JPH1063304A - Manufacturing process managing method and its managing controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To decide an optimum processing sequence even for the increase in the number of lots and processing sequence by calculating a full processing time concerning the combination pattern of the processing sequence of each lot, where the same processor is not used in the same period, and deciding a processing order with a shortest full processing time from among them. SOLUTION: All of the combination patterns of the processing sequence set by a combination pattern setting part 3 are held in a combination pattern holding part 4. A processing time arithmetic part 5 calculates an average processing time and a shortest processing time concerning all of these patterns and temporarily stores them in a processing time storing part 6. Then a combination pattern discriminating part 7 judges a pattern with a shortest processing time and extracts the pertinent pattern from the part 4 to output through a combination pattern output part 8. A processing sequence with the shortest full processing time is decided in a way like this.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the determination of the processing order of products and the progress in a manufacturing process in which the same processing apparatus is used a plurality of times in a series of processing steps, such as a semiconductor device manufacturing process. The present invention relates to a method for efficiently managing and a control device for realizing a system using the management method.

[0002]

2. Description of the Related Art In a series of processes for manufacturing and processing a product, the same manufacturing apparatus or processing apparatus may have to be used a plurality of times. For example, a semiconductor device mounted on a computer, information communication equipment, or the like is usually manufactured by a combination of various unit processes such as chemical vapor deposition (CVD), photoetching, impurity diffusion, and ion implantation. In particular, in a semiconductor device having a complicated circuit, a laminated wiring, or the like, a product is completed through several tens of steps or more processing steps. In a manufacturing process using the same manufacturing apparatus or processing apparatus, creation of an efficient production plan and grasping the progress thereof are important factors in determining the production capacity or the processing capacity. Hereinafter, in order to simplify the description, a method of managing a manufacturing process of a semiconductor device will be described as an example.

[0003] In the conventional semiconductor device manufacturing process management, for example, a process management table listing the processing status of each lot (minimum unit of wafer processing) is created, and a production management person refers to this process management table. However, it relies on manual work to determine the order of lots to be processed next and the time allotted to each processing apparatus.

[0004]

In the management method using the process management table as described above, when priority processing such as interruption due to customer's convenience or change of the delivery deadline occurs, it is possible to quickly respond. There was a problem that it could not. In particular, as the number of in-process lots and the number of processing steps increase, the burden on production managers increases, and priority processing without regularity, such as interruption of a specific lot, can reduce the processing status of other lots. Significant impact can be experienced.
For example, depending on the judgment of the production manager, the processing for a specific device is concentrated, the waiting time (loss time) of the next lot to be processed increases, and as a result, the progress of the entire manufacturing process is delayed, and the throughput is reduced. There is a problem that worsens.

[0005] The above-mentioned conventional problems are caused by the fact that the number of lots and the number of processing steps increase, the number of combinations of the processing order and processing time of each lot becomes enormous, and it becomes difficult to efficiently grasp the processing order. The purpose of the present invention is
An object of the present invention is to provide a manufacturing process management method and a management control device that can determine an optimum processing order even for such an increase in the number of lots and processing steps.

In particular, using a computer or the like capable of high-speed processing of a large amount of data, all combinations of processing orders for each lot satisfying the condition that the same processing apparatus is not used at the same time (no competition) are extracted, and all the patterns are extracted. An object of the present invention is to provide a management method for realizing an efficient manufacturing process by calculating a total processing time in a combination pattern and determining a processing order having the shortest total processing time from the total processing time, and a control device therefor. Also, when priority processing such as an interrupt occurs, the processing order is determined so that the total processing time of the lot having the highest priority processing order is minimized, and the total processing time is minimized according to the priority processing order. This optimizes the allocation time for each processing device.

[0007]

According to one aspect of the present invention, there is provided a method for managing a manufacturing process comprising a plurality of continuous unit processes and processing two or more different products. Creating a combination pattern of a processing order in which the same processing does not compete at the same time based on the basic processing order for each of the products and the unit processing time for each of the unit processes, which is known in advance; and Calculating the total processing time, and selecting the combination pattern having the shortest total processing time, according to the selected combination pattern,
Determining the processing order of each product.

According to a second aspect of the present invention, there is provided a method of managing a manufacturing process comprising a plurality of continuous unit processes and processing two or more different products, wherein the basic processing for each of the products is known in advance. Based on the order and priority processing order and the unit processing time for each unit process, a combination pattern of the processing order of each product is sequentially created from the product having the highest priority processing order to the product having the lowest priority processing order. And calculating the total processing time for each combination pattern, and minimizing the processing time of the product with the higher priority processing order, and selecting the combination pattern that minimizes the total processing time, Determining the processing order of each product according to the selected combination pattern.

