JP2011146448A - Scheduler, substrate treatment apparatus, and method for operating substrate treatment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scheduler that generates not only a normal substrate transferring schedule for a newly-supplied substrate, but also a substrate transferring schedule for keeping a large production quantity even if a failure occurs, a substrate treatment apparatus using the scheduler, and a method for operating the substrate treatment apparatus. <P>SOLUTION: The scheduler is embedded in a control device of the substrate treatment apparatus which includes a plurality of substrate treatment sections for treating substrates, transfer sections for transferring the substrates, and the control device for controlling the transfer of the substrates at the transfer sections and controlling substrate treatment at the substrate treatment sections, and calculates the schedule of the transfer of the substrates. The scheduler also has a function which successively calculates the substrate transfer schedule for the newly-supplied substrate, and when the fault occurs in the apparatus, recalculates the substrate transferring schedule with the fault-occurrence state as an initial state. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention includes a scheduler built in a control unit of a substrate processing apparatus that includes a plurality of processing units and a plurality of substrate transporters, and sequentially transports the substrates loaded by the substrate transporter to the plurality of processing units, The present invention relates to a substrate processing apparatus using the scheduler and a method for operating the substrate processing apparatus.

  The substrate processing apparatus has various configurations, but in general, a plurality of substrates are sequentially put into the apparatus from a substrate storage container, and are transferred between a plurality of processing devices (processing units) by a plurality of transfer machines. In many cases, a substrate that is processed in parallel and that is configured to collect all the processed substrates in a substrate storage container is used. In addition, some substrate storage containers can be mounted / replaceable, and in such a substrate processing apparatus, substrate processing can be performed continuously by appropriately replacing the substrate storage container loaded with unprocessed substrates. The device can be operated.

  In the above-mentioned substrate processing apparatus, for example, a substrate plating processing apparatus that performs bump formation, TSV formation, rewiring plating, etc., severe process constraint conditions (predetermined process time interval from the end of the process to the start of the next process) While satisfying the above, it may be required to realize a high production amount (substrate processing amount per unit time including a recovery time from a failure). In order to satisfy this strict requirement, various scheduling methods (hereinafter sometimes abbreviated as “SCH”) have been conceived for making an optimal substrate transfer plan for substrate transfer control of the substrate plating apparatus. Among these, the scheduler using linear programming is an excellent scheduling method that exhibits maximum throughput while satisfying severe process constraint conditions. In this method, it is required to formulate a process constraint condition and a non-negative condition of conveyance suspension in advance, and to create a substrate conveyance schedule by linear programming so that a plurality of loaded substrates can be completed in the process as soon as possible. Therefore, it is a condition that the regular transfer performance for transferring the substrate without failure is maximized.

JP 2001-319842 A Japanese Patent No. 399478

  However, in the scheduler using the conventional linear programming method, when a non-stationary event such as the occurrence of a failure occurs, the formulation in the linear programming method becomes complicated and difficult. It is necessary to collect all the substrates in the substrate storage container and start the substrate transfer process. Naturally, during this substrate recovery, a new substrate cannot be put in, so the production amount is greatly reduced. For example, in a plating processing apparatus such as a bump forming plating processing apparatus in which many substrates are present at the same time, it takes a long time (for example, 2 hours) to recover the substrate.

  Further, in the above plating processing apparatus, when a rectifier abnormality or the like occurs in the plating processing section during the substrate process, in order to rescue the substrate, the process is interrupted and immediately transferred to another plating processing section of the same type. It is necessary to continue or to collect the substrate in a substrate collection container. However, since the current scheduler does not have a scheduling means for that purpose, in order not to generate a defective substrate, the processing start of the subsequent new substrate is temporarily stopped and the defective substrate and the substrate being processed are controlled by the apparatus controller. Thus, it is necessary to recover the substrate into the substrate storage container and to introduce a subsequent new substrate from the state in which the substrate is no longer in the apparatus. Therefore, the production volume is greatly reduced.

  In addition, when a failure occurs in the plating processing unit during the substrate process and the plating processing unit becomes unusable after that, the current scheduler dynamically changes the setting of the plating processing unit. Subsequent substrates cannot be processed continuously. As a result, in order to change the setting of the plating processing section, it is necessary to temporarily stop the introduction of a new substrate into the apparatus and stop the apparatus, and the production amount (substrate plating processing amount) is greatly reduced.

  The present invention has been made in view of the above points. In addition to creating a normal substrate transfer schedule for a newly loaded substrate, the present invention can easily achieve a high production amount even when a failure occurs. It is an object of the present invention to provide a scheduler capable of creating a substrate transfer schedule that can be maintained, a substrate processing apparatus using the scheduler, and a method for operating the substrate processing apparatus.

  In order to solve the above-described problems, the present invention controls a plurality of substrate processing units that process a substrate, a transfer unit that transfers a substrate, substrate transfer in the transfer unit, and substrate processing in the substrate processing unit. This is a scheduler that calculates the substrate transfer schedule built in the control unit of the substrate processing apparatus equipped with a control unit that sequentially calculates the substrate transfer schedule for newly loaded substrates, and when a failure occurs in the apparatus Further, the present invention is characterized in that a function of recalculating the substrate transfer schedule is provided with the state as an initial state.

  Also, the present invention is characterized in that, in the scheduler, the substrate transfer schedule calculation method is a transfer simulation method.

  Further, according to the present invention, in the scheduler, the substrate transfer schedule executes a processing process under conditions set in advance for each substrate at a target processing throughput or more while satisfying a predetermined process constraint condition when the substrate is loaded. It is calculated.

  Further, the present invention provides the above-described scheduler, wherein the transfer simulation method is performed for substrate transfer that has been scheduled according to the transfer schedule of a substrate that has been created in the previous transfer scheduling (hereinafter referred to as “input completed”). The priority of the transfer schedule for newly loaded substrates and the allowable delay time when the transfer of loaded substrates is affected by the interrupt of the newly loaded substrate transfer causes a delay, and the device design for these parameters. It is characterized in that a transport schedule that reaches a target throughput is created by using a set value that has been optimized at the time.

  Further, in the scheduler according to the present invention, the substrate transfer schedule may include loading a new substrate while collecting a substrate in which a failure has occurred or a device that has stopped due to an equipment failure and remains in the substrate processing unit. Features.

  Further, in the scheduler according to the present invention, when a failure occurs in a part of the substrate processing unit, the substrate processing schedule is set so that the substrate processing unit cannot be used, and the substrate processing unit which has been disabled is scheduled to be used. The substrate transfer schedule in which the substrate processing unit used by the loaded substrate and the unprocessed substrate used is changed to another usable substrate processing unit is recalculated.

  Further, in the scheduler according to the present invention, the substrate transfer schedule may be such that the substrate processing unit in which a failure has occurred is taken out and transferred to another normal and usable substrate processing unit to continue the processing, or It collects in a substrate storage container after washing with water and drying, It is characterized by the above-mentioned.

  In the scheduler, the substrate transfer schedule may include a new substrate in parallel while collecting a substrate in which a failure has occurred or collecting a substrate remaining in the substrate processing unit when the apparatus is stopped due to an equipment failure. It is characterized in that the process is input.

    Further, the present invention is characterized in that, in the scheduler, the substrate transfer schedule inputs a new substrate in parallel with recalculating the substrate transfer schedule changed to another usable substrate processing unit. .

  Further, in the scheduler according to the present invention, the substrate transfer schedule is such that the substrate of the substrate processing unit in which the failure has occurred is taken out, transferred to another normal and usable substrate processing unit, and the processing is continued. Then, a new substrate is processed and input.

  In the above-described scheduler, the substrate transfer schedule has been created by the above-described scheduler based on all processing processes for a newly loaded substrate, a processing process downstream from the collection start processing unit of the substrate to be collected, and the substrate loading scheduling before the previous time. The substrate transfer schedule is scheduled so that the processing process constraint condition is satisfied for all the processing processes for the substrate.

  The present invention also provides a substrate processing apparatus including a plurality of substrate processing units that perform substrate processing, a transport unit that transports a substrate, and a control unit that controls substrate transport in the transport unit and substrate processing in the substrate processing unit. In this operation method, the substrate transfer schedule of newly input substrates is sequentially calculated, and when a failure occurs, the control unit sets the state as an initial state and recalculates the substrate transfer schedule.

  In addition, the present invention provides a substrate processing apparatus including a transport unit that transports a substrate, a plurality of substrate processing units that perform substrate processing, and a control unit that controls substrate transport in the transport unit and substrate processing in the substrate processing unit. The scheduler according to any one of the above inventions is used as the scheduler built in the control unit.

  The present invention adopts a simulation method as a substrate transfer schedule calculation method, so that not only can a normal process substrate transfer schedule be created for a newly loaded substrate, but it can also be easily performed when a failure occurs. A substrate transfer schedule can be created.

  The present invention reduces the time required for substrate recovery and improves production volume by performing substrate transfer scheduling so that a new substrate can be loaded while recovering the substrate remaining in the apparatus after recovery from a failure. Can be made.

  If a device failure occurs in the substrate processing unit during substrate processing and the substrate processing unit can no longer be used, the substrate processing unit is automatically disabled and subsequent substrates are processed continuously. By carrying out the substrate transfer scheduling that makes it possible to reduce the time for stopping the apparatus and collecting the substrate, it is possible to improve the production amount.

  When a processing process failure occurs, while satisfying the processing process constraint conditions (allowable value of the process time interval from the end of the processing process to the start of the next processing process, etc.) of other substrates in the apparatus, As much as possible to damage the processing process of the substrate by moving the substrate to another processing unit of the same type that can continue the processing process, or by scheduling for recovery to the substrate storage container. As a result, the generation of defective substrates can be suppressed and the production amount can be improved.

