CN110352470B - Substrate processing system, substrate processing apparatus, and substrate processing method - Google Patents

Substrate processing system, substrate processing apparatus, and substrate processing method Download PDF

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CN110352470B
CN110352470B CN201780087607.XA CN201780087607A CN110352470B CN 110352470 B CN110352470 B CN 110352470B CN 201780087607 A CN201780087607 A CN 201780087607A CN 110352470 B CN110352470 B CN 110352470B
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lot
substrate processing
schedule
processing apparatus
temporary
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CN110352470A (en
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柴田英树
木村隆一
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Screen Holdings Co Ltd
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Screen Holdings Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Systems or methods specially adapted for specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30—Computing systems specially adapted for manufacturing

Abstract

The invention aims to make the scheduling of a non-arriving batch in a mode of not conflicting with the scheduling of other batches made later. In order to achieve this object, a scheduling unit creates a temporary schedule as a schedule for a non-arriving lot based on a schedule for a arriving lot and a recipe for a non-arriving lot, and transmits the temporary schedule to a host computer, the host computer determines whether or not to transfer the non-arriving lot to a substrate processing apparatus based on the temporary schedule, and when it is determined to transfer the non-arriving lot to the substrate processing apparatus, the host computer provides a signal indicating to transfer the non-arriving lot to the substrate processing apparatus to the scheduling unit, and when the scheduling unit receives the signal, the scheduling unit executes a reservation process of reserving the temporary schedule for the non-arriving lot as a schedule for another lot in the scheduling unit before the non-arriving lot arrives at the substrate processing apparatus.

Description

Substrate processing system, substrate processing apparatus, and substrate processing method
Technical Field
The present invention relates to a substrate processing technique for processing a semiconductor wafer, a glass substrate for a liquid crystal display device, a glass substrate for plasma display (plasma display), a substrate for an optical disk, a substrate for a magnetic disk, a substrate for an optical disk, a glass substrate for a photo mask (photo mask), a substrate for a solar cell, or the like (hereinafter, simply referred to as "substrate").
Background
Patent document 1 discloses a substrate processing system that processes a substrate accommodated in a FOUP, the substrate processing system including: a plurality of substrate processing apparatuses; a host computer that gives an instruction to transfer a FOUP to be processed; a pre-apparatus buffer (buffer) disposed upstream of the plurality of substrate processing apparatuses; and a carrying system for carrying the FOUP. The pre-apparatus buffer causes a simulation (simulation) of processing to be performed by the plurality of substrate processing apparatuses with respect to the FOUP received from the transport system in accordance with an instruction from the host computer, even if the plurality of substrate processing apparatuses create a schedule (schedule) of processing of the FOUP based on a recipe (recipe). The pre-apparatus buffer selects an optimum apparatus indicating which substrate processing apparatus performs the optimum process or an optimum sequence apparatus indicating which substrate processing apparatus performs the optimum process in which sequence a plurality of FOUPs are arranged based on the simulation result. The pre-device buffer instructs the selected best device or best sequence device for processing of the FOUP within the pre-device buffer transported by the transport system.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open publication No. 2011-077136
Disclosure of Invention
However, the substrate processing system of patent document 1 has the following problems: if another FOUP is received before the FOUP is transferred to the best device or the like by the pre-device buffer, the schedule of the process requested by the other FOUP conflicts with the schedule of the process requested previously (buffering).
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a technique for creating a schedule for executing substrate processing of a non-arrival lot (lot) that does not arrive at a substrate processing apparatus so as not to conflict with a schedule of another lot created later.
Means for solving the problems
In order to solve the problem, a substrate processing system according to claim 1 includes: a substrate processing apparatus including a plurality of processing units for processing substrates, and a scheduling unit for creating a schedule for performing a batch of substrate processing using the plurality of processing units; and a host computer that transmits a recipe of a lot to a scheduling unit of the substrate processing apparatus, wherein the host computer transmits the recipe of a non-arriving lot that has not arrived at the substrate processing apparatus to the scheduling unit, wherein the scheduling unit creates a temporary schedule in the substrate processing apparatus of the non-arriving lot and transmits the temporary schedule to the host computer, wherein the host computer determines whether or not to transfer the non-arriving lot to the substrate processing apparatus based on the temporary schedule transmitted from the scheduling unit, wherein when it is determined to transfer the non-arriving lot to the substrate processing apparatus, the host computer provides a signal indicating to transfer the non-arriving lot to the substrate processing apparatus to the scheduling unit, and wherein when the scheduling unit receives the signal from the host computer, the scheduling unit performs a reservation process of scheduling the temporary schedule of the non-arriving lot in the scheduling unit as exclusive with other lots before the non-arriving at the substrate processing apparatus.
A substrate processing system according to claim 2 is the substrate processing system according to claim 1, wherein the scheduling unit executes a reservation process of reserving the provisional schedule for the unreachable lot as a schedule that cannot be changed when the schedule for the other lot is created.
A substrate processing system according to claim 3 is the substrate processing system according to claim 1, wherein the scheduling unit executes a reservation process of reserving the provisional schedule of the unreachable lot as a schedule that can be changed when the schedule of the other lot is created.
A substrate processing system according to claim 4 is the substrate processing system according to any one of claims 1 to 3, wherein the scheduling unit of the substrate processing apparatus further creates a schedule of the other lot using the schedule of the unreached lot on which the reserved process is performed.
A substrate processing system according to claim 5 is the substrate processing system according to any one of claims 1 to 4, wherein the host computer further provides a scheduled arrival time of the non-arrival lot to the scheduling unit of the substrate processing apparatus, and the scheduling unit creates a temporary schedule in the substrate processing apparatus of the non-arrival lot based on the schedule of the arrival lot, the recipe of the non-arrival lot, and the scheduled arrival time, and sends the temporary schedule to the host computer.
The substrate processing system according to claim 6 is the substrate processing system according to claim 5, wherein the host computer sets the scheduled arrival time of the unreached lot based on a processing status of the substrate processing apparatus.
The substrate processing system according to claim 7 is the substrate processing system according to claim 5 or 6, wherein the non-arrival lot is a lot including substrates processed by a substrate processing apparatus at a preceding stage, and the host computer sets the scheduled arrival time of the non-arrival lot based on a time required for lot transfer from the substrate processing apparatus at the preceding stage to the substrate processing apparatus.
A substrate processing system according to claim 8 is the substrate processing system according to any one of claims 1 to 7, wherein the scheduling unit is configured to create a schedule of the priority-added other lots again so that the priority-added other lots and the non-arriving lots are processed in an order corresponding to the processing priorities of the non-arriving lots based on recipes of the non-arriving lot for which processing priorities are set in advance and the priority-added other lots to which processing priorities have been assigned in advance but processing has not yet started, and to create a temporary schedule of the scheduling in the substrate processing apparatus for the non-arriving lot.
A substrate processing system according to claim 9 is the substrate processing system according to any one of claims 1 to 8, wherein the scheduling unit is capable of creating the schedule of the scheduled other lot again so that the processing of the non-arriving lot is performed earlier than the scheduled other lot which has not yet started processing, and creating the schedule in the substrate processing apparatus of the non-arriving lot as a temporary schedule.
The substrate processing system of claim 10 is the substrate processing system of claim 9, wherein the other lots on which the schedule has been created include the arriving non-processing lots that have not yet begun processing.
A substrate processing system according to claim 11 is the substrate processing system according to any one of claims 1 to 10, wherein the substrate processing system includes a plurality of the substrate processing apparatuses, the host computer sends the recipe for the unreached lot to the scheduling units of the plurality of substrate processing apparatuses, the scheduling units of the plurality of substrate processing apparatuses create the temporary schedule for the unreached lot based on the schedule for the arrived lot and the recipe for the unreached lot and send the temporary schedule to the host computer, and the host computer selects one of the plurality of substrate processing apparatuses as the substrate processing apparatus for transporting the unreached lot based on the temporary schedule for the unreached lot received from each of the plurality of substrate processing apparatuses.
