JP5448682B2 - Substrate processing system and control method thereof - Google Patents

Description

  The present invention relates to a substrate processing apparatus that performs a predetermined process on a substrate such as a semiconductor wafer or a glass substrate (hereinafter simply referred to as a substrate) for a liquid crystal display device, and a host computer that issues a processing instruction to the substrate processing apparatus. The present invention relates to a substrate processing system including a transfer system for transferring to a substrate processing apparatus and a control method thereof.

  Conventionally, as this type of substrate processing system, a plurality of substrate processing apparatuses, a transport system including a transport carriage for transporting a FOUP (lot) containing a substrate between the substrate processing apparatuses, and a plurality of substrates Some include a processing apparatus and a host computer that gives instructions to the transport system (see, for example, Patent Document 1).

  In the substrate processing system configured as described above, the host computer transports the FOUP to each substrate processing apparatus according to the production plan. Thereafter, the substrate processing apparatus into which the lot has been input calculates a process end estimated time and transmits each process end estimated time to the host computer. The host computer determines an efficient transfer path of the transfer carriage for transferring the FOUP unloaded from the substrate processing apparatus based on the estimated process end time of each substrate processing apparatus. Thereby, a lead time can be improved by using a conveyance trolley efficiently.

JP 2008-310467 A

However, the conventional example having such a configuration has the following problems.
In other words, the conventional substrate processing system considers the conveyance when the lot is loaded into the substrate processing apparatus, in other words, when the lot is unloaded from the substrate processing apparatus. On the other hand, the situation on the substrate processing apparatus side when the transport system instructed by the host computer transports the FOUP to each substrate processing apparatus is not considered. The host computer gives an instruction in advance as to which of a plurality of substrate processing apparatuses will process a lot, but does not determine the state of the substrate processing apparatus at the time of lot insertion. Therefore, since the lot is transferred as it is even if the processing is completed earlier when the processing is performed by another device than the designated device, there is a limit to increasing the productivity.

  Depending on the situation, a plurality of lots may be sequentially processed by the same substrate processing apparatus. However, in a specific lot, the substrate processing apparatus side is set up before processing. The term “setup” as used herein means, for example, that the processing liquid in the processing tank is always replaced with a new liquid before a specific lot is processed. Therefore, even if multiple lots can be processed quickly if they are input from lots that do not require setup, the substrate processing apparatus can wait for a lot to wait for lots in the order instructed by the host computer. May occur. As a result, there is a problem that productivity may decrease.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a substrate processing system and a control method thereof that can prevent a decrease in productivity by performing lot injection according to the situation. To do.

In order to achieve such an object, the present invention has the following configuration.
That is, the invention described in claim 1 is a substrate processing system for processing a substrate accommodated in a FOUP, and a plurality of substrate processing apparatuses that carry in the FOUP and process the substrate according to a schedule according to a recipe. A host computer that issues a transport instruction for the processing target FOUP, a pre-device buffer arranged upstream of the plurality of substrate processing apparatuses, and a FOUP transported to the pre-device buffer based on the instructions of the host computer as well as, and and a transport system for transporting the FOUP said to plurality of substrate processing apparatus from the apparatus front buffer, wherein the device before the buffer is about FOUP received from the transfer system by an instruction of the host computer, the When a FOUP is received when there is no FOUP in the device front buffer To simulate processing on the plurality of substrate processing apparatuses, said that treatment with any of the substrate processing apparatus to select an optimal device indicating whether optimal, its FOUP inside the device before buffer after the simulation When the next FOUP is received in the existing state, the plurality of substrate processing apparatuses are caused to simulate again the processing for the plurality of FOUPs in the pre-device buffer, and how the plurality of FOUPs are processed. An optimum ordering device that indicates which substrate processing device is optimum for processing in a proper order, and the selected optimum device or the optimum ordering device in the pre-device buffer that is transported by the transporting system. The FOUP process is instructed .