FIG. 1 is a schematic diagram showing a configuration example of a plating apparatus according to Embodiment 1 of the present invention. FIG. 2 is a diagram illustrating an example of a hardware configuration of a control unit of the plating apparatus. FIG. 3 is a diagram for explaining the definition of the process constraint condition. FIG. 4 is a diagram for explaining the definition of the production amount. FIG. 5 is a diagram showing the architecture of the scheduler. FIG. 6 is a diagram showing a module configuration of the substrate transfer scheduler. FIG. 7 is a diagram showing a flow of main processing of the scheduler scheduling process according to the present invention. FIG. 8 is a diagram showing a flow of the new substrate loading process (ST21 in FIG. 7). FIG. 9 is a diagram showing a flow of the production resumption process (ST22 in FIG. 7) after the apparatus is stopped. FIG. 10 is a diagram showing a flow of unit unusable setting change processing (ST23 in FIG. 7). FIG. 11 is a diagram showing a flow of process NG substrate recovery processing (ST24 in FIG. 7). FIG. 12 is a diagram showing a flow of a new substrate loading / transporting simulation process (ST21-3, ST21-6 in FIG. 8, ST23-9 in FIG. 10). FIG. 13 is a diagram showing a flow of the production restart substrate recovery / transfer simulation process (ST22-6 in FIG. 9). FIG. 14 is a diagram showing a flow of the process NG substrate continuous transport simulation process (ST24-3 in FIG. 11). FIG. 15 is a diagram showing a flow of the process NG substrate recovery / transfer simulation process (ST23-5 in FIG. 10, ST24-5 in FIG. 11). FIG. 16 is a diagram showing the flow of the transport simulation initialization process (ST101 in FIG. 12). FIG. 17 is a diagram showing a flow of production resuming residual substrate recovery and transfer simulation initialization processing (ST201 in FIG. 13 and ST401 in FIG. 15). FIG. 18 is a diagram showing a flow of process NG substrate continuous transport simulation initialization processing (ST301 in FIG. 14). FIG. 19 is a diagram showing a flow of the transport simulation timekeeping process (ST102 in FIG. 12, ST202 in FIG. 13, ST302 in FIG. 14, ST402 in FIG. 15). FIG. 20 is a diagram showing a flow of a new loading port loading substrate or a loaded substrate loading start process (ST103 in FIG. 12). FIG. 21 is a diagram showing a flow of unit status update processing (ST104 in FIG. 12, ST203 in FIG. 13, ST303 in FIG. 14, ST403 in FIG. 15). FIG. 22 is a diagram showing the flow of the conveyor status update process (ST105 in FIG. 12, ST204 in FIG. 13, ST304 in FIG. 14). FIG. 23 is a diagram showing a flow of new input substrate transfer start determination processing (ST106 in FIG. 12). FIG. 24 is a diagram showing a flow of new collection designated substrate transfer start processing (ST205 in FIG. 13 and ST405 in FIG. 15). FIG. 25 is a diagram showing a flow of new continuation designation substrate transfer start determination processing (ST305 in FIG. 14). FIG. 26 is a diagram showing a flow of the loaded substrate transfer start determination process (ST107 in FIG. 12). FIG. 27 is a diagram showing the flow of the recovery SCH-completed substrate transfer start determination process (step ST206 in FIG. 13). FIG. 28 shows the flow of the loaded substrate transfer start determination process (ST306 in FIG. 14 and ST406 in FIG. 15). FIG. 29 is a diagram showing a flow of a loaded substrate transfer start determination process (step ST108 in FIG. 12, ST207 in FIG. 13, ST307 in FIG. 14, ST407 in FIG. 15). FIG. 30 is a diagram showing a flow of new input substrate transport error processing (step ST109 in FIG. 12). FIG. 31 is a diagram showing a flow of new collection designated substrate transfer error processing (ST208 in FIG. 13 and ST408 in FIG. 15). FIG. 32 is a diagram showing a flow of the new continuation designation substrate transport error process (ST308 in FIG. 14). FIG. 33 is a diagram showing a flow of processing (ST110 in FIG. 12) for copying the conveyance simulation state to the designated area. FIG. 34 is a diagram showing a flow of a conveyance simulation end process (ST112 in FIG. 12, ST210 in FIG. 13, ST310 in FIG. 14, ST410 in FIG. 15). FIG. 35 is a conceptual diagram for explaining the resumption of production from the apparatus stop state.

  Hereinafter, embodiments of the present invention will be described in detail. In the present embodiment, a plating apparatus that performs a plating process on a semiconductor substrate will be described as an example of the substrate processing apparatus. However, the substrate processing apparatus according to the present invention is not limited to this, for example, for manufacturing a LCD on a glass substrate. The present invention can be applied to various substrate processing apparatuses such as a substrate processing apparatus that performs processing.

  FIG. 1 is a schematic diagram showing a configuration example of a plating apparatus according to an embodiment of the present invention. The plating apparatus 10 includes a load port 11, a load robot 12, a substrate positioning table 13, a cleaning / drying machine 14, clamping stages 15 a and 15 b, a substrate holder storage area 25 including a plurality of stockers 16, pre-water washing. A configuration in which a tank 17, a pretreatment tank 18, a water washing tank 19, a coarse drying tank (blow tank) 20, a water washing tank 21, a plating area 26 provided with a plurality of plating tanks 22, and two conveyors 23 and 24 are arranged. It is. In FIG. 1, an arrow A indicates a substrate load transfer process, and an arrow B indicates a substrate unload transfer process. A substrate storage container that stores a plurality of unprocessed substrates and a substrate storage container that stores a plurality of processed substrates are placed on the load port 11.

  In the plating apparatus 10 having the above-described configuration, the load robot 12 takes out an unprocessed substrate from the substrate storage container placed on the load port 11, places it on the substrate positioning table 13, and sets the substrate on the basis of notches, orientation flats, and the like. Perform positioning. Next, the load robot 12 transfers the substrate to the clamping stages 15a and 15b, and attaches the substrate to the substrate holder taken out from the stocker 16 in the substrate holder storage area 25 by the clamping stages 15a and 15b. Here, a substrate is mounted on each substrate holder by two clamping stages 15a and 15b, and the two substrate holders are transported as one set. The substrate mounted on the substrate holder is transferred to the pre-water washing tank 17 by the transfer device 23 and pre-washed in the pre-water washing tank 17, then transferred to the pre-treatment tank 18, and pretreated in the pre-treatment tank 18. After that, it is further transferred to a water rinsing tank 19 where it is washed with water.

  The substrate that has been subjected to the water washing treatment in the water washing tank 19 is transferred to one of the plating tanks 22 in the plating region 26 by the transporter 24 and immersed in the plating solution. Here, a plating process is performed to form a metal film on the substrate. The substrate on which the metal film is formed is transferred to the washing tank 21 by the transporter 24, and the substrate washed in the washing tank 21 is transferred to the coarse drying tank (blow tank) 20, and the coarse drying tank 20 After being dried, the substrate is transferred to the clamping stages 15a and 15b by the transfer device 23, where the substrate is removed from the substrate holder. The substrate removed from the substrate holder is transferred to the cleaning / drying machine 14 by the load robot 12 and subjected to cleaning / drying processing. Then, the substrate is removed from the predetermined position of the predetermined substrate storage container placed on the load port 11 (not described above). The unprocessed substrate of the substrate storage container from which the processed substrate has been extracted is stored, or is stored at a predetermined position of the substrate storage container for storing a separately placed substrate (processed substrate) after processing.

  Control of the substrate load transfer process indicated by arrow A and transfer control of the substrate unload transfer process indicated by arrow B by the load robot 12, the transfer machine 23, and the transfer machine 24 are controlled by a control unit described later. To do. FIG. 2 is a diagram illustrating an example of a hardware configuration of the control unit. As illustrated, the control unit 30 includes a central processing unit (CPU) 31, a pointing device such as a keyboard and a mouse, an input device 32 such as a communication device for reading data stored in another computer, and a shared storage. A device 33 is provided. The shared storage device 33 includes a ROM 33-1, a memory 33-2, and a hard disk 33-3. The control unit 30 is connected to a device control controller 35 via an input / output interface 34. A control signal from the CPU 31 is sent to the device control controller 35 via the input / output interface 34, whereby the load robot 12, the transport device 23, and the transport device 24 are controlled via the device control controller 35.

  In the plating apparatus with the above configuration, when the events "New substrate input", "Transfer equipment / process equipment abnormality", "Substrate holder failure", and "Plating tank rectifier abnormality" occur, “Substrate loading transfer simulation process”, “Transfer equipment / process equipment abnormality process”, “Substrate holder defect process”, and “Plating tank rectifier abnormality process” are performed.

[Transfer simulation for loading new substrates]
In the transfer simulation for loading a new substrate, transfer simulation is performed by the following methods 1) to 4), and a substrate transfer schedule (substrate transfer execution time table) is re-created.
1) A transport simulation for loading one or more new substrates one by one (in this embodiment, one set of two) is performed.

  2) In the transfer simulation, a virtual device model is generated in the control unit 30, and the loaded substrate is transferred according to the substrate transfer schedule created in the previous new substrate loading scheduling, and the unit processing of the newly loaded substrate is completed. A transport simulation that satisfies the conditions and the transport conditions is performed to create a new substrate transport schedule (substrate transport execution time table).

  3) In the transfer simulation, it is assumed that a newly loaded substrate is loaded from the substrate storage container and returned to the designated substrate storage container after the process is completed.

  4) In the transfer simulation, transfer processing is performed on each input substrate in accordance with process recipe conditions set in advance on the control unit 30 side. Also included is a process of skipping over a unit whose recipe time setting is 0.

[Conveyor / Process equipment (motor, pump, thermostat, sensor, etc.) abnormality]
If an abnormality occurs in the transfer device / process device, the apparatus stops loading a new substrate, stops processing the substrate being processed in the device to the limit, and then stops. Thereafter, when the operator presses the production resumption button on the operation panel, a new substrate is loaded while collecting the substrate staying in the plating tank 22 in the plating region 26, and the substrate for normal production. A transfer schedule is created by transfer simulation. (Hereinafter referred to as “production resumption processing from equipment stop”). However, the calculation is performed so that the process constraint condition is satisfied in the process downstream from the residual plating tank 22 for all the collected substrates.

[Defective board holder]
When plating energization failure frequently occurs and it is determined that the substrate holder is defective, the substrate holder determined to be defective is returned to the stocker 16 of the substrate holder storage area 25 as unusable, and thereafter, the use is prohibited until the apparatus is stopped. Along with this, the substrate holder used by the loaded substrate and the unprocessed substrate which are scheduled to be used as the unusable substrate holder is changed to another usable substrate holder, and the substrate transfer schedule is recreated. (Hereinafter referred to as “unit (substrate processing unit) unusable setting change process”). Thereafter, when there is a request to input a new substrate from the control unit 30 of the apparatus, a substrate transfer schedule (substrate transfer execution time table) is created by transfer simulation.