Further, according to a third aspect of the present invention, there is provided a management control apparatus for a manufacturing process which comprises a plurality of continuous unit processes and processes two or more different products. Setting data input means for inputting an order and a unit processing time for each unit process measured in advance, and a combination pattern of a processing order that does not cause the same processing conflict at the same time based on the basic processing order and the unit processing time A combination pattern setting means for creating a combination processing pattern; a total processing time calculating means for calculating a total processing time for each combination pattern; a pattern determination means for determining the combination pattern having the shortest total processing time; and Pattern output means for outputting a combination pattern having the shortest total processing time. It is configured.

According to a fourth aspect of the present invention, there is provided a management control apparatus for a manufacturing process which comprises a plurality of continuous unit processes and processes two or more different products. Setting data input means for inputting an order and a priority processing order and a unit processing time for each unit process measured in advance; and a processing order for each of the products based on the basic processing order, the priority processing order and the unit processing time. Combination pattern setting means for sequentially creating the combination pattern from the product with the highest priority processing order to the product with the lowest priority processing order, and total processing time calculation means for calculating the total processing time for each of the combination patterns, The combination that minimizes the processing time of the product with the higher priority processing order and minimizes the total processing time And pattern discrimination means for discriminating the turn on the basis of the determination result, is configured to have a pattern output means for outputting a combination pattern having a total processing time of the shortest.

According to the manufacturing process management method and the management control device, as shown in the flow chart of FIG. 1, the basic processing sequence for each product (the execution sequence of the unit process) is known as the basic processing operation. ) And setting data such as the unit processing time (processing time) for each unit process,
Since time allocation for each processing device when each product is processed independently can be assumed, a combination pattern of the processing order of each product is set so that processing by the same processing device does not occur at the same time (S11). Next, the total processing time required until all the processing performed on each product is completed for each combination pattern is calculated (S12), and the shortest processing time is determined from the calculated total processing times, and the corresponding processing time is determined. A combination pattern is selected (S13), and then the order of input of each product in each processing apparatus, the input time, and the allocation of the processing time can be determined based on the selected combination pattern (S14).

That is, the present invention optimizes the order and time at which each lot or product is carried (input) into each processing apparatus, and evenly distributes the processing load to each manufacturing apparatus, thereby achieving efficient production. It will be realized.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a basic concept applied to a manufacturing process management method and a management control device according to the present invention will be described. For the sake of simplicity, the number of lots to be processed is three, and they are represented by symbols L1, L2, and L3, respectively. Further, there are two processing units, which are represented by symbols S1 and S2, respectively. Each lot L1,
The process of sequentially processing L2 and L3 in each of the processing devices S1 and S2 can be represented by the following symbol string for the lot L1, for example.

S1 _L1 (T1 _L1 ) → S2 _L1 (T2 _L1 ) → S1 _L1 (T3 _L1 ) → S2 _L1 (T4 _L1 ) → (1) Here, S1 _L1 (T1 _L1 ) is a processing device. Lot L1 using S1
Means the processing, the time required for processing (T1 _L1 )
It represents that. S2 _L1 (T2 _L1 ) is the processing unit S2
And that the processing time is (T2 _L1 ). The processing symbol string of the formula (1) is obtained by performing predetermined processing (S1 _L1 (T1 _L1 ) → S2 _L1 (T2 _L1 )) by the processing apparatuses S1 and S2 with the lot L1 as the first cycle, followed by 2 As a cycle, another processing (S1 _L1
(T3 _L1 ) → S2 _L1 (T4 _L1 )).

Next, the time when the three lots L1, L2, and L3 are input for a specific processing apparatus is set to T1 _in , T1
Assuming that each lot can be processed independently as 2 _in and T3 _in , lot processing end times T1 _out and T1 in which each lot finishes all processing and is unloaded from the processing apparatus.
2 _out and T3 _out are given by the following equations. T1 _out = T1 _in + (T1 _L1 + T2 _L1 + T3 _L1 + ...) (2) T2 _out = T2 _in + (T1 _L2 + T2 _L2 + T3 _L2 + ...) (3) T3 _out = T3 _in + (T1 _L3 + T2 _L3 + T3 _L3 +...) (4) Then, the time T at which all the lots finish the processing steps
_max is given by the following equation.