[Operation / Effect] According to the invention described in claim 1, the pre-device buffer receives the FOUP from the transport system according to the instruction from the host computer, and then receives the FOUP without the FOUP in the pre-device buffer. In this case, processing is simulated for a plurality of substrate processing apparatuses, an optimum apparatus indicating which substrate processing apparatus is optimal to process the received FOUP is selected, and the FOUP is stored in the pre-device buffer. when receiving the next FOUP in a state that is present, the processing for a plurality of the plurality of FOUP internal device buffers before the substrate processing apparatus is again simulated, what order several FOUP double in, select the optimal order device indicating whether best to process any substrate processing apparatus, with respect to optimum device or optimal order device selected, Sending an instruction processing FOUP in the previous device is conveyed buffer by system. As a result, considering the situation of the board processor can increase the productivity.

  In the present invention, the pre-device buffer simulates a schedule when each of the plurality of substrate processing apparatuses processes each FOUP, and based on each simulation result, the earliest scheduled end time for processing each FOUP It is preferable that the optimum apparatus is determined by the substrate processing apparatus. The pre-device buffer simulates a schedule when each FOUP is processed by a plurality of substrate processing apparatuses, and is an optimum apparatus for a substrate processing apparatus that has the earliest scheduled end time for processing each FOUP based on each simulation result. Judging. Therefore, by conveying the FOUP to the optimum apparatus, the FOUP process can be completed most quickly, and the productivity can be improved.

  Further, in the present invention, the pre-device buffer causes the schedule to be simulated while changing the order of loading each FOUP when processing each FOUP for each of the plurality of substrate processing apparatuses, and all the FOUPs are calculated based on the simulation results. It is preferable that the optimum order device is determined based on the input order of the scheduled end time that is earliest for processing and the substrate processing apparatus. The pre-device buffer simulates the schedule while changing the input order of each FOUP, and determines the input order and the substrate processing apparatus of the earliest scheduled end time for processing all the FOUPs based on the simulation results. Therefore, by conveying the FOUPs in the optimal ordering apparatus to the optimal ordering apparatus, the processing of all the FOUPs can be completed earliest and the productivity can be improved.

  In the present invention, when the apparatus front buffer receives the next FOUP from the transport system and performs the simulation, the FOUP simulation is performed again for the FOUP that has been received and the simulation has been completed. The simulation time required for execution is compared with the remaining time until the FOUP is transported based on the previous simulation result. If the simulation time is longer, the FOUP is excluded from re-simulation. (Claim 4). When the FOUP is transported from the transport system to the pre-device buffer, it is preferable to perform the simulation again for the FOUP that has already been simulated. However, since the simulation takes several seconds to several tens of seconds, if the simulation time required for the simulation is longer than the time required to start transporting the FOUP according to the previous simulation result, the simulation is excluded. As a result, it is possible to prevent the previous simulation from being wasted and to prevent the transport of the previously received FOUP from being delayed.

According to a fifth aspect of the present invention, there is provided a substrate processing system control method for processing a substrate accommodated in a FOUP. A plurality of substrates that carry in a FOUP and process the substrate according to a schedule according to a recipe. A processing apparatus, a host computer that issues a transfer instruction for a processing target FOUP, a pre-device buffer disposed upstream of the plurality of substrate processing apparatuses, and the pre-device buffer based on an instruction from the host computer And a transport system for transporting the FOUP from the pre-device buffer to the plurality of substrate processing apparatuses, wherein the pre-buffer receives the FOUP received from the transport system in accordance with an instruction from the host computer. for, immediately upon receipt of the FOUP at the FOUP absence inside of the device before buffer The, to simulate processing on the plurality of substrate processing apparatus, the method comprising the is to process any of the substrate processing apparatus to select an optimum device indicating whether optimal, the device front buffer, the simulation When the next FOUP is received in a state where the FOUP exists in the pre-device buffer later, the processing for the plurality of FOUPs in the pre-device buffer is performed again on the plurality of substrate processing apparatuses. A process of selecting an optimal ordering device that represents the optimal order in which the plurality of FOUPs should be processed and in which substrate processing apparatus, and the selected optimal device or optimal ordering device; , characterized in that it and a process for instructing the processing of the FOUP of the device before the buffer carried by the carrying system Than is.