[Abnormal plating tank rectifier]
When a plating tank rectifier abnormality occurs, the plating energization process is interrupted, and the substrate of the plating tank 22 in which the failure has occurred is transferred to another normal plating tank 22 to perform the energization plating process, or the board is washed with water. A substrate transport schedule for collecting in the substrate storage container 11 after the water washing and drying process is created by the tank 21, the coarse drying tank 20, and the cleaning dryer 14. (Hereinafter referred to as “process NG substrate recovery process”). However, the calculation is performed so as to satisfy the process constraint conditions without disturbing the substrate transfer schedule of other normal processing substrates. In addition, one row of the plating tank 22 in which the failure has occurred is switched to the “unusable” setting and the subsequent substrate is prohibited from being thrown in. Along with this, the used processing tank of the loaded substrate and the unprocessed substrate that were scheduled to be used for the plating tank 22 that has been made unusable is changed to another usable plating tank 22, and the substrate transfer schedule is recreated, that is, Unit (substrate processing unit) unusable setting change processing. Thereafter, when there is a request from the control unit 30 to insert a new substrate, a substrate transfer schedule for that purpose is created by transfer simulation. (Hereinafter referred to as “new substrate loading process”.)

In this embodiment, the conveyance simulation method is employed instead of the linear programming method, and the following solutions (1) to (3) are executed in order to realize a high production amount while satisfying severe process constraint conditions. Here, the strict process constraint condition is a process time interval from the end of the process to the start of the next process. As shown in FIG. 3, the process shifts from the L unit recipe process to the M unit recipe process. The process time interval T _P is
T _P = Post-processing time T ₁ + Removal waiting time T ₂ + Transfer time T ₃ + Pre-processing time T ₄
It is. Usually, in the plating process, the post-processing time T ₁ and the pre-processing time T ₄ are 0 (T ₁ = 0, T ₄ = 0), and the transport time T ₃ varies depending on which column of the plating tank 22 is taken out. Therefore, scheduling is performed by adjusting the extraction waiting time T ₂ so as not to exceed the process time interval T _P.

  Further, the production amount is, in a narrow sense, the number of substrates that can be processed per unit time during normal transportation, and is called throughput. Here, as shown in FIG. This is a substrate processing amount per unit time in a broad sense including failure cause investigation time + failure repair time + substrate recovery time).

(1) By reducing the time required for substrate recovery by reducing the time required for substrate recovery by carrying out a transfer schedule that allows the introduction of a new substrate while recovering the substrate remaining in the plating processing equipment after failure recovery. Improve.

(2) When a failure occurs during the plating process of the substrate and the processing unit (plating tank 22) during the plating process of the substrate becomes unusable thereafter, the processing unit is dynamically disabled. Then, the transfer scheduling that enables the subsequent substrate to be continuously plated is performed. Thereby, the plating processing apparatus is stopped and the time for collecting the substrate is reduced, and the production amount of the substrate is improved.

(3) If a plating process failure occurs, the corresponding substrate can be preferentially continued to the same type processing unit that can continue the process while satisfying the plating process constraint condition of the other substrate in the plating processing apparatus. By moving or carrying out a transfer schedule for collection into the substrate storage container, process damage to the substrate is reduced as much as possible to suppress the occurrence of defects.

  As will be described in detail later, the control unit 30 performs “new substrate loading processing”, “production restart processing from apparatus stop”, “unit (substrate processing unit) unusable setting change processing”, “process NG substrate recovery processing”. Each of the board transfer simulations is performed to create a board transfer schedule.

  FIG. 5 is a diagram showing an architecture of a scheduler for creating the substrate transfer schedule. As shown in the figure, the scheduler 40 includes a control process 41, an initialization process 42, a scheduling process 43, and an interface process 44. The control process 41 activates the scheduling process 43 and the interface process 44, and performs data transmission / reception (data reading / writing) between the scheduling process 43 and the interface process 44 by handshaking. The initialization process 42 initializes the shared storage device 33. The interface process 44 communicates with the apparatus control unit 50 having an apparatus control controller, transmits an event notification to the scheduling process 43, and transmits / receives a substrate transfer schedule. The scheduling process 43 receives an event from the interface process 44, calculates a transport schedule, and transmits a transport schedule created by calculation. The shared storage device 33 is an interface process 44 and a scheduling process 43 and transfers various data such as parameter settings, recipe settings, and substrate transfer schedules.

FIG. 6 is a diagram showing a module configuration of the substrate transfer scheduler. The substrate transfer scheduler performs a substrate transfer simulation according to an event in the apparatus and realizes the following functions a) to d).
a) New board loading scheduling function (function to create a board transfer schedule corresponding to the process recipe conditions of a new board)
b) Production resumption scheduling function (function of creating a substrate transfer schedule for collecting all the substrates remaining in the apparatus after the apparatus has stopped due to failure)
c) Unit use / non-use dynamic switching function (unit (substrate processing unit) setting switching, board transfer to change the used unit of the loaded substrate and unprocessed substrate for which the unit whose setting has been changed is scheduled) A function to create a schedule)
d) Process NG substrate recovery scheduling function (whether the (plating) process is judged to be defective or whether it is moved to the same type of unit capable of continuing another process quickly while continuing another normal substrate process) Or, a board transfer schedule creation function that collects in the board storage container after washing and drying)

  FIG. 7 is a diagram showing the flow of the main process of the schedule ring process. In step ST1, a scheduler command is received from the device control controller (see FIG. 5) of the device control unit 50, and the process proceeds to step ST2. In step ST2, it is determined whether there is a device start start request. If yes (Y), the process proceeds to step ST3, and if not (N), the process returns to step ST1. In step ST3, a device start process is performed, and the process proceeds to step ST4. In step ST4, a scheduler command is received from the device control controller of the device control unit 50, and the process proceeds to step ST5.

  In step ST5, the type of the device command is determined. Depending on whether the device command is “load new substrate”, “resume device production”, “unit unusable dynamic switching”, or “process NG generation”, “new” “Substrate loading processing”, “Production resumption processing from apparatus stop” in Step ST22, “Unit unusable setting change processing” in Step ST23, and “Process NG substrate recovery processing” in Step ST24 are performed, and the process proceeds to Step ST30. If there is no device command in step ST5, the process proceeds to step ST30.

  In step ST30, it is determined whether there is a substrate being processed or a substrate to be processed in the apparatus. If yes (Y), the process proceeds to step ST31. If not (N), the process proceeds to step ST32. . In step ST31, the substrate transfer schedule change is transmitted to the apparatus control controller of the apparatus control unit 50, and the process proceeds to step ST32. In step ST32, it is determined whether or not there is a device start request. If yes (Y), the process proceeds to step ST33, and scheduler operation unit stop processing of the scheduling process 43 of the scheduler 40 is performed. If there is no device start request (N), the process returns to step ST4. Hereinafter, the “new substrate loading process”, “production resuming process after apparatus stop”, “unit unusable setting change process”, and “process NG substrate recovery process” will be described in detail.

  FIG. 8 is a diagram showing a flow of new substrate loading processing (step ST21 in FIG. 7). First, in step ST21-1, it is checked whether or not there is a pre-processing substrate in the apparatus. If there is no substrate (N), the process proceeds to step ST21-2, and if it is present (Y), the process proceeds to step ST21-4. In step ST21-2, conveyance simulation data is initialized, and the process proceeds to step ST21-3. In step ST21-3, a leading new substrate loading / transporting simulation is performed, and the process proceeds to step ST21-4.

  In step ST21-4, it is determined whether the same recipe is input to the subsequent substrate. If yes (Y), the process proceeds to step ST21-5, and if no (N), the process proceeds to step ST21-6. In step ST21-5, throughput verification is performed, the maximum throughput parameter is selected, and the process proceeds to step ST21-6. In step ST21-6, a subsequent new substrate loading / transporting simulation is performed, and the process proceeds to step ST21-7. In step ST21-7, the substrate transfer schedule is updated.

  FIG. 9 is a diagram showing a flow of the production resumption process (step ST22 in FIG. 7) after the apparatus is stopped. In the production resumption process from the stop of the apparatus, first, in step ST22-1 the residual substrate position data in the apparatus of the apparatus control controller is read, and the process proceeds to step ST22-2. In step ST22-2, the conveyance simulation data is initialized, and the process proceeds to step ST22-3. In step ST22-3, the most downstream unrecovered residual substrate in the apparatus is searched, and the process proceeds to step ST22-4. In step ST22-4, it is determined whether there is an unrecovered residual substrate. If yes (Y), the process proceeds to step ST22-5, and if no (N), the process proceeds to step ST22-7. In step ST22-5, a new collection target substrate is designated, and the process proceeds to step ST22-6. In step ST22-6, a recovery designated residual substrate recovery transfer simulation is performed, and the process returns to step ST22-3. In step ST22-7, the substrate transfer schedule is updated.

  FIG. 10 is a diagram showing a flow of unit unusable setting change processing (unit unusable setting dynamic switching processing) (step ST23 in FIG. 7). In the unit unusable setting changing process, first, the use / nonuse setting switching of the target unit is performed in step ST23-1, and the process proceeds to step ST23-2. In step ST23-2, it is determined whether the setting after unit change is used or not used. If not, the process proceeds to step ST23-3. In step ST23-3, the unit use planned board upstream side search is performed. If there is a board to be used, the process proceeds to step ST23-4, and if there is no board to be used, the process proceeds to step ST23-7. In step ST23-4, the same type usable alternative unit is searched. If not, the process proceeds to step ST23-5, and if present, the process proceeds to step ST23-6.

  In step ST23-5, a process NG substrate recovery transfer simulation is performed, and the process proceeds to step ST23-7. In Step ST23-6, the board transfer schedule of the unit use scheduled upstream board is changed to use of the alternative unit, and the process proceeds to Step ST23-7. In step ST23-7, a search is performed before starting the unit use scheduled substrate processing. If there is a substrate before starting processing, the process proceeds to step ST23-8, and if there is no substrate before starting processing, the process proceeds to step ST23-10. In step ST23-8, the substrate transfer schedule of the substrate before the start of processing is deleted, and the process proceeds to step ST23-9. In step ST23-9, a substrate re-insertion simulation before starting processing is performed, and the process proceeds to step ST23-10. In step ST23-10, the substrate transfer schedule is updated.

  FIG. 11 is a diagram showing a flow of process NG substrate recovery processing (step ST24 in FIG. 7). In the process NG substrate recovery processing, first, in step ST24-1, the substrate transfer schedule of the NG target substrate is deleted, and the process proceeds to step ST24-2. In step ST24-2, a usable replacement unit of the same type is searched. If there is a usable replacement unit of the same type, the process proceeds to step ST24-3, and if not, the process proceeds to step ST24-5. Whether or not there is a substitute unit of the same type as this process abnormality occurrence unit is determined whether there is no normal substrate that is scheduled to use the substitute unit on the upstream side or the substrate storage container, or if there is a substitute unit, If the process in the alternative unit of the process NG board is completed before the board to be used arrives there, it is regarded as “present”.

