JP2001351964A - System and method for controlling conveyance for semiconductor manufacturing line, and as recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a system and a method for production managing for automatic control of the shipment and conveyance of a lot, scheduled in allowed time period in a semiconductor manufacturing line. SOLUTION: In the system for controlling the semiconductor manufacturing line, comprising a host computer for managing the progress management of the lot of a semiconductor wafer, a first facility for processing the lot of the wafer, and a second facility for next processing a processing lot which is processed in the first facility, in the case that a load request of the lot from the first facility is output to the computer with respect to a setting lot introduced into a flow, which requires that the time of starting the processing of the lot in the second facility from the end of the process of the lot of the first facility fall within a prescribed allowed time and a load request for the lot from the second facility be output to the computer, the computer instructs shipment and conveying of the setting lot from the shelf for containing the setting lot to the first facility.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production control technique applied to a semiconductor device manufacturing line, and more particularly to a flow requiring a time between facilities for processing semiconductor wafers to be within a predetermined allowable time. TECHNICAL FIELD The present invention relates to a system and a method for controlling automatic conveyance of a lot input to a medium and a recording medium.

[0002]

2. Description of the Related Art The outline of the transfer of a lot of semiconductor wafers in a bay and the transfer of a lot between bays in a semiconductor manufacturing line will be described below as background art of the present invention.

[0003] The entire semiconductor manufacturing line is generally divided into bays (or blocks) for each process, and each bay has a plurality of semiconductor manufacturing facilities and at least one stocker (called "shelf"). It has. The semiconductor manufacturing equipment (hereinafter referred to as “equipment”) includes, for example, apparatuses for performing various processes such as cleaning, oxidation, impurity introduction, thin film formation, exposure and development, for each process (process).

In the case of a track type as shown in FIG. 8, a lot of semiconductor wafers is transported between different bays, for example, on an elevated passage 54 by a bay-to-bay (inter-process) transport vehicle 50 and a shelf 30 of a certain bay. wafer lots 51 that is left from the ₁ are goods receipt is conveyed to the shelf 30 ₂ of the next bay. The transfer of a lot between bays (between processes) is performed by a host computer 10 that manages the progress of the process in lots in a semiconductor manufacturing line.
Under the instruction control described above, the automatic transfer control device (transport controller) 40 performs control and management. The automatic transfer control device 40 controls automatic transfer of lots in the bays as well as transfer of lots between bays. The host computer 10 stores and manages the state of the equipment, manages the progress of the lot in accordance with a preset process flow, and stores, on a database (not shown), the shelf 30 and the equipment (not shown) from the network 60. Based on the information transmitted through the server, the lot stored in each shelf and the lot processed in each facility are stored and managed.

On the other hand, the transfer of a lot in the same bay is performed as shown in FIG.
As shown in the figure, the transfer is performed between the shelf 30 and the facility 20 by the intra-bay carrier 50A. As the intra-bay transport vehicle 50A, an unmanned transport vehicle (Auto Guided Vehicl) usually comprising a cassette transport robot capable of freely moving in the bay is used.
e; “AGV”). Depending on the production line, a track-type carrier may be used as the intra-bay carrier.

[0006] The facility 20 notifies the host computer 10 of a lot load request (load request) via a network. When the host computer 10 receives the load request from the facility 20, the host computer 10 sends the lot 2 from the shelf 30 to the facility 2.
0 in-process lot is selected, and the automatic transfer control device (4 in FIG. 8) is selected.
0), a delivery instruction for outgoing transfer of the corresponding lot is output from the shelf 30. The in-bay transfer vehicle 50A mounts a cassette storing the in-process lot that has been taken out of the shelf 30. Then, a series of processing until the cassette is transferred to the equipment 20 and transferred to the equipment 20 is automatically performed.

[0007] The intra-bay carrier 50 A is
Receives the unload request output from the host computer 10 to the host computer 10, the processing lot processed by the facility 20 is collected on the shelf 30, and is stored in the shelf 30.

In a semiconductor manufacturing line, the allowable time from the end of processing of a semiconductor wafer in a certain step to the start of the processing of the next step is short, and when the processing of the next step is started beyond the allowable time. In some cases, the quality of the semiconductor wafer is degraded and defective products are produced. For example, during the processing steps from the acid cleaning step to the diffusion oxidation step, after the acid cleaning, a natural oxide film is formed on the semiconductor wafer surface over time, which affects the processing in the subsequent diffusion oxidation step.

For this reason, it is necessary to appropriately manage a permissible time for a lot supplied from the first facility in the preceding process to the processing flow of the second facility in the subsequent process.

Referring to FIG. 10, a conventional semiconductor manufacturing line is shown.
A description will be given of the allowable time management in the application. See FIG.
In comparison, a conventional semiconductor manufacturing line is shown schematically.
The clean room is divided into three bays A, B and C
The bay A has 30 shelves.₁And equipment 1 is installed
And bay B has 30 shelves_TwoAnd equipment 2 and equipment 3
The bay C has 30 shelves_ThreeAnd equipment 4 are installed
You. The shelf 30₁~ Shelf 30 _ThreeIs the mechanism for each piece of equipment.
It is also called "work in shelves" to store the data. Shelf 30₁, 3
0_Two, 30_ThreeThe transfer of the lot between the bays is performed by the inter-bay transfer vehicle (5 in FIG. 8).
0), and within the same bay, the lot
This is performed by an inner carrier (AGV) (50A in FIG. 9).

The host computer 10 performs production management such as process progress and equipment management for each lot in the semiconductor manufacturing line. When each equipment is capable of processing a lot, as described above, a load request is issued. (Load request) is output to the host computer 10. Upon receiving the load request from the equipment, the host computer 10 outputs an outgoing transfer instruction of the work-in-progress lot of the relevant equipment stored on the shelf, and under the control of the automatic transfer device (see 40 in FIG. 8), The lot delivered from the shelf is transported to a target facility.

In the conventional semiconductor manufacturing line shown in FIG. 10, when the time between the end of the processing in the previous facility and the start of the processing in the facility for performing the next processing exceeds the allowable time, the characteristics deteriorate. Therefore, for a flow that requires the time between the facilities to be managed within the allowable time, the operator does not apply the automatic dispatch under the control of the host computer 10 and the operator manually gives the transfer instruction. ,
By allowing the processing to proceed with priority, the allowable time is prevented from being exceeded.

In FIG. 10, for example, there is a processing flow (equipment 2 → equipment 3) that requires permissible time management, such as pre-cleaning and diffusion, between equipment 2 and equipment 3 in the same bay B. , While being aware of the processing progress of facility 3,
Operator, and wits the timing of launching the allowable time managed widget lot equipment 2, the equipment from the shelf 30 ₂ 2, the conveyance of the lot from the equipment 2 to equipment 3, the terminal 1 by the operator
Instruction input from 1 or by the operator himself.

At this time, the operator: ・ Launches the lot processed by the facility 2 into the facility 3 within an allowable time from the end of the processing of the facility 2; and ・ Shortens the idle time of the facility 3 as much as possible. Therefore, it is required to perform the transport operation in consideration of the above.

In the same manner as described above, if a processing flow (equipment 1 → equipment 2) requiring allowable time management exists between the equipment 1 and the equipment 2 between different bays, 1
While managing the in-process and the processing progress of the equipment 2 that processes the lot processed in the above, the timing for setting the lot requiring the management of the allowable time on the equipment 1 is determined. Then, at the time of installing the equipment 1, the worker
And unloading the target lot from the shelves 30 _1, to convey to the facility 1.

The equipment 1 is, if a facility is transported by intra-bay transport vehicle from the shelf 30 _1, equipment is received into the shelf 30 ₁ 1
Of widget lots destined, the allowable time managed lot, keep at a stop on the output of the automatic unloading transport instruction to the host computer 10 from the terminal 11, from the shelf 30 ₁ of allowable time managed Lot Out of the automatic dispatch target.

