JP2001035361A5 - - Google Patents

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Publication number
JP2001035361A5
JP2001035361A5 JP1999202562A JP20256299A JP2001035361A5 JP 2001035361 A5 JP2001035361 A5 JP 2001035361A5 JP 1999202562 A JP1999202562 A JP 1999202562A JP 20256299 A JP20256299 A JP 20256299A JP 2001035361 A5 JP2001035361 A5 JP 2001035361A5
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JP
Japan
Prior art keywords
etching
emitter
cathode conductor
carbon
electron
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JP1999202562A
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English (en)
Japanese (ja)
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JP4036572B2 (ja
JP2001035361A (ja
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Priority to JP20256299A priority Critical patent/JP4036572B2/ja
Priority claimed from JP20256299A external-priority patent/JP4036572B2/ja
Publication of JP2001035361A publication Critical patent/JP2001035361A/ja
Publication of JP2001035361A5 publication Critical patent/JP2001035361A5/ja
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Publication of JP4036572B2 publication Critical patent/JP4036572B2/ja
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Expired - Fee Related legal-status Critical Current

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JP20256299A 1999-07-16 1999-07-16 電子放出源の製造方法 Expired - Fee Related JP4036572B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20256299A JP4036572B2 (ja) 1999-07-16 1999-07-16 電子放出源の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20256299A JP4036572B2 (ja) 1999-07-16 1999-07-16 電子放出源の製造方法

Publications (3)

Publication Number Publication Date
JP2001035361A JP2001035361A (ja) 2001-02-09
JP2001035361A5 true JP2001035361A5 (enExample) 2006-06-08
JP4036572B2 JP4036572B2 (ja) 2008-01-23

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ID=16459558

Family Applications (1)

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JP20256299A Expired - Fee Related JP4036572B2 (ja) 1999-07-16 1999-07-16 電子放出源の製造方法

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JP (1) JP4036572B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3632682B2 (ja) * 2001-07-18 2005-03-23 ソニー株式会社 電子放出体の製造方法、冷陰極電界電子放出素子の製造方法、並びに、冷陰極電界電子放出表示装置の製造方法
JP2003168355A (ja) * 2001-11-30 2003-06-13 Sony Corp 電子放出体の製造方法、冷陰極電界電子放出素子の製造方法、並びに、冷陰極電界電子放出表示装置の製造方法
JP3432818B1 (ja) 2002-03-07 2003-08-04 科学技術振興事業団 ナノホーン担持体とその製造方法
JP2003303540A (ja) * 2002-04-11 2003-10-24 Sony Corp 電界電子放出膜、電界電子放出電極および電界電子放出表示装置
JP4543604B2 (ja) * 2002-05-20 2010-09-15 ソニー株式会社 電子放出領域の製造方法
JP2004178972A (ja) * 2002-11-27 2004-06-24 Sony Corp 電子放出素子の製造方法及び表示装置の製造方法
US7044822B2 (en) * 2002-12-20 2006-05-16 Samsung Sdi Co., Ltd. Method of manufacturing a field emission device utilizing the sacrificial layer
KR101082440B1 (ko) 2005-10-04 2011-11-11 삼성에스디아이 주식회사 전자 방출 소자, 이를 구비한 전자 방출 디스플레이 장치및 그 제조 방법
CN101452797B (zh) 2007-12-05 2011-11-09 清华大学 场发射电子源及其制备方法
JP5926709B2 (ja) 2012-08-29 2016-05-25 国立大学法人東北大学 電界電子放出膜、電界電子放出素子、発光素子およびそれらの製造方法

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