JP2001048539A5 - - Google Patents
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- Publication number
- JP2001048539A5 JP2001048539A5 JP1999223724A JP22372499A JP2001048539A5 JP 2001048539 A5 JP2001048539 A5 JP 2001048539A5 JP 1999223724 A JP1999223724 A JP 1999223724A JP 22372499 A JP22372499 A JP 22372499A JP 2001048539 A5 JP2001048539 A5 JP 2001048539A5
- Authority
- JP
- Japan
- Prior art keywords
- titanium oxide
- thin film
- heat
- oxide thin
- titanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 9
- OGIDPMRJRNCKJF-UHFFFAOYSA-N TiO Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 7
- 229910001929 titanium oxide Inorganic materials 0.000 description 7
- 239000010409 thin film Substances 0.000 description 5
- 238000006460 hydrolysis reaction Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003301 hydrolyzing Effects 0.000 description 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 2
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-N Carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N ethylene glycol monomethyl ether Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011941 photocatalyst Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22372499A JP2001048539A (ja) | 1999-08-06 | 1999-08-06 | 酸化チタン薄膜の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22372499A JP2001048539A (ja) | 1999-08-06 | 1999-08-06 | 酸化チタン薄膜の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001048539A JP2001048539A (ja) | 2001-02-20 |
| JP2001048539A5 true JP2001048539A5 (ko) | 2006-04-27 |
Family
ID=16802698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22372499A Pending JP2001048539A (ja) | 1999-08-06 | 1999-08-06 | 酸化チタン薄膜の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001048539A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4947678B2 (ja) * | 2001-08-23 | 2012-06-06 | 宇部日東化成株式会社 | 酸化チタン薄膜の製造方法および有機−無機複合傾斜材料の製造方法 |
-
1999
- 1999-08-06 JP JP22372499A patent/JP2001048539A/ja active Pending
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