T _max = max (T 1 _out , T 2 _out , T 3 _out ) (5) Further, the shortest processing time T _min at which the lot that finishes the processing first is unloaded is given by the following equation. T _min = min (T 1 _out , T 2 _out , T 3 _out ) (6) Further, the average processing time T _ave for all lots is given by the following equation.

T _ave = (T1 _out + T2 _out + T3 _out ) / 3 (7) Here, the sum of the lot processing end times (T1 _out + T2 _out + T3)
_out ) is called the total processing time. That is, the average processing time T
_ave is proportional to the total processing time, and the process of determining the minimum average processing time T _ave described later is equivalent to determining the minimum total processing time.

Note that these calculation results are established under idealized conditions, and factors that do not take into account the occurrence of priority processing such as interrupts and the pre-setup and post-setup in each processing device are not actually considered. Causes a loss time, and the above expression does not always hold. The features of the present invention are:
Even in such a situation, it is possible to realize a manufacturing process in which an efficient processing order and a processing start time are set. In particular, considering the processing process of each lot, use of the same processing device at the same time does not occur. The minimum average processing time from all of the combination patterns of the processing order assumed as
It is to select a combination pattern having the T _ave 'and the shortest processing time T _{m in'.}

Next, an embodiment of a method for managing a manufacturing process according to claim 1 of the present invention will be described with reference to the above formula and the flowchart of FIG. Here, the priorities between lots are not set, and the restrictions on each process are as follows:
It is assumed that there is only competition of the same processing at the same time. First, the time at which the target processing is completed and carried out from the input of each lot is referred to as the target processing end time T1 _next , T2 _next , T3
_Next , the initial state is set as follows (S2
1).

T1_next= 0 (8) T2_next= 0 (9) T3_next= 0 (10) And the basic processing order and unit processing of each lot
Use of the same processing device at the same time
In order to ensure that all lots are
Use the same processing equipment at the same time from all processing steps
It is determined whether or not (S22). The same processing equipment at the same time
If not used, all lots L1, L2, L3
Process step, and the corresponding processing unit processing time T1_L1,
T2_L2, T3 _L3Is simply added to each target processing end time (S
24). Therefore, the target processing end time T1_next, T2_next,
T3_nextIs given as follows:

T1 _next = T1 _next + T1 _L1 (11) T2 _next = T2 _next + T2 _L2 (12) T3 _next = T3 _next + T3 _L3 (13) Here, T1 _next , T2 _next and T3 _next on the left side are This is the target processing end time when the processing ends, and is T1 on the right side.
_next , T2 _next , and T3 _next are the target processing end times initialized by the equations (9) to (10) or the target processing end times at the time when the processing performed up to this time ends.

On the other hand, when the same processing apparatus is used at the same time, a lot to be processed next is randomly extracted (S23), the processing steps of the lot are advanced, and the unit processing time of the corresponding processing is determined. Is added (S24). For example, if the extracted lot is L1 and the unit processing time is Ti _L1 , the target processing end time at the end of the current processing
T1 _next is given as follows.

T1 _next = T1 _next + Ti _L1 (14) Then, one of the remaining two lots L2 and L3 to be processed next is randomly selected again, and the same calculation is performed. For example, assuming that the selected lot is L2 and the unit processing time is Ti _L2 , the target processing end time T2 _next at the end of this processing considers that processing starts after processing of lot L1 ends And given by:

T2 _next = T2 _next + Ti _L1 + Ti _L2 (15) Further, the same processing is performed on the remaining one lot. If the lot is L3 and the unit processing time is Ti _L3 , the current processing is Processing end time T3 _next at the end
Is given by the following equation. T3 _next = T3 _next + Ti _L1 + Ti _L2 + Ti _L3 (16) The above calculation process is repeated until all processes are completed for all lots (S25).

All the processings thus obtained are completed.
Target processing end time T1 when completed _next, T2_next, T3
_nextIs the sum of the time required for each process.
From the input to the completion of all processing and
It is equal to the lot processing end time. T1_out= T1_next (17) T2_out= T2_next (18) T3_out= T3_next (19) Using these equations (17) to (19), average processing as shown in equations (7) and (6)
Time T_aveAnd the shortest processing time T_minAnd calculate these totals
The calculation result and the combination pattern are assigned to the first manufacturing process management
(Hereinafter simply referred to as an index) (S2
6).