The substrate processing apparatus according to claim 12 includes: the method comprises the following steps: a plurality of processing units for processing a substrate, and a scheduling unit for creating a schedule for executing a batch of substrate processing using the plurality of processing units, the scheduling unit including: a lot information receiving unit that receives a recipe of a non-arrival lot that does not arrive at the substrate processing apparatus from an external host computer; a temporary schedule creation unit that creates a temporary schedule for the schedule in the substrate processing apparatus for the non-reached lot based on a schedule set in advance for a lot that has reached the substrate processing apparatus and the recipe for the non-reached lot; a temporary schedule supply unit that supplies the temporary schedule of the unreached lot acquired by the temporary schedule creation unit to the host computer; a signal receiving unit configured to receive a signal indicating that the unreached lot is transferred to the substrate processing apparatus from the host computer; and a reservation processing unit that executes reservation processing for reserving the schedule of the non-arrival lot as a schedule exclusive to schedules of other lots before the non-arrival lot arrives at the substrate processing apparatus when the signal receiving unit receives the signal.
A substrate processing method according to claim 13 includes a scheduling step of creating a schedule for executing substrate processing of a lot, wherein in the scheduling step, the schedule in the substrate processing apparatus of a non-reached lot is created as a provisional schedule based on a schedule of a lot that has reached the substrate processing apparatus and a recipe of a non-reached lot that has not reached the substrate processing apparatus, and the substrate processing method further includes: a determining step of determining whether to transfer the unreached lot to the substrate processing apparatus based on the temporary schedule, the scheduling step being a step of: when it is determined in the determining step that the non-arrival lot is transported to the substrate processing apparatus, a reservation process is executed in which the temporary schedule of the non-arrival lot is reserved as a schedule exclusive to schedules of other lots before the non-arrival lot arrives at the substrate processing apparatus.
A substrate processing method according to claim 14 is the substrate processing method according to claim 13, wherein the scheduling step is a step of executing reservation processing for reserving the provisional schedule of the unreachable lot as a schedule that cannot be changed when the schedule of the other lot is created.
A substrate processing method according to claim 15 is the substrate processing method according to claim 13, wherein the scheduling step is a step of executing reservation processing for reserving the provisional schedule of the unreachable lot as a schedule that can be changed when the schedule of the other lot is created.
A substrate processing method according to claim 16 is the substrate processing method according to any one of claims 13 to 15, wherein the scheduling step is a step of creating a schedule of the another lot using the schedule of the unreached lot on which the scheduled process is performed.
A substrate processing method according to claim 17 is the substrate processing method according to any one of claims 13 to 15, further including: a time setting step of setting a scheduled arrival time of the non-arrival lot to the substrate processing apparatus, wherein the scheduling step is a step of creating a temporary schedule on the basis of the schedule of the already-arrived lot, the recipe of the non-arrival lot, and the scheduled arrival time in the substrate processing apparatus of the non-arrival lot.
A substrate processing method according to claim 18 is the substrate processing method according to claim 17, wherein the time setting step is a step of setting the scheduled arrival time of the unreachable lot in accordance with a processing status of the substrate processing apparatus.
A substrate processing method according to claim 19 is a substrate processing method according to claim 17 or 18, wherein the non-arrival lot is a lot including substrates processed by a substrate processing apparatus at a preceding stage, and the time setting step is a step of setting the scheduled arrival time of the non-arrival lot based on a time required for lot transfer from the substrate processing apparatus at the preceding stage to the substrate processing apparatus.
A substrate processing method according to claim 20 is the substrate processing method according to any one of claims 13 to 19, wherein the scheduling step includes: the scheduling of the second priority lot is created again based on the recipes of the second priority lot having the processing priority set in advance and the second priority lot having the scheduling created in advance and having the processing priority given in advance but not yet started to be processed, so that the second priority lot and the second priority lot are processed in the order corresponding to the processing priority of the second priority lot and the scheduling of the second priority lot in the substrate processing apparatus is created as a temporary scheduling.
A substrate processing method according to claim 21 is the substrate processing method according to any one of claims 13 to 20, wherein the scheduling step includes: the schedule of the scheduled other lot can be created again so that the processing of the non-arriving lot can be performed earlier than the scheduled other lot that has not yet started processing, and the schedule in the substrate processing apparatus of the non-arriving lot can be created as a temporary schedule.
The substrate processing method according to claim 22 is the substrate processing method according to claim 21, wherein the scheduled other lots include the arrived non-processing lot that has not yet started processing.
A substrate processing method according to claim 23 is the substrate processing method according to any one of claims 13 to 22, wherein the scheduling step is provided for each of the plurality of substrate processing apparatuses, and the scheduling step is a step of creating the temporary schedule for the unreached lot based on the schedule for the arrived lot and the recipe for the unreached lot for each of the plurality of substrate processing apparatuses, and the substrate processing method further comprises: a selection step of selecting one of the plurality of substrate processing apparatuses as a substrate processing apparatus that carries the unreached lot based on the temporary schedule of the unreached lot corresponding to each of the plurality of substrate processing apparatuses.
Effects of the invention
According to the invention of claim 1, the host computer determines whether or not the unreached lot is to be transported to the substrate processing apparatus based on the temporary schedule transmitted from the scheduling unit, and when it is determined that the unreached lot is to be transported to the substrate processing apparatus, the host computer supplies a signal indicating that the unreached lot is to be transported to the substrate processing apparatus to the scheduling unit, and when the scheduling unit receives the signal from the host computer, the host computer executes reservation processing for reserving the temporary schedule of the unreached lot as an exclusive schedule with other lots in the scheduling unit before the unreached lot arrives at the substrate processing apparatus. Thus, the schedule for performing substrate processing for a non-arriving lot may be made to not conflict with the schedules of other lots to be manufactured later.
According to the invention of claim 2, the scheduling unit can reserve the temporary schedule of the non-reached lot as a schedule which is exclusive to the schedule of the other lot and which cannot be changed when the schedule of the other lot is created.
According to the invention of claim 3, the scheduling unit can reserve the temporary schedule of the non-reached lot as a schedule which is exclusive to the schedule of the other lot and can be changed when the schedule of the other lot is created.
According to the invention of claim 4, the scheduling unit of the substrate processing apparatus can actually create the schedule of another lot by using the schedule of the unreached lot on which the reservation processing is performed.
According to the invention of claim 5, the scheduling unit may create the schedule in the substrate processing apparatus for the unreachable lot as the temporary schedule based on the schedule for the reachable lot, the recipe for the unreachable lot, and the scheduled arrival time of the unreachable lot provided from the host computer. Therefore, a highly reliable temporary schedule can be made.
According to the invention of claim 6, since the scheduled arrival time of the non-arrival lot is set according to the processing status of the substrate processing apparatus, the provisional schedule with higher reliability can be created.
According to the invention of claim 8, the scheduling unit creates the schedule of the other lot with priority again so that the other lot with priority and the non-arrival lot are processed in the order corresponding to the priority of the respective processes, and creates the schedule in the substrate processing apparatus of the non-arrival lot as the temporary schedule. Thus, a temporary schedule reflecting the priority of processing may be made.