  In step ST24-3, a process NG substrate replacement unit process continuous transfer simulation is performed, and the process proceeds to step ST24-4. The process NG substrate is transferred from the abnormal unit to the alternative unit within the process restriction time and the process is continued, and all the substrates including the process NG substrate are properly transferred to the substrate storage container while observing the process restriction conditions of other normal substrates. Carry out a transport simulation to return. Here, the details of the conveyance simulation method are the same as the “residual collection simulation” in the resumption of production.

  In step ST24-4, it is determined whether or not the process continuation conveyance simulation is successful. If yes (Y), the process proceeds to step ST24-6, and if no (N), the process proceeds to step ST24-5. In this determination, it is determined whether or not all the substrates including the process NG substrate have returned to the load port normally in accordance with the process constraint conditions in the transfer simulation.

  In step ST24-5, a process NG substrate recovery transfer simulation is performed, and the process proceeds to step ST24-6. A transport simulation for taking out the process NG substrate from the abnormality occurrence unit and returning it to the load port through water washing and drying processing is performed. Other normal substrates continue the process. Here, the details of the conveyance simulation method are the same as the “residual collection simulation” in the resumption of production. In step ST24-6, the substrate transfer schedule is updated.

  Hereafter, each said process is demonstrated. FIG. 12 is a diagram showing a flow of a new substrate loading / transporting simulation process (ST21-3, ST21-6 in FIG. 8, ST23-9 in FIG. 10). In FIG. 12, N represents the number of substrate storage containers (load port 11), UNIT_NUM represents the total number of units (the total of all treatment tanks including the plating tank 22, and load units), and TRF_NUM represents the number of transfer machines. First, in step ST101, at the beginning of the transfer simulation, unit (plating tank 22) information, transfer machine (load robot 12, transfer machine 23, 24) information, and a pointer referring to the loaded substrate transfer schedule are initialized, and transfer simulation is started. Then, the process proceeds to the conveyance simulation time counting process in step ST102. In the transport simulation timekeeping process in step ST102, the minimum remaining time until the next status transition event of the transporter or unit process is searched and the timekeeping process is performed, and the process proceeds to steps ST103 and 104.

  In step ST103, a process for starting the loading of a newly loaded substrate or a loaded substrate in the substrate storage container is performed. In step ST104, a process status update process is performed in all the process units, and the process proceeds to step ST105. In step ST105, the transfer status is updated in all the transfer machines, and the process proceeds to step ST106. In step ST106, a determination process for starting transfer is performed for a newly loaded substrate existing in the process unit or the transfer machine, and the process proceeds to step ST107. In step ST107, a determination process for starting the next transfer is performed on the loaded substrate referred to by the reference pointer of the substrate transfer schedule, and the process proceeds to step ST108.

  In step ST108, a transfer start process is performed for the substrate requested to start transfer by the transfer start determination process for the newly loaded substrate or the already loaded substrate, and the process proceeds to step ST109. In step ST109, when an error deviating from the process constraint condition occurs in the process status update process in step ST104 or the transfer machine status update process in step ST105, the transfer simulation data is restored to the initial state and the load start time is set. Delayed transport error processing is performed, and the process proceeds to step ST110. In step ST110, when a pre-load state storage request for transfer simulation is generated after turning on the process start request in the load port 11, the current transfer simulation data is copied to the pre-load state storage area. Move on to ST111.

  In step ST111, a search is made as to whether there is a newly inserted or in-processed substrate in the process in the transfer simulation apparatus. If yes (Y), the process returns to step ST102, and if not (N), that is, a new substrate and When it has been confirmed that the transfer of all the loaded substrates satisfies the process constraints and has been normally processed and returned to the designated substrate storage container, the process proceeds to step ST112, and a transfer simulation end process is performed. In this transfer simulation end process, the newly created substrate transfer schedule is overwritten and copied in the loaded substrate transfer schedule variable area.

  FIG. 13 is a diagram showing a production resumption substrate recovery transfer simulation process flow of step ST22-6 of FIG. First, in step ST201, the conveyance simulation is initialized, and the process proceeds to step ST202. In step ST202, the conveyance simulation time is measured, and the process proceeds to step ST203. In step ST203, process unit status update processing is performed, and the process proceeds to step ST204. In step ST204, the conveyor status update process is performed, and the process proceeds to step ST205. In step ST205, an in-apparatus residual new collection designated substrate transfer start determination process is performed, and the process proceeds to step ST206. In step ST206, in-apparatus residual recovery SCH-completed substrate transfer start determination processing is performed, and the process proceeds to step ST207.

  In step ST207, a new recovery designated substrate or recovery SCH-completed substrate transporter start process is performed, and the process proceeds to step ST208. In step ST208, residual substrate recovery simulation transport error processing is performed, and the process proceeds to step ST209. In step ST209, it is determined whether there is a substrate being collected in the transfer simulation apparatus. If yes (Y), the process proceeds to step ST202, and the above process is performed. If no (N), the process proceeds to step ST210. In the substrate retrieval during collection here, residual substrates in the apparatus for which collection scheduling (SCH) has not yet been performed are excluded. In step ST210, a conveyance simulation end process is performed.

  FIG. 14 is a diagram showing a process NG substrate continuous transport simulation flow of step ST24-3 in FIG. First, in step ST301, the conveyance simulation is initialized, and the process proceeds to step ST302. In step ST302, the conveyance simulation time is measured, and the process proceeds to step ST303. In step ST303, process unit status update processing is performed, and the process proceeds to step ST304. In step ST304, the conveyor status update process is performed, and the process proceeds to step ST305. In step ST305, a process NG new continuation designation substrate transfer start determination process is performed, and the process proceeds to step ST306.

  In step ST306, a loaded substrate transfer start determination process is performed, and the process proceeds to step ST307. In step ST307, a process NG continuation designation substrate or a loaded substrate transporter start process is performed, and the process proceeds to step ST308. Here, “inputted substrates” refers to all substrates scheduled as new input substrates or collection designated substrates. In step ST308, process NG substrate continuous simulation transport error processing is performed, and the process proceeds to step ST309. In step ST309, it is determined whether or not there is a substrate being processed in the transfer simulation apparatus. If yes (Y), the process proceeds to step ST302. If no (N), the process proceeds to step ST310, and the transfer simulation end process is performed. I do.

  FIG. 15 is a diagram showing a process NG substrate recovery / conveyance simulation flow of step ST23-5 of FIG. 10 and step ST24-5 of FIG. First, in step ST401, the conveyance simulation is initialized, and the process proceeds to step ST402. In step ST402, the conveyance simulation time is measured, and the process proceeds to step ST403. In step ST403, process unit status update processing is performed, and the process proceeds to step ST404. In step ST404, a conveyor status update process is performed, and the process proceeds to step ST405. In step ST405, a process NG new collection designated substrate transfer start determination process is performed, and the process proceeds to step ST406.

  In step ST406, a loaded substrate transfer start determination process is performed, and the process proceeds to step ST407. In step ST407, a new recovery designated substrate or a loaded substrate transporter start process is performed, and the process proceeds to step ST408. Here, “inputted substrates” refers to all substrates scheduled as new input substrates or collection designated substrates. In step ST408, a process NG substrate recovery simulation transport error process is performed, and the process proceeds to step ST409. In step ST409, it is determined whether or not there is a substrate being processed in the transport simulation apparatus. If yes (Y), the process proceeds to step ST402. If no (N), the process proceeds to step ST410, and the transport simulation is performed. Perform termination processing.

  FIG. 16 is a diagram showing a transport simulation initialization flow in step ST101 of FIG. First, in step ST101-1, the transfer simulation state is initialized to the state before loading the previously loaded substrate, and the process proceeds to step ST101-2. Here, the transfer simulation state includes all unit information data, transfer machine information data, and other data necessary for transfer simulation. In the initialization, the data set copied to the storage area at the start of the previous board transfer simulation (step ST101-7) is overwritten and copied to the transfer simulation variable area. In step ST101-2, the reference pointer of the loaded substrate transfer schedule is initialized to the state before loading a new loaded substrate, and the process proceeds to step ST101-3. Here, the reference pointer is used to sequentially refer to the existing substrate transfer schedule in order to start transfer of the loaded substrates in accordance with the order of the existing substrate transfer schedule.

  In step ST101-3, the load waiting time of the newly loaded substrate with respect to the previously loaded substrate is calculated, and the process proceeds to step ST101-4. The lower limit of the load waiting time is set as the default value or the throughput verification result value. When all the units are in use in a type consisting of a plurality of units, the unit that is emptied as soon as possible is searched, and the load waiting time during which the corresponding newly inserted substrate is smoothly stored in the unit is calculated. The calculated time is not less than the above lower limit value. In step ST101-4, the load start time of the newly loaded substrate is set by adding the load standby time to the start time of the previously loaded substrate, and the process proceeds to step ST101-5.

  In step ST101-5, it is determined whether the apparatus current time has exceeded the newly loaded substrate load start time (apparatus current time> new loaded substrate load start time). If yes (Y), the process proceeds to step ST101-6. If no (N), the process proceeds to step ST101-7. In step ST101-6, the newly loaded substrate loading start time is reset by adding the margin time to the apparatus current time, and the process proceeds to step ST101-7. The margin time used here is a constant time set in advance as a required time from the start to the end of scheduling at the current device time. The device current time is read from the device control controller 50. In step ST101-7, all the transfer simulation state variable data are copied to the storage area before loading.

  FIG. 17 is a flowchart showing the initialization flow of the process resumption residual substrate recovery and process NG substrate recovery transfer simulation in step ST201 of FIG. 13 and step ST401 of FIG. First, in step ST201-1, the transport simulation state is initialized to a state before starting collection of a new collection designated substrate, and the process proceeds to step ST201-2. In Step ST201-2, the reference pointer of the loaded substrate transfer schedule is initialized to the state before the loading of the previously loaded SCHed substrate, and the process proceeds to Step ST201-3. In step ST201-3, the time before the start of loading the previously loaded SCH-completed substrate is set as the current simulation time, and the process proceeds to step ST201-4. In step ST201-4, a recovery transfer sequence and process conditions for a new recovery designated substrate are created, and the process proceeds to step ST201-5. In step ST201-5, all transfer simulation state variable data is copied to the storage area before recovery starts. To do.

