JP2001046833A5 - - Google Patents
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- Publication number
- JP2001046833A5 JP2001046833A5 JP1999225888A JP22588899A JP2001046833A5 JP 2001046833 A5 JP2001046833 A5 JP 2001046833A5 JP 1999225888 A JP1999225888 A JP 1999225888A JP 22588899 A JP22588899 A JP 22588899A JP 2001046833 A5 JP2001046833 A5 JP 2001046833A5
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- water
- heater
- exhausted
- dry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22588899A JP4210395B2 (ja) | 1999-08-10 | 1999-08-10 | ドライエッチング排ガス処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22588899A JP4210395B2 (ja) | 1999-08-10 | 1999-08-10 | ドライエッチング排ガス処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001046833A JP2001046833A (ja) | 2001-02-20 |
| JP2001046833A5 true JP2001046833A5 (enExample) | 2006-08-24 |
| JP4210395B2 JP4210395B2 (ja) | 2009-01-14 |
Family
ID=16836453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22588899A Expired - Fee Related JP4210395B2 (ja) | 1999-08-10 | 1999-08-10 | ドライエッチング排ガス処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4210395B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011058033A (ja) * | 2009-09-08 | 2011-03-24 | Taiyo Nippon Sanso Corp | 排ガス処理系配管内における珪フッ化アンモニウムの堆積抑制方法 |
| JP2013086088A (ja) * | 2011-10-24 | 2013-05-13 | Taiyo Nippon Sanso Corp | ハロゲン化物粒子を含むガスの除害方法 |
| JP6058107B1 (ja) * | 2015-12-01 | 2017-01-11 | 日立造船株式会社 | ガス水洗装置 |
| KR101820821B1 (ko) * | 2017-06-27 | 2018-01-22 | (주)제이솔루션 | 설치가 용이한 반도체 및 lcd 제조공정의 배기가스 가열용 3중 배관 가열장치 |
-
1999
- 1999-08-10 JP JP22588899A patent/JP4210395B2/ja not_active Expired - Fee Related
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