[Operation / Effect] According to the invention described in claim 5, when the buffer in front of the apparatus receives FOUPs received from the transport system without receiving the FOUP in the buffer in front of the apparatus, a plurality of FOUPs are received. The substrate processing apparatus is simulated for processing. Then, an optimum apparatus indicating which substrate processing apparatus is optimal for processing the received FOUP is selected. When the pre-device buffer receives the next FOUP after the simulation and the FOUP exists in the pre-device buffer, a plurality of FOUPs in the pre-device buffer are sent to a plurality of substrate processing apparatuses. The processing for the above is simulated again, and an optimal ordering device that indicates in what order and in which substrate processing apparatus it is optimal to process a plurality of FOUPs is selected. And since the FOUP processing in the pre-device buffer transported by the transport system is instructed to the selected optimum device or optimum order device, the situation of the substrate processing device can be taken into consideration and the productivity can be improved. .

  Further, in the present invention, the process of obtaining the optimum device is performed by simulating a schedule when the pre-device buffer processes each FOUP in the plurality of substrate processing apparatuses, and processes each FOUP based on each simulation result. It is preferable that the optimum apparatus is the substrate processing apparatus having the earliest scheduled end time for performing the above (Claim 6).

  Further, in the present invention, the process for obtaining the optimum order device is to simulate the schedule while changing the order of loading each FOUP when the pre-device buffer processes each FOUP for each of the plurality of substrate processing devices, Based on each simulation result, it is preferable that the optimum ordering device is set according to the input order of the earliest scheduled end time for processing all FOUPs and the substrate processing apparatus.

  In the present invention, the simulation process may be performed when the pre-device buffer receives the next FOUP from the transport system and performs the simulation. The simulation time required to execute the FOUP simulation again is compared with the remaining time until the FOUP is transported based on the previous simulation result. If the simulation time is longer, the FOUP It is preferable to exclude the target of re-simulation (claim 8).

According to the substrate processing system of the present invention, after the FOUP is received from the transport system in response to an instruction from the host computer, the buffer before the apparatus includes a plurality of FOUPs when no FOUP is received inside the buffer before the apparatus. The substrate processing apparatus is subjected to a process simulation, the optimum apparatus indicating which substrate processing apparatus is optimal for processing the received FOUP is selected, and the next FOUP exists in the buffer in front of the apparatus. when receiving the FOUP, the processing for a plurality of FOUP internal device before the buffer is again simulated with respect to a plurality of substrate processing apparatus, in what order several FOUP double, which substrate processing choose the best order device indicating whether best to processing by the apparatus for optimum device or optimal order devices selected, the transportable Instructing FOUP processing of the device before the buffer carried by the system. Based on the result, the pre- device buffer instructs the processing of the FOUP in the pre-device buffer, so that the situation of the substrate processing apparatus can be taken into account and the productivity can be improved.

It is a block diagram which shows schematic structure of the substrate processing system which concerns on an Example. It is a flowchart which shows operation | movement of the apparatus front buffer. It is a schematic diagram which shows the flow of a process.

An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is a block diagram illustrating a schematic configuration of the substrate processing system according to the embodiment.

  The substrate processing system according to the present embodiment includes, for example, three substrate processing apparatuses 1 (1A, 1B, 1C), a host computer 3, an apparatus front buffer 5, and a transport system 7.

  The substrate processing apparatus 1 (1A, 1B, 1C) has a function of processing the substrate W. The substrate W is transported while being accommodated in a FOUP (Front-Opening Unified Pod) 9. The substrate processing apparatus 1 carries in the FOUP 9 and processes the substrate W according to a schedule created in advance according to the recipe. The processed substrate W is again accommodated in the FOUP 9 and carried out. As will be described later, when a simulation request is received from the pre-device buffer 5, a schedule is created and the scheduled end time and scheduled start time are transmitted.

  The host computer 3 includes a manufacturing execution system (MES: Manufacturing Execution System) and a transfer control system (MCS: Material Control System). The host computer 3 instructs the transport system 7 such as transport to the processing target FOUP 9.

  The pre-device buffer 5 is disposed upstream of the substrate processing apparatus 1 (1A, 1B, 1C). The pre-device buffer 5 receives an instruction from the host computer 3 and causes the substrate processing apparatuses 1A to 1C to simulate processing of the substrate W for the FOUP 9 transferred from the transfer system 7. This simulation refers to a schedule of FOUP 9 (sometimes referred to as a lot for processing) in the substrate processing apparatus 1 (1A, 1B, 1C). Each of the substrate processing apparatuses 1A to 1C requested for the simulation creates a schedule based on the instructed FOUP 9 and the recipe. In addition, a schedule is created while changing the order in which a plurality of designated FOUPs 9 are input. Then, the scheduled start time and the scheduled end time of processing based on the created schedule are transmitted to the pre-device buffer 5.