  FIG. 18 is a diagram showing a process NG substrate continuous transport simulation initialization flow in step ST301 of FIG. First, in step ST301-1, the transfer simulation state is initialized to the state before transfer of the new continuation designation substrate, and the process proceeds to step ST301-2. Here, the transport simulation state includes all unit information data, transporter information data, and other data necessary for the transporter simulation. Also, in the initialization, the data set copied in the storage area (step ST201-5 in FIG. 17) when the transport simulation of the previously collected SCH-completed substrate is started is overwritten and copied to the transport simulation variable area. In step ST301-2, the reference pointer of the loaded substrate transfer schedule is initialized to the state before starting loading of the previously loaded SCHed substrate, and the process proceeds to step ST301-3. Here, the reference pointer is used to sequentially refer to the existing substrate transfer schedule in order to start transfer of the loaded substrates in accordance with the order of the existing substrate transfer schedule.

  In step ST301-3, the time before the start of loading the previously loaded SCH-completed substrate is set as the current simulation time, and the process proceeds to step ST301-4. Here, in the process NG substrate continuous conveyance simulation, there is no need to create a new continuation designated substrate conveyance order and process conditions because they already exist. In step ST301-4, all the conveyance simulation state variable data are copied to the storage area before the continuation start.

  FIG. 19 is a diagram showing a transport simulation timekeeping flow in step ST102 of FIG. 12, step ST202 of FIG. 13, step ST302 of FIG. 14, and step ST402 of FIG. First, in step ST102-1, the minimum value of the remaining time until the unit next status transition is searched, set to the interval time, and the process proceeds to step ST102-2. In step ST102-2, it is determined whether the remaining time until the newly input substrate transfer start time does not exceed the interval time (remaining time until new input substrate transfer start time <interval time). If yes (Y), step ST102 is determined. -3 and No (N) moves to step ST102-4. In step ST102-3, the remaining time until the newly loaded substrate transfer start time is set as an interval time, and the process proceeds to step ST102-4. In step ST102-4, the remaining time minimum value until the next status shift of the transfer machine is performed. Is moved to step ST102-5.

  In step ST102-5, it is determined whether the minimum remaining time until the next status of the transporter does not exceed the interval time (remaining time minimum value <interval time). If yes (Y), the process proceeds to step ST102-6. Then, the process proceeds to No (N) Step ST102-7. In step ST102-6, the minimum remaining time until the next status of the transfer machine is set as the interval time, and the process proceeds to step ST102-7. In step ST102-7, the minimum remaining time until the input base transfer start time is reached. Is moved to step ST102-8. In step ST102-8, it is determined whether the minimum remaining time until the loaded substrate transfer start time does not exceed the interval time (minimum remaining time until the loaded substrate transfer start time <interval time), and yes (Y). If NO, the process proceeds to step ST102-9. If NO (N), the process proceeds to step ST102-10.

  In step ST102-9, the minimum remaining time until the loaded substrate transfer start time is set as the interval time, and the process proceeds to step ST102-10. In step ST102-10, a transfer clog error is monitored, and the process proceeds to step ST102-11. Transition. The conveyance jam error monitoring monitors a situation in which the interval time becomes zero over a certain number of times. If such a situation occurs, a new substrate loading delay time is set to a constant value as a transport error. In step ST102-11, interval time is added to conveyance simulation time.

  FIG. 20 is a diagram showing a flow of the load port new input substrate or input substrate input start processing in step ST103 of FIG. First, in step ST103-1, the next load board is searched and specified in the order of the preprocessed boards that have been scheduled to be input, and the new load board is specified as the next load at the end, and the process proceeds to step ST103-2. In step ST103-2, it is determined whether the current simulation time has passed the load start time of the next load designated input board. If yes (Y), the process proceeds to step ST103-3, and if no (N). Moves to step ST103-11. In step ST103-3, the load designation input board data is registered in the load port unit information, and the process proceeds to step ST103-4. In step ST103-4, it is determined whether the board is a new board or a board that has been thrown in. If it is a new board, the process proceeds to step ST103-5, and if it has been loaded, the process proceeds to step ST103-12. .

  In step ST103-5, available empty units are searched for all processes from the start of substrate loading from the substrate storage container to the return to the substrate storage container, and the process proceeds to step ST103-6. In step ST103-6, it is determined whether or not a search for empty units that can be used in all processes has succeeded with respect to a newly loaded substrate. If yes (Y), the process proceeds to step ST103-7, and no (N ), The process proceeds to step ST103-13. In step ST103-7, the conveyance start request signal of the load port unit is turned ON, and the process proceeds to step ST103-8. In step ST103-8, the conveyance simulation information pre-load state storage request is turned ON. As a result, the conveyance simulation information in step ST110 in FIG. 12 is copied to the designated storage area behind the conveyance simulation loop.

  In step ST103-11, the remaining time until the load start time is set. At this time, it is used for the minimum time search at the time of conveyance simulation time measurement in step ST102 (see FIG. 12). In step ST103-12, the load port unit conveyance start request is turned ON. In step ST103-13, when there are a plurality of units of the process target type and all of them are in use, the load start time is delayed to the startable time, the process proceeds to step ST103-14, and the load is performed in step ST103-14. Set the remaining time until the start time.

  FIG. 21 is a diagram showing a unit status update process flow in step ST104 in FIG. 12, step ST203 in FIG. 13, step ST303 in FIG. 14, and step ST403 in FIG. First, in step ST104-1, the conveyance simulation interval time is added to the unit processing elapsed time, and the process proceeds to step ST104-2. In step ST104-2, it is determined whether unit processing elapsed time ≧ next status movement time. If yes (Y), the process proceeds to step ST104-3, and, if no (N), the process proceeds to step ST104-40. In step ST104-3, the unit processing status is determined. If the unit processing status is “processing”, “processing completed”, or “reset”, the process proceeds to step ST104-11, step ST104-21, or step ST104-31, respectively. Transition.

  In step ST104-11, the unit processing status is changed to “processing completed”, the process proceeds to step ST104-12, and the substrate transfer request signal is turned ON. In step ST104-21, it is determined whether the unit processing status “reset” transfer request is ON. If yes (Y), the process proceeds to step ST104-22, the unit information board data is deleted, and the process proceeds to step ST104-23. Transition. In step ST104-23, the unit processing status is changed to “reset”, and the process proceeds to step ST104-24. In step ST104-24, the reset time is added to the next status transition time, and the process proceeds to step ST104-25. In step ST104-25, the remaining time until the next status transition time is set. In step ST104-31, the unit processing status is changed to “processing stop”, and the process proceeds to step ST104-32. In step ST104-32, all unit information data is erased. In step ST104-40, the remaining time until the next status transition time is set.

  FIG. 22 is a diagram showing a conveyor status update process flow in step ST105 in FIG. 12, step ST204 in FIG. 13, and step ST304 in FIG. First, in step ST105-1, the conveyance simulation interval time is added to the conveyance machine conveyance process elapsed time, and the process proceeds to step ST105-2. In step ST105-2, it is determined whether or not the conveyance process elapsed time ≧ next status movement time has elapsed (conveyance process elapsed time ≧ next status movement time). If yes (Y), the process proceeds to step ST105-3. In the case of (N), the process proceeds to step ST105-50. In step ST105-3, the transfer status is determined, and the transfer status is “moving”, “removing”, “storing”, “retracting”, respectively, step ST105-11, step ST105-21, step ST105- 31, the process proceeds to step ST105-41.

  In step ST105-11, it is determined whether or not the carrier non-interference condition is satisfied. If yes (Y), the process proceeds to step ST105-12, and if no (N), the process proceeds to step ST105-16. In step ST105-12, the transfer type of the transfer machine is determined. If “takeout”, the process proceeds to step ST105-13, and the transfer status is changed to “being taken out”. If “stored”, the process returns to step ST105-14. Move to change the transport status to “Accommodating”. In step ST105-16, the next status transition time is delayed and updated.

  In step ST105-21, it is determined whether the in-unit substrate transfer request is ON. If yes (Y), the process proceeds to step ST105-22, and if no (N), the process proceeds to step ST105-25. In step ST105-22, the unit processing status is requested to “reset”, the process proceeds to step ST105-23, the conveyance status is changed to “stopped” (conveyance is completed), and the process proceeds to step ST105-24. In ST105-24, the post-process leaving time upper and lower limit transport errors are monitored. In step ST105-25, the unit processing remaining time is delayed and added to the next status movement time.

  In step ST105-31, the transfer board data is copied to the unit information, and the process proceeds to step ST105-32. In Step ST105-32, a process for shifting the storage unit to the status “processing” is started, and the process proceeds to Step ST105-33. In step ST105-33, it is determined whether the position of the transport device is outside the interference region. If yes (Y), the process proceeds to step ST105-34, and if no (N), the process proceeds to step ST105-36. In step ST105-34, the transfer status is changed to “stopped” (transfer ended), and the process proceeds to step ST105-35. In step ST105-35, all the transporter time information data is erased, and the process proceeds to step ST105-37. In step ST105-37, the process time interval upper and lower conveyance errors are monitored, and the process proceeds to step ST105-38. In step ST105-38, the conveyance machine holding time upper limit conveyance error is monitored. In step ST105-36, the conveyance status is changed to “retracting”.

  In step ST105-41, the transporter current position data is changed to the standby position, and the process proceeds to step ST105-42. In step ST105-42, the conveyance status is changed to “stopped” (conveyance is completed), and in step ST105-43, all the conveyance machine information data is deleted. In step ST105-50, the remaining time until the next status transition time is set.

  FIG. 23 is a diagram showing a new input substrate transfer start determination processing flow in step ST106 of FIG. Since the newly loaded substrate transfer start determination process is performed when the designated transfer machine is at rest, first in step ST106-1, it is determined whether the specified transfer machine is stopped and the transfer start request is OFF, and the answer is YES (Y). Then, the process proceeds to step ST106-2. In step ST106-2, it is determined whether the current simulation time has passed the conveyance start time (current simulation time ≧ conveyance start time). If yes (Y), the process proceeds to step ST106-3, and no (N). If there is, the process proceeds to step ST106-9. Here, the transfer start time indicates the time set by subtracting the time required to reach the transfer device from the process recipe setting time for unit information in the case of extraction. In the case of storage, the current simulation time itself is used. In step ST106-3, a carrier non-interference condition determination process is performed, and the process proceeds to step ST106-4. In this determination, if the designated transporter enters the interference area with the adjacent transport machine, whether the adjacent transport machine is accessing the interference area or if the designated transport machine is scheduled to be accessed is reserved. judge.

