CN103286090B - Clean device and the Photoresisting coating machines of erasing rubber in light blockage coating processing procedure - Google Patents
Clean device and the Photoresisting coating machines of erasing rubber in light blockage coating processing procedure Download PDFInfo
- Publication number
- CN103286090B CN103286090B CN201310169566.2A CN201310169566A CN103286090B CN 103286090 B CN103286090 B CN 103286090B CN 201310169566 A CN201310169566 A CN 201310169566A CN 103286090 B CN103286090 B CN 103286090B
- Authority
- CN
- China
- Prior art keywords
- erasing rubber
- shower nozzle
- processing procedure
- light blockage
- internal cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 59
- 238000000576 coating method Methods 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims abstract description 42
- 238000012545 processing Methods 0.000 title claims abstract description 37
- 239000007788 liquid Substances 0.000 claims abstract description 31
- 238000004140 cleaning Methods 0.000 claims description 46
- 239000012530 fluid Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000001737 promoting effect Effects 0.000 abstract 1
- 238000005728 strengthening Methods 0.000 abstract 1
- 239000007921 spray Substances 0.000 description 5
- 230000003044 adaptive effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 230000002000 scavenging effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/34—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to influence the nature of flow of the liquid or other fluent material, e.g. to produce swirl
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Coating Apparatus (AREA)
Abstract
The invention discloses a kind of device and the Photoresisting coating machines that clean erasing rubber in light blockage coating processing procedure, this device comprise rinsing table and to be arranged on above rinsing table and liquid outlet towards the shower nozzle in rinsing table direction, be provided with conical internal cavity in this shower nozzle, the pointed cone portion of described conical internal cavity is the liquid outlet of described shower nozzle.The present invention can realize the clean dynamics strengthening erasing rubber in light blockage coating processing procedure while saving production cost, and is conducive to the quality promoting light blockage coating.<!--1-->
Description
Technical field
The present invention relates to LCD color film light blockage coating technical field, particularly relate to a kind of device and the Photoresisting coating machines that clean erasing rubber in light blockage coating processing procedure.
Background technology
High speed coating machine (Coater) in flat-panel monitor process industry needs the action carrying out " telling in advance " before coated with glass, after " telling in advance ", photoresistance (the PR in coating shower nozzle (Nozzle) is remained in for clean last time coating, PhotoResist) and " telling in advance " photoresistance remain, erasing rubber (Rubber need be used, Wiper) position that spues of coating shower nozzle is cleaned, and upper once tell in advance before use chemical solvent to complete the clean of erasing rubber surface.Because the residual photoresistance on coating shower nozzle cleans primarily of erasing rubber, especially colored filter photoresistance solid content is very high, and pigment molecule is in " suspended state " in chemical solvent in photoresistance, thus easily there is cohesion and be difficult to again disperse in a solvent, in colored filter manufacture process, easily form " Gel " (photoresistance slag), therefore the impact of cleannes on light blockage coating quality of erasing rubber is most important.
With reference to the structural representation that Fig. 1, Fig. 1 are the devices cleaning erasing rubber in light blockage coating processing procedure in prior art.In the prior art, erasing rubber 30(refers generally to the first erasing rubber and the second erasing rubber) be thorough clean coating shower nozzle, be designed to and be coated with shower nozzle and fit (in inverted triangle shape).The erasing rubber cleaning mode of general employing is: adopt vertical spray cleaning head 2 to use vertical mode clean first erasing rubber and the second erasing rubber respectively, as shown in Figure 1, wherein the purity requirements of the second erasing rubber is higher than the first erasing rubber.The chemical solvent that vertical spray cleaning head 2 sprays is dispersed and fluid area large, all adopts same intensity to clean to various piece, but erasing rubber 30 designs with coating shower nozzle contact portion actual size less, dirty skewness.Therefore, need thoroughly clean erasing rubber surface more difficult, particularly long-time continuous easily produces photoresistance and remains erasing rubber 30 surface after producing, and also easily causes waste simultaneously.And through experiment test, clean ability and cleaning shower nozzle (shower) of erasing rubber 30 clean discharge relation more greatly, the high speed of namely cleaning shower nozzle is rinsed and can effectively be strengthened clean ability.And stable cleaning performance will be reached, conventional clean shower nozzle need be heightened flow or extend scavenging period, turn increases production cost like this.
Summary of the invention
Main purpose of the present invention is to provide a kind of device cleaning erasing rubber in light blockage coating processing procedure, is intended to strengthen the clean ability to erasing rubber, and saves production cost.