  The pre-device buffer 5 that has received the simulation result selects the substrate processing device 1 (1A to 1C) with the earliest scheduled end time among them as the “optimum device” of any one of the FOUPs 9. . Further, when processing a plurality of FOUPs 9 in order, it is selected as an “optimum order device” indicating which device is optimal in what order. These optimum devices and optimum order devices are selected not only in consideration of one of them but in consideration of both. Based on the result, the transfer system 7 and the substrate processing apparatus 1 (1A to 1C) are informed that the FOUP 9 will be transferred by the scheduled start time of the simulation result, and are prepared so that the process can be started by that time. .

The transport system 7 transports the FOUP 9 to each unit according to instructions from the host computer 3 . Examples of the transport system 7 include AMHS (Automated Material Handling Systems) such as AGV (Automatic Guided Vehicle) and OHT (Overhead Hoist Transport).

  Next, the operation of the pre-device buffer 5 will be described with reference to FIGS. 2 is a flowchart showing the operation of the pre-device buffer, and FIG. 3 is a schematic diagram showing the processing flow.

  In the following description, it is assumed that three FOUPs 9 (9A to 9C) are processed by a substrate processing system including three substrate processing apparatuses 1 (1A to 1C).

Step S1
The host computer 3 operates the transport system 7 to sequentially transport the FOUPs 9 (9A to 9C) together with the processing contents to the apparatus front buffer 5.

Step S2
The pre-device buffer 5 branches the process depending on whether there is a FOUP 9 inside. Here, description will be made assuming that FOUP 9 does not exist. That is, it is a case where FOUP 9 is received first. Here, it is assumed that FOUP 9A has been received.

Step S3
The pre-device buffer 5 requests each of the substrate processing apparatuses 1A to 1C to simulate a schedule for processing the FOUP 9A. The simulation combinations are as follows. And the scheduled start time and the scheduled end time are received among the simulation results by the respective substrate processing apparatuses 1A to 1C.

Equipment Processing target Substrate processing equipment 1A FOUP9A
Substrate processing equipment 1B FOUP9A
Substrate processing equipment 1C FOUP9A

Step S4
The pre-device buffer 5 compares each scheduled end time received from each of the substrate processing apparatuses 1A to 1C to determine an “optimum apparatus”. That is, the device with the earliest scheduled end time is selected as the optimum device. For example, the substrate processing apparatus 1A is selected as the optimum apparatus.

Step S5
The pre-device buffer 5 instructs the substrate processing apparatus 1A, which is the optimum apparatus, to process the FOUP 9A. However, this instruction has a reserved meaning, and the FOUP 9A is not immediately transported by the transport system 7, but the transport is actually started a predetermined time before the scheduled start time of the simulated schedule. The Until then, the FOUP 9A is kept in the pre-device buffer 5.

  Next, the case where the FOUP 9B is transported to the pre-device buffer 5 will be described.

Step S1, S2
After receiving the processing instruction (step S1), the pre-device buffer 5 determines whether there is a FOUP 9 (step S2) and branches the processing. Here, since there is already FOUP 9A, the process branches off from step S6.

Steps S6 to S8
The pre-device buffer 5 branches the process depending on whether or not the FOUP 9A that has already been simulated can be simulated again. Specifically, according to the simulation result of FOUP 9A, the transport by the transport system 7 is started a predetermined time before the scheduled start time of the process. Since the simulation takes several seconds to several tens of seconds, if the time is not taken into consideration, the execution according to the previous schedule becomes impossible during the simulation. Therefore, the remaining time until the scheduled start time is compared with the simulation time. If the simulation time is longer, the process branches to step S7 to exclude the FOUP 9A from the simulation target. On the other hand, if the remaining time is longer than the simulation time, the process instruction transmitted in step S5 is canceled because the process by the previous simulation (schedule) is not performed. As a result, it is possible to prevent the previous simulation from being wasted and to prevent inconveniences such as a delay in the transport of the previously received FOUP 9A.

