of the time calculated based on the constant stored in the constant storage means. The shelf management apparatus for an automatic warehouse according to claim 1 or 2, characterized in that: The determination unit is excluded from the determination of the transfer priority when the number of empty shelves in the automatic warehouse of the workpiece transfer destination is equal to or less than the number calculated based on the constant stored in the constant storage unit. The shelf management apparatus for an automatic warehouse according to any one of claims 1 to 3. The determination unit increases the priority when the number of empty shelves in the automatic warehouse from which the workpiece is transferred is equal to or less than the number calculated based on the constant stored in the constant storage unit. 4. The automatic warehouse shelf management apparatus according to any one of 4 above. The determination means is equal to or less than the number calculated based on the constant stored in the constant storage means and the number of empty shelves in the automatic warehouse from which the work is transported. The automatic warehouse according to any one of claims 1 to 3, wherein when the number is less than or equal to a number calculated based on a constant stored in the constant storage means, avoidance transport is performed to an automatic warehouse other than the transport destination automatic warehouse. Shelf management device. The shelf management apparatus for an automatic warehouse according to claim 6, wherein the determination means sets the automatic warehouse of the avoidance transport destination as an automatic warehouse having the largest number of empty shelves among the plurality of automatic warehouses. The automatic warehouse according to any one of claims 1 to 7, wherein the transport request storage means stores, in addition to the management information, information to be divided into a plurality of groups according to priority judgment criteria. Shelf management device. The constant storage means includes a constant used for determining whether or not the automatic warehouse of the transfer source is nearly full, and a constant used for determining whether or not the automatic warehouse of the transfer destination is nearly full. The shelf management device for an automatic warehouse according to any one of claims 1 to 8, wherein the shelf management device is distinguished and stored.

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