In order to achieve the above object, the present invention proposes a kind of device cleaning erasing rubber in light blockage coating processing procedure, this device comprise rinsing table and to be arranged on above rinsing table and liquid outlet towards the shower nozzle in rinsing table direction, be provided with conical internal cavity in this shower nozzle, the pointed cone portion of described conical internal cavity is the liquid outlet of described shower nozzle.
Preferably, also comprise control circuit, described rinsing table is provided with and described erasing rubber is carried out cleaning positions location and fixing location division, and this location division is connected with described control circuit.
Preferably, the liquid outlet of described shower nozzle is provided with cone tank.
Preferably, the liquid outlet of described shower nozzle is provided with V-shaped groove.
Preferably, described shower nozzle is the combined sprinkler with the first conical internal cavity and the second conical internal cavity, and the pointed cone portion of described first conical internal cavity and the second conical internal cavity is liquid outlet.
Preferably, described combined sprinkler is provided with the control valve controlling cleaning fluid ejection/shutoff.
Preferably, described shower nozzle is obliquely installed and the setting angle of this angle of inclination and erasing rubber is adaptive at an angle.
The present invention also proposes a kind of Photoresisting coating machines, comprises the device of erasing rubber in cleaning light blockage coating processing procedure; This device comprise rinsing table and to be arranged on above rinsing table and liquid outlet towards the shower nozzle in rinsing table direction, be provided with conical internal cavity in this shower nozzle, the pointed cone portion of described conical internal cavity is the liquid outlet of described shower nozzle.
The present invention by arranging the shower nozzle that has conical internal cavity on rinsing table, the pointed cone portion of described conical internal cavity is the liquid outlet of described shower nozzle, and the liquid outlet of shower nozzle is aimed at rinsing table direction, therefore, the clean ability to erasing rubber can be strengthened during work, and save production cost.
Accompanying drawing explanation
Fig. 1 is a structural representation of the device cleaning erasing rubber in light blockage coating processing procedure in prior art;
Fig. 2 is the structural representation that the present invention cleans device one embodiment of erasing rubber in light blockage coating processing procedure;
Fig. 3 is the structural representation that the present invention cleans another embodiment of device of erasing rubber in light blockage coating processing procedure;
Fig. 4 is the structural representation that the present invention cleans the another embodiment of device of erasing rubber in light blockage coating processing procedure;
Fig. 5 is the structural representation of the device also embodiment that the present invention cleans erasing rubber in light blockage coating processing procedure;
Fig. 6 is the fragmentary, perspective view that the present invention cleans shower nozzle in device one embodiment of erasing rubber in light blockage coating processing procedure;
Fig. 7 is the fragmentary, perspective view that the present invention cleans combined sprinkler in device one embodiment of erasing rubber in light blockage coating processing procedure;
Fig. 8 is the angled arrangement schematic diagram that the present invention cleans shower nozzle in device one embodiment of erasing rubber in light blockage coating processing procedure;
Fig. 9 is the angled arrangement schematic diagram that the present invention cleans shower nozzle in another embodiment of device of erasing rubber in light blockage coating processing procedure.
The realization of the object of the invention, functional characteristics and advantage will in conjunction with the embodiments, are described further with reference to accompanying drawing.
Detailed description of the invention
Technical scheme of the present invention is further illustrated below in conjunction with Figure of description and specific embodiment.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
The present invention proposes a kind of device cleaning erasing rubber in light blockage coating processing procedure.
With reference to shown in Fig. 2 to Fig. 9, Fig. 2 is the structural representation that the present invention cleans device one embodiment of erasing rubber in light blockage coating processing procedure; Fig. 3 is the structural representation that the present invention cleans another embodiment of device of erasing rubber in light blockage coating processing procedure; Fig. 4 is the structural representation that the present invention cleans the another embodiment of device of erasing rubber in light blockage coating processing procedure; Fig. 5 is the structural representation of the device also embodiment that the present invention cleans erasing rubber in light blockage coating processing procedure; Fig. 6 is the fragmentary, perspective view that the present invention cleans shower nozzle in device one embodiment of erasing rubber in light blockage coating processing procedure; Fig. 7 is the fragmentary, perspective view that the present invention cleans combined sprinkler in device one embodiment of erasing rubber in light blockage coating processing procedure; Fig. 8 is the angled arrangement schematic diagram that the present invention cleans shower nozzle in device one embodiment of erasing rubber in light blockage coating processing procedure; Fig. 9 is the angled arrangement schematic diagram that the present invention cleans shower nozzle in another embodiment of device of erasing rubber in light blockage coating processing procedure.