  In step ST106-4, the transporter condition determination and the take-out source / storage destination unit condition determination are performed, and the process proceeds to step ST106-5. In this determination, it is determined whether the transporter hand does not have a substrate when the substrate is taken out as a transporter condition, or whether the transporter hand has a substrate when the substrate is stored. Further, it is determined as a take-out source / storage destination unit condition whether a board exists at the take-out source and there is no other board for each storage destination. In step ST106-5, it is determined whether all of the above-described carrier non-interference conditions, carrier conditions, take-out source / storage destination unit conditions are satisfied, and if yes (Y), the process proceeds to step ST106-6. In step ST106-6, a new input substrate transfer start priority determination is performed, and the process proceeds to ST106-7. In this determination, if the start time delay time of the loaded substrate transfer exceeds the set allowable value immediately after the transfer is started, it is determined by the priority parameter whether priority is given to the new substrate transfer over the loaded substrate.

  In step ST106-7, it is determined in step ST106-6 whether the transfer delay time of the newly loaded substrate is equal to 0 (= 0) or a positive value (> 0). If it is 0, step ST106-8 is determined. , And turn on the transfer start request to the transfer device. If the value is positive, the process proceeds to step ST106-10, and the remaining time is set by adding the delay time to the conveyance start time. This remaining time is used for interval time calculation for the conveyance simulation timekeeping.

  FIG. 24 is a diagram showing a new recovery designated substrate transfer start determination process flow in step ST205 of FIG. 13 and step ST405 of FIG. Since the transfer start determination process for the loaded substrate is performed when the designated transfer machine is at rest, first in step ST205-1, it is determined whether the transfer start request is OFF while the specified transfer machine is stopped, and yes ( If (Y), the process proceeds to step ST205-2. In step ST205-2, it is determined whether or not the current simulation time has passed the scheduled transfer start time (current simulation time ≥ planned transfer start time). If yes (Y), the process proceeds to step ST205-3, and no ( In the case of N), the process proceeds to step ST205-11. Here, the scheduled transfer start time indicates a time set by subtracting a predetermined time of transfer arrival from the process recipe setting time for unit information in the case of extraction. In the case of storage, the current simulation time itself is used.

  In Step ST205-3, the carrier non-interference condition is determined, and the process proceeds to Step ST205-4. In this determination, when the carrier enters the interference area with the adjacent carrier, whether the adjacent carrier does not access the interference area, or if the designated carrier intends to access, the designated carrier reserves the interference area. It is determined whether or not. In step ST205-4, carrier condition determination and take-out / storage destination unit condition determination are performed, and the process proceeds to step ST205-5. In this determination, it is determined whether the transporter hand does not have a substrate when it is taken out as a transporter condition or whether it has a substrate when it is stored. Further, it is determined as a take-out source / storage destination unit condition whether there is a board at the take-out source and no other board at the storage destination.

  In step ST205-5, it is determined whether all of the above-mentioned carrier non-interference conditions & carrier conditions & take-out / storage unit conditions are satisfied. If yes (Y), the process proceeds to step ST205-6. In step ST205-6, a new recovery designated substrate transfer start priority determination is performed, and the process proceeds to step ST205-7. In this determination, if the transfer SCH substrate transfer start time delay time exceeds the set allowable value immediately after the transfer is started, it is determined by the priority parameter whether the new recovery designated substrate transfer is given priority over the recovery SCH substrate. To do. In step ST205-7, it is determined whether the new collection designated substrate transfer start delay time is 0 (= 0) or a positive value (> 0). If it is equal to 0, the process proceeds to step ST205-8, where a positive value is set. In this case, the process proceeds to step ST205-12. In step ST205-8, a transfer start request is set to ON for the transfer machine. Here, the remaining time is used for interval time calculation for conveyance simulation timekeeping. In step ST205-12, the remaining time is set by adding the delay time to the scheduled transfer start time. In step ST205-11, a scheduled time until the conveyance start time is set.

  FIG. 25 is a diagram showing a new continuation designated substrate transfer start determination process flow in step ST305 of FIG. First, in step ST305-1, it is determined whether the designated transfer machine is stopped and the transfer start request is OFF. If yes (Y), the process proceeds to step ST305-2. In step ST305-2, it is determined whether the current simulation time has passed the conveyance start time (current simulation time ≧ conveyance start time). If yes (Y), the process proceeds to step ST305-3, and no (N). In this case, the process proceeds to step ST305-11, and the remaining time until the conveyance start time is set. In this case, the transfer start time indicates a time set by subtracting the time required to reach the transfer device from the process recipe setting time for unit information in the case of extraction. In the case of storage, the current simulation time itself is used.

  In Step ST305-3, the transporter non-interference condition is determined, and the process proceeds to Step ST305-4. In this determination, when the designated carrier enters the interference area with the adjacent carrier, whether the adjacent carrier does not access the interference area, or if the access is scheduled to be made, the designated carrier reserves the interference area. Judge whether it is. In step ST305-4, transporter condition determination and take-out / storage destination unit condition determination are performed, and the process proceeds to step ST305-5. In this determination, it is determined whether the transporter hand does not have a substrate when it is taken out as a transporter condition, or whether it has a substrate when stored. Further, it is determined as a take-out source / storage destination unit condition whether there is a board at the take-out source and no other board at the storage destination.

  In step ST305-5, it is determined whether all of the transporter non-interference condition, the transporter condition, the takeout source / storage destination unit condition are satisfied, and if yes (Y), the process proceeds to step ST305-6. In step ST305-6, a new continuation designation substrate transfer start priority determination is performed, and the process proceeds to step ST305-7. In this determination, if the start time delay of the collection SCH completed substrate transfer exceeds the set allowable value immediately after the transfer is started, it is determined by the priority parameter whether the new collection designated substrate transfer is given priority over the collection SCH completed substrate. To do. In step ST305-7, it is determined whether the continuation designated substrate transfer start delay time is 0 (= 0) or a positive value (> 0). If it is 0, the process proceeds to step ST305-8, and the transfer machine is set. On the other hand, the transfer start request is set to ON, and in the case of a positive value, the process proceeds to step ST305-12, the delay time is added to the transfer start time, and the remaining time is set. Here, the remaining time is used for interval time calculation for the conveyance simulation timekeeping.

  FIG. 26 is a diagram showing a loaded substrate transfer start determination processing flow in step ST107 of FIG. First, in step ST107-1, it is determined whether the designated transfer device is stopped and the transfer start request is OFF. If yes (Y), the process proceeds to step ST107-2. In step ST107-2, it is determined whether or not the current simulation time has passed the scheduled transfer start time of the transfer execution time table (current simulation time ≧ transfer scheduled start time of transfer table). If yes (Y), step ST107- If No (N), the process proceeds to Step ST107-11. Here, the scheduled transfer start time indicates the time in the row referred to by the pointer of the substrate transfer schedule.

  In Step ST107-3, the carrier non-interference condition is determined, and the process proceeds to Step ST107-4. In this determination, when the designated transporter enters the interference area with the adjacent transport machine, whether or not the adjacent transport machine has accessed the interference area, or the designated transport machine reserves the interference area when the access is scheduled. Determine whether you are doing. In step ST107-4, transporter condition determination and take-out / storage destination unit condition determination are performed, and the process proceeds to step ST107-5. In this determination, it is determined whether the transporter hand does not have a substrate in the case of take-out as a transporter condition or whether it has a substrate in the case of storage. Further, it is determined as a take-out source / storage destination unit condition whether there is a board at the take-out source and no other board at the storage destination. In step ST107-11, the remaining time until the scheduled start time of transport is set.

  In step ST107-5, it is determined whether all of the transporter non-interference conditions, the transporter conditions, the take-out source / storage destination unit conditions are satisfied, and if yes (Y), the process proceeds to step ST107-6. In step ST107-6, priority is given to starting the transport of loaded substrates, and the process proceeds to step ST107-7. In this determination, if the transfer immediately starts and the delay time exceeds the set allowable value after the scheduled transfer time, it is determined by the priority parameter whether the new substrate transfer is prioritized over the loaded substrate.

  In step ST107-7, it is determined whether the input substrate transfer start delay time is 0 (= 0) or a positive value (> 0). If it is 0, the process proceeds to step ST107-8 and the transfer device is set. On the other hand, the transfer start request is turned ON. If the value is positive, the process proceeds to step ST107-12, and the remaining time is set by adding the delay time to the scheduled transfer start time. Here, the remaining time is used for interval time calculation for conveyance simulation timekeeping.

  FIG. 27 is a diagram showing a recovery SCH-completed substrate transfer start determination process flow in step ST206 of FIG. First, in step ST206-1, it is determined whether the designated transfer machine is stopped and the transfer start request is OFF. If yes (Y), the process proceeds to step ST206-2. In step ST206-2, it is determined whether or not the current simulation time has passed the scheduled transfer start time of the transfer execution time table (current simulation time ≧ transfer scheduled start time of transfer table). If yes (Y), step ST206- If NO (N), the process proceeds to step ST206-11. The scheduled transfer start time here refers to the time in the row referenced by the pointer of the loaded substrate transfer schedule.

  In step ST206-3, the carrier non-interference condition is determined, and the process proceeds to step ST206-4. In this determination, if the designated transporter enters the interference area with the adjacent transport machine, whether the adjacent transport machine transporter does not access the interference area or if the designated transport machine is scheduled to access, the designated transport machine is in the interference area. Determine if you have booked. In step ST206-4, carrier condition determination and take-out / storage destination unit condition determination are made, and the process proceeds to step ST206-5. In this determination, it is determined whether the transporter hand does not have a substrate when it is taken out as a transporter condition or whether it has a substrate when it is stored. Further, it is determined as a take-out source / storage destination unit condition whether a board exists at the take-out source and there is no other board at the storage destination. In step ST206-11, the remaining time until the scheduled start time of conveyance is set.

  In step ST206-5, it is determined whether all of the transporter non-interference conditions, the transporter conditions, the take-out source / storage destination unit conditions are satisfied, and if yes, the process proceeds to step ST206-6, and the recovered SCHed substrate The conveyance start priority determination is performed, and the process proceeds to step ST206-7. In this determination, if the transfer immediately starts and the delay time exceeds the set allowable value after the scheduled transfer time of the new collection specified substrate, priority is given to whether the recovery SCH-completed substrate transfer has priority over the new collection specified substrate Judge by rank parameter.

  In step ST206-7, it is determined whether the recovery SCH-completed substrate transfer time start delay time is 0 (= 0) or a positive value (> 0). If 0, the process proceeds to step ST206-8, and the transfer is performed. Turn on the transfer start request to the machine. In the case of a positive value, the remaining time is set by adding a delay time to the scheduled transfer start time. This remaining time is used for interval time calculation for the conveyance simulation timekeeping.

