JP2001044569A5 - - Google Patents

Download PDF

Info

Publication number
JP2001044569A5
JP2001044569A5 JP2000177538A JP2000177538A JP2001044569A5 JP 2001044569 A5 JP2001044569 A5 JP 2001044569A5 JP 2000177538 A JP2000177538 A JP 2000177538A JP 2000177538 A JP2000177538 A JP 2000177538A JP 2001044569 A5 JP2001044569 A5 JP 2001044569A5
Authority
JP
Japan
Prior art keywords
semiconductor material
dopant
semiconductor
layer
doped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000177538A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001044569A (ja
Filing date
Publication date
Priority claimed from GB9913900A external-priority patent/GB2351390A/en
Application filed filed Critical
Publication of JP2001044569A publication Critical patent/JP2001044569A/ja
Publication of JP2001044569A5 publication Critical patent/JP2001044569A5/ja
Withdrawn legal-status Critical Current

Links

JP2000177538A 1999-06-16 2000-06-13 ドープド半導体材料、ドープド半導体材料の製造方法、および半導体デバイス Withdrawn JP2001044569A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9913900A GB2351390A (en) 1999-06-16 1999-06-16 A semiconductor material comprising two dopants
GB9913900.8 1999-06-16

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009020700A Division JP2009158964A (ja) 1999-06-16 2009-01-30 半導体材料および半導体デバイス

Publications (2)

Publication Number Publication Date
JP2001044569A JP2001044569A (ja) 2001-02-16
JP2001044569A5 true JP2001044569A5 (https=) 2005-10-20

Family

ID=10855379

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000177538A Withdrawn JP2001044569A (ja) 1999-06-16 2000-06-13 ドープド半導体材料、ドープド半導体材料の製造方法、および半導体デバイス
JP2009020700A Pending JP2009158964A (ja) 1999-06-16 2009-01-30 半導体材料および半導体デバイス

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2009020700A Pending JP2009158964A (ja) 1999-06-16 2009-01-30 半導体材料および半導体デバイス

Country Status (4)