With reference to Fig. 2, Fig. 4 and Fig. 6, in the cleaning light blockage coating processing procedure that the present embodiment provides the device of erasing rubber comprise rinsing table 10 and to be arranged on above rinsing table 10 and liquid outlet 201 towards the shower nozzle 20 in rinsing table 10 direction, be provided with conical internal cavity 202 in this shower nozzle 20, the pointed cone portion of described conical internal cavity 202 is the liquid outlet 201 of described shower nozzle.Therefore, the fluid pressure of ejection can be made comparatively strong, thus strengthen cleaning performance again while saving production cost, be conducive to the production quality improving light blockage coating.
Particularly, above-mentioned rinsing table 10 is provided with and described erasing rubber 30 is carried out cleaning positions location and fixing location division (not shown), this location division is connected with a control circuit, there is in this control circuit program editing chip, move to assigned address by editor and the controlled location division processed of working procedure.Above-mentioned shower nozzle 20 is fixed in a support (not shown), and this support is fixed on rinsing table 10, and makes the liquid outlet 201 of shower nozzle 20 aim at rinsing table 10, and the liquid outlet 201 of shower nozzle 20 can just arrange rinsing table 10 or tilt certain angle arrange.
When operating, control circuit execution pre-set programs controls erasing rubber 30 to be cleaned and moves to the cleaning positions that rinsing table 10 pre-sets, then start shower nozzle 20 and can carry out cleaning showers to erasing rubber 30, as shown in Figure 2, in light blockage coating technique, erasing rubber 30 refers generally to the first erasing rubber 301 and the second erasing rubber 302, when cleaning, respectively the first erasing rubber 301 and the second erasing rubber 302 are cleaned.Wherein, the inner chamber 201 of shower nozzle 20 is taper, and the fluid pressure of ejection can be made comparatively strong, and the intensity spraying fluid pressure directly affects cleaning performance, pressure is stronger, and removing photoresistance ability is stronger.And by reasonably designing the size of liquid outlet 201, the uniform liquid of ejection can be made to disperse, thus achieve good cleaning performance.Further, in order to better save scavenging period, and when the cleannes of guarantee first erasing rubber 301 and the second erasing rubber 302, can a liquid outlet be set on shower nozzle 20 again, and the position of the position of two liquid outlets and the first erasing rubber 301 and the second erasing rubber 302 is adaptive, can realize like this cleaning the first erasing rubber 201 and the second erasing rubber 302 simultaneously.
Should be understood that, while utilizing the shower nozzle 20 with conical internal cavity 202 to strengthen the clean dynamics of discharge pressure reinforcement, owing to greatly reducing the quantity of liquid outlet 201, so do not increase the cost of the cleaning fluid expended under the same terms, on the contrary, waste is also reduced.
With reference in Fig. 6, Fig. 8 and Fig. 9 the present embodiment, in order to make the liquid of ejection be diverging diffusion and Relatively centralized, to strengthen cleaning capacity, the liquid outlet 201 of above-mentioned shower nozzle 20 is provided with cone tank 203.This cone tank 203 is generally taper shape, and as Fig. 5, the large I of this cone tank 203 is specifically arranged according to actual needs.Certainly, above-mentioned cone tank 203 can also be arranged to V-shaped groove 204, as Fig. 4, the liquid sprayed can be made to be fan-shaped diffusion, by reducing the scattering of shower nozzle 20, concentrating cleaning some areas, not only can strengthen clean ability, can also save cleaning liquid.
As shown in Fig. 4, Fig. 5 and Fig. 7, in the present embodiment, above-mentioned shower nozzle is the combined sprinkler with the first conical internal cavity 401 and the second conical internal cavity 402, and the pointed cone portion of described first conical internal cavity 401 and the second conical internal cavity 402 is liquid outlet 201.Particularly, combinations thereof shower nozzle can be two identical shower nozzle combinations and is fixed together, and can reduce the time of cleaning first erasing rubber 301 and the second erasing rubber 302 like this.Certainly this combined sprinkler also can be the parent-subsidiary nozzle (not shown) that the first conical internal cavity 401 is communicated with the second conical internal cavity 402, can reduce the time of cleaning first erasing rubber 301 and the second erasing rubber 302 equally.
Further, in order to realize controlling flexibly combinations thereof shower nozzle or parent-subsidiary nozzle cleans needing the first clean erasing rubber 301 and the second erasing rubber 302, combinations thereof shower nozzle is provided with the control valve (not shown) controlling cleaning fluid ejection/turn off.Wherein on two shower nozzles, respectively establish a control valve respectively, can realize one of them shower nozzle and spray, another turns off, to avoid waste.