According to the invention of claim 9, the scheduling unit can create the schedule of the scheduled other lot again so that the scheduled other lot is processed earlier than the scheduled other lot that has not yet started processing, and can create the schedule in the substrate processing apparatus of the non-scheduled lot as the temporary schedule. Therefore, even when the order of processing between lots needs to be changed regardless of priority, for example, when processing of another lot for which a schedule is created is delayed due to occurrence of a liquid replacement, a temporary schedule for processing can be created for a non-reached lot earlier than another lot for which a schedule is created.
According to the invention of claim 10, the other lots for which the schedule has been made include non-processing lots that have arrived and have not begun processing. Therefore, the process sequence between batches can be changed with a higher degree of freedom.
According to the invention of claim 11, the substrate processing system includes a plurality of substrate processing apparatuses, and the host computer selects one substrate processing apparatus among the plurality of substrate processing apparatuses as a substrate processing apparatus for transporting the unreachable lot based on the temporary schedule of the unreachable lot received from each of the plurality of substrate processing apparatuses. Therefore, it is possible to select an apparatus most suitable for processing of a non-arriving lot from a plurality of substrate processing apparatuses, thereby increasing throughput (throughput) of the entire substrate processing system.
According to the invention of claim 12, when the signal receiving unit of the substrate processing apparatus receives a signal indicating that the non-arrival lot is transported to the substrate processing apparatus from the host computer, the reservation processing unit executes the reservation processing of reserving the scheduling of the non-arrival lot in the scheduling unit as the exclusive scheduling with the scheduling of the other lot before the non-arrival lot arrives at the substrate processing apparatus. Therefore, the schedule for performing the substrate processing of the unreachable lot is created so as not to conflict with the schedule of the other lot created later.
According to the invention of claim 13, the determining step is a step of determining whether or not to transfer the non-arrival lot to the substrate processing apparatus based on the temporary schedule created in the scheduling step, and in the scheduling step, when it is determined to transfer the non-arrival lot to the substrate processing apparatus, reservation processing is executed in which the temporary schedule of the non-arrival lot is reserved as a schedule exclusive with other lots before the non-arrival lot arrives at the substrate processing apparatus. Therefore, the schedule for performing the substrate processing of the unreachable lot is created so as not to conflict with the schedule of the other lot created later.
Drawings
Fig. 1 is a block diagram showing a configuration example of a substrate processing system according to an embodiment.
Fig. 2 is a schematic plan view showing a configuration example of the substrate processing apparatus of fig. 1.
Fig. 3 is a schematic view showing a process flow in the substrate processing system of fig. 1.
Fig. 4 is a flowchart showing an example of the operation of the host computer of fig. 1.
Fig. 5 is a flowchart illustrating an example of the operation of the substrate processing apparatus of fig. 1.
Fig. 6 is a timing chart showing an example of the temporary schedule creation process.
Fig. 7 is a timing chart showing an example of the temporary schedule creation process.
Detailed Description
Hereinafter, a substrate processing apparatus 100 according to an embodiment will be described with reference to the drawings. The following embodiments are examples embodying the present invention, and are not intended to limit the technical scope of the present invention. For convenience of understanding, the dimensions and the number of the respective portions may be exaggerated or simplified in the drawings referred to below. In the drawings, the same reference numerals are given to the same components and functions, and redundant description will not be given in the following description.
<1 > substrate processing System 300>
Fig. 1 is a block diagram showing an example of the configuration of a substrate processing system 300 according to the embodiment.
In the substrate processing system 300 of the present embodiment, a carrier (carrier) C containing a plurality of substrates 9 is generally transferred between a plurality of substrate processing apparatuses. The substrate processing system 300 includes: host computer (host computer) 3; a main rail R1 for carrying the carrier; a plurality of device bays (bay) 201, 202; warehousing system (stocker) 5. An OHT (over head Transfer) 6 is slidably connected to the trunk rail R1, and the OHT 6 transports the carrier C between the plurality of device bays 201 and 202 along the trunk rail R1. Branch lines R11 and R21 are provided in the device bays 201 and 202. The branch lines R11 and R21 are tracks that are looped inside the device bays 201 and 202, and are connected to the main line rail R1 via the drop lines R12 and R22. The OHT 6 moves to the branch line R11 inside the 1 st device bay 201 through the drop line R12, and delivers the carrier C to and from a plurality of substrate processing apparatuses 100 (described later) provided in the 1 st device bay 201. Similarly, the OHT 6 moves to the branch line R21 inside the 2 nd device bay 202 through the inlet line R22, and delivers the carrier C to and from the plurality of substrate processing apparatuses 100 (described later) provided on the 2 nd device bay 202.
The stocker system 5 is disposed outside the 1 st device bay 201 and the 2 nd device bay 202. The stocker system 5 is a device that stores a plurality of carriers C, and makes delivery of the carriers C with the OHT 6.
The 1 st apparatus rack 201 includes a plurality of substrate processing apparatuses 100 (in the example of fig. 1, 3 substrate processing apparatuses 100 (100A, 100B, and 100C)). On the other hand, the 2 nd apparatus rack 202 includes a plurality of substrate processing apparatuses 100 (in the example of fig. 1, 3 substrate processing apparatuses 100 (100D, 100E, 100F)).
Hereinafter, the stocker system 5 and the OHT 6 are collectively referred to as the handling system 4. The host computer 3, the substrate processing apparatuses 100, and the transfer system 4 are electrically connected to each other, for example.
The substrate processing apparatuses 100 (100A to 100F) have a function of processing the substrate 9. The substrate 9 is transported while being accommodated in the carrier C. Usually, the carrier C houses a plurality of substrates 9. The carrier C may be a FOUP (Front Opening Unified Pod) that accommodates the substrate 9 in a closed space, an SMIF (Standard Mechanical interface) Pod, or an OC (Open Cassette) that exposes the accommodated substrate 9 to the outside air. The carrier C is carried into the substrate processing apparatuses 100A to 100F by the transfer system 4, and is carried out of the substrate processing apparatuses 100A to 100F by the transfer system 4. Here, the substrate processing apparatuses 100A to 100F are apparatuses that perform the same type of substrate processing (e.g., substrate cleaning).
The carrier C or the substrate group accommodated in the carrier C is also referred to as a "lot". The substrate processing apparatus 100 receives lot information including a recipe specifying the processing contents for a lot from the host computer 3. The substrate processing apparatus 100 carries the carrier C conveyed by the conveyance system 4 into the inside thereof, and processes the substrate 9 according to a schedule prepared in advance according to the recipe. The substrate 9 after the processing is accommodated in the carrier C again and carried out.
The host computer 3 includes a Manufacturing Execution System (MES) and a transport Control System (MCS). The host computer 3 controls the carrying operation of the carrier C by the carrying system 4. The host computer 3 controls the substrate processing apparatuses 100 to perform substrate processing on a batch.
The host computer 3 also transmits temporary lot information (also referred to as "non-arrival lot information") K1 of lots (also referred to as "temporary lots" and "non-arrival lots") that are scheduled to be transported to any of the plurality of substrate processing apparatuses 100 (100A to 100F) but are not yet transported to any of the substrate processing apparatuses 100 to the scheduling unit 15 of each of the substrate processing apparatuses 100A to 100F. The temporary batch information K1 includes an ID for specifying a temporary batch, a recipe for specifying the processing contents of the temporary batch, the priority of processing of the temporary batch, and the like (see fig. 3). The host computer 3 may set the scheduled arrival time of the temporary lot according to the processing status of each substrate processing apparatus 100. Therefore, the host computer 3 can give different scheduled arrival times to the substrate processing apparatuses 100.