Next, the target processing end times T1 _next and T2 again
_Next , T3 _next is set to the initial state, and when using the same processing apparatus at the same time, the lot processing end time T1 _out , T2 _out ,
T3 _out is calculated, and the average processing time T _ave and the shortest processing time T
_min is obtained, and these calculation results and a combination pattern thereof are used as a second index.

That is, for example, when three lots L1, L2, and L3 use the same processing apparatus at the same time, there are six lot extraction patterns. Assuming that there are n competing processing devices of L2 and L3, there are 6 ⁿ combinations of processing orders and 6 ⁿ indices (S27). The one having the minimum average processing time T _ave and the shortest processing time T _min is obtained from the 6 ⁿ indices (S28), and the use time of each processing device is allocated based on the processing order and the input time of each lot in that case. Is determined, and an actual manufacturing process is created (S29).

In the above embodiment, for the lot using the same processing apparatus at the same time, the average processing time of the combination patterns of all the processing orders is calculated, and the pattern having the shortest average processing time is selected from the calculated average processing time. The processing steps were determined as described above, but the present invention is not limited to this method. Other methods will be described below. Another embodiment of the manufacturing process management method according to claim 1 of the present invention will be described with reference to the flowchart of FIG. In addition,
The description of the steps equivalent to those in the above embodiment is omitted.

The average processing time T _ave and the shortest processing time T _min are calculated as given in the equations (8) to (19) by the same procedure as in the above embodiment, that is, in steps S 31 to S 36, and the first index and I do. Next, the first index is set as a reference value, the index is compared with an index of another combination pattern calculated thereafter, and when an index equal to or smaller than the reference value occurs, the same comparison process is repeated using the index as a reference value, The convergence state of the reference value is determined (for example, when the reference value is equal to or less than a predetermined set value), and the average processing time T _ave and the shortest processing time T _min of the index are determined as the shortest processing time (S3).
7). The manufacturing process is determined based on the combination pattern of the processing order given by the determination result (S3).
8).

Next, an embodiment of a method for managing a manufacturing process according to claim 2 will be described. The feature of this embodiment is that priorities are set for lots to be subjected to priority processing, and the lot processing time is minimized according to the priorities, and the overall average processing time is also minimized. For example, assuming that the lot having the highest priority is L1 and the unit processing time is Ti _L1 , the target processing end time T1 _next is obtained by adding the unit processing time Ti _L1 of the target processing as in the following equation (14). Given to.

T1 _next = T1 _next + Ti _L1 (20) Here, T1 _next is the target processing end time in the initial state. Next, the higher priority is selected from the remaining two lots L2 and L3, and the same calculation is performed. For example, assuming that the lot having the higher priority is L2 and the unit processing time is Ti _L2 , the target processing end time T2 _next is _calculated by the following equation in consideration of the fact that the processing starts after the processing of the lot L1 is completed, as in the equation (15). Given by

T2 _next = T2 _next + Ti _L1 + Ti _L2 (21) Further, the same processing is performed on the remaining one lot, and assuming that the unit processing time of the lot L3 is Ti _L3 ,
The target processing end time T3 _next is given by the following equation, as in equation (16). T3 _next = T3 _next + Ti _L1 + Ti _L2 + Ti _L3 (22) Such arithmetic processing is repeated until all the steps are completed, and the average processing time T _ave and the highest priority are set as shown in the above-described embodiment of the first embodiment. The processing time _{Tpri of the} lot is calculated, and the calculation result and the combination pattern thereof are set as a first index.

Next, the target processing end times T1 _next and T2 again
_Next and T3 _next are set to the initial state, and when the same processing apparatus is used at the same time, the priority processing order of the lot to be processed next is changed to change the target processing end time T1 _next , T2 _next ,
T3 _next is calculated, the average processing time _Tave and the highest-priority lot processing time _Tpri are calculated, and the calculation result and a combination pattern thereof are used as a second index. In the above description, the calculation was performed assuming that the lot input times are all 0. However, the calculation is performed by setting each time to a finite value other than 0 (corresponding to shifting the lot input time). Can also be performed.

Such an index setting method is realized by designating according to a predetermined priority processing order instead of the processing procedure of randomly extracting lots in the above-described embodiment of the first aspect. In addition, as a method of determining the optimum combination pattern of the processing order from these indices, the shortest processing time according to the priority processing order among all the set indices and the total processing time are minimized. A method of selecting an index having a combined pattern or a method of repeating a comparison process with a predetermined reference value for each index setting, and selecting a combination pattern for which processing time has converged and shortest has been determined is applied. You.