Country Link
US (2) US6426522B1 (https=)
EP (1) EP1061563A3 (https=)
JP (2) JP2001044569A (https=)
GB (1) GB2351390A (https=)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6653213B2 (en) * 2000-12-21 2003-11-25 Bookham Technology, Plc Structure and method for doping of III-V compounds
JP4265875B2 (ja) * 2001-05-28 2009-05-20 日本オプネクスト株式会社 面発光半導体レーザの製造方法
DE10219345B4 (de) * 2002-04-30 2011-05-19 Osram Opto Semiconductors Gmbh Strahlungsemittierendes Halbleiterbauelement mit Co-Dotierung
DE10262373B3 (de) * 2002-04-30 2013-01-17 Osram Opto Semiconductors Gmbh Strahlungsemittierendes Halbleiterbauelement mit Co-Dotierung
US6750482B2 (en) * 2002-04-30 2004-06-15 Rf Micro Devices, Inc. Highly conductive semiconductor layer having two or more impurities
US7110629B2 (en) * 2002-07-22 2006-09-19 Applied Materials, Inc. Optical ready substrates
US7126052B2 (en) * 2002-10-02 2006-10-24 The Boeing Company Isoelectronic surfactant induced sublattice disordering in optoelectronic devices
US7122734B2 (en) * 2002-10-23 2006-10-17 The Boeing Company Isoelectronic surfactant suppression of threading dislocations in metamorphic epitaxial layers
JP2007501448A (ja) * 2003-05-29 2007-01-25 アプライド マテリアルズ インコーポレイテッド 光学信号の直列経路
US7075165B2 (en) * 2003-05-29 2006-07-11 Applied Material, Inc. Embedded waveguide detectors
EP1627454A4 (en) * 2003-05-29 2007-04-25 Applied Materials Inc ROOM-BASED WAVEGUIDE DETECTORS
DE10329079B4 (de) * 2003-06-27 2014-10-23 Osram Opto Semiconductors Gmbh Strahlungsemittierendes Halbleiterbauelement
US7205624B2 (en) * 2003-10-07 2007-04-17 Applied Materials, Inc. Self-aligned implanted waveguide detector
US20050214964A1 (en) * 2003-10-07 2005-09-29 Applied Materials, Inc. Patent Counsel, Legal Affairs Dept. Sige super lattice optical detectors
JP2005203520A (ja) * 2004-01-14 2005-07-28 Sumitomo Electric Ind Ltd 半導体発光素子
JP2005236024A (ja) * 2004-02-19 2005-09-02 Fuji Photo Film Co Ltd 半導体レーザ素子
US7172949B2 (en) * 2004-08-09 2007-02-06 Micron Technology, Inc. Epitaxial semiconductor layer and method
WO2007027615A1 (en) * 2005-09-01 2007-03-08 Applied Materials, Inc. Ridge technique for fabricating an optical detector and an optical waveguide
FR2898433B1 (fr) * 2006-03-08 2008-06-06 Commissariat Energie Atomique Procede de preparation d'un semi-conducteur.
DE102006013228A1 (de) * 2006-03-22 2007-09-27 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterkörper
US9142714B2 (en) * 2008-10-09 2015-09-22 Nitek, Inc. High power ultraviolet light emitting diode with superlattice
WO2011112612A1 (en) 2010-03-08 2011-09-15 Alliance For Sustainable Energy, Llc Boron, bismuth co-doping of gallium arsenide and other compounds for photonic and heterojunction bipolar transistor devices
US8575659B1 (en) 2011-08-13 2013-11-05 Hrl Laboratories, Llc Carbon-beryllium combinationally doped semiconductor
TWI597862B (zh) * 2013-08-30 2017-09-01 晶元光電股份有限公司 具阻障層的光電半導體元件
KR20160054712A (ko) * 2014-11-06 2016-05-17 삼성전자주식회사 반도체 발광소자 및 반도체 발광소자 패키지
JP6940866B2 (ja) * 2017-06-21 2021-09-29 国立研究開発法人情報通信研究機構 半導体光デバイス、半導体光源、光集積回路、及び半導体光デバイスの製造方法
TWI640648B (zh) * 2017-11-24 2018-11-11 Institute Of Nuclear Energy Research, Atomic Energy Council, Executive Yuan, R. O. C 以有機金屬化學氣相沉積法製作磷化銦鎵磊晶層的方法
US11228160B2 (en) * 2018-11-15 2022-01-18 Sharp Kabushiki Kaisha AlGaInPAs-based semiconductor laser device and method for producing same
US12514033B2 (en) 2021-04-23 2025-12-30 Virginia Commonwealth University P-type beryllium doped gallium nitride semiconductors and methods of production
DE102023117461A1 (de) * 2023-07-03 2025-01-09 Ams-Osram International Gmbh Halbleiterstruktur für ein halbleiterbauelement