Step S9
A simulation is requested for each of the substrate processing apparatuses 1 (1A to 1C) for the FOUP 9 to be simulated. Here, it is assumed that both FOUPs 9A and 9B are simulated. Thereby, a simulation result (start scheduled time, scheduled end time) is received from each substrate processing apparatus 1 (1A to 1C).

Step S10
Similar to step S4 described above, the optimum device is selected based on the scheduled end time. However, since there are two FOUPs 9 (FOUPs 9A and 9B) here, the simulation is performed with six combinations considering the following order and six combinations for processing one FOUP 9 in each device. . Therefore, the “optimum order device” or “optimum device” indicating which device is the earliest to process in which order is selected.

Equipment First treatment Second treatment Substrate treatment equipment 1A FOUP9A FOUP9B
Substrate processing equipment 1A FOUP9B FOUP9A
Substrate processing equipment 1B FOUP9A FOUP9B
Substrate processing equipment 1B FOUP9B FOUP9A
Substrate processing equipment 1C FOUP9A FOUP9B
Substrate processing equipment 1C FOUP9B FOUP9A

Equipment Processing target Substrate processing equipment 1A FOUP9A
Substrate processing equipment 1A FOUP9B
Substrate processing equipment 1B FOUP9A
Substrate processing equipment 1B FOUP9B
Substrate processing equipment 1C FOUP9A
Substrate processing equipment 1C FOUP9B

Step S11
The pre-device buffer 5 instructs each unit to perform processing based on the optimal order device or the optimal device.

  Next, a case where the FOUP 9C is transported to the pre-device buffer 5 will be described. However, it is assumed that the pre-device buffer 5 has FOUPs 9A and 9B. That is, there are three FOUPs 9A to 9C in the pre-device buffer 5.

  Processing instructions are given through steps S2 to S11 described above. However, in the simulation, 18 combinations in consideration of the following order and 9 combinations are executed. From among these, “optimum apparatus” or “optimum order apparatus” is selected.

Equipment First processing Second processing Third processing Substrate processing equipment 1A FOUP9A FOUP9B FOUP9C
Substrate processing equipment 1A FOUP9B FOUP9C FOUP9A
Substrate processing equipment 1A FOUP9C FOUP9A FOUP9B
Substrate processing equipment 1A FOUP9C FOUP9B FOUP9A
Substrate processing equipment 1A FOUP9A FOUP9C FOUP9B
Substrate processing equipment 1A FOUP9B FOUP9A FOUP9C
Substrate processing equipment 1B FOUP9A FOUP9B FOUP9C
Substrate processing equipment 1B FOUP9B FOUP9C FOUP9A
Substrate processing equipment 1B FOUP9C FOUP9A FOUP9B
Substrate processing equipment 1B FOUP9C FOUP9B FOUP9A
Substrate processing equipment 1B FOUP9A FOUP9C FOUP9B
Substrate processing equipment 1B FOUP9B FOUP9A FOUP9C
Substrate processing equipment 1C FOUP9A FOUP9B FOUP9C
Substrate processing equipment 1C FOUP9B FOUP9C FOUP9A
Substrate processing equipment 1C FOUP9C FOUP9A FOUP9B
Substrate processing equipment 1C FOUP9C FOUP9B FOUP9A
Substrate processing equipment 1C FOUP9A FOUP9C FOUP9B
Substrate processing equipment 1C FOUP9B FOUP9A FOUP9C

Equipment Processing target Substrate processing equipment 1A FOUP9A
Substrate processing equipment 1A FOUP9B
Substrate processing equipment 1A FOUP9C
Substrate processing equipment 1B FOUP9A
Substrate processing equipment 1B FOUP9B
Substrate processing equipment 1B FOUP9C
Substrate processing equipment 1C FOUP9A
Substrate processing equipment 1C FOUP9B
Substrate processing equipment 1C FOUP9C

  The pre-device buffer 5 selects an optimal order and device from the above combination based on the scheduled end time, and instructs each unit to perform processing.

  FIG. 3 shows the process flow described above between the apparatuses. It can be seen from FIG. 3 that the pre-device buffer 5 instructs the processing after judging the status of each substrate processing apparatus 1 (1A to 1C).

