JP2001046833A5 - - Google Patents
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- Publication number
- JP2001046833A5 JP2001046833A5 JP1999225888A JP22588899A JP2001046833A5 JP 2001046833 A5 JP2001046833 A5 JP 2001046833A5 JP 1999225888 A JP1999225888 A JP 1999225888A JP 22588899 A JP22588899 A JP 22588899A JP 2001046833 A5 JP2001046833 A5 JP 2001046833A5
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- water
- heater
- exhausted
- dry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- VSCWAEJMTAWNJL-UHFFFAOYSA-K Aluminium chloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Description
各ドライエッチング装置Ａ，Ｂ，Ｃから排気された排ガスは、真空に保たれたマニホルドを経由してドライポンプ（真空ポンプ）１から、加熱手段２によって加熱された排ガス通路３に排気され、昇華性物質を気体状態に保ったまま自吸式微細気泡発生装置Ｄに送入される。加熱手段２としては特に限定されないが、通常、ステンレス鋼製の曲げ部分のある配管を加熱する関係からリボンヒータ、テープヒータ、マントルヒータ等作業性のよいもの、また、温度調節が可能なものが好ましく用いられる。 Exhaust gas exhausted from each of the dry etching devices A, B, and C is exhausted from a dry pump (vacuum pump) 1 through a vacuum-held manifold to an exhaust gas passage 3 heated by a heating unit 2, and sublimated. While the volatile substance is kept in a gaseous state, it is sent to the self-priming fine bubble generator D. Although the heating means 2 is not particularly limited, usually, a heater having good workability, such as a ribbon heater, a tape heater, and a mantle heater, and a heater capable of controlling the temperature are used because of heating a pipe having a bent portion made of stainless steel. It is preferably used.
自吸式微細気泡発生装置Ｄの吸気管４の上部から吸引され、微細気泡として水中に分散された排ガスは、水と接触して塩化アルミニウム等の水溶性物質、余剰の塩素系ガス等が除去された後、水洗塔９でさらに水洗され、大気中に放出される。 Exhaust gas sucked from the upper part of the suction pipe 4 of the self-priming fine bubble generator D and dispersed as fine bubbles in water is brought into contact with water to remove water-soluble substances such as aluminum chloride and excess chlorine-based gas. After that, it is further washed with a washing tower 9 and released into the atmosphere.
また自吸式微細気泡発生装置のロータ６を、液槽の下方に設けた駆動部により回転する方式とした場合、排ガス通路３の一部を構成する吸気管４の内部には、長時間の使用により塩化アルミニウム等が析出する場合がある。このときは、吸気管４への排ガス導入部より上方に水供給手段７を設けて水をスプレイ状に噴射して、水の持つ溶解力あるいは水勢により、固形物を除去する。水洗後、水−窒素ガス導入切替弁８を切替えて水洗ラインに窒素ガスを流し、水供給手段７等を乾燥させ、同時に吸気管４の乾燥も行なう。 The addition rotor 6 self-priming fine bubble generating equipment, when a method of rotating by a driving unit provided below the liquid tank, in the interior of the intake pipe 4 constituting a part of the exhaust gas passage 3 for a long time May precipitate aluminum chloride and the like. At this time, a water supply means 7 is provided above the exhaust gas introduction portion to the intake pipe 4 to spray water in a spray shape, and solids are removed by the dissolving power or water force of the water. After rinsing, the water-nitrogen gas introduction switching valve 8 is switched to flow nitrogen gas into the rinsing line to dry the water supply means 7 and the like, and at the same time to dry the intake pipe 4.
上記した吸気管４の洗浄作業の間に、排ガス通路３を全般に亘って目視により点検したところ、固形物の堆積は殆ど見られなかった。 During the cleaning operation of the intake pipe 4 described above, the exhaust gas passage 3 was visually inspected over the entire area, and hardly any solid matter was deposited.
【００３１】
【発明の効果】
以上述べたように、アルミニウムドライエッチング工程から排気される三塩化アルミニウム等の昇華性物質を含む排ガスの通路に、真空ポンプを接続し、真空ポンプから排気された排ガスを、加熱された排ガス通路を通して排ガス処理装置に導くことにより、上記の昇華性物質の配管内での堆積を防ぐことができた。
[0031]
【The invention's effect】
Above As mentioned, the passage of exhaust gas containing sublimable material, such as aluminum trichloride exhausted from aluminum dry etching process, to connect the vacuum pump, the exhaust gas exhausted from the vacuum pump, heated exhaust gas channel By passing through to the exhaust gas treatment device through the, the above-mentioned sublimation substance was prevented from being deposited in the pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22588899A JP4210395B2 (en) | 1999-08-10 | 1999-08-10 | Dry etching exhaust gas treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22588899A JP4210395B2 (en) | 1999-08-10 | 1999-08-10 | Dry etching exhaust gas treatment equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001046833A JP2001046833A (en) | 2001-02-20 |
| JP2001046833A5 true JP2001046833A5 (en) | 2006-08-24 |
| JP4210395B2 JP4210395B2 (en) | 2009-01-14 |
Family
ID=16836453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22588899A Expired - Fee Related JP4210395B2 (en) | 1999-08-10 | 1999-08-10 | Dry etching exhaust gas treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4210395B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011058033A (en) * | 2009-09-08 | 2011-03-24 | Taiyo Nippon Sanso Corp | Method for suppressing deposition of ammonium silicofluoride in exhaust gas treatment system piping |
| JP2013086088A (en) * | 2011-10-24 | 2013-05-13 | Taiyo Nippon Sanso Corp | Detoxifying method of gas including halide particle |
| JP6058107B1 (en) * | 2015-12-01 | 2017-01-11 | 日立造船株式会社 | Gas water washing device |
| KR101820821B1 (en) * | 2017-06-27 | 2018-01-22 | (주)제이솔루션 | Triple pipe heating device for exhaust gas heating in a semiconductor and lcd manufacturing process |
-
1999
- 1999-08-10 JP JP22588899A patent/JP4210395B2/en not_active Expired - Fee Related
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