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT956828B (it) * 1971-08-05 1973-10-10 Rca Corp Processo per l ottenimento di regio ni diffuse a semiconduttore presen tanti un numero ridotto di difetti nel cristallo
JPS5856329A (ja) * 1981-09-29 1983-04-04 Nec Corp オ−ミツク電極の形成法
JPS59163821A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 液相エピタキシヤル成長方法
US4727556A (en) * 1985-12-30 1988-02-23 Xerox Corporation Semiconductor lasers fabricated from impurity induced disordering
US4871690A (en) * 1986-01-21 1989-10-03 Xerox Corporation Semiconductor structures utilizing semiconductor support means selectively pretreated with migratory defects
JPH0410486A (ja) * 1990-04-26 1992-01-14 Sanyo Electric Co Ltd 半導体レーザの製造方法
US5171707A (en) * 1990-09-13 1992-12-15 Mitsubishi Denki Kabushiki Kaisha Method of fabricating semiconductor laser device using the light generated by the laser to disorder its active layer at the end surfaces thereby forming window regions
GB2248966A (en) * 1990-10-19 1992-04-22 Philips Electronic Associated Field effect semiconductor devices
US5132763A (en) * 1991-02-07 1992-07-21 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration InAs hole-immobilized doping superlattice long-wave-infrared detector
US5270246A (en) * 1991-06-18 1993-12-14 Matsushita Electric Industrial Co., Ltd. Manufacturing method of semiconductor multi-layer film and semiconductor laser
JPH06302909A (ja) * 1993-04-19 1994-10-28 Fuji Xerox Co Ltd 半導体レーザ装置
US5395793A (en) * 1993-12-23 1995-03-07 National Research Council Of Canada Method of bandgap tuning of semiconductor quantum well structures
US5376583A (en) * 1993-12-29 1994-12-27 Xerox Corporation Method for producing P-type impurity induced layer disordering
US5559368A (en) * 1994-08-30 1996-09-24 The Regents Of The University Of California Dynamic threshold voltage mosfet having gate to body connection for ultra-low voltage operation
US5740192A (en) * 1994-12-19 1998-04-14 Kabushiki Kaisha Toshiba Semiconductor laser
US5708674A (en) * 1995-01-03 1998-01-13 Xerox Corporation Semiconductor laser or array formed by layer intermixing
US5717707A (en) * 1995-01-03 1998-02-10 Xerox Corporation Index guided semiconductor laser diode with reduced shunt leakage currents
US5766981A (en) * 1995-01-04 1998-06-16 Xerox Corporation Thermally processed, phosphorus- or arsenic-containing semiconductor laser with selective IILD
SE9601174D0 (sv) * 1996-03-27 1996-03-27 Abb Research Ltd A method for producing a semiconductor device having a semiconductor layer of SiC and such a device
JPH11112075A (ja) * 1997-09-30 1999-04-23 Fujitsu Ltd 半導体レーザ装置及びその製造方法
US6064683A (en) * 1997-12-12 2000-05-16 Honeywell Inc. Bandgap isolated light emitter

Similar Documents

Publication Publication Date Title
JP2001044569A5 (https=)
US6897084B2 (en) Control of oxygen precipitate formation in high resistivity CZ silicon
EP1493179B1 (en) Silicon wafer and process for controlling denuded zone depth in an ideal oxygen precipitating silicon wafer
Nickel et al. Nucleation of hydrogen-induced platelets in silicon
US6653248B2 (en) Doped semiconductor material, a method of manufacturing the doped semiconductor material, and a semiconductor device
DE112014007334B3 (de) Sauerstoffpräzipitation in stark dotierten Siliciumwafern, geschnitten aus nach dem Czochralski-Verfahren gezüchteten Ingots
JP2007335867A (ja) ヘテロ構造内で空孔拡散を制限する方法
JP3353277B2 (ja) エピタキシャルウェハの製造方法
TW200921763A (en) Diffusion control in heavily doped substrates
KR20050111528A (ko) 규소 웨이퍼의 제조방법
CN101228301A (zh) 高电阻率硅结构和用于制备该结构的方法
EP1705698A2 (en) Method of fabricating strained silicon on an SOI substrate
US20140061863A1 (en) Method for producing a semiconductor layer
JP2009038124A (ja) エピタキシャルウェーハの製造方法およびエピタキシャルウェーハ
JP2014526135A (ja) シリコンウェハにおいて少数キャリア寿命劣化を抑制する方法
Inada et al. Formation of ultrashallow p+ layers in silicon by thermal diffusion of boron and by subsequent rapid thermal annealing
JP2007505502A (ja) 埋込多孔質シリコン層の酸化によるシリコン・ゲルマニウムオンインシュレータ構造の形成
JP2007505502A5 (https=)
KR100625822B1 (ko) 실리콘 웨이퍼 및 그의 제조 방법
US5500391A (en) Method for making a semiconductor device including diffusion control
JP2003209114A (ja) シリコン結晶中の遷移金属不純物のゲッタリング方法
JP4267810B2 (ja) 炭化珪素半導体装置の製造方法
JPS6125209B2 (https=)
Hobart et al. Post‐growth annealing of low temperature‐grown Sb‐doped Si molecular beam epitaxial films
EP1879224A2 (en) Process for controlling denuded zone depth in an ideal oxygen precipitating silicon wafer