When the temporary lot information K1 is received from the host computer 3, the scheduling unit 15 of each of the substrate processing apparatuses 100A to 100F creates a temporary schedule for processing the temporary lot based on the temporary lot information K1. The temporary schedule includes, for example, a scheduled end time and a scheduled start time of processing of the temporary lot. The scheduled start time is a time at which the carrier C corresponding to the provisional lot can be placed on the 1 st carrier stage (carrier stage) 111 (see fig. 2) of the substrate processing apparatus 100, or a time at which the 1 st substrate 9 can be carried out from the carrier C on the 2 nd carrier stage 153 (see fig. 2). The scheduled end time is a time when all the substrates belonging to the temporary lot are subjected to the substrate processing by the substrate processing apparatus 100 and are carried out to the carrier C on the 2 nd carrier table 153 to be ended, or a time when the carrier C in which all the substrates 9 belonging to the temporary lot are stored can be removed from the 1 st carrier table 111. Each of the substrate processing apparatuses 100A to 100F transmits the created temporary schedule to the host computer 3.
The host computer 3 selects one substrate processing apparatus 100 of the plurality of substrate processing apparatuses 100 as the substrate processing apparatus 100 that transfers the temporary lot based on the temporary schedule of the temporary lot (non-arrival lot) received from each of the plurality of substrate processing apparatuses 100. Specifically, the host computer 3 selects the substrate processing apparatus 100 having the earliest scheduled start time or scheduled end time of the temporary lot, for example, based on each temporary schedule supplied from each substrate processing apparatus 100. That is, the host computer 3 determines whether or not the unreachable lot is to be transported to the substrate processing apparatus 100 based on the temporary schedule transmitted from the scheduling unit 15, and determines to transport the substrate processing apparatus 100 of the unreachable lot. The host computer 3 supplies a signal (also referred to as a "notice signal" or a "notification signal") indicating that the unreachable lot is transferred to the substrate processing apparatus 100 to the scheduling unit 15 of the substrate processing apparatus 100 determined as the transfer destination of the temporary lot.
The transport system 4 transports the carrier C to each unit in accordance with the instruction from the host computer 3. As described above, the conveyance system 4 includes the stocker system 5 and the OHT 6.
Since the 1 st device bay 201 and the 2 nd device bay 202 have substantially the same configuration, only the 1 st device bay 201 will be described below, and the 2 nd device bay 202 will not be described.
The OHT 6 receives the carrier C from a substrate processing apparatus (not shown) that performs a substrate process (for example, a film formation process, an etching process, an impurity addition process, a CMP (chemical mechanical polishing), or the like) at a previous stage of the substrate process in each substrate processing apparatus 100, and places the carrier C on the stocker system 5 as needed. The stocker system 5 temporarily stores the loaded carriers C. The OHT 6 may directly transfer the carrier C from the substrate processing apparatus in the previous stage to the substrate processing apparatus 100 in the 1 st apparatus bay 201 without being placed in the stocker system 5.
Each substrate processing apparatus 100 takes out a substrate from the carrier C received by the OHT 6, and performs a cleaning process of removing various particles attached to the substrate at a previous stage from the substrate, or the like. The transport distances of the carriers C from the substrate processing apparatus in the previous stage to the substrate processing apparatuses 100 are not the same. Therefore, the carrier transfer time for transferring the carrier C from the previous substrate processing apparatus to each substrate processing apparatus 100 differs among the substrate processing apparatuses 100. The host computer 3 can set the scheduled arrival time of the non-arrival lot to a different value for each substrate processing apparatus 100 based on the length of the carrier transport time. The host computer 3 may set the scheduled arrival time of the non-arrival lot based on the time required for transporting the carrier C from the previous substrate processing apparatus to each substrate processing apparatus 100, that is, the time required for transporting the non-arrival lot of the group of unprocessed substrates stored in the carrier C. The substrate processing apparatus at the previous stage of the substrate processing apparatus 100 may be disposed in the same apparatus bays 201 and 202 as the substrate processing apparatus 100.
The stocker system 5 performs the delivery of the carrier C between the OHT 6. The stocker system 5 temporarily holds the carrier C inside, and adjusts a time difference in which the carrier C can be received between the OHT 6 and the substrate processing apparatus 100.
<2 > substrate processing apparatus 100
The structure of the substrate processing apparatus 100 according to the embodiment will be described with reference to fig. 2. Fig. 2 is a schematic plan view showing a configuration example of the substrate processing apparatus.
The substrate processing apparatus 100 is an apparatus for processing a plurality of substrates 9 such as semiconductor wafers. The surface shape of the substrate 9 is substantially circular. The substrate processing apparatus 100 includes a plurality of substrate processing units (units) 1. The substrate processing apparatus 100 may continuously process the substrates 9 one by one in each substrate processing unit 1, or may process a plurality of substrates 9 in parallel in a plurality of substrate processing units 1.
The substrate processing apparatus 100 includes a plurality of cells (processing blocks) arranged in parallel, and specifically includes: an indexer cell (indexer cell) 110, a processing unit 120, and a control unit 130 that controls the respective operation mechanisms and the like provided in the plurality of cells 110 and the unit 120.
< indexer cell 110>
The indexer unit 110 is a unit for transferring the unprocessed substrate 9 received from outside the apparatus to the processing unit 120 and for carrying out the processed substrate 9 received from the processing unit 120 to outside the apparatus. The indexer cell 110 also has a function of buffering the carrier C. The indexer unit 110 includes: a1 st carrier stage 111 on which a plurality of carriers C carried by the OHT 6 are placed, and an internal buffer 150.
The unprocessed substrates 9 are taken out one by one from the carrier C and processed in the apparatus, and the processed substrates 9 whose processing in the apparatus has been completed are accommodated in the carrier C again. The carrier C containing the processed substrate 9 is carried out to the outside of the apparatus by the OHT 6. In this way, the 1 st carrier stage 111 functions as a substrate accumulating section for accumulating the unprocessed substrates 9 and the processed substrates 9.
The internal buffer 150 is disposed between the 1 st carrier stage 111 and the processing unit 120. The internal buffer 150 includes: a rack section 152 including a plurality of carrier storage chambers 151 for storing carriers C; a 2 nd carrier stage 153 on which a carrier C for delivering the substrate 9 to and from the processing unit 120 is placed; a carrier transfer robot (robot) 154 that transfers the carrier C among the 1 st carrier stage 111, the frame section 152, and the 2 nd carrier stage 153; and a load port 155 for loading and unloading a lid (not shown) of the carrier C placed on the 2 nd carrier stage 153.
The internal buffer 150 can temporarily store the carrier C when the carrier C cannot be carried from the 1 st carrier stage 111 to the 2 nd carrier stage 153 or when the carrier C cannot be carried out from the 1 st carrier stage 111 to the outside of the substrate processing apparatus 100. That is, the internal buffer 150 has a buffer function of the carrier C. In addition, when the unprocessed substrate 9 cannot be carried out from the carrier C to the processing unit 120, the internal buffer 150 may temporarily wait the unprocessed substrate 9 in the carrier C stored in the carrier storage chamber 151. That is, the internal buffer area 150 also has a buffer function of the substrate 9.
The transfer robot IR includes: a plurality of (e.g., 4) hands (hand) capable of holding the substrate 9 in a horizontal posture (a posture in which the main surface of the substrate 9 is horizontal) by supporting the substrate 9 from below; and a plurality of arms (arm) for moving the plurality of hands. The transfer robot IR takes out the unprocessed substrate 9 from the carrier C placed on the 2 nd carrier stage 153, and delivers the taken-out substrate 9 to the transfer robot CR (to be described later) at the substrate delivery position P. The transfer robot IR receives the processed substrate 9 from the transfer robot CR at the substrate transfer position P, and stores the received substrate 9 in the carrier C placed on the 2 nd carrier table 153. The transfer robot IR may also use a plurality of hands to deliver the substrates 9 at the same time.