As described above, according to the present embodiment, the pre-device buffer 5 first receives the FOUP 9 from the transport system 7 in response to an instruction from the host computer 3, and then receives the FOUP 9 from each substrate processing apparatus 1 (1A to 1C). “Optimum apparatus” indicating which substrate processing apparatus 1 (1A to 1C) is optimal to process the FOUP 9 or in what order and which substrate processing apparatus 1 (1A to 1C) processes a plurality of FOUPs 9 One of “optimum order device” indicating whether it is optimum to perform, or “optimum device” and “optimum order device” is obtained. Based on the result, the pre-device buffer 5 informs the transport system 7 that the FOUP 9 is transported, and the host computer 3 instructs the transport of the FOUP 9, so that the situation of the substrate processing apparatus 1 (1A to 1C) is taken into consideration. And increase productivity.

  Further, the pre-device buffer 5 simulates a schedule when each of the FOUPs 9 is processed by a plurality of substrate processing apparatuses 1 (1A to 1C), and based on each simulation result, the earliest completion schedule for processing each FOUP 9 The optimum apparatus is determined by the substrate processing apparatus 1 at the time. Therefore, by transporting the FOUP 9 to the optimum apparatus, the FOUP processing can be completed earliest and the productivity can be improved.

  Further, the pre-device buffer 5 simulates the schedule while changing the input order of the FOUPs 9, and determines the input order and the substrate processing apparatus 1 at the earliest scheduled end time for processing all the FOUPs 9 based on the simulation results. . Therefore, by transporting the FOUPs 9 in the optimal ordering apparatus to the optimal ordering apparatus, the processing of all the FOUPs 9 can be completed earliest, and productivity can be improved. In particular, since the processing sequence of the FOUP 9 is taken into consideration in the optimum order apparatus, the “setup” in which the processing liquid in the processing tank is always replaced with a new liquid before the specific FOUP 9 is processed. However, this is preferable because it does not reduce the production efficiency.

  Note that when the host computer 3 instructs each substrate processing apparatus 1 (1A to 1C) to process only one FOUP 9, only the optimum apparatus described above needs to be considered. Specifically, when processing each of the three FOUPs 9A to 9C with only one of the three substrate processing apparatuses 1A to 1C, select the “optimum apparatus” from the following combinations: do it.

Equipment Processing target Substrate processing equipment 1A FOUP9A
Substrate processing equipment 1A FOUP9B
Substrate processing equipment 1A FOUP9C
Substrate processing equipment 1B FOUP9A
Substrate processing equipment 1B FOUP9B
Substrate processing equipment 1B FOUP9C
Substrate processing equipment 1C FOUP9A
Substrate processing equipment 1C FOUP9B
Substrate processing equipment 1C FOUP9C

  The present invention is not limited to the above-described embodiment, and can be modified as follows.

  (1) In the above-described embodiment, the substrate processing system having the configuration shown in FIG. 1 has been described as an example. However, the present invention is not limited to this configuration as long as the pre-device buffer 5 having the above-described function is provided. It is not limited.

  (2) In the embodiment described above, it may be excluded from the simulation target by determining whether or not the re-simulation is possible in step S6. However, the re-simulation may be performed without making such a determination. .

  (3) In the above-described embodiment, the processing when the number of FOUPs 9 is three (in other words, three lots) has been described as an example. However, the present invention can be applied even when there are one or two, or four or more. Can be applied.

DESCRIPTION OF SYMBOLS 1 ... Substrate processing apparatus 1A-1C ... Substrate processing apparatus 3 ... Host computer 5 ... Pre-device buffer W ... Substrate 7 ... Transport system 9 ... FOUP
9A-9C ... FOUP

Claims (8)