Then, at the timing of setting up the equipment 1, the worker sends the information from the terminal 11 to the host computer 10.
To, by entering the stop release time allowed managed lot, the allowable time managed lot, the automatic transfer target lot at bay transport vehicle from the shelf 30 ₁ performs automatic transport to facilities 1.

[0018] After the completion of processing in the equipment 1, the inter-bay transport from the shelf 30 ₁ until the shelf 30 ₂ is the usual lot to handle, and is conveyed by the bay between the transport vehicle.

[0019]

However, in the above-mentioned conventional system, although the allowable time can be complied with, the operation rate of the equipment is lowered, or the processing waiting time of the lot becomes longer. There is a problem that the efficiency of the semiconductor manufacturing line may be reduced and the processing performance (throughput) of the equipment may be reduced.

The reason is that the progress of the work-in-process lot and the transport management that are input to the process flow that requires the allowable time management are controlled.
This is because the operation is performed with the intervention of an operator.

It is not preferable that an operator who can be a source of particles enters the clean room.

Further, when the lot delivery timing is manually adjusted in order to comply with the permissible time imposed on the transfer of the lot between the facilities, there is a difference in how to take the timing depending on each worker, and an appropriate There is also a problem that it is difficult to maintain timing.

In particular, from the terminal, for a work-in-process lot whose allowable time is to be managed, a stop is made on the delivery from the shelf to the equipment, and the worker himself recognizes that it is time to start the equipment. In the case where the terminal is released from the shelf to stop the outgoing transport of the work-in-progress for which the allowable time is to be controlled, and the transport is carried out from the shelf to the equipment, there is a concern that the operator may recognize the timing incorrectly. . If the worker incorrectly judges the timing of taking out from the shelf, if the timing is too early, the number of lots waiting to be processed in the equipment will increase, and the passing of the timing will exceed the allowable time. . As described above, when the progress / transportation management by hand and the automatic management of the process progress of the lot by the host computer 10 cannot be properly compatible, the progress / transportation management of the lot by manual operation is performed by the host computer 10. This will affect management and therefore the host computer 1
In the case of No. 0, it is necessary to newly provide a function or the like for synchronizing with the lot progress / transportation management by hand, and the control becomes complicated.

Further, there is also a problem that the management by humans cannot keep up with the increase in the number of work-in-progress put into the flow requiring the allowable time management between the facilities, and it becomes difficult to maintain appropriate timing. Yes, in the end, when the operator gives a lot transfer instruction, the burden on the worker increases,
It is difficult to improve the productivity of a wafer lot.
In the first place, in a semiconductor manufacturing line equipped with an automatic loading / unloading function and an automatic transfer control function in which a lot is automatically transferred to a target equipment or shelf, the allowable time between the equipments is manually controlled. The fact that a worker leaves a lot from a shelf and transports it to a port of a target facility is counter to the automation of a semiconductor manufacturing line.

For example, Japanese Unexamined Patent Publication No. 9-7912 discloses that continuous time between processing of semiconductor wafers is required to be equal to or less than a time limit for leaving that quality deterioration is guaranteed to be within an allowable range. In the processing step, the production control device for controlling each processing start time of the semiconductor wafer is a second control apparatus.
Based on the time required for transport and the time required for processing in the second processing apparatus, the scheduled processing start time and processing end time of the first processing apparatus are set so that the idle time of each processing lot is equal to or less than the idle time limit. The scheduled processing start time and the scheduled processing end time of the second processing apparatus are calculated for each scheduled lot, and the calculated values are stored as reservation information, and are stored in the reservation information stored in the storage unit by the transport control unit. A configuration in which a lot to be carried in is conveyed based thereon is disclosed.

However, the configuration disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 9-7912 only generates schedule information (scheduled start and end times of processing) in a production plan. It does not control the allowable time based on the actual operation status.

As another method for managing the allowable time, for example, Japanese Patent Application Laid-Open No. H11-168039 discloses a method for preventing the deterioration of product quality and yield due to the lapse of time from the end of each process. For the inventory lot, the elapsed time from the end of the previous process is calculated, the remaining time is calculated from the limit specification time and the elapsed time, and processing instructions are given in order from the unprocessed stock lot with the shortest remaining time. A method is disclosed.

However, Japanese Patent Application Laid-Open No. H11-1680 describes
In the conventional method disclosed in Japanese Patent Publication No. 39, the control of processing of a processed lot in a processing device of a pre-process is the subject of the invention, and the timing of transport of a work-in-process lot to the processing device of the pre-process is disclosed. Is not considered at all.

Accordingly, the present invention has been made in view of the above-mentioned problems, and a main object of the present invention is to provide an automated semiconductor manufacturing line with an outgoing transfer of a lot in which an allowable time is imposed on the transfer between facilities. To provide a system and method for automatically controlling the recording medium and a recording medium. Other objects, features, advantages, and the like of the present invention will be immediately apparent to those skilled in the art from the following description of the embodiments.

[0030]

According to the present invention, there is provided a first facility for processing a lot of semiconductor wafers,
A second lot to be processed next in the lot processed in the first facility
It is necessary that the time from the end of the processing of the lot in the first equipment to the start of the processing of the lot in the second equipment be within a predetermined allowable time. The in-process transfer of the in-process lot from the shelf accommodating the in-process lot to the first facility with respect to the in-process lot to be input to the flow in
Means for controlling execution at the timing when both of the equipment and the second equipment output a signal indicating that a lot can be accepted.

According to the present invention, there is provided a host computer for managing the progress management of a lot of semiconductor wafers in a semiconductor manufacturing line, a first facility for processing a lot of semiconductor wafers, and a processing lot processed by the first facility. And a second facility to be processed next, wherein the time from the end of the processing of the first facility to the start of the processing of the second facility is required to be within a predetermined allowable time, A lot loading request is output from the first equipment to the host computer for a work-in-progress input into a processing flow including the first equipment and the second equipment, and
When a load request for a lot is also output from the second facility to the host computer, the host computer sends an automatic transfer means from the shelf accommodating the in-process lot to the first facility. Of the in-process lot is issued. As will be apparent from the following description of the embodiments, the above object is similarly achieved by the present invention described in each claim of the claims.

[0032]

Embodiments of the present invention will be described. In one embodiment, the transfer control system of the present invention comprises a first facility for processing a lot of semiconductor wafers, and a second facility for processing the lot processed by the first facility next. A flow in which the time from the end of processing of the lot in the first facility to the start of processing of the lot in the second facility is required to be within a predetermined allowable time, For the input work-in-process lot, the timing of the outgoing transfer of the work-in-process lot from the shelf accommodating the work-in-process lot to the first equipment is determined not only by the operation status (vacancy status) of the first equipment, Further, the determination is made in consideration of the operation status (vacancy status) of the second facility. Preferably, a lot load request (load request) is output from the first facility to the host computer. And, at the timing when the lot load request is also output from the second equipment to the host computer, the host computer sends the work in progress lot from the shelf accommodating the work in progress lot of the first equipment to the first equipment. Is carried out.

More specifically, a first facility for processing a lot of semiconductor wafers, a second facility for performing the next process on the processed lot of the first facility, and a work in progress shelf for storing a work in process lot An automatic transfer means for issuing a lot from the in-process rack and automatically transferring the lot to the processing equipment, and a host computer connected to the equipment, the in-work shelf and the automatic transfer means, and managing the process progress of each lot, The first equipment and the second equipment issue a load request (load request) to the host computer when a lot can be processed,
In the transport control system in which the host computer that has received the load request instructs the shelf and the automatic transport unit to carry out a delivery to the facility that has issued the load request, a processing end time of the first facility When the lot is stored in the shelf for a lot requiring an allowable time management in which the idle time until the processing start time of the second equipment is within a predetermined allowable time, the first When both a load request from the second facility and a load request from the second facility for processing the processed lot processed by the first facility are issued to the host computer, Outputs a lot transfer instruction from the shelf to the first facility to the shelf and the automatic transfer means.