< processing Unit 120>
The processing unit 120 is a unit for processing the substrate 9. The processing unit 120 includes: a plurality of substrate processing units ("processing sections") 1; and a transfer robot CR that carries in and out the substrate 9 to and from the plurality of substrate processing units 1. The transfer robot CR and the control unit 130 are substrate transfer apparatuses. Here, a plurality of (for example, 3) substrate processing units 1 are stacked in the vertical direction to constitute 1 substrate processing apparatus group 10. A plurality of (4 in the illustrated example) substrate processing apparatuses 10 are provided in a cluster (tassel) shape so as to surround the transfer robot CR. Therefore, the plurality of substrate processing units 1 are disposed around the transfer robot CR. The substrate processing unit 1 performs a predetermined process (for example, a chemical process, a rinsing process, a drying process, or the like) on a substrate while holding the substrate placed on the upper side (upper side in the vertical direction) of a spin chuck (not shown) by the spin chuck so as to be detachable and rotating the spin chuck about a predetermined rotation axis a 1.
The transfer robot CR is a robot that transfers the substrate 9 while cantilever-supporting it. The transfer robot CR takes out the processed substrate 9 from the designated substrate processing unit 1, and delivers the taken-out substrate 9 to the transfer robot IR at the substrate delivery position P. The transfer robot CR receives an unprocessed substrate 9 from the transfer robot IR at the substrate transfer position P, and transfers the received substrate 9 to the predetermined substrate processing unit 1. The transfer robot CR includes a plurality of (e.g., 4) hands and a plurality of arms for moving the plurality of hands, as in the transfer robot IR. The transfer robot CR can transfer the substrate 9 by using a plurality of hands at the same time.
< control section 130>
The control unit 130 controls the operations of the carrier transfer robot 154, the load port 155, the transfer robot IR, the transfer robot CR, and the set of substrate processing units 1. The hardware configuration of the control unit 130 may be the same as that of a general computer. That is, the control unit 130 is configured by, for example, electrically connecting a CPU (central processing unit) 11 that performs various arithmetic processes, a ROM (read only memory) 12 that is a read-only memory for storing a basic program, a RAM (random access memory) 13 that is a read-write memory for storing various information, and a disk 14 in which a program PG, data, and the like are stored in advance to a bus (bus line) 29. The bus line 29 is also electrically connected to a display unit 141 such as a liquid crystal panel, an input unit 142, and an output unit 143. The input unit 142 and the output unit 143 are, for example, a USB interface including a USB control circuit and a USB connector.
The disk 14 stores, in addition to the program PG, temporary batch information K1 and the like transmitted from the host computer 3. Further, the magnetic disk 14 also stores batch information of a batch that has arrived at the substrate processing apparatus 100.
The control unit 130 realizes various functional units for controlling the respective units of the substrate processing apparatus 100 and also realizes the functional units for creating the temporary schedule of the temporary lot by performing the arithmetic processing in the order described in the program PG by the CPU 11 as the main control unit.
Specifically, the CPU 11 also operates as, for example, a scheduling unit 15, and the scheduling unit 15 creates a schedule for executing substrate processing of a lot using the plurality of substrate processing units 1. The scheduling unit 15 also functions as a lot information receiving unit 16, a temporary schedule creating unit 17, a temporary schedule supplying unit 18, a signal receiving unit 19, and a reservation processing unit 20.
The lot information receiving unit 16 receives a recipe of a temporary lot that has not reached the substrate processing apparatus 100 from the external host computer 3 via the input unit 142.
The temporary schedule creating unit 17 creates a temporary schedule for the schedule in the substrate processing apparatus 100 of the temporary lot based on the temporary lot information K1 such as a schedule set in advance for the lot that has arrived at the substrate processing apparatus 100 and a recipe of the temporary lot (non-arrived lot).
The temporary schedule creating unit 17 may create a schedule of the other lot with priority again such that the other lot with priority and the temporary lot are processed in the order corresponding to the priority of each process based on the recipe of each of the temporary lot with priority for which the process is set in advance in the temporary lot information K1 and the other lot with priority to which the schedule is created in advance, to which the process is given in advance and to which the process has not yet started. At this time, the temporary schedule creating unit 17 creates a temporary schedule from the schedule in the substrate processing apparatus 100 for the temporary lot.
For example, in the case where the liquid needs to be replaced in the substrate processing unit 1 that processes another scheduled batch for which processing has not yet started, the temporary schedule creating unit 17 can create the schedule of the scheduled other batch again so that the processing of the temporary batch proceeds earlier than the scheduled other batch for which processing has not yet started, regardless of the priority, and create the schedule in the substrate processing apparatus 100 of the temporary batch as the temporary schedule. In addition, other lots for which schedules have been made include non-processing lots that have arrived and have not begun processing.
The temporary schedule supplying unit 18 supplies the temporary schedule of the temporary lot acquired by the temporary schedule creating unit 17 to the host computer 3 via the output unit 143. The signal receiving unit 19 receives a signal indicating that the non-arrival lot is transferred to the substrate processing apparatus 100 from the host computer 3. When the signal receiving unit 19 receives the signal, the reservation processing unit 20 executes reservation processing for reserving the schedule of the temporary lot as an exclusive schedule with the schedule of another lot in the scheduling unit 15 before the temporary lot reaches the substrate processing apparatus 100. The reservation processing unit 20 may execute reservation processing for reserving the temporary schedule of the non-arrived lot as a schedule that cannot be changed when the schedule of the other lot is created, and may execute reservation processing for reserving the temporary schedule of the non-arrived lot as a schedule that can be changed when the schedule of the other lot is created. The scheduling unit 15 may create a schedule of another lot using the schedule of the unreached lot subjected to the reservation processing.
The exclusive schedule is a schedule that does not include any other schedule that defines the substrate processing defined by the schedule and the substrate processing performed at the same timing in the same processing unit 1. In other words, an exclusive schedule is exclusive to the same processing unit and at the same timing.
In addition, a part or all of the functional units implemented in the control unit 130 may be implemented in hardware by a dedicated logic circuit or the like.
< operation of the substrate processing System 300>
The operation of the substrate processing system 300 according to the embodiment will be described with reference to fig. 3 to 4. Fig. 3 is a schematic diagram illustrating a process flow in a substrate processing system 300. Fig. 4 is a flowchart showing an example of the operation of the host computer. Fig. 5 is a flowchart illustrating an example of the operation of the substrate processing apparatus 100.
The host computer 3 reads lot-specific information set for each lot and information transmitted from the preceding substrate processing apparatus, and thereby acquires temporary lot information K1 relating to the temporary lot. The temporary batch information K1 may be acquired by input from an operator or by reading from an external storage device (step S10 in fig. 4). The host computer 3 supplies the acquired temporary lot information K1 to each of the substrate processing apparatuses 100 (100A to 100F) (step S20 in fig. 3 and 4).
The lot information receiving unit 16 of the scheduling unit 15 of each substrate processing apparatus 100 receives the temporary lot information K1 supplied from the host computer 3 via the input unit 142 (step S110 in fig. 3 and 5). The temporary schedule creating unit 17 creates a temporary schedule based on the temporary lot information K1 (step S120 in fig. 3 and 5), and the temporary schedule supplying unit 18 supplies the created temporary schedule to the host computer 3 via the output unit 143 (step S130 in fig. 3 and 5). As described above, the temporary lot information K1 includes the arrival scheduled time at which the temporary lot arrives at each substrate processing apparatus 100. The temporary schedule supply unit 18 creates a substrate processing schedule for the temporary lot in the substrate processing apparatus 100, starting from the scheduled arrival time of the temporary lot. Therefore, even when a long time is required for carrier transfer from the previous substrate processing apparatus to each substrate processing apparatus 100 or when there is a variation in carrier transfer time from the previous substrate processing apparatus to each substrate processing apparatus 100, the temporary schedule supplying unit 18 can accurately create the temporary schedule of the temporary lot.