In a substrate processing system for processing a substrate accommodated in a FOUP,
A plurality of substrate processing apparatuses that carry in the FOUP and process the substrate according to a schedule according to the recipe;
A host computer that issues a transport instruction to the processing target FOUP;
A pre-device buffer disposed upstream of the plurality of substrate processing devices;
In accordance with an instruction from the host computer, a FOUP is transported to the pre-device buffer, and a FOUP is transported from the pre-device buffer to the plurality of substrate processing apparatuses;
With
When the FOUP received from the transfer system in response to an instruction from the host computer is received in a state where there is no FOUP inside the pre-device buffer, the pre-device buffer is provided for the plurality of substrate processing apparatuses. The process is simulated to select an optimum apparatus that indicates which substrate processing apparatus is optimal to process , and after the simulation, the next FOUP is received in the state where the FOUP exists in the pre-device buffer. In this case, the plurality of substrate processing apparatuses are caused to simulate again the processing for the plurality of FOUPs in the pre-device buffer, and the plurality of FOUPs are processed in any order and in which substrate processing apparatus. choose the best order device indicating whether best to process, the selected optimal device or optimal order Relative location, a substrate processing system, characterized by instructing the FOUP processing within the device before the buffer carried by the carrying system. The substrate processing system according to claim 1,
The pre-device buffer simulates a schedule when each FOUP is processed by the plurality of substrate processing apparatuses, and the substrate processing apparatus having the earliest scheduled end time for processing each FOUP based on each simulation result A substrate processing system characterized by determining an optimum apparatus. The substrate processing system according to claim 1,
The pre-device buffer simulates a schedule while changing the order of loading each FOUP when processing each FOUP for each of the plurality of substrate processing apparatuses, and is the fastest to process all FOUPs based on the simulation results. The substrate processing system, wherein the optimum order device is determined based on a loading sequence of scheduled end times and a substrate processing device. The substrate processing system according to any one of claims 1 to 3,
The pre-device buffer receives a next FOUP from the transport system and performs the simulation. For the FOUP that has already been received and the simulation has been completed, the simulation required to execute the FOUP simulation again. Comparing the time and the remaining time until the FOUP starts to be transported based on the previous simulation result, if the simulation time is longer, the FOUP is excluded from re-simulation. Substrate processing system. In a control method of a substrate processing system for processing a substrate accommodated in a FOUP,
A plurality of substrate processing apparatuses that carry in the FOUP and process the substrate according to a schedule according to the recipe;
A host computer that issues a transport instruction to the processing target FOUP;
A pre-device buffer disposed upstream of the plurality of substrate processing devices;
In accordance with an instruction from the host computer, a FOUP is transported to the pre-device buffer, and a FOUP is transported from the pre-device buffer to the plurality of substrate processing apparatuses;
With
When the pre-device buffer receives a FOUP received from the transport system in response to an instruction from the host computer without receiving a FOUP inside the pre-device buffer, A process of simulating the process and selecting an optimum apparatus that indicates which of the substrate processing apparatuses is optimal to process,
When the pre-device buffer receives the next FOUP in the state where the FOUP exists in the pre-device buffer after the simulation, the internal buffer of the pre-device buffer is sent to the plurality of substrate processing apparatuses. Re-simulating the processing for a plurality of FOUPs, and selecting an optimal ordering device that indicates in what order and in which substrate processing apparatus the plurality of FOUPs are processed optimally;
Instructing the selected optimum device or optimum sequence device to process the FOUP in the pre-device buffer conveyed by the conveyance system ;
A method for controlling a substrate processing system comprising: In the control method of the substrate processing system according to claim 5,
The process for obtaining the optimum device is the earliest end for the pre-device buffer to simulate the schedule when each FOUP is processed by the plurality of substrate processing apparatuses, and to process each FOUP based on each simulation result. A control method for a substrate processing system, wherein the substrate processing apparatus at a scheduled time is the optimum apparatus. In the control method of the substrate processing system according to claim 5,
In the process of obtaining the optimal order device, the pre-device buffer processes a FOUP for each of the plurality of substrate processing devices, and simulates a schedule while changing the order of loading each FOUP, and based on each simulation result, A control method for a substrate processing system, characterized in that the optimum ordering device is selected according to a loading order of the earliest scheduled end time for processing all FOUPs and the substrate processing device. In the control method of the substrate processing system in any one of Claim 5 to 7,
In the simulation process, when the pre-device buffer receives the next FOUP from the transport system and performs the simulation, the simulation of the FOUP is performed again for the FOUP that has been received and the simulation has been completed. The simulation time required for execution is compared with the remaining time until the FOUP is transported based on the previous simulation result. If the simulation time is longer, the FOUP is excluded from re-simulation. A control method for a substrate processing system.

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