[0034] In one embodiment of the present invention, the second equipment, which forms a post-equipment in which the permissible time management between the equipments is required, is performed for a predetermined time longer than the end time of the lot processing in the second equipment. At the previous time, a load request (load request) is output to the host computer.

In one embodiment of the present invention, in the facility provided with a plurality of ports for receiving lots, a port is allocated to a lot to be subjected to a permitted time management or a normal lot in response to a lot load request, or a dispatch is performed. The configuration is such that setting rules are set and managed for each port of each facility.

More specifically, the equipment has a plurality of ports for receiving lots, and is configured to issue a load request to the host computer for each of the ports. In each case, a dedicated port of a lot for which the allowable time is managed in the transport between the facilities, a dedicated port of a normal lot for which the allowable time is not managed, and a priority of receiving the lot for which the allowable time is managed with priority Among the port types of the priority port which preferentially enters the port and the normal lot for which the allowable time management is not performed, the port type selected and input is allocated and managed.

In this case, for example, with respect to the first equipment and the second equipment which subsequently processes the lot processed by the first equipment, the second equipment which preferentially receives the lot for which the allowable time management is performed is stored. If there is a work-in-progress lot of the first facility that manages the allowable time in response to the load request of the priority port, the work-in-progress lot is preferentially received in the first facility. If there is no work-in-process lot of the first equipment for which the permissible time is managed and there is a normal lot for which the control of the permissible time is not performed as the work-in-progress lot of the second equipment, this normal lot is It is controlled so as to be stored in the priority port of the second facility.

As described above, according to the embodiment of the present invention, by using the load requests of both the front and rear facilities requiring the permissible time management, it is possible to return to the in-process shelf after the processing of the preceding facility is completed. Instead, it enables direct automatic transfer to the subsequent equipment, enabling lot progress in a short allowable time.

Further, according to the embodiment of the present invention, the transmission of the load request for the post-processing equipment is performed during the lot processing in the post-processing equipment. (The processing of the lot in the preceding equipment and the processing of the lot in the subsequent equipment overlap in time), thereby reducing the waiting time (lot arrival waiting time, idle time) of the subsequent equipment. be able to.

Further, according to one embodiment of the present invention,
By using the load requests of both the front and rear facilities that require the allowable time management, it becomes possible to grasp the availability of the rear facilities (reserve one port of the rear facilities),
After the processing of the pre-equipment, the waiting time of the lot of the post-equipment can be reduced to the transfer time to the post-equipment.

As a method according to an embodiment of the present invention, a method for controlling the transfer of lots of semiconductor wafers in the same bay in a semiconductor manufacturing line will be described.

Referring to the flow chart of FIG. 3, after the processing of the lot in the first facility, which is the facility before processing the lot of semiconductor wafers, the processing lot processed by the first facility is processed next. For a work-in-process lot to be put into a flow that requires the time until the start of the processing of the lot in the second equipment constituting the post-equipment to be within a predetermined allowable time, the host computer Receives a load request for a lot output from the first facility (Yes in step S1), and receives a load request for a lot output from the second facility (step S1).
2), the host computer instructs the automatic transfer control means to take out and transfer the in-process lot from the shelf accommodating the in-process lot to the first facility (step S3).

The in-process lot of the first equipment stored on the shelf is transferred from the shelf to the first equipment (step S).
4).

When the processing of the lot in the first facility is completed (step S5), the processed lot is removed from the first facility by the second facility.
(Step S6).

After the processing is completed in the second facility, the processing lot is collected on the shelf (step S7).

Next, a method for controlling the transfer of lots of semiconductor wafers between different bays in a semiconductor manufacturing line will be described as a method according to an embodiment of the present invention.

Referring to the flow chart of FIG. 4, after the lot processing in the first equipment which is the pre-processing equipment for processing the semiconductor wafer lot is completed, the processing lot processed in the first equipment is processed next. For a work-in-process lot to be put into a flow that requires the time until the start of the processing of the lot in the second equipment constituting the post-equipment to be within a predetermined allowable time, the host computer Receives a load request for a lot output from the first facility (Yes in step S11) and receives a load request for a lot output from the second facility (Yes in step S12), the host computer And outputting an in-process transfer instruction for the in-process lot from the first shelf accommodating the in-process lot to the first facility to the automatic transfer control means (step S1). ).

When the processing of the lot in the first facility is completed (step S15), the processed lot processed in the first facility is collected on the first shelf (step S16), and the processed lot is set as a reserved lot. A transfer instruction between bays is preferentially issued to the second shelf (step S17).

Then, the reserved lot conveyed to the second shelf between the bays is preferentially sent to the second facility with an outgoing conveyance instruction (step S18).

The lot processed by the second facility is collected on the second shelf (step S18).

As described above, according to the present invention, the lot to be managed for the allowable time is specially recognized even in the transportation between the front and rear facilities, so that the lot is handled as the highest priority lot.
Transport time can be minimized.

According to the present invention, in the pre- and post-equipment requiring the permissible time management, the load request of each port of the post-equipment is normally processed and reserved (waiting for the arrival of the permissible time management target lot from the previous equipment). Parallel operation, the waiting time for the arrival of lots at the subsequent equipment (idle time)
Can be reduced.

[0053]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of the present invention; In the embodiment of the present invention, the transfer of a lot from the work in-process shelf to the equipment in a semiconductor manufacturing line in the same bay is performed by an unmanned guided vehicle (Auto Guided Vehicle;
In-bay carrier such as “AGV” (50A in FIG. 9)
Reference). It is needless to say that the intra-bay transfer may be performed by the track-type transfer unit. The transfer of lots between different bays is performed by an interbay transfer vehicle (see 50 in FIG. 8) that transfers lots between shelves in each bay. The automatic transfer control by the intra-bay transfer vehicle and the inter-bay transfer vehicle is controlled by an automatic transfer control device (40 in FIG. 7) under the management of the host computer.

FIG. 1 is a diagram for explaining an embodiment of the present invention. Unlike the system shown in FIG. 10, in one embodiment of the present invention, an operator for controlling the transport of a lot whose allowable time is to be managed is not required. Transport control is fully automated.

[0055] equipment from the shelf 30 ₁ 1 (20 _1), goods issue transport instruction artworks from the shelf 30 ₁ onto the rack 30 _{and second} bay B are output from the host computer 100 for managing the process progress of each lot.

When the host computer 100 receives the load request from the equipment, the host computer 100 refers to a database (not shown), selects the most appropriate work-in-progress lot from the shelves storing the work-in-process lot of the equipment, and stores it in the shelf. An outgoing transfer instruction is sent to this. The outgoing transfer instruction issued to the shelf from the host computer 100 includes the lot ID of the outgoing lot, and a controller (not shown) that manages the incoming and outgoing of the shelf extracts the corresponding lot from the shelf, It is mounted on an intra-bay carrier (see 50A in FIG. 8), and the intra-bay carrier 50A receives an instruction from the host computer 100 that manages the progress of the process of the corresponding lot, and uses the lot discharged from the shelf as the target. Transport to equipment.

The load request from the equipment is usually transmitted to the host computer 100 at a timing when the processing device in the equipment becomes empty. As an example, an intra-bay carrier (A
The lot transferred from the GV) to the port of the equipment is loaded into the processing equipment of the equipment and processed. After the processing is completed, the equipment sends an unload request to the host computer 100.
When a sensor provided at the port detects that a lot to be unloaded on a port of the equipment has been transferred to an intra-bay carrier (AGV), a load request is sent from the equipment. Is output to the host computer 100.

Referring to FIG. 1 and FIG. 3, a description will be given of the direct transfer between the facilities in the same bay in one embodiment of the present invention. FIG. 3 is a flowchart showing a processing procedure according to one embodiment of the present invention.

[0059] in bay B are facilities 2 (20 ₂₎ and equipment 3 (20 ₃₎ and is provided with a shelf widget identical shelves 30 _2. Equipment 2 → Equipment 3
In addition, if the permissible time from the completion of the lot processing in the facility 2 in the preceding process to the processing in the facility 3 is short, the same bay direct transfer is applied. .