When receiving the temporary schedule from each of the substrate processing apparatuses 100 (step S30 in fig. 3 and 4), the host computer 3 selects (determines) a substrate processing apparatus 100 for transporting a temporary lot from among the substrate processing apparatuses 100 based on each temporary schedule (step S40 in fig. 3 and 4). The host computer 3 transmits a signal (a "notice signal" or a "notification signal") indicating that the temporary lot is transferred to the scheduling unit 15 of the selected substrate processing apparatus 100 (the substrate processing apparatus 100A in the example of fig. 3) and transmits a release signal indicating that the reservation of the temporary schedule should be released to the unselected substrate processing apparatuses 100 (100B and 100C) (step S50 of fig. 3 and 4). In addition, the reservation signal and the release signal of the reservation of the temporary schedule are added with the ID of the temporary batch. Therefore, even in a state where a plurality of temporary lots exist, each substrate processing apparatus 100 can accurately perform reservation processing and release processing.
The signal receiving unit 19 of the selected substrate processing apparatus 100 (100A) receives the notice signal for notifying the conveyance of the temporary lot (step S140 in fig. 3 and 5), and the reservation processing unit 20 executes the reservation processing for reserving the schedule of the temporary lot as the exclusive schedule with the schedule of the other lot in the scheduling unit 15 before the temporary lot reaches the substrate processing apparatus 100 (step S150 in fig. 3 and 5). The substrate processing apparatuses 100 (100B, 100C) that have received the release signal release the reservation of the temporary schedule.
After executing the processing of step S50 in fig. 4, the host computer 3 instructs the transfer system 4 to transfer the temporary lot to the substrate processing apparatus 100 (100A) selected (determined) as the transfer destination of the temporary lot (step S60 in fig. 3 and 4). The instructed transfer system 4 transfers the temporary lot to the selected substrate processing apparatus 100 (100A), and the substrate processing apparatus 100 (100A) performs substrate processing based on the recipe on the arrived lot transferred by the transfer system 4 (step S160 in fig. 3 and 5).
< manufacturing Process of temporary scheduling >
Referring to fig. 6 and 7, a process of manufacturing the temporary schedule by the substrate processing apparatus 100 will be described. Fig. 6 and 7 are timing charts showing an example of the temporary schedule creation process. Fig. 6 shows three timing charts (schedules) 90A to 90C showing an example of a process of creating a temporary schedule from the status of each substrate process in 3 substrate processing apparatuses (also simply referred to as "apparatuses") 100A to 100C. Each rectangle in fig. 6 represents a timing chart of processing for each processing lot, each reserved lot, or each provisional lot. Fig. 7 shows three timing charts (schedules) 91A to 91C showing a process of creating a temporary schedule in a temporary schedule corresponding to three priorities "low", "medium", and "high" of processing. The priority of processing is lowered in the order of "high", "medium", and "low".
The processing lot in fig. 6 and 7 is a lot that has already reached the substrate processing apparatus 100 (100A to 100C) and has started substrate processing. The reserved lot is a lot in which the reservation processing unit 20 reserves substrate processing in the scheduling unit by using the temporary schedule of the temporary lot as an exclusive schedule with the schedule of another lot in a state where the temporary lot does not reach the substrate processing apparatus 100.
In the timing chart 90A, substrate processing is performed for two processing lots, and there is a reserved lot reserved with the temporary schedule as an exclusive schedule. The temporary schedule creation unit 17 of the substrate processing apparatus 100A creates a temporary schedule, which is a process schedule of the temporary lot, so that the process is not performed in the same substrate processing unit 1 and at the same time as the reserved lot. The temporary schedule includes a scheduled start time t11 and a scheduled end time t12 of the substrate processing. The temporary lot is transferred from the substrate processing apparatus in the previous stage to the substrate processing apparatus 100A by the transfer system 4 and is placed on the 1 st carrier stage 111. After that, the temporary batch is stored in the carrier storage chamber 151 of the rack section 152 (scheduled arrival time t 10). To catch up with the scheduled start time t11, the temporary lot is transported to the 2 nd carrier stage 153 by the carrier transporting robot 154.
In the timing chart 90B, a temporary schedule of the temporary lot is set for the substrate processing apparatus 100B. In the timing chart 90B, after the processing of one processing batch is completed, the liquid exchange in the substrate processing apparatus 100B is scheduled. Therefore, the provisional schedule of the substrate processing apparatus 100B sets the scheduled start time t21 so that the processing of the provisional batch is started after the liquid exchange is completed. In the provisional schedule, a scheduled end time t22 of the substrate processing of the provisional lot is also set. Here, the substrate processing apparatus 100A is disposed at a position closer to the substrate processing apparatus at the previous stage than the substrate processing apparatus 100B. Therefore, the scheduled time (scheduled arrival time t 10) at which the temporary lot arrives at the substrate processing apparatus 100A is earlier than the scheduled time (scheduled arrival time t 20) at which the temporary lot arrives at the substrate processing apparatus 100B.
In the timing chart 90C, the substrate processing apparatus 100C is used to create a temporary schedule of temporary lots in a state where the lots are being processed in four processes. The temporary schedule is set so that the processing of the temporary lot is not performed in the same substrate processing unit 1 and at the same timing as any one of the four processing lots. The provisional schedule is set with a scheduled start time t31 and a scheduled end time t32 of the substrate processing for the provisional lot. Here, the substrate processing apparatus 100A is disposed at a position closer to the substrate processing apparatus in the previous stage than the substrate processing apparatus 100B and the substrate processing apparatus 100C. Therefore, the scheduled time (scheduled arrival time t 10) at which the temporary lot arrives at the substrate processing apparatus 100A is earlier than the scheduled times (scheduled arrival times t20, t 30) at which the temporary lots arrive at the substrate processing apparatuses 100B, 100C.
In the timing charts 90A to 90C, the provisional schedule of the substrate processing apparatus 100A is started first. Therefore, the host computer 3 selects, for example, the substrate processing apparatus 100A as the substrate processing apparatus 100 to which the temporary lot is transferred, based on the temporary schedule supplied from the substrate processing apparatuses 100A to 100C.
In the timing charts 90A to 90C, the provisional scheduling of the substrate processing apparatus 100A is ended at the earliest. Therefore, the host computer 3 selects the substrate processing apparatus 100A as the substrate processing apparatus 100 to which the temporary lot is transferred, for example, based on the temporary schedule supplied from the substrate processing apparatuses 100A to 100C.
Fig. 7 is a timing chart for explaining how to perform temporary scheduling when temporary lots with different priorities are assigned to the substrate processing apparatuses 100 (100A, 100B, 100C) in different scheduling states. The timing charts 91A to 91C of fig. 7 show the temporary schedule of the temporary lot produced in a state where the processing of the two out-of-process lots is performed and two reserved lots are present.
In the timing chart 91A, a temporary schedule of a temporary lot is set for the substrate processing apparatus 100A. In the timing chart 91A, the priority of processing of one reserved lot is "medium", the priority of processing of another reserved lot is "low", and the priority of the temporary lot is also "low". Thus, the temporal scheduling is made to start after two reserved batches. Therefore, the scheduled start time of the substrate processing of the provisional lot is set to t41, and the scheduled end time is set to t42.
In the timing chart 91B, a temporary schedule of a temporary lot is set for the substrate processing apparatus 100B. In the timing chart 91B, the priority of processing of one reserved lot is "medium", the priority of processing of another reserved lot is "low", and the priority of the temporary lot is "medium". Also, the temporary schedule is set to process between two reserved lots. Therefore, the scheduled start time of the substrate processing of the provisional lot is set to t51, and the scheduled end time is set to t52.