Next, an embodiment of the schematic configuration of the management control device according to claim 3 will be described with reference to a block diagram shown in FIG. This management control device is a configuration for realizing the manufacturing method management method according to claim 1. In FIG.
Reference numeral 1 denotes a setting data input unit (recognition data input means) for inputting setting data such as a basic processing order for each lot and a unit processing time of a unit process applied to each lot. The same processing determining unit 3 that determines whether there is a process by the same processing device at the same time based on the received data, sets a combination pattern of the processing order for each lot based on a command from the same processing determining unit 2. A combination pattern setting unit (combination pattern setting unit) 4 is a combination pattern holding unit that stores and holds the combination pattern in the processing order set by the combination pattern setting unit 3, and 5 is a pattern set by the combination pattern setting unit 3. A processing time calculating unit (total processing time calculating means) for calculating an average processing time and a shortest processing time; A processing time storage unit for storing the average processing time and the shortest processing time for each pattern calculated by the interval calculation unit 5; and 7, a shortest processing time from the average processing time and the shortest processing time calculated by the processing time calculation unit 5. A combination pattern discriminating section (pattern discriminating means) 8 for discriminating a pattern having a pattern is extracted from the combination pattern holding section 4 and outputs a combination pattern in a processing order having the shortest processing time based on the discrimination result of the pattern discriminating section 6. It is a combination pattern output unit (pattern output means). Each of these components is easily realized by an arithmetic function of a computer or the like. For example, the same processing determination unit 2, combination pattern setting unit 3, processing time calculation unit 5, and combination pattern determination unit 7 are configured by a central processing calculation unit (CPU). The combination pattern holding unit 4 and the processing time storage unit 6 are configured by a memory unit such as a RAM.
Further, the setting data input unit 1 is composed of an input device such as a keyboard, for example, and the combination pattern output unit 8
Is constituted by an output device such as a monitor or a printer, or a storage medium such as a floppy disk.

FIG. 2 or FIG.
Of the manufacturing process as shown in the flowchart of FIG. For example, in the processing operation of calculating the average processing time and the shortest processing time for all of the combination patterns of the processing order and setting the index (see the flowchart of FIG. 2), as shown by the solid line arrow in FIG. All of the combination patterns in the processing order set by 3 are held in the combination pattern holding unit 4, and the processing time calculation unit 5 calculates the average processing time T _ave and the shortest processing time T _min for all of these patterns and temporarily processes them. It is stored in the time storage unit 6. Then, the combination pattern determination unit 7 determines a pattern having the shortest processing time, extracts a corresponding pattern from the combination pattern holding unit 4, and outputs the extracted pattern via the combination pattern output unit 8. Here, the combination pattern and its processing time (average processing time T _ave and shortest processing time T _min ) are tabulated as manufacturing process management indexes and stored in a memory, so that the combination pattern can be determined and the corresponding pattern can be extracted. The load on the CPU in the output operation can be reduced.

Further, in the processing operation for comparing the average processing time and the shortest processing time of the combination pattern of the processing order with the reference value each time (refer to the flowchart of FIG. 3), as shown by the dashed arrow in FIG. In addition, the processing time calculation unit 5 calculates the average processing time for the combination pattern of the processing order set by the combination pattern setting unit 3.
T _ave and the shortest processing time T _min are calculated, and the combination pattern discriminating unit 7 performs comparison with a predetermined reference value. The obtained processing time (average processing time T _ave and shortest processing time T _min ) is stored in the processing time storage unit 6.
, And the processing time is set as a new reference value. When it is determined that the reference value has converged and becomes equal to or less than a predetermined set value, for example, the combination pattern having the reference value is combined with the combination pattern holding unit 4.
And outputs it via the combination pattern output unit 8. Here, as a method of determining the shortest processing time, the processing time is calculated for each combination pattern, and compared with a reference value, and the judgment is performed. Can be reduced, and the load on the CPU can be reduced.

Next, an embodiment of the schematic configuration of the management control device according to claim 4 will be described. This management control device has a configuration for realizing the manufacturing method management method according to the second aspect, and its schematic configuration is equivalent to the block diagram shown in FIG. The feature of this embodiment is to minimize the processing time according to the priority processing order of each lot and to minimize the overall average processing time. The combination patterns are sequentially set so that the total processing time is the shortest, the processing time calculation unit 5 calculates the average processing time and the top priority processing time for each of the set combination patterns, and the combination pattern determination unit 7 calculates. The combination pattern in which the highest priority processing time is the shortest and the overall average processing time is the shortest is determined. That is, as a combination pattern determination method, as described above, the processing time is calculated for all of the combination patterns in the processing order set based on the priority processing order, and the combination pattern having the optimum processing time is selected from among them. Or a method in which a comparison with a reference value is performed each time the processing time of a combination pattern is calculated, and a combination pattern having the shortest processing time is determined.