[0060] equipment 2 widget lot is stored are shelf 30 ₂ receipts. The host computer 100 includes a load request from the equipment 2, when both are aligned load requests from the equipment 3, is stored on the shelf 30 _2,
An outgoing transfer instruction for the in-process lot of the facility 2 is issued (steps S1 to S3).

[0061] Shelf 30_TwoOf the equipment 2 stored inside
The lot is transferred to the equipment 2 (step S4), and
After the processing of the lot is completed (step S5), the facility 2
Download request to host computer 100
The processing lot is transferred from the facility 2 to the intra-bay carrier (not shown).
), Is automatically transferred to the next facility 3 (step S6),
The processing is performed in the facility 3 (step S7). Processed in equipment 3
Processing lot is shelf 30 _TwoWill be collected. Note that
In step S5, the processing lot is transferred to the intra-bay carrier.
At this point, Facility 2 sends the load request to the host computer.
Data 100.

[0062] Thus, at the timing when the lot progress from the shelf 30 ₂ is unloading transported to facility 2, the equipment 3, has a processing ready lots after the lot processing ends in equipment 2, immediately It is automatically conveyed to the facility 3 by the intra-bay carrier, and in the facility 3, the processing of the lot directly conveyed from the facility 2 is immediately executed.

In this case, if a load request is transmitted to the host computer 100 at a timing when the processing device in the equipment 3 for performing the next processing of the processing lot processed by the allowable equipment 2 is vacant, the operating loss is reduced. A large case may occur.

The operation loss will be described in detail with reference to FIG. FIG. 2 is a sequence chart showing the operation status of the facilities 2 and 3 along the time axis (horizontal axis).

As shown in FIG. 2A, the host computer 100 that has received the load requests from the facilities 2 and 3 for which the allowable time management between the facilities is required,
Outputs transmission instruction, after transporting Widgets lot from the shelf 30 ₂ to facility 2, the equipment 2 executes the processing of the lot (lot A) (equipment 2 shown in FIG. 2 (a) "Processing A" reference ).

The processing of the lot A is completed in the facility 2,
After the processing lot A is unloaded, the facility 2 outputs a load request to the host computer 100.

The processing lot A processed in the facility 2 is automatically conveyed from the facility 2 to the facility 3, and the following processing is performed on the lot A in the facility 3 (“processing in progress” of the facility 3 in FIG. 2A). A)).

After the processing of the lot A is completed in the facility 3 and the lot A is unloaded, the facility 3 outputs a load request to the host computer 100.

[0069] At this point, set the load request from the facility 2 and equipment 3, the host computer 100 outputs a conveyance instruction, from the shelf 30 _2, are conveyed lot B, is processed in equipment 2 (FIG. 2 "Processing B" of facility 2 in (a)
reference).

After the processing of the lot B is completed in the facility 2, the lot B is transported to the facility 3, and the following processing is performed on the lot B in the facility 3 (“Processing B” of the facility 3 in FIG. 2A). "reference).

In this case, the period from the processing end time a of the lot A in the facility 3 to the processing start time b of the lot B in the facility 3 is an “operation loss”.

In one embodiment of the present invention, as shown in FIG. 2B, a facility 3 for performing the next process of the facility 2 in order to reduce the operation loss and improve the processing performance (throughput). At the end time a of the processing of the lot A,
At time point before time X, the load request is output from the facility 3 to the host computer 100.

In this case, when the load request is output from the equipment 3 before the time X of the scheduled end time a of the lot A in the equipment 3, the host computer 100
Outputs a transport instruction for the lot B-process on the shelf 30 _2, shelf 3
0 ₂ from widget lot B is unloading, it is automatically transported by intra-bay conveyor car equipment 2.

For this reason, while the lot A is being processed by the facility 3 (see “Processing A” of the facility 3 in FIG. 2B), the lot B is processed by the facility 2 (the facility 2 in FIG. 2B). "Processing B"
), There is an overlap time during which processing is performed simultaneously in the facilities 2 and 3 (overlap time = X−
(Transfer time from the work-in-progress shelf to the facility 2)) After the processing of the lot B in the facility 2, the lot B is automatically transported to the facility 3
The corresponding process is performed.

As shown in FIG. 2B, in the facility 3,
The idle time (operation loss) from the processing end time a of the lot A to the processing start time c of the lot B is shorter than the time X in FIG.

As described above, in one embodiment of the present invention, the equipment 2 forming the processing flow in which the time from the end of the processing in the equipment of the preceding process to the start of the processing in the equipment of the subsequent step is within the allowable time is set. In the facility 3, in order to improve the operation rate of the facility 3, the facility 3 monitors the processing end time of the lot currently being processed in the facility, and a predetermined time X of the scheduled end time of the processing of the lot. First, a load request is transmitted to the host computer 100. Time X is set in advance for equipment 3
Is the set value set in the processing time of the facility 2,
The time is set in consideration of the transport time from the equipment 2 to the equipment 3.

The host computer 100 registers and manages the lot for which the allowable time is managed in the transportation between the equipments, and sends the lot from the second equipment forming the post-equipment a predetermined time before the processing end time of the lot. When outputting a load request to the host computer 100 during the lot processing, the host computer 100 does not manage the load request from the second facility as a load request due to the actual end of processing in the second facility. At the same time, along with the load request from the first facility
Is managed as a signal for instructing outgoing transfer of a work-in-process lot of the equipment. In this case, even if the processing of the lot entered in the flow in which the allowable time is managed is completed in the second facility,
The second facility is configured not to output the load request, or controls the host computer 100 to mask the load request even if the second facility outputs the load request.

Note that, unlike the above, for example, when there is no need to manage the allowable time for the work-in-process lot input to the facility 2, a single load request from the facility 2 to the host computer 100 will be described. Once sent, the host computer 100, to the equipment 2 widget lots stored in the shelf 30 _2, issues a transport instruction is transported to the facility 2 at bay transport vehicle, in equipment 2 of the lot After the processing is completed, the processing lot is transferred to the shelf 30 by the intra-bay carrier.
Recovered ₂ is received into the shelf 30 _2.

Next, with reference to FIG. 1 and FIG. 4, a description will be given of the different bay allowable time conveyance in one embodiment of the present invention. FIG. 4 is a flowchart for explaining a processing procedure of different bay allowable time transport in one embodiment of the present invention. Hereinafter, the equipment 1 belonging to a shelf 30 ₁ bay A, the equipment 2 belonging to the shelf 30 _{and second} bay B are managed in the allowed time will be described when necessary. Incidentally, during the progress shelves 30 _1-process rack 30 ₂ is automatically conveyed by the inter-bay transport vehicle.

As the progress of the lot process, equipment 1 → equipment 2
In addition, a lot which requires that the time from the end of the processing in the facility 1 to the start of the processing in the facility 2 be within a predetermined allowable time is different from that in a different bay. Allowable time transport is applied.

[0081] acceptable time the subject of equipment 1 widget lot is receipts on the shelf 30 _1-process. The host computer 100
In response to a load request from the equipment 1, no delivery instruction for the in-process lot to the equipment 1 is output. Further, the host computer 100 does not operate in response to a load request from the facility 2 alone.

[0082] As described above, also in this case, the host computer 100 at the timing equipment 1 and equipment 2 of load request are met both for equipment 1 widget lot that is received into widget shelves 30 _1, equipment 1 is issued (steps S11 to S13). At that time, equipment 2
The host computer 1
00 is recognized as a “reserved request”, and this lot is registered and managed in a database (not shown) as a “reserved lot”.

[0083] Widget lot of equipment 1 that is stored on the shelf 30 ₁ is issuing transported to facilities 1 (step S14), and treated with equipment 1 (step S15), and equipment 1 processing lots at bay transport vehicle It is recovered in the shelf 30 ₁ (step S
16).

The host computer 100 is connected to the shelf 30
To _1, when receiving a notification that the process lot that has been processed in the equipment 1 is receipts, at the timing of the process lot has been receipts, the process lot, and recognized as "reserved lot",
Controlling the conveyance top priority lot in the bay between the transport up to the shelf 30 ₂ is the next step.