In the timing chart 91C, the priority of processing of one reserved lot is "medium", the priority of processing of another reserved lot is "low", and the priority of temporary lot is "high". Therefore, the temporary schedule is set to perform substrate processing of the temporary lot before the two reserved lots. Therefore, the scheduled start time of the substrate processing of the provisional lot is set to t61, and the scheduled end time is set to t62.
In the timing charts 91A to 91C, the provisional schedule of the substrate processing apparatus 100C is started first. Therefore, the host computer 3 selects, for example, the substrate processing apparatus 100C as the substrate processing apparatus 100 to which the temporary lot is transferred, based on the temporary schedule supplied from the substrate processing apparatuses 100A to 100C.
Alternatively, the substrate processing apparatus 100 with the earliest scheduled end time of the provisional lot may be selected. In the example of fig. 7, the scheduled end time t62 of the temporary lot in the substrate processing apparatus 100C is earlier than the scheduled end times t42 and t52 of the temporary lots in the other substrate processing apparatuses 100A and 100B. Therefore, the host computer 3 selects the substrate processing apparatus 100C as the substrate processing apparatus 100 to which the temporary lot is transferred, for example, based on the temporary schedule supplied from the substrate processing apparatuses 100A to 100C.
Alternatively, the transfer destination of the temporary lot may be selected based on the length of the standby time in the substrate processing apparatus 100. For example, in the timing charts 91A to 91C, the standby time (current scheduled time t60 to t 61) in the substrate processing apparatus 100C is shorter than the standby time in the other substrate processing apparatuses 100A and 100B. Therefore, the host computer 3 selects the substrate processing apparatus 100C as the substrate processing apparatus 100 to which the temporary lot is transferred, for example, based on the temporary schedule supplied from the substrate processing apparatuses 100A to 100C.
According to the substrate processing system of the present embodiment configured as described above, the host computer 3 determines whether or not to transfer the temporary lot ("non-arrival lot") to the substrate processing apparatus 100 based on the temporary schedule transmitted from the scheduling unit 15, and when it is determined to transfer the temporary lot to the substrate processing apparatus 100, the host computer provides a signal indicating to transfer the temporary lot to the substrate processing apparatus 100 to the scheduling unit 15, and when the scheduling unit 15 receives the signal from the host computer 3, the scheduling unit executes the reservation processing of reserving the temporary schedule of the temporary lot as the schedule exclusive to the schedules of other lots in the scheduling unit 15 before the temporary lot reaches the substrate processing apparatus 100. Therefore, the schedule for performing the substrate processing of the provisional lot can be made so as not to conflict with the schedule of another lot to be manufactured later.
In addition, according to the substrate processing system of the present embodiment, the scheduling unit 15 can reserve the temporary schedule of the temporary lot as a schedule which is exclusive to the schedule of the other lot and which cannot be changed when the schedule of the other lot is created.
In addition, according to the substrate processing system of the present embodiment, the scheduling unit 15 can reserve the temporary schedule of the temporary lot as a schedule which is exclusive to the schedule of the other lot and can be changed when the schedule of the other lot is created.
In addition, according to the substrate processing system of the present embodiment, the scheduling unit 15 of the substrate processing apparatus 100 can actually create the schedule of the other lot by using the schedule of the temporary lot on which the reservation processing is performed.
In the substrate processing system according to the present embodiment, the scheduling unit 15 can create the schedule in the substrate processing apparatus 100 for the provisional lot as the provisional schedule based on the schedule of the already arrived lot, the recipe of the provisional lot, and the scheduled arrival time of the provisional lot provided by the host computer 3. Therefore, a highly reliable temporary schedule can be made.
In addition, according to the substrate processing system of the present embodiment, since the scheduled arrival time of the temporary lot is set according to the processing status of the substrate processing apparatus 100, it is possible to create a temporary schedule with higher reliability.
In the substrate processing system according to the present embodiment, the scheduling unit 15 creates a schedule of the other lot with priority again so that the other lot with priority and the provisional lot are processed in the order corresponding to the priority of the respective processes, and creates the schedule in the substrate processing apparatus 100 of the provisional lot as the provisional schedule. Therefore, a temporary schedule reflecting the priority of processing can be created.
In addition, according to the substrate processing system of the present embodiment, the scheduling unit 15 can create the schedule of the scheduled other lot again so that the processing of the temporary lot is performed earlier than the scheduled other lot for which the processing has not been started, and can create the schedule in the substrate processing apparatus 100 of the temporary lot into the temporary schedule.
In addition, according to the substrate processing system of the present embodiment, other lots on which the schedule has been created include non-processing lots that have arrived and have not started processing. Therefore, the process sequence between batches can be changed with a higher degree of freedom.
In addition, the substrate processing system according to the present embodiment includes a plurality of substrate processing apparatuses 100, and the host computer 3 selects one substrate processing apparatus 100 of the plurality of substrate processing apparatuses 100 as the substrate processing apparatus 100 that transports the temporary lot based on the temporary schedule of the temporary lot received from each of the plurality of substrate processing apparatuses 100. Therefore, an apparatus most suitable for the processing of the temporary lot can be selected from the plurality of substrate processing apparatuses 100, and thus the throughput (throughput) of the entire substrate processing system is increased.
In the substrate processing apparatus of the present embodiment configured as described above, when the signal receiving unit 19 receives a signal indicating that a temporary lot is to be transferred to the substrate processing apparatus from the host computer 3, the reservation processing unit 20 executes reservation processing for reserving the schedule of the temporary lot as an exclusive schedule with respect to the schedule of another lot in the scheduling unit 15 before the temporary lot reaches the substrate processing apparatus. Thus, the schedule for performing substrate processing for the temporary lot may be made so as not to conflict with the schedule for other lots to be manufactured later.
The present invention has been described in detail, but the description is illustrative in all aspects and is not restrictive. Therefore, the present invention can be modified and omitted as appropriate within the scope of the invention.
Description of the symbols
300 substrate processing system
100 substrate processing apparatus
100A-100F substrate processing apparatus
10 group of substrate processing apparatuses
1 substrate processing unit (processing unit)
130 control part
3 host computer
4 handling system
5 warehousing system
6OHT
11CPU
15 scheduling part
9 substrate
C: and (3) a carrier.

Claims (23)

1. A substrate processing system includes:
a substrate processing apparatus including a plurality of processing units for processing a substrate, and a scheduling unit for creating a schedule for performing a batch of substrate processing using the plurality of processing units; and
a host computer for transmitting the recipe of the lot to a scheduling unit of the substrate processing apparatus,
it is characterized in that the preparation method is characterized in that,
the host computer sends the recipe of the unreached lot that has not arrived at the substrate processing apparatus to the scheduling unit,
the scheduling unit creates a temporary schedule for the substrate processing apparatus of the non-reached lot and sends the temporary schedule to the host computer according to a schedule of the lot that has reached the substrate processing apparatus and a recipe of the non-reached lot,
the host computer determines whether or not to transfer the non-arrival lot to the substrate processing apparatus based on the temporary schedule transmitted from the scheduling unit, and if it is determined to transfer the non-arrival lot to the substrate processing apparatus, supplies a signal indicating to transfer the non-arrival lot to the substrate processing apparatus to the scheduling unit,
the scheduling unit executes reservation processing for reserving the temporary schedule of the non-arrival lot as an exclusive schedule with other lots before the non-arrival lot arrives at the substrate processing apparatus when receiving the signal from the host computer.
2. The substrate processing system of claim 1,
the scheduling unit executes a reservation process of reserving the temporary schedule of the unreached lot as a schedule that cannot be changed when the schedule of the other lot is created.