Although the present invention has been described with reference to the embodiments, it is needless to say that the present invention is not limited to the above-described embodiments and can be suitably applied to manufacturing processes other than the semiconductor device. . Further, the method of determining the shortest processing time does not hinder any method other than the method of selecting the minimum value from all the processing times or the method of comparing the reference value every time the processing time is calculated. Further, the reference value may be a minimum value of the processing time up to the previous time, a processing time obtained when each lot is independently processed, or an arbitrary value assigned in relation to another production process. Processing time.

[0040]

As described above, according to the manufacturing process management method and the management control device of the present invention, the same processing time and the same processing time are taken into consideration by taking into account the basic processing order of each lot and the unit processing time for each unit process. The total processing time is calculated for the combination patterns of the processing order of the lots set so that the use of the processing apparatus does not occur, and the combination pattern having the minimum processing time or the processing time equal to or less than the reference value can be selected therefrom. Therefore, the order and the time at which each lot or product is put into each processing apparatus can be optimized, the processing load on each manufacturing apparatus can be evenly distributed, and efficient production can be realized.

[Brief description of the drawings]

FIG. 1 is a flowchart showing a basic processing operation of the present invention.

FIG. 2 is a flowchart showing one embodiment of a processing operation in the manufacturing process management method according to claim 1 of the present invention.

FIG. 3 is a flowchart showing another embodiment of the processing operation in the manufacturing process management method according to claim 1 of the present invention.

FIG. 4 is a block diagram showing an embodiment of a control device for controlling a manufacturing process according to claim 3 of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Setting data input part 2 Same processing discrimination part 3 Combination pattern setting part 4 Combination pattern holding part 5 Processing time calculation part 6 Processing time storage part 7 Combination pattern discrimination part 8 Combination pattern output part

Claims (4)

[Claims] 1. A method of managing a manufacturing process comprising a plurality of continuous unit processes and processing two or more different products, comprising: a basic processing sequence for each of the products and a unit for each of the unit processes, which are known in advance. Based on the processing time, a step of creating a combination pattern in a processing order at which the same processing does not compete at the same time; a step of calculating a total processing time for each of the combination patterns; and a step of calculating the combination pattern having the shortest total processing time. A method of managing a manufacturing process, comprising: a step of selecting; and a step of determining a processing order of each of the products according to the selected combination pattern. 2. A method of managing a manufacturing process comprising a plurality of continuous unit processes and processing two or more different products, comprising: a basic processing order and a priority processing order for each of the products, which are known in advance; Based on the unit processing time for each process, a step of sequentially creating a combination pattern of the processing order of each product from the product with the highest priority processing order to the product with the lowest priority processing order, and for each of the combination patterns Calculating the total processing time; and minimizing the processing time of the product with the higher priority processing order, selecting the combination pattern that minimizes the total processing time, and according to the selected combination pattern. And a step of determining a processing order of each of the products. 3. A management control device for a manufacturing process comprising a plurality of continuous unit processes and processing two or more different products, comprising: a preset basic processing sequence for each of said products; Setting data input means for inputting a unit processing time for each process; andcombination pattern setting means for creating a combination pattern of processing orders at which the same processing does not compete at the same time based on the basic processing order and the unit processing time. A total processing time calculating means for calculating a total processing time for each combination pattern; a pattern determining means for determining the combination pattern having the shortest total processing time; and the shortest total processing time based on the determination result. And a pattern output means for outputting a combination pattern having a pattern. Control device. 4. A management control apparatus for a manufacturing process comprising a plurality of continuous unit processes and processing two or more different products, wherein a basic processing order and a priority processing order for each of the products set in advance and measurement in advance are performed. Setting data input means for inputting the unit processing time for each of the unit processes, based on the basic processing order, the priority processing order and the unit processing time, and setting the combination pattern of the processing order for each product to the priority processing order. Combination pattern setting means for sequentially creating from the product with the highest priority to the product with the lowest priority processing order; total processing time calculation means for calculating the total processing time for each combination pattern; A pattern determination for determining the combination pattern that minimizes the processing time and minimizes the total processing time A management control apparatus for a manufacturing process, comprising: another means; and pattern output means for outputting a combination pattern having the shortest total processing time based on the determination result.