[0085] That is, process lot that is received into the shelf 30 ₁ (reserved lot) receives the transport instruction from the host computer 100, is left from the rack 30 ₁ the highest priority (most recently receipts have been lots (reserved requires lot) is earliest unloading; Last in fisrt Out), in the inter-bay transport vehicle, it is automatically transported to the rack 30 ₂ (step S1
7).

[0086] If this reserved lot has arrived on the shelf 30 _2, the host computer 100, the reserved lot, as a top priority lots, put out the unloading transport instructions from the shelf 30 ₂ to the equipment 2 (step S18). Shelves 30 ₂ which has received this instruction, the automatic transfer by bay in the transport vehicle and unloading the lot to facility 2. Lot processed in equipment 2 is shelf 3
0 ₂ is collected is received into (step S19). Shelf 3
0 ₂ to warehousing has been the lot, the host computer 100
Under the above control, necessary processes such as transport to the next process are performed according to a predetermined process flow.

On the other hand, in a semiconductor manufacturing line, unlike the so-called belt conveyor system, each facility is used repeatedly in a job flow. Therefore, when focusing on a certain facility, the facility in the preceding process is fixed. do not do.

For example, referring to FIG. 1, there are different flows such as equipment 1 → equipment 2 and equipment 4 → equipment 2 as the process progress of a lot. In this case, there are two facilities, facility 1 and facility 4, as facilities in the pre-process of facility 2.

Among them, the flow from equipment 1 to equipment 2 includes:
Permissible time management is required, and another flow of equipment 4 →
When the allowable time management is not required between the facilities 2, a dispatch rule is applied to each port of the facility.

The equipment 1 and the equipment 2 are provided in different bays A and B. Between the equipment 1 and the equipment 2, a different bay allowable time transfer system is applied. In this case, among the work-in-progress lots of the facility 1, for the lot that is processed in accordance with the flow from the facility 1 to the facility 2, the load request is output from both the two facilities 1 and 2 as described above. Then, an instruction to transport the work-in-progress lot to the equipment 1 is issued.

Lots not subject to the permissible time management (for example, processed in equipment 1, but equipment 1 → equipment 3, equipment 1 → equipment 4
Etc., lots whose subsequent equipment is processed by a flow other than equipment 2)
As described above, the host computer 100 outputs a delivery and transfer instruction to the equipment 1 for the lot based on a single load request from the equipment 1 as usual.

Further, the different bay allowable time transfer is not applied to the flow from the equipment 4 to the equipment 2. In this case, stored in the shelf 30 _3, relative progress lot equipment 4, the host computer 100, by a single load request from equipment 4, and outputs a goods issue conveyor instruction from the shelf 30 ₃ to equipment 4 .

[0093] After the lot process is completed in the equipment 4, processed lot is recovered by interbay transport vehicle, are receipts again on the shelf 30 ₂ as widget lot facility 2.

[0094] Then, the in-process lots of equipment 2, which are receipts on the shelf 30 _2, when the host computer 100, which has received the load request from the equipment 2, the outgoing transport instruction from the shelf 30 ₂ to the equipment 2 Output.

The load request output from the facility 2 is in accordance with the flow to the facility 2, a delivery instruction for a work-in-progress lot of the facility 1 in the preceding process (load control to the facility in the preceding process), and the own facility is arranged. and unloading transport instruction for the shelf 30 ₂ archived by that equipment 2 widget lots bay, 2
Used on the street.

Here, as shown schematically in FIG. 5, for example, the equipment 2 has a plurality of ports (lot entrances to the equipment).
In the case where the port request is provided, the host computer 100 may set priorities for use of the port in response to the load request transmitted from each port. FIG. 5 shows a multi-port facility 2
As 0, an example of a four-port sputtering apparatus having a multi-chamber configuration is schematically shown. A cassette accommodating lots is automatically transferred to a designated port from the intra-bay carrier (AGV) 50A, and the lots from each port are
Each chamber is loaded via the load lock chamber, and the processed lot is unloaded to the port via the unloader. When a processing lot is placed on a port, an unload request for that port is output to the host computer 100. When the lot is transferred onto the intra-bay carrier (AGV) 50A, a sensor that detects this is sent to the port. A load request is output to the host computer 100 assuming that the lot can be accommodated.

As an example of the selection of the port priority order, a port type such as: a port dedicated to different bay allowable time transfer, a port dedicated to normal outgoing transport instruction, a port priority to different bay allowable time transport, a priority port to normal outgoing transport instruction, etc. Is prepared.

Of these, the function of the dedicated port is not changed. For example, a port dedicated to different bay allowable time transfer is a port dedicated to receiving lots that are put into a flow that requires transfer to be performed while managing the allowable time between facilities in different bays, and is usually dedicated to outgoing transfer instructions The port is for receiving a lot dedicated to a normal flow that does not require management of the allowable time.

On the other hand, the priority port is used as the other processing port when there is no in-process lot corresponding to the priority processing for the load request.

For example, the different bay allowable time transport priority port is:
In response to a load request for the port from the equipment, a work-in-process lot (waiting processing lot) to be put into a flow that requires transporting while managing the allowable time between the equipment in different bays is a pre-processing equipment work-in-progress shelf. If the in-process lot is reserved in the port, the in-process lot that requires the management of the allowable time does not exist on the shelf, and the normal lot that does not require the management of the allowable time is the in-process lot of the equipment. In the case where the normal lot is stored in a shelf, priority control is performed such that the normal lot is stored in the port.

In addition, the normal outgoing transfer instruction priority port is such that, in response to a load request from the equipment, a normal lot which does not require the management of the allowable time between the equipment in different bays is set as a work-in-progress lot (lot waiting for processing) on the shelf. If it is stored, the normal lot is received at the port, and there is no in-process lot that does not require the management of the allowable time, and the lot that requires the management of the allowable time is put on the shelf as the in-process lot of the preprocessing equipment. If it is stored, a lot for which the management of the allowable time is required is reserved in the port.

By setting a port type for each port of the equipment and registering and managing the setting of the port type of the equipment on the host computer 100, a work-in-process lot that needs to be transported between the equipments within an allowable time is obtained. If it does not exist, a normal lot that does not require the management of the allowable time is received in the port,
If there is no normal work-in-process lot that does not require the management of the allowable time in the work-in-process shelf, control the allowable time and carry out the control to receive the work-in-process lot that needs to be transported to the port, thereby reducing the allowable time. If there are many in-process lots that do not require management and there are no in-process lots that require time management, normal lots can be loaded into the lot ports that require time management and the equipment utilization rate can be reduced. To improve processing efficiency.

In the embodiment of the present invention, the priority order of the equipment ports is determined based on the processing capacity of the equipment in the semiconductor manufacturing line, the mixing ratio of the product types, the work-in-process, and the like. , And TAT (turn around time) are appropriately set.

FIG. 6 is a diagram showing an example of a setting screen (shelf equipment maintenance screen) for setting the port numbers of equipment and their priorities (types) according to an embodiment of the present invention. And so on. For the four ports of the equipment, the loading mode (how to load) is changed from the state of no mode designation (0) (no distinction is made between the permitted time management and the normal management) from the port dedicated to the normal delivery and transfer instruction (1). ), A normal delivery transfer instruction priority port (2), a different bay allowable time transfer priority port (3), a different bay allowable time transfer dedicated port (4), and the like. Set / changed. The port type selected on this screen is recorded and managed in the database of the host computer 100.

Thus, according to one embodiment of the present invention,
This makes it possible to realize transport control that is adapted to the throughput of the production line lot and the operating status of the equipment.

FIG. 7 is a diagram showing an example of the configuration of the host computer 100 for realizing the above-described embodiment of the present invention. FIG. 7 shows processing apparatuses (wafer processing apparatuses) 21 ₁ to 21 _1, which respectively configure four facilities, as the configuration of the facilities.
21 _4, load / unload request transmission unit 22 _{1-22 4}
It is shown.