3. The substrate processing system of claim 1,
the scheduling unit executes reservation processing for reserving the temporary schedule of the non-reached lot as a schedule that can be changed when the schedule of the other lot is created.
4. The substrate processing system according to any one of claims 1 to 3,
the scheduling unit of the substrate processing apparatus further creates a schedule of the other lot using the schedule of the unreached lot on which the reservation processing is performed.
5. The substrate processing system of any of claims 1 to 3,
the host computer further provides a scheduled arrival time of the unreached lot to the scheduling unit of the substrate processing apparatus,
the scheduling unit creates a schedule in the substrate processing apparatus for the non-reached lot as a provisional schedule based on the schedule for the reached lot, the recipe for the non-reached lot, and the scheduled arrival time, and transmits the provisional schedule to the host computer.
6. The substrate processing system of claim 5,
the host computer sets the scheduled arrival time of the unreached lot according to a processing status of the substrate processing apparatus.
7. The substrate processing system of claim 5,
the non-arrival lot is a lot including substrates processed in the substrate processing apparatus at the previous stage,
the host computer sets the scheduled arrival time of the non-arrival lot based on a time required for lot transfer from the preceding-stage substrate processing apparatus to the substrate processing apparatus.
8. The substrate processing system of any of claims 1 to 3,
the scheduling unit may create a schedule of the priority-added other lot again so that the priority-added other lot and the non-arriving lot are processed in an order corresponding to the processing priorities of the non-arriving lot and the non-arriving lot based on recipes of the non-arriving lot in which the processing priorities are set in advance and the priority-added other lot to which the processing priorities are given in advance but processing has not yet started, and create a temporary schedule of the schedule in the substrate processing apparatus for the non-arriving lot.
9. The substrate processing system of any of claims 1 to 3,
the scheduling unit may create a schedule of the scheduled other lot again so that the processing of the non-arriving lot is performed earlier than the scheduled other lot that has not yet started processing, and may create a temporary schedule of the schedule in the substrate processing apparatus of the non-arriving lot.
10. The substrate processing system of claim 9,
the other lots for which schedules have been made include the non-processing lots that have arrived but have not yet begun processing.
11. The substrate processing system of any of claims 1 to 3,
the substrate processing system comprises a plurality of the substrate processing apparatuses,
the host computer sends the recipe of the non-arrival lot to the scheduling unit of each of the plurality of substrate processing apparatuses,
the scheduling unit of each of the plurality of substrate processing apparatuses creates the temporary schedule of the non-arriving lot and transmits the temporary schedule to the host computer based on the schedule of the arriving lot and the recipe of the non-arriving lot,
the host computer selects one of the plurality of substrate processing apparatuses as a substrate processing apparatus that carries the unreached lot based on the temporary schedule of the unreached lot received from each of the plurality of substrate processing apparatuses.
12. A substrate processing apparatus comprising: a plurality of processing units for processing substrates, and a scheduling unit for creating a schedule for performing a substrate processing of a lot using the plurality of processing units,
it is characterized in that the preparation method is characterized in that,
the scheduling unit includes:
a lot information receiving unit that receives a recipe of a non-arrival lot that does not arrive at the substrate processing apparatus from an external host computer;
a temporary schedule creation unit that creates a temporary schedule for the schedule in the substrate processing apparatus for the non-reached lot based on a schedule set in advance for a lot that has reached the substrate processing apparatus and the recipe for the non-reached lot;
a temporary schedule supplying unit configured to supply the temporary schedule of the non-arrival lot acquired by the temporary schedule creating unit to the host computer;
a signal receiving unit configured to receive a signal indicating that the unreachable lot is transferred to the substrate processing apparatus from the host computer; and
and a reservation processing unit that executes reservation processing for reserving the schedule of the non-arrival lot as an exclusive schedule with respect to schedules of other lots before the non-arrival lot arrives at the substrate processing apparatus when the signal receiving unit receives the signal.
13. A method of processing a substrate includes a scheduling step of making a schedule for performing a processing of the substrate for a lot,
it is characterized in that the preparation method is characterized in that,
in the scheduling step, a schedule in a substrate processing apparatus for a non-arriving lot is made a temporary schedule based on a schedule of lots that have arrived at the substrate processing apparatus and recipes of non-arriving lots that have not arrived at the substrate processing apparatus,
the substrate processing method further includes: a determination step of determining whether to transfer the unreached lot to the substrate processing apparatus based on the temporary schedule,
the scheduling step comprises the following steps: when it is determined in the determining step that the non-arrival lot is transferred to the substrate processing apparatus, a reservation process is executed in which the temporary schedule of the non-arrival lot is reserved as an exclusive schedule with respect to schedules of other lots before the non-arrival lot arrives at the substrate processing apparatus.
14. The substrate processing method according to claim 13,
the scheduling step is a step of executing reservation processing for reserving the temporary schedule of the unreachable lot as a schedule that cannot be changed when the schedule of the other lot is created.
15. The substrate processing method according to claim 13,
the scheduling step is a step of executing reservation processing for reserving the temporary schedule of the unreachable lot as a schedule that can be changed when the schedule of the other lot is created.
16. The substrate processing method according to any one of claims 13 to 15,
the scheduling step is a step of further creating a schedule of the other lot using the schedule of the unreached lot subjected to the reservation processing.
17. The substrate processing method according to any one of claims 13 to 15,
the substrate processing method further includes: a time setting step of setting a scheduled arrival time of the unreached lot to the substrate processing apparatus,
the scheduling step is a step of making a schedule in the substrate processing apparatus of the unreachable lot as a temporary schedule based on the schedule of the arrived lot, the recipe of the unreachable lot, and the scheduled arrival time.
18. The substrate processing method according to claim 17,
the time setting step is a step of setting the scheduled arrival time of the unreached lot based on a processing status of the substrate processing apparatus.
19. The substrate processing method according to claim 17,
the non-arrival lot is a lot including substrates processed in the substrate processing apparatus at the previous stage,
the time setting step is a step of setting the scheduled arrival time of the non-arrival lot based on a time required for lot transfer from the preceding-stage substrate processing apparatus to the substrate processing apparatus.
20. The substrate processing method according to any one of claims 13 to 15,
the scheduling step comprises the following steps: the scheduling of the priority-added other lot is created again based on the recipe of the non-arriving lot having a processing priority set in advance and the recipe of the priority-added other lot having a scheduling created in advance and having a processing priority given in advance but not yet started to be processed, so that the priority-added other lot and the non-arriving lot are processed in the order corresponding to the processing priority of each of the non-arriving lot and the scheduling in the substrate processing apparatus of the non-arriving lot is created as a temporary scheduling.
21. The substrate processing method according to any one of claims 13 to 15,
the scheduling step comprises the following steps: the schedule of the scheduled other lot can be created again so that the processing of the not-yet-to-reach lot can be performed earlier than the scheduled other lot for which processing has not yet been started, and the schedule in the substrate processing apparatus of the not-yet-to-reach lot can be made a temporary schedule.
22. The substrate processing method according to claim 21,
the other lots for which schedules have been made include the non-processing lots that have arrived but have not yet begun processing.
23. The substrate processing method according to any one of claims 13 to 15,
the scheduling step is provided for each of the plurality of substrate processing apparatuses,
for each of the plurality of substrate processing apparatuses, the scheduling step is a step of making the temporary schedule for the unreached lot based on the schedule for the arrived lot and the recipes for the unreached lot,
the substrate processing method further includes: a selection step of selecting one of the plurality of substrate processing apparatuses as a substrate processing apparatus that carries the unreached lot based on the temporary schedule of the unreached lot corresponding to each of the plurality of substrate processing apparatuses.
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