  FIG. 28 is a diagram showing a loaded substrate transfer start determination processing flow in step ST306 in FIG. 14 and step 406 in FIG. First, in step ST306-1, it is determined whether the designated transfer machine is stopped and the transfer start request is OFF. If yes (Y), the process proceeds to step ST306-2. In step ST306-2, it is determined whether the current simulation time has passed the transfer start time table transfer start scheduled time (current simulation time ≥ transfer execution time table transfer start scheduled time). If yes (Y), step ST306- If NO (N), the process proceeds to step ST306-11. Here, the scheduled transfer start time indicates the time in the row referred to by the pointer of the input substrate transfer schedule.

  In step ST306-3, the carrier non-interference condition is determined, and the process proceeds to step ST306-4. In this determination, when the designated transporter enters the interference area with the adjacent transport machine, whether or not the adjacent transport machine has accessed the interference area, or the designated transport machine reserves the interference area when the access is scheduled. Determine whether you are doing. In step ST306-4, carrier condition determination and take-out / storage destination unit condition determination are performed, and the process proceeds to step ST306-5. In this determination, it is determined whether the transporter hand does not have a substrate when it is taken out as a transporter condition or whether it has a substrate when it is stored. Further, it is determined as a take-out source / destination unit condition that a board exists in the take-out and there is no other board in the storage destination. In step ST306-11, the remaining time until the scheduled start time of conveyance is set.

  In step ST306-5, it is determined whether all of the transporter non-interference condition, the transporter condition, and the take-out source / storage destination unit condition are satisfied. If yes (Y), the process proceeds to step ST306-6. In step ST306-6, priority is given to starting the transport of loaded substrates, and the process proceeds to step ST306-7. In this judgment, if the transfer immediately starts and the delay time exceeds the set allowable value after the scheduled transfer time of the new continuation or recovery specified board passes, whether the input board has priority over the new continuation or recovery specified board. Is determined by the priority order parameter.

  In step ST306-7, it is determined whether the input substrate transfer start delay time is 0 (= 0) or a positive value (> 0). If 0, the transfer start request is set to ON for the transfer device. In the case of a positive value, the remaining time is set by adding a delay time to the scheduled transfer start time. The remaining time is used for calculating the interval time for the conveyance simulation timekeeping.

  FIG. 29 is a diagram showing a loaded substrate transfer start determination processing flow in step ST108 in FIG. 12, step ST207 in FIG. 13, step ST307 in FIG. 14, and ST step 407 in FIG. First, in step ST108-1, it is determined whether the designated transfer machine is stopped and the transfer start request is ON. If yes (Y), the process proceeds to step ST108-2. In step ST108-2, the transfer substrate data and transfer operation are set in the transfer machine information data, and the process proceeds to step ST108-3. In Step ST108-3, the conveyance status is set to “moving”, and the process proceeds to Step ST108-4. Here, the transport status is included as a property in the transporter information data.

  In step ST108-4, the moving time is set as the remaining time until the transfer to the next status of the transporter, and the process proceeds to step ST108-5. In step ST108-5, the transfer data is registered in the substrate transfer schedule, and the process proceeds to step ST108-6. In step ST108-6, it is determined whether the substrate is a newly input substrate or a substrate that has been input. If the substrate is already input, the process proceeds to step ST108-7. In step ST108-7, the loaded substrate transfer schedule reference pointer is updated, and the process proceeds to step ST108-8. In Step ST108-8, the transporter transport start request is turned OFF.

FIG. 30 is a diagram showing a flow of new input substrate transport error processing in step ST109 of FIG. In the transfer simulation, all the loaded substrates except for the process defective substrate existing in the defective unit and the substrate remaining in the unit when the equipment is stopped are not satisfied with the process constraint condition, or the transfer is clogged. A transport error is detected by the transport status update process in step ST105 (see FIG. 12). When a transfer error is detected in the transfer status update process in step ST105, a new input delay time for delaying the process input start time of the new substrate into the apparatus is set. This process constraint includes upper and lower limits for the following (a) to (c) for all units.
(A) Time from the end of the process to the time when the carrier hand grips the substrate (b) Process time interval from the end of the process to the start of the process in the next unit (c) Next after the substrate finishes taking out the substrate Transporter holding time until starting storage in the unit

  In FIG. 30, in step ST109-1, it is determined whether the new substrate loading delay time is a positive value. If yes (Y), the process proceeds to step ST109-2. In step ST109-2, the state of the transfer simulation is restored to the initial state before loading the newly loaded substrate. In subsequent step ST109-3, the reference pointer of the loaded substrate transfer schedule is restored to the state before loading the newly loaded substrate. The process proceeds to step ST109-4. In step ST109-4, the loading start time of the newly loaded substrate is postponed by the delay time, and the transfer simulation is retried.

  FIG. 31 is a diagram showing a flow of the new recovery designated substrate transfer error processing in step ST208 of FIG. 13 and step ST408 of FIG. First, in step ST208-1, it is determined whether the new collection designated substrate collection start delay time> 0. If yes (Y), the process proceeds to step ST208-2, and if no (N), the process proceeds to step ST208-4. To do. In step ST208-2, the transfer simulation state is restored to the initial state before starting the recovery of the new recovery designated substrate, and the process proceeds to step ST208-3. The restoration of the transfer simulation state is performed by overwriting and copying the data set copied to the storage area (step ST201-5 in FIG. 17) at the start of the transfer simulation of the previous collection designated substrate to the transfer simulation variable area.

  In step ST208-3, the reference pointer of the loaded substrate transfer schedule is restored to the state before the start of new collection designated substrate collection, the process proceeds to step ST208-4, and collection of the new collection designated substrate is started in step ST208-4. Delay the time by the delay time.

  FIG. 32 is a diagram showing a flow of new continuation designation substrate transport error processing in step ST308 of FIG. First, in step ST308-1, it is determined whether the new continuation designation board continuation start delay time is a positive value (> 0). If yes (Y), the process proceeds to step ST308-2, and if no (N), step ST308-2 is performed. Move on to ST308-4. The transfer simulation state is restored by overwriting to the storage area at the start of transfer simulation of a new continuation designation substrate (step ST301-4 in FIG. 18). In step ST308-2, the conveyance simulation state is restored to the initial state before the new continuation designation substrate continuation start, and the process proceeds to step ST308-3. In step ST308-3, the reference pointer of the loaded substrate transfer schedule is restored to the state before starting the new continuation designation substrate, and the process proceeds to step ST308-4. In step ST308-4, the continuation start time of the new continuation designation board is postponed by the delay time.

  FIG. 33 is a diagram showing a flow for copying the conveyance simulation state of step ST110 of FIG. 12 to the designated area. First, in step ST110-1, the conveyance simulation information storage request is turned ON, and the process proceeds to step ST110-2. In step ST110-2, the specified state of the conveyance simulation information is copied to the storage area, and the process proceeds to step ST110-3. In step ST110-3, the conveyance simulation information storage request is turned OFF.

  FIG. 34 is a diagram showing a conveyance simulation end process flow in step ST112 in FIG. 12, step ST210 in FIG. 13, step ST310 in FIG. 14, and step ST410 in FIG. In step ST112-1, the created substrate transfer schedule is overwritten and copied to the loaded substrate transfer schedule variable area.

[Throughput verification]
The throughput verification process in step ST21-5 of FIG. 8 is performed as follows.
1) When a plurality of new substrates having the same process recipe conditions are simultaneously input, after the transfer simulation (step ST21-3 in FIG. 8) of the introduction of the first new substrate from a state where no substrate exists in the apparatus, and subsequent subsequent substrate input Before the transfer simulation (step ST21-6 in FIG. 8), verification (step ST21-5 in FIG. 8) is performed to select the transfer control parameter setting that provides the maximum throughput. Here, the transfer simulation for loading the top new substrate (step ST21-3 in FIG. 8) is a procedure for loading the top substrate first when the throughput verification process (step ST21-5 in FIG. 8) takes time. is there.

  2) In the throughput verification function 1) (step ST21-5 in FIG. 8), a plurality of parameter settings that are assumed to be optimum are prepared, and a new substrate is loaded and transferred for each of the number of throughput evaluation targets. Perform a simulation and measure the throughput evaluation value. Among them, the parameter having the maximum throughput value is selected and used for the simulation of loading and transferring a plurality of remaining new substrates.

  3) The parameter setting of 2) includes a newly input substrate and a transfer start delay allowable time of the already-inserted substrate, a priority parameter, and a substrate input time lower limit interval.

  4) The plurality of parameter settings assumed to be optimal in 2) are prepared in advance by searching for parameter settings that maximize the throughput value with respect to the process recipe conditions considered at the design time.

5) The throughput evaluation value measured in the above 2) is the following lot index value from when the first new substrate is inserted into the substrate storage container to when the last substrate returns to the substrate storage container, or when the first new substrate is the substrate storage container. Any one of the tact base values from when the last substrate is returned to when the last substrate returns to the substrate storage container is selected and used. Which one is used depends on the device.
Lot index value WPH _{lot index}
= Number of substrates processed N / Total substrate processing time T _N
Tact base value WPH _{takt base}
= (Number of processed substrates N-1) / (Total processing time T _N -Starting substrate processing time T ₁ )

[Production restart function]
When a request for resuming production is received from the equipment control unit after manual maintenance after the equipment has stopped, a new board is put into the equipment while collecting the board remaining in the equipment into the specified board storage container. Scheduling is performed as in 1) to 3) below.
1) A transport simulation method is used for production resumption scheduling.
2) The substrate remaining in the apparatus is collected into the designated substrate storage container while satisfying the process constraint conditions.
3) Scheduling to collect the substrate remaining in the apparatus is performed, and then scheduling for introducing a subsequent new substrate is performed.

  FIG. 35 is a conceptual diagram for explaining the resumption of production from the apparatus stop state. FIG. 35 (a) shows a conventional example, and FIG. 35 (b) shows this embodiment. As shown in the figure, in the conventional example, as shown in FIG. 35 (a), the substrates 1 to 4 remaining in the apparatus are collected, and then the production resumption preparation is performed. 5-8 were charged. On the other hand, in this embodiment, as shown in FIG. 35B, the new substrates 5 to 8 are loaded in parallel with the recovery of the substrates 1 to 4 remaining in the apparatus. This improves the production volume.

[Rescheduling scheduling of the substrate remaining in the equipment]
The outline of the collection schedule of the substrate remaining in the apparatus is as follows 1) to 4).
1) A transfer simulation is performed to designate one or a plurality of substrates remaining in the apparatus one by one (in the present embodiment, one set is designated) and to collect them in the substrate storage container.