The load / unload request transmitting units 22 _{1 to} 22 ₄ of the four facilities # 1 to # 4 are connected to the host computer 100 by communication. In addition, facilities # 1 to #
4 of communication connection with the loading / unloading request transmission unit 22 ₁ to 22 ₄ and the host computer 100, wired, may be any of the wireless line. In the load / unload request transmission units 22 _{1 to} 22 ₄ , the load / unload request transmission unit 22 corresponding to the post-equipment that needs to manage the allowable time between the equipments
Then, the predetermined time X at which the lot processing is completed in
Prior to this, a load request is sent to the host computer 1 to control the outgoing transfer of the lot for which the allowable time is managed to the preceding equipment.
00 is transmitted. However, in this case, when the processing of the lot being processed by the processing device 21 is actually ended at the time of outputting the load request, and the unload request is output and the processed lot is conveyed, the load / unload request transmitting unit 22 does not transmit a load request to the host computer 100 to avoid issuing a double load request.

[0108] The host computer 100, load request (load request) and loading / unloading request receiving that receives unload request (Unload request) sent from the load / unload request transmission unit 22 ₁ to 22 ₄ of the equipment Unit 101 and an incoming / outgoing report receiving unit 102 that receives an incoming / outgoing report from the automatic transfer control device 40 that controls the in-process shelf and the transporting vehicle, and manages the lot that has been put into the shelf and the lot that has been taken out from the shelf. And a control unit 110 that determines an instruction to carry out the delivery of the work-in-progress lot stored on the shelf to the equipment based on the load request signal from the load / unload request receiving unit 101, and a delivery / transport instruction from the control unit 110 And a transfer instruction unit 109 for outputting an outgoing transfer instruction to the automatic transfer control device 40.

The host computer 100 includes, as databases, equipment / port type holding table 103, allowable control target equipment load request holding table 104, transport lot determination holding table 105, lot process flow holding table 106, shelf storage lot Holding table 107
And an allowable control target lot holding table 108. These tables are stored in the host computer 100.
Is stored in a storage device (not shown).

The shelf storage lot holding table 107 receives a report on the incoming and outgoing lots from the incoming and outgoing report receiving unit 102, and stores the lot stored in each shelf in the shelf and lot ID.
Are stored and managed in association with By referring to the shelf storage lot holding table 107, the control unit 110 can search on which shelf the lot is currently stored.

The equipment / port type holding table 103 is
The type of each port of each equipment (normal delivery transfer instruction dedicated port, normal delivery transfer instruction priority port, different bay allowable time transfer priority port, different bay allowable time transfer dedicated port) is stored and managed. The contents registered in the equipment / port type holding table 103 can be changed from the screen of the terminal connected to the host computer 100 as shown in an example of the setting screen in FIG. .

The control unit 110 is, for example, the shelf 3 shown in FIG.
0 ₂ when transporting and unloading equipment 2 widgets lot from when equipment 2 is a multi-port structure, with reference to the equipment port version table 103, based on the type information equipment 2 ports, said Select a port suitable for the work in process lot,
A transfer instruction that specifies the lot ID of the lot to be released and the port number information of the target facility 2 is transmitted to the transfer instruction unit 109.
Output from

The allowable control target equipment load request holding table 104 holds a load request (load request) from the preceding equipment and a load request from the subsequent equipment in the preceding and following equipment constituting the continuous process of the allowable time management.
In the preceding and following facilities for which the permissible time is to be managed, even if the control unit 110 receives a single load request from the preceding facility, the control unit 110 does not carry out the delivery of the lot to the preceding facility and holds the load request from the preceding facility. In response to a load request from the post-installation facility, a delivery instruction is output.

Transport lot determining means holding table 105
Holds the lot ID of the lot determined to be transported.
This table 105 may be used to manage the association between the lot to be conveyed and the vehicle number of the carrier of the lot.

The lot process flow holding table 106
The flow of the processing process for each lot is stored and managed. In the lot process flow holding table 106, each lot (lot I
For each D), the process flow of the lot is changed from equipment 1 → equipment 2 →
If the lot in process is, for example, “Equipment 1”, the control unit 1
At 10, it is recognized that the lot is a lot to be put into the flow for managing the allowable time between the facilities. The management of the reserved lot and the management of the highest priority lot in the different bay allowable time transfer are also performed in the lot process flow holding table 1.
06.

Allowable control target lot holding table 108
Is a table for storing and managing the lots to be supplied to the facilities before and after configuring the flow of the allowable time management object.
For the lots registered in the allowable control target lot holding table 108, the control unit 100 sets the transfer instruction unit 109 when the load request of both the preceding and following facilities is stored in the allowable control target facility load request holding table 104. Output a shipping transfer instruction for the lot via
It instructs the automatic transfer control device 40 to directly transfer the processing lot processed in the preceding equipment to the subsequent equipment. For the lots registered in the permissible control target lot holding table 108, as described above, in the case of the inter-bay permissible time conveyance, the control unit 110
The lot collected from the previous equipment to the shelf is "Reserved lot"
Priority is given to transfer between bays to the shelf of the subsequent equipment, and control is performed so as to carry out the delivery from the shelf to the subsequent equipment as the highest priority lot.

In one embodiment of the present invention, at least the control unit 110 can realize its processing and functions by a program executed on the host computer 100.

That is, the continuous flow composed of the first equipment and the second equipment sets the time from the end of the processing of the first equipment to the start of the processing of the second equipment within a predetermined allowable time. If the flow is required to be performed, if the work-in-process lot input to the flow is stored on a shelf, a load request from the first facility and a load request from the second facility And when both the load requests are output, a control signal is output based on these load requests to output a delivery / transfer instruction signal for a work-in-progress lot to be stored in the shelf to the first equipment to the first equipment. The processing and functions of the processing of the unit 110 are realized by a program executed on the host computer 100. In this case, the recording medium on which the program is recorded is transferred to the host computer 10 via a recording medium reading device.
By reading to 0 and executing, control of the host computer 100 in the present invention can be realized.

Further, in the present invention, the equipment is provided with a plurality of ports for receiving lots, and is configured to issue a load request to the host computer for each of the ports. A dedicated port of a lot for which the management of the permissible time is performed in the transfer between the facilities, a dedicated port of a normal lot for which the management of the permissible time is not performed, and a priority port for storing the lot for which the permissible time is managed with priority, When the type is selected and input from at least one of the priority ports that enter the warehouse with priority given to the normal lot that does not perform the allowable time management, the type is set for each port of the equipment by the equipment / port type holding table. 1
The processing and functions of the processing to be registered in the host computer 03 are realized by a program executed on the host computer 100. In this case, the recording medium on which the program is recorded is
Host computer 1 via a recording medium reading device
By reading and executing the data at 00, control of the host computer 100 according to the present invention can be realized.

Note that the host computer 1 shown in FIG.
The configuration of 00 shows an example of the functions and the table configuration of the host computer 100 according to an embodiment of the present invention. The control unit 110 and the load / unload processing unit 10
1. The configuration of the functional module including the entry / exit report receiving unit 102 and the transport instruction unit 109, and the configuration of the table are limited to the above configuration as long as the control and function described in the above embodiment are realized. Needless to say, it is not done. The host computer 100 may of course be configured to be distributed to a plurality of computers, such as a computer for database management, a computer for facility management, a computer for process management, and a computer for transport instruction control.

Although the present invention has been described with reference to the above embodiments, the contents shown in the drawings are only for illustrative purposes of the present invention and are not intended to limit the present invention. Of course, the present invention includes various changes and modifications that can be made by those skilled in the art within the scope of the claims.

[0122]

As described above, according to the present invention,
The following effects are obtained.

A first effect of the present invention is that, in the transfer of a lot between the equipments of a semiconductor manufacturing line, fully automatic transfer of a lot put into a flow requiring an allowable time management is realized, and the efficiency of semiconductor manufacturing is improved. That is, the improvement of the throughput can be particularly improved. The reason is as follows.

