JP2001053045A - Uniform paint film scattering system by moving shower nozzle in horizontal spin washing machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To instantaneously form a liquid film contributing to the reduction of the amount of the liquid and process time, and to make reaction of an entire substrate uniform by moving a movable shower nozzle toward the center of a substrate at appropriate speed while the liquid is scattered from the outside of the spinning substrate. SOLUTION: While liquid 1 is scattered, a shower nozzle 2 on a spinning substrate 5 is moved toward the center of the substrate 5, thus successively forming a liquid film from the outside of the substrate 5, and forming the uniform liquid film on the entire substrate 5 in an instant when the shower nozzle 2 reaches the center. A liquid supply port corresponds to the shower nozzle 2 for scattering the liquid with the area of a shower part rather than the nozzle diameter of the total area of a liquid scattering part small aperture, thus achieving superior efficiency. Furthermore, a supply amount of the liquid is set to merely primary supply on movement and secondary supply by replenishment on stop at the center, thus greatly reducing the amount of liquid to be used.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spin cleaning apparatus for the semiconductor industry, and to various apparatuses mainly for spraying a liquid on a rotating body.

[0002]

2. Description of the Related Art Conventionally, a liquid spraying method of a spin washer is as follows.
Some sprayed from nozzles fixed in the center or from mobile nozzles.

[0003]

In the prior art, since the liquid is supplied by a nozzle while the substrate is rotating, a large number of streak-like flows are generated, which successively fill the gap. It took time for the entire substrate to reach full contact with the liquid. These are the amount of liquid used,
The process time increases, and it takes time from the contact of the liquid to the central part to the complete contact of the entire substrate with the liquid, and there is a large difference in the reaction time between the central side and the circumferential side. Further, since the liquid spreads in a streak shape, a uniform reaction of the entire substrate could not be achieved. In addition, there are strong acid and strong alkali solutions in the type of liquid, and if the amount used is large,
Due to the large amount of emissions, the impact on the environment is a major problem.

In the method according to the first aspect, the liquid supply port is formed into a shower nozzle shape, and the liquid is sprayed onto the spinning substrate while moving the shower nozzle, thereby reducing the amount of liquid used and the processing time. It is an object of the present invention to provide a cleaning method capable of achieving instantaneous formation of a liquid film contributing to the above and a uniform reaction of the entire substrate.

According to a second aspect of the present invention, the liquid supply pipe to the shower nozzle is used as a support, and the support is operated,
An apparatus for realizing the method according to claim 1, wherein the shower nozzle moves while supplying liquid to the shower nozzle.

According to a third aspect of the present invention, in addition to the method of the first aspect, by applying ultrasonic vibration to the substrate, a more favorable cleaning of the substrate is achieved by a synergistic effect with the ultrasonic vibration. The aim is to achieve a cleaning method that can be achieved.

[0007]

According to a first aspect of the present invention, there is provided a method comprising:
A movable shower nozzle moves at an appropriate speed toward the center of the substrate while spraying liquid from the outside of the substrate as a primary supply on the spinning substrate. The shower nozzle that reaches the center, as a secondary supply, sprays the liquid at the flow rate until the end of the process, or sprays the liquid at a reduced flow rate, and returns from the center to the outside of the substrate after the end of the process.

According to a second aspect of the present invention, the liquid supply pipe to the shower nozzle is used as a support, and the support is operated.
An apparatus characterized in that the shower nozzle moves while supplying the liquid to the shower nozzle.

The method according to a third aspect is characterized in that, in addition to the method according to the first aspect, an ultrasonic vibration is applied to the substrate to be cleaned.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A shower nozzle moves toward the center of a spinning substrate while spraying a liquid to form a liquid film sequentially from the outside of the substrate.
As soon as the shower nozzle reaches the center, a uniform liquid film is formed on the entire substrate.

[0011]

[Embodiment] After a uniform liquid film is formed, the liquid film is kept stable even if the supply flow rate changes.
It is only necessary to fix the shower nozzle at the center and to replenish only the amount shaken off from the circumferential portion, and this method contributes to the reduction of the supply liquid amount.

During the drying process, the shower nozzle waits outside the substrate, so that there is no water droplet attached to the shower nozzle due to mist or the like and falling onto the substrate.

[0013]

According to the first aspect of the present invention, since the liquid in contact with the substrate forms a uniform liquid film, a uniform reaction of the entire substrate can be realized. Further, the time required for the shower nozzle to move is a short time because it is the distance corresponding to the radius of the substrate.

According to the first aspect of the present invention, since the liquid supply port is a shower nozzle, the liquid can be sprayed in the area of the shower section more efficiently than the nozzle diameter corresponding to the total area of the small diameter of the liquid spraying portion. Further, since the supply amount of the liquid is only the primary supply at the time of movement and the secondary supply at the center by replenishment at the time of stop, the amount of liquid used can be greatly reduced.

According to the second aspect of the present invention, the liquid supply pipe of the shower nozzle can be used as a support portion, so that the operation method of the shower nozzle becomes easy and the structure of the driving portion is simplified.

According to a third aspect of the present invention, there is provided the first aspect of the present invention.
In addition to the effects of the invention described, for the substrate of the object to be cleaned,
Because the effect of ultrasonic vibration is added, by the synergistic effect,
There is an effect that a better cleaning process can be performed.

[Brief description of the drawings]

FIG. 1 is a structural view according to claim 1 of the present invention;

FIG. 2 is a structural view according to claim 2 of the present invention;

FIG. 3 is a structural view according to claim 3 of the present invention;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Spraying liquid 2 Shower nozzle 3 Liquid supply pipe 4 Shower nozzle moving direction 5 Substrate 6 Rotation axis 7 Substrate rotation direction 8 Operating part 9 Liquid supply pipe fastener 10 Operating range 11 Ultrasonic vibrator liquid supply part 12 Ultrasonic vibrator liquid Supply pipe 13 Liquid supply unit 14 Ultrasonic nozzle hole 15 Shower nozzle hole 16 Ultrasonic vibrator

Claims (3)

[Claims] 1. A liquid supply port having a shower nozzle shape,
A uniform coating spraying method in a horizontal spin washer in which a shower nozzle is moved to the center of the spinning substrate while spraying liquid. 2. The cleaning apparatus according to claim 1, wherein the shower nozzle can be moved by operating a liquid supply pipe to the shower nozzle as a support portion and operating the support portion. 3. The spraying method according to claim 1, wherein an ultrasonic vibrator is added to the shower nozzle.