  2) In the transfer simulation, a virtual device model is generated in the control unit (see FIG. 5), and the substrate with the recovery schedule is transferred according to the substrate transfer schedule created in the previous residual substrate recovery simulation, and a new recovery is specified. The substrate performs a transport simulation that satisfies the unit processing end condition and the transport condition, and creates a new substrate transport schedule.

  3) In the transfer simulation, it is assumed that the newly collected designated substrate returns to the designated substrate storage container after the end of the process.

  4) In the transfer simulation, transfer processing is performed on each collected substrate according to the process recipe conditions set in advance on the apparatus control unit side. Also included is a process of skipping over a unit whose recipe time setting is 0.

[Residual substrate recovery transfer simulation flow]
Since the flow of the residual substrate recovery transfer simulation is the same as the flow of the production restart substrate recovery transfer simulation process (ST22 in FIG. 9) in FIG. 13, the illustration and description thereof are omitted.

[Residual substrate recovery simulation]
Here, the new recovery designated substrate transfer start determination processing flow is the same as the flow of the new recovery specified substrate transfer start processing (ST205 in FIG. 13 and ST405 in FIG. 15), and the illustration and description thereof will be omitted.
Also, the transfer start determination process for the collection scheduled substrate is the same as the flow of the recovery SCH complete substrate transfer start determination process (ST206 in FIG. 13) in FIG.

[Transfer error handling]
Since the transport error processing flow is the same as the new collection designated transport error processing flow (ST208 in FIG. 13 and ST408 in FIG. 15) in FIG. 31, the illustration and description thereof will be omitted.

[Dynamic switching function with and without unit use]
When a failure occurs during the processing of a substrate and the unit that is processing the substrate can no longer be used (in step ST5 of FIG. 7, step ST8 when the device command is a unit-usable dynamic switching). The above-described transfer simulation method is used for scheduling that allows the subsequent processing of the subsequent substrate by dynamically disabling the processing unit.

  Scheduling at the time of unit unusable setting is performed as described in the paragraphs 0053 to 0054 based on the unit unusable setting change processing flow of FIG. In summary, the following 1) to 17) are obtained.

  1) When a processing start substrate is scheduled to use a unit whose setting has been changed to “not used” and is in the process of being trendy, it can be used without affecting other substrate processes of the same type as the unit. Find another unit.

  2) If another usable unit is found in 1), the substrate transfer schedule is rewritten to use the other processing unit.

  3) If another usable unit is not found in the above 1), schedule the recovery of the substrate to the substrate storage container from the end of the unit processing in the current process, or use the unit as scheduled. And do not schedule to continue the process.

  4) In the case of recovering the substrate in the above 3), the recovery scheduling described later is performed assuming that the substrate existing in the unit immediately before the unit is a process defective substrate.

  5) The determination of the process continuation in 3) is made according to parameters set in advance at the time of design. This parameter setting is different for each apparatus.

  6) In the above function, when a substrate that is scheduled to use a unit whose setting has been changed to “not used” is included in the substrate before the start of processing, all the substrates before the processing start after that substrate are transferred. Are temporarily deleted from the substrate transfer schedule of the loaded substrates, and a transfer simulation for re-loading the substrates before the start of processing is performed in the same manner as in the case of loading the new substrate.

  7) In the case where the substrate before processing starts includes a substrate scheduled to perform a type of process including a unit whose setting has been changed to “use”, all the substrates before processing start after that substrate are included. Transfer is temporarily deleted from the substrate transfer schedule of the loaded substrates, and a transfer simulation for re-loading the substrates before the start of processing is performed in the same manner as the loading of the new substrate.

[Process for collecting defective substrates]
Continuing the process of another normal substrate while moving the process to another unit of the same type where the process abnormality occurred in the processing unit, continue the process, or after washing and drying Scheduling for collection into the substrate container is performed as in 1) to 5) below.
1) The transfer simulation method is used for process continuation or substrate recovery scheduling.

  2) In the transfer simulation, a virtual device model is generated in the control unit, the loaded substrate is transferred according to the substrate transfer schedule created in the previous new input scheduling, and the recovery specified substrate is transferred to the unit processing end condition and transfer A transfer simulation that satisfies the conditions is performed to create a new substrate transfer schedule.

  3) In the transfer simulation, it is assumed that the collection designated substrate returns to the designated substrate container after the process is completed.

4) In the transfer simulation, transfer processing is performed on each collected substrate according to the process recipe conditions set in advance on the apparatus control unit side. Also included is a process of skipping over a unit whose recipe time setting is 0.
5) The flow of the transfer simulation is the same as the above “residual substrate recovery transfer simulation”.

  The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the technical idea described in the claims and the specification and drawings. Can be modified. In the above embodiment, the plating apparatus for forming a metal film such as a bump electrode on the semiconductor substrate in the plating tank 22 has been described as an example. However, the present invention is not limited to this, and more strict management of the substrate transfer schedule is performed. Is suitable for an apparatus that requires For example, in electroplating, it is possible to stop the progress of plating by shutting off the power supply that supplies the electrolysis current. Therefore, the electroless plating apparatus does not require substrate transport scheduling under strict constraints as in the electroless plating apparatus. Then, since the plating process inevitably progresses, it is necessary to manage the substrate transport schedule more strictly. Therefore, the present invention is suitable.

  The present invention adopts a simulation method as a method for calculating a substrate transfer schedule, so that not only a normal processing substrate transfer schedule is created for a newly introduced substrate, but also a failure occurs and the failure is recovered. A scheduler that can reduce the time required for substrate recovery and improve production volume by performing substrate transfer scheduling so that a new substrate can be loaded while collecting the substrate remaining in the apparatus later, The substrate processing apparatus using the scheduler and the operation method of the substrate processing apparatus can be used.

DESCRIPTION OF SYMBOLS 10 Plating processing apparatus 11 Load port 12 Road robot 13 Substrate positioning stand 14 Washing dryer 15 Tightening stage 16 Stocker 17 Pre-washing tank 18 Pretreatment tank 19 Washing tank 20 Rough drying tank (blow tank)
DESCRIPTION OF SYMBOLS 21 Washing tank 22 Plating tank 23 Conveyor 24 Conveyor 25 Substrate holder storage area 26 Plating area 30 Control unit 31 Central processing unit (CPU)
32 Input Device 33 Shared Storage Device 34 Input / Output Interface 40 Scheduler 41 Control Process 42 Initialization Process 43 Scheduling Process 44 Interface Process 50 Device Control Unit

Claims (13)

A substrate processing apparatus comprising: a plurality of substrate processing units that process a substrate; a transfer unit that transfers the substrate; and a control unit that controls transfer of the substrate in the transfer unit and substrate processing in the substrate processing unit A scheduler for calculating a substrate transfer schedule built in the control unit of
A scheduler comprising a function of sequentially calculating a substrate transfer schedule for a substrate to be newly added and further recalculating the substrate transfer schedule with the state as an initial state when a failure occurs in the apparatus. The scheduler of claim 1,
A scheduler characterized in that the substrate transfer schedule calculation method is a transfer simulation method. The scheduler according to claim 1 or 2,
The substrate transfer schedule is calculated so as to execute a processing process under conditions set in advance for each substrate at a target processing throughput or higher while satisfying a predetermined process constraint condition when the substrate is loaded. Scheduler. The scheduler according to claim 2 or 3,
The transfer simulation method is based on the priority of the transfer schedule of the newly loaded substrate relative to the transferred substrate transfer according to the transfer schedule of the substrate already created in the previous transfer scheduling, and the transfer of the input substrate is interrupted by the transfer of the newly input substrate Create a transport schedule that reaches the target throughput by using the allowable delay time when the transport delay is affected as a parameter and using the setting values optimized at the time of device design for those parameters. A scheduler characterized by that. The scheduler according to any one of claims 1 to 4,
The scheduler is characterized in that the substrate transfer schedule performs loading of a new substrate while collecting a substrate in which a failure has occurred or an apparatus is stopped due to a device failure and a substrate remaining in the substrate processing unit. The scheduler according to any one of claims 1 to 4,
In the substrate transfer schedule, when a failure occurs in some of the substrate processing units, the substrate processing unit is disabled, and the substrate that has been scheduled to be used for the disabled substrate processing unit and A scheduler for recalculating a substrate transfer schedule in which a substrate processing unit used by an unprocessed substrate is changed to another usable substrate processing unit. The scheduler according to any one of claims 1 to 4,
The substrate transfer schedule is to take out the substrate of the substrate processing unit in which the failure has occurred and transfer it to another normal and usable substrate processing unit to continue the processing, or collect it in the substrate storage container after washing and drying. The scheduler characterized by doing. The scheduler according to claim 5, wherein
The substrate transfer schedule is characterized in that a new substrate is processed in parallel while collecting the substrate in which the failure has occurred or collecting the substrate remaining in the substrate processing unit when the apparatus is stopped due to an equipment failure. To scheduler. The scheduler according to claim 6, wherein
The scheduler is characterized in that the substrate transfer schedule inputs a new substrate in parallel with recalculating the changed substrate transfer schedule to the other usable substrate processing unit. The scheduler according to claim 7, wherein
The substrate transfer schedule takes out the substrate of the substrate processing unit in which the failure has occurred, transfers it to another normal and usable substrate processing unit, continues processing, and inputs a new substrate in parallel. The scheduler characterized by doing. The scheduler according to claim 8 or 10,
Processing for all processing processes for newly loaded substrates, processing processes downstream from the recovery start processing unit for the substrates to be recovered, and all processing processes for substrates for which the substrate transfer schedule has been created by the previous substrate loading scheduling A scheduler for scheduling a substrate transfer schedule so as to satisfy a process constraint condition. In an operating method of a substrate processing apparatus comprising a plurality of substrate processing units that perform substrate processing, a transfer unit that transfers a substrate, and a control unit that controls substrate transfer in the transfer unit and substrate processing in the substrate processing unit. ,
An operation method of a substrate processing apparatus, wherein a substrate transfer schedule of newly input substrates is sequentially calculated, and when a failure occurs, the control unit sets the state as an initial state and recalculates the substrate transfer schedule. In a substrate processing apparatus comprising: a transport unit that transports a substrate; a plurality of substrate processing units that perform substrate processing; and a control unit that controls substrate transport in the transport unit and substrate processing in the substrate processing unit.
A substrate processing apparatus using the scheduler according to claim 1 as a scheduler built in the control unit.

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