That is, according to the present invention, by using the load requests of both the front and rear facilities requiring the permissible time management, it is possible to return to the in-process shelf after the completion of the previous facility.
This is because they can be transported directly to the subsequent equipment, and the lot can be advanced in a short allowable time.

A second effect of the present invention is that the waiting time (operating loss) in the facilities before and after that requires the management of the allowable time can be reduced.

The reason is that, in the present invention, since the load request transmission from the post-processing equipment is performed during the lot processing, the processing time in the pre-processing equipment is absorbed within the processing time of the pre-processing lot in the post-processing equipment. This is because it is possible.

A third effect of the present invention is that, in realizing fully automatic transfer of a lot put into a flow requiring allowable time management, it is possible to maximize the operation rate of each facility and shorten the TAT. This means that the waiting time for work can be reduced particularly. The reason is as follows.

That is, according to the present invention, it is possible to grasp the vacancy status of the rear equipment (reserve one port of the rear equipment) by using the load requests of both the front and rear facilities that require the allowable time management. This makes it possible to reduce the lot waiting time to the transport time only after the processing of the preceding equipment. Furthermore, also in the transport between the front and rear facilities, the transport time can be minimized by specially recognizing the target lot and treating it as the highest priority lot.

The fourth effect of the present invention is that, in the pre- and post-installation facilities that require the allowable time management, the load request of each port of the rear equipment is processed by the normal processing and the reservation processing (the arrival of the allowable time management target lot from the previous equipment). Waiting) in parallel,
This means that the waiting time for post-installation equipment can be reduced.

The fifth effect of the present invention is that an unstable loss (waiting time) generated by manual intervention can be eliminated, the reliability of a semiconductor manufacturing line is improved, and the efficiency and throughput are particularly improved. It can be improved. The present invention has the remarkable effects as described above, and its practical value is extremely high.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a system configuration according to an embodiment of the present invention.

FIG. 2 is a diagram illustrating an operation sequence according to an embodiment of the present invention.

FIG. 3 is a flowchart illustrating a processing procedure according to an embodiment of the present invention.

FIG. 4 is a flowchart illustrating a processing procedure according to an embodiment of the present invention.

FIG. 5 is a diagram schematically illustrating a configuration of a multi-port facility (sputtering apparatus).

FIG. 6 is a diagram showing an example of a mode setting screen of a port of a facility according to an embodiment of the present invention.

FIG. 7 is a diagram illustrating a configuration of a host computer according to an embodiment of the present invention.

FIG. 8 is a diagram for explaining transfer between bays (between processes).

FIG. 9 is a diagram for explaining intra-bay transfer.

FIG. 10 is a diagram for explaining a conventional system.

[Explanation of symbols]

 10, 100 Host computer 11 Terminal 20 Equipment 21 Processing device 22 Load request / unload request transmission unit 30 Shelf (stocker, work-in-progress shelf) 40 Automatic transport control device 50 Interbay transport vehicle 50A Intrabay transport vehicle 51 Wafer (lot) 52 Cassette 60 Network 101 Load / Unload Request Receiving Unit 102 Receiving / Receiving Report Receiving Unit 103 Equipment / Port Type Holding Table 104 Allowable Controlled Equipment Load Request Holding Table 105 Transport Lot Determination Holding Table 106 Lot Process Flow Holding Table 107 Shelf Storage Lot Holding Table 108 Permitted control target lot holding table 109 Transport instruction unit 110 Control unit

Claims (24)