With reference to Fig. 3 and Fig. 5, in the present embodiment, above-mentioned shower nozzle 20 is obliquely installed at an angle, and the setting angle of this angle of inclination and erasing rubber 30 is adaptive.It will be understood by those of skill in the art that and to be with respect to the horizontal plane obliquely installed all at an angle for the first erasing rubber 301 of clean coating mouth and the second erasing rubber 302, namely the first erasing rubber 301 and the second erasing rubber 302 are parallel to each other and are located along the same line.Therefore, during mounting spray head 20, if when making the liquid outlet 201 of shower nozzle 20 just to the first erasing rubber 301 and second erasing rubber 302 position (namely shower nozzle 20 is perpendicular to horizontal plane), because the first erasing rubber 301 and the second erasing rubber 302 tilt certain angle, itself can stop the cleaning fluid sprayed out, some are not just washed clean clearly by the dead angle that stops, so above-mentioned shower nozzle 20 is set to and the first erasing rubber 301 and the with respect to the horizontal plane same setting angle of the second erasing rubber 302.Like this, when the first erasing rubber 301 to be cleaned and the second erasing rubber 302 move to cleaning positions (i.e. the best jeting area of shower nozzle), just there is no dead angle, thus effectively can clean clean first erasing rubber 301 and the second erasing rubber 302.And, because the purity requirements of the second erasing rubber 302 is higher than the first erasing rubber 301, therefore, by specifically arranging the position relationship of shower nozzle 20 and the first erasing rubber 301 and the second erasing rubber 302, shower nozzle 20 is made mainly to aim at the first erasing rubber 301, jeting area edge is radiated to the second erasing rubber 302, can carry out prerinse, at utmost can utilize cleaning fluid like this while main wash first erasing rubber 301 to the second erasing rubber 302.Then, when clean second erasing rubber 302, just at short notice the photoresistance remained on the second erasing rubber can be cleaned up, therefore, save the time of cleaning first erasing rubber 301 and the second erasing rubber 302 generally.
Should be understood that, if installation is combined sprinkler, combined sprinkler can be obliquely installed at an angle equally, and the setting angle of this angle of inclination and erasing rubber 30 is adaptive.During cleaning, the first erasing rubber 301 and the second erasing rubber 302 are moved to prerinse position, the first erasing rubber 301 and the second erasing rubber 302 can be cleaned up equally, and be conducive to saving scavenging period.
The present invention also provides a kind of Photoresisting coating machines, and this Photoresisting coating machines comprises the device of erasing rubber in aforementioned cleaning light blockage coating processing procedure, repeats no more herein.Owing to employing the device of erasing rubber in aforementioned cleaning light blockage coating processing procedure, therefore can strengthen cleaning performance, improve light blockage coating quality and save production cost.
The foregoing is only the preferred embodiments of the present invention; not thereby the scope of the claims of the present invention is limited; every utilize description of the present invention and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (7)
1. one kind is cleaned the device of erasing rubber in light blockage coating processing procedure, comprise rinsing table, it is characterized in that, also comprise to be arranged on above rinsing table and liquid outlet towards the shower nozzle in rinsing table direction, conical internal cavity is provided with in this shower nozzle, the pointed cone portion of described conical internal cavity is the liquid outlet of described shower nozzle, described shower nozzle is horizontal by an angular slope setting and this angle of inclination and erasing rubber setting angle is with respect to the horizontal plane identical, described shower nozzle is the combined sprinkler with the first conical internal cavity and the second conical internal cavity, described combined sprinkler is that two identical jet head sets are combined or are the parent-subsidiary nozzle that the first conical internal cavity is communicated with the second conical internal cavity.
2. the device of erasing rubber in cleaning light blockage coating processing procedure according to claim 1, it is characterized in that, also comprise control circuit, described rinsing table is provided with and described erasing rubber is carried out cleaning positions location and fixing location division, and this location division is connected with described control circuit.
3. the device of erasing rubber in cleaning light blockage coating processing procedure according to claim 1, it is characterized in that, the liquid outlet of described shower nozzle is provided with cone tank.
4. the device of erasing rubber in cleaning light blockage coating processing procedure according to claim 1, it is characterized in that, the liquid outlet of described shower nozzle is provided with V-shaped groove.
5. the device of erasing rubber in cleaning light blockage coating processing procedure according to claim 1, it is characterized in that, the pointed cone portion of described first conical internal cavity and the second conical internal cavity is liquid outlet.
6. the device of erasing rubber in cleaning light blockage coating processing procedure according to claim 5, is characterized in that, described combined sprinkler is provided with the control valve controlling cleaning fluid ejection/turn off.
7. a Photoresisting coating machines, is characterized in that, comprises the device of erasing rubber in the cleaning light blockage coating processing procedure described in any one of claim 1-6.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310169566.2A CN103286090B (en) | 2013-05-09 | 2013-05-09 | Clean device and the Photoresisting coating machines of erasing rubber in light blockage coating processing procedure |
| PCT/CN2013/078082 WO2014180043A1 (en) | 2013-05-09 | 2013-06-26 | Apparatus for cleaning rubber eraser in photoresist coating process, and photoresist coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310169566.2A CN103286090B (en) | 2013-05-09 | 2013-05-09 | Clean device and the Photoresisting coating machines of erasing rubber in light blockage coating processing procedure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103286090A CN103286090A (en) | 2013-09-11 |
| CN103286090B true CN103286090B (en) | 2016-01-13 |
Family
ID=49087916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310169566.2A Expired - Fee Related CN103286090B (en) | 2013-05-09 | 2013-05-09 | Clean device and the Photoresisting coating machines of erasing rubber in light blockage coating processing procedure |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103286090B (en) |
| WO (1) | WO2014180043A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106647186A (en) * | 2017-01-11 | 2017-05-10 | 东旭（昆山）显示材料有限公司 | Cleaning unit and method for eraser of coating machine and coating machine |
| CN107115990A (en) * | 2017-04-17 | 2017-09-01 | 武汉华星光电技术有限公司 | The cleaning device of nozzle sanitary equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5597122A (en) * | 1993-02-09 | 1997-01-28 | Alfred Karcher Gmbh & Co. | Flat jet nozzle for a high-pressure cleaning device |
| US5942045A (en) * | 1992-12-08 | 1999-08-24 | Flow International Corporation | Hard coating removal with ultrahigh-pressure fan jets |
| CN2621822Y (en) * | 2003-05-21 | 2004-06-30 | 哈尔滨市科佳通用机电有限公司 | Cleaner nozzle |
| CN2855548Y (en) * | 2005-11-27 | 2007-01-10 | 马文忠 | Cleaning spraing nozzle |
| CN201454736U (en) * | 2009-08-04 | 2010-05-12 | 上海小糸车灯有限公司 | Multiple-jet nozzle for cleaning car lamp |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87214261U (en) * | 1987-10-16 | 1988-03-23 | 石油工业部华东勘察设计研究院 | Stream whirl nozzle |
| CN2820353Y (en) * | 2005-08-08 | 2006-09-27 | 张恒 | Portable electric cleaner |
| KR100937849B1 (en) * | 2005-12-29 | 2010-01-21 | 엘지디스플레이 주식회사 | Apparatus and method for cleaning nozzle |
| JP4884038B2 (en) * | 2006-03-10 | 2012-02-22 | 東京応化工業株式会社 | Slit nozzle cleaning device |
| JP2009220056A (en) * | 2008-03-18 | 2009-10-01 | Toray Ind Inc | Method and device for cleaning slit nozzle, and method and apparatus for manufacturing display member |
| JP5766990B2 (en) * | 2011-03-23 | 2015-08-19 | 東レエンジニアリング株式会社 | Coating device |
-
2013
- 2013-05-09 CN CN201310169566.2A patent/CN103286090B/en not_active Expired - Fee Related
- 2013-06-26 WO PCT/CN2013/078082 patent/WO2014180043A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5942045A (en) * | 1992-12-08 | 1999-08-24 | Flow International Corporation | Hard coating removal with ultrahigh-pressure fan jets |
| US5597122A (en) * | 1993-02-09 | 1997-01-28 | Alfred Karcher Gmbh & Co. | Flat jet nozzle for a high-pressure cleaning device |
| CN2621822Y (en) * | 2003-05-21 | 2004-06-30 | 哈尔滨市科佳通用机电有限公司 | Cleaner nozzle |
| CN2855548Y (en) * | 2005-11-27 | 2007-01-10 | 马文忠 | Cleaning spraing nozzle |
| CN201454736U (en) * | 2009-08-04 | 2010-05-12 | 上海小糸车灯有限公司 | Multiple-jet nozzle for cleaning car lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014180043A1 (en) | 2014-11-13 |
| CN103286090A (en) | 2013-09-11 |
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Granted publication date: 20160113 |