[Claims] 1. A first facility for processing a lot of semiconductor wafers, and a second facility for processing a lot processed by the first facility next, wherein the lot in the first facility is provided. The time required from the end of the process to the start of the lot processing in the second facility is within a predetermined allowable time. The timing of delivery and transfer of the work-in-progress lot from the shelf accommodating the lot to the first facility is determined based on the availability of the second facility in addition to the availability of the first facility. A transport control system, comprising: 2. A first facility for processing a lot of semiconductor wafers, and a second facility for processing a lot processed by the first facility next, wherein a lot of the lot in the first facility is processed. For a work-in-process lot to be put into a flow requiring management so that the time from the end of processing to the start of processing of the lot in the second facility is within a predetermined allowable time, the work-in-process lot A signal indicating that a lot can be accepted from both the first facility and the second facility for output and transfer of the work-in-progress lot by the automatic transport means from the shelf accommodating the first facility to the first facility is output together. A transport control system, comprising: means for controlling execution at a timing. 3. A host computer for managing the progress management of a lot of semiconductor wafers in a semiconductor manufacturing line, a first facility for processing a lot of semiconductor wafers, and a processing lot processed by the first facility. A second facility for processing, wherein the time from the end of the processing of the lot in the first facility to the start of the processing of the lot in the second facility is within a predetermined allowable time. For a work-in-process lot to be put into a flow that needs to be performed, the host computer outputs a lot load request from the first equipment to the host computer, and also outputs a lot from the second equipment. When the load request is output to the host computer, the automatic transfer means sends the first
A delivery control of the in-process lot to the first facility. 4. A first facility for processing a lot of semiconductor wafers, a second facility for performing a next process on a lot processed by the first facility, a shelf for storing the lot, and the shelf And automatic transfer means for performing automatic transfer of a lot between the equipment, connected to the equipment, the shelf and the automatic transfer means,
A host computer that manages the process progress of each lot; wherein the first and second facilities each issue a load request to the host computer when a lot can be processed; The transfer control system in which the host computer that receives the request instructs the automatic transfer unit to issue and transfer a work-in-progress lot to the equipment that has issued the load request, wherein the first equipment and the second equipment 2 is a flow that requires the time from the end of the processing of the first equipment to the start of the processing of the second equipment to be within a predetermined allowable time, When the work-in-process lot input to the flow is stored in the shelf, the load request from the first equipment and the load request from the second equipment are both: When output to the host computer, the host computer instructs the shelf and the automatic transport unit to take out the in-process lot from the shelf and transport the same to the first facility. A transport control system characterized by the following. 5. When the first equipment and the second equipment are installed in the same bay, the automatic transfer means returns the lot processed by the first equipment to the shelf. The transfer control system according to any one of claims 1 to 4, wherein the transfer is performed directly from the first facility to the second facility without the need. 6. The facility for pre-processing the second facility, wherein the time from the end of the processing of the first facility to the start of the processing of the second facility is within a predetermined allowable time. Is required, the second facility loads the host computer with respect to the host computer at a predetermined time before the end time of the lot processing in the second facility. The transfer control system according to any one of claims 3 to 5, wherein the request is output. 7. The first facility and the second facility are installed in a first bay and a second bay, respectively, which are different from each other. A work-in-progress lot of the first equipment stored on the first shelf is transported and processed, and at this time, a load request from the first equipment;
When the host computer issues a load request from a second facility that subsequently processes the processing lot processed by the first facility to the host computer, the host computer removes the first lot from the first shelf. And outputting a delivery / transfer instruction of the lot to the first equipment. When the processing lot processed by the first equipment is collected on the first shelf, the processing lot is regarded as a reserved lot and the first shelf is processed. From the second bay to the second shelf of the second bay by the inter-bay transport means, and the host computer sets the reserved lot stored in the second shelf as the highest priority lot to the second facility 8. The transport control system according to claim 3, wherein an instruction is given to carry out the transport to a warehouse. 8. The apparatus according to claim 3, further comprising means for setting and managing a dispatching rule for each port with respect to the facility having a plurality of ports for receiving lots. 3. The transfer control system according to 1. 9. The host computer processes, for each port of the equipment, a lot load request for reservation processing for waiting for arrival of a lot to be managed for an allowable time and a processing for a normal lot not to be managed for an allowable time. 9. The transport control system according to claim 8, further comprising means for variably setting a dispatch rule for each of the devices. 10. The equipment is provided with a plurality of ports for receiving lots, and a load request is issued to the host computer for each of the ports. A dedicated port of a lot for which the management of the permissible time is performed in the transport of the dedicated port of a normal lot for which the management of the permissible time is not performed, and a priority port for storing the lot in which the permissible time management is performed with priority, Means for assigning and managing the port to the selected port type when one of the port types with a priority port that preferentially enters a normal lot for which the allowable time management is not performed is selected. The transport control system according to any one of claims 3 to 9, wherein the transport control system is provided. 11. The second equipment, wherein the first equipment and the second equipment which subsequently processes the lot processed by the first equipment are stored with priority given to the lot for which the allowable time management is performed. If there is a work-in-progress lot of the first facility that manages the allowable time in response to the load request of the priority port, the work-in-progress lot is preferentially received in the first facility. And the first to perform allowable time management
If there is no work-in-process lot of the second facility and there is a normal lot in which the management of the allowable time is not performed as the work-in-process lot of the second facility, this normal lot is stored in the priority port of the second facility. The transfer control system according to claim 10, wherein: 12. A priority port which receives a priority of a normal lot for which priority time management is not performed includes a normal in-process lot for which priority time management is not performed in response to a load request for the priority port. In the case where the in-process lot is preferentially received, if the normal in-process lot does not exist, and a lot for which the management of the allowable time is performed exists as a in-process lot, the lot is received in the priority port, The transport control system according to claim 10, wherein: 13. The system according to claim 13, wherein the host computer registers and manages a lot for which an allowable time is managed in the transport between the first facility and the second facility in a database. At a point in time that is a predetermined time before the processing end time, the host computer outputs a load request to the host computer during the lot processing. Without managing the load request as a load request due to the actual processing end in the second facility,
13. The apparatus according to claim 3, further comprising: a unit that manages the load request from the first facility and a signal for instructing the in-process transfer of the in-process lot of the first facility. Transfer control system. 14. A process in which the host computer registers and manages, in a database, lots whose allowable time is managed in the transport between the first equipment and the second equipment, and the processing performed by the first equipment. When the lot is a lot for which the management of a short permissible time is performed, the host computer does not return the processing lot to the shelf, and the automatic transfer means causes the automatic transfer means to transfer the lot from the first facility. The transfer control system according to claim 3, wherein the transfer is performed directly to the second facility. 15. A flow comprising: a first facility for processing a lot of semiconductor wafers; and a second facility for processing a lot processed by the first facility next, wherein the first facility comprises: The time from the end of the processing of the lot in the second equipment to the start of the processing of the lot in the second equipment is within a predetermined allowable time. The timing of the outgoing transfer of the in-process lot from the shelf accommodating the in-process lot to the first facility by the availability of the second facility in addition to the availability of the first facility; A transport control method characterized in that the transport control method is determined based on: 16. A flow comprising: a first facility for processing a lot of semiconductor wafers; and a second facility for processing a lot processed by the first facility next, wherein the first facility is used. The time from the end of the processing of the lot in the second equipment to the start of the processing of the lot in the second equipment is within a predetermined allowable time. A signal indicating that a lot can be accepted from both the first facility and the second facility for outgoing transport of the in-process lot from the shelf accommodating the in-process lot to the first facility by the automatic transport means. A transport control method, wherein the control is performed so as to be executed at a timing when both are output. 17. A method for controlling the transfer of a lot of semiconductor wafers in a semiconductor manufacturing line, comprising the steps of: starting from the end of processing of the lot in the first facility for processing the lot of semiconductor wafers; A work-in-process lot to be put into a flow that requires the time until the start of processing of the lot in the second facility to be processed next to be within a predetermined allowable time is stored on a shelf. When a lot loading request has been output from the first facility to the host computer,
Also, when a lot load request is also output from the second facility to the host computer, the host computer instructs the automatic transfer control means from the shelf accommodating the in-process lot to the second computer. A transfer control method, wherein an instruction is made for outgoing transfer of the in-process lot to the first facility. 18. A method for controlling the transfer of a lot of semiconductor wafers in a semiconductor manufacturing line, comprising the steps of: starting from a first facility installed in a first bay and processing the lot of semiconductor wafers; A work-in-process lot that is put into a flow that requires the time until the start of processing of the second equipment that is installed and subsequently processed by the first equipment to be processed within the second equipment is within a predetermined allowable time, A request to load a lot from the first equipment and a request to load a lot from the second equipment are issued to the host computer when the goods are stored in the first shelf of the first bay. In the case, the host computer
Outputting an instruction to carry out the in-process lot from the first shelf of the first bay to the first facility; and a process lot processed by the first facility is collected on the first shelf. Then, the host computer gives an instruction to transfer the processing lot as a reserved lot preferentially from the first shelf to the second shelf between bays.
A transfer control method, wherein an instruction is given to give priority to the reserved lot conveyed between bays to the second shelf to be transported to a second facility. 19. The second facility outputs a load request to the host computer at a point in time that is a predetermined time before a lot processing end time in the second facility. The transport control method according to any one of claims 15 to 18, wherein: 20. A lot load request is variably set for each port of the equipment, for a reservation process for waiting for arrival of a lot to be managed for an allowable time and for a normal lot not to be managed for an allowable time. 16. The method according to claim 15, wherein
19. The transfer control method according to any one of claims 18 to 18. 21. A first method for processing a lot of semiconductor wafers.
Equipment, a second equipment for performing the following processing on the processing lot of the first equipment, a shelf for receiving and storing a work-in-process lot of the first equipment, and between the bays and in the bays An automatic transfer unit that performs automatic transfer of the lot, and a host computer that controls the process progress of each lot and instructs the automatic transfer unit to carry out the delivery of the lot. And a second facility, wherein the host computer in the semiconductor manufacturing line that outputs a load request to the host computer when a lot can be processed, wherein the first facility and the second facility Is a flow that requires the time from the end of the processing of the first facility to the start of the processing of the second facility to be within a predetermined allowable time. When the work-in-process lot is stored in the shelf, when the load request from the first facility and the load request from the second facility are both received, the shelf is determined based on these load requests. A program for causing the host computer to execute a process of outputting an outgoing transfer instruction signal for instructing the automatic transfer means to output the in-process lot from the shelf and transfer the processed lot to the first facility. The recording medium on which it was recorded. 22. The recording medium according to claim 21, wherein said facility comprises a plurality of ports for receiving lots, and issues a load request to said host computer for each of said ports; For each port, a dedicated port of a lot for which the management of the allowable time is performed in the transfer between the facilities, a dedicated port of a normal lot for which the management of the allowable time is not performed, and a lot for which the management of the allowable time is performed. When one of the port types of the priority port for receiving in priority and the priority port for receiving the normal lot that does not perform the allowable time management is selected and input from the input means, the port type is changed to the equipment. A recording medium on which a program for causing the host computer to execute a process of registering in the storage means for each port is recorded. 23. A first method for processing a lot of semiconductor wafers.
Equipment, a second equipment for performing the following processing on the processing lot of the first equipment, a shelf for storing the lot, and an automatic transfer means for automatically transferring the lot between and within the bay And a host computer that manages the progress of each lot and instructs the automatic transfer means to carry out the transfer of the lot, and manages the semiconductor manufacturing line. Means for receiving a load request output from each of the facilities to the host computer; and a flow comprising the first facility and the second facility, wherein the processing of the first facility is performed. The flow from the end to the start of the processing of the second facility is required to be within a predetermined allowable time, and the work lot input to the flow is When received at the time of receiving the load request from the first equipment and the load request from the second equipment together, based on these load requests, the shelf and the automatic transport means hand,
Means for outputting an outgoing transfer instruction signal for instructing that the in-process lot is released from the shelf and transported to the first facility. 24. A facility connected to a host computer for processing a lot of semiconductor wafers conveyed, wherein a pre-facility for performing a process prior to said facility is a process from completion of said pre-facility to start of processing of said facility. The equipment is a pre-equipment whose time is required to be within a predetermined allowable time, and the equipment is requested to load a lot at a time that is a predetermined time before the end time of the lot processing in the equipment. For outputting to the host computer.