JP2001023855A - Manufacture of multilayer ceramic electronic component - Google Patents

Manufacture of multilayer ceramic electronic component

Info

Publication number
JP2001023855A
JP2001023855A JP19561499A JP19561499A JP2001023855A JP 2001023855 A JP2001023855 A JP 2001023855A JP 19561499 A JP19561499 A JP 19561499A JP 19561499 A JP19561499 A JP 19561499A JP 2001023855 A JP2001023855 A JP 2001023855A
Authority
JP
Japan
Prior art keywords
internal electrode
multilayer ceramic
electronic component
thickness
ceramic electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19561499A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Yamazaki
三浩 山▲崎▼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP19561499A priority Critical patent/JP2001023855A/en
Publication of JP2001023855A publication Critical patent/JP2001023855A/en
Pending legal-status Critical Current

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  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing superior multilayer ceramic electronic component, capable of preventing the occurrence of a structural defect like delamination and having small firing distortions. SOLUTION: The multilayer ceramic electronic component is made by alternately laminating a plurality of ceramic green sheets 1 and internal electrodes 2 to form a laminated green block and then cutting the laminated green block to a predetermined form and firing it. Here, the internal electrode 2 is composed of a first internal electrode 2a, formed of a conductive paste on the surface of the ceramic green sheet 1 and a second internal electrode 2b, formed of the conductive paste in a thickness of C, such that it overlaps only the outer peripheral portion A of the first internal electrode 2a.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は積層セラミック電子
部品の製造方法に関するものである。
The present invention relates to a method for manufacturing a multilayer ceramic electronic component.

【0002】[0002]

【従来の技術】従来の積層セラミック電子部品の製造方
法を積層セラミックコンデンサを例に説明する。
2. Description of the Related Art A conventional method of manufacturing a multilayer ceramic electronic component will be described by taking a multilayer ceramic capacitor as an example.

【0003】まず、セラミック誘電体粉末、有機結合
剤、有機溶剤を所定量秤量後、混練してセラミックスラ
リーを作製する。
[0003] First, ceramic dielectric powder, an organic binder, and an organic solvent are weighed in predetermined amounts and then kneaded to prepare a ceramic slurry.

【0004】次に、セラミックスラリーをポリエチレン
テレフタレートフィルム製のキャリアフィルム面に塗工
しセラミックグリーンシートを作製する。
Next, a ceramic slurry is applied to the surface of a carrier film made of a polyethylene terephthalate film to produce a ceramic green sheet.

【0005】次いで、セラミックグリーンシート面に銀
−パラジウム等の導電性金属粉末、有機溶剤、バインダ
ー等から成る導電性ペーストを用い、グラビア印刷法等
により内部電極を形成した後、乾燥を行い、内部電極を
形成しセラミックグリーンシートを作製する。
Next, an internal electrode is formed on the surface of the ceramic green sheet by a gravure printing method or the like using a conductive paste made of a conductive metal powder such as silver-palladium, an organic solvent, a binder, etc., and then dried. An electrode is formed to produce a ceramic green sheet.

【0006】その後、内部電極を形成したセラミックグ
リーンシートを所定枚数、加熱、圧着を繰り返し積層
し、積層体グリーンブロックを作製する。
Thereafter, a predetermined number of ceramic green sheets on which internal electrodes are formed are repeatedly laminated by heating and pressing to produce a laminated green block.

【0007】次に、積層体グリーンブロックを所定形状
に切断してグリーンチップを作製する。得られたグリー
ンチップは長手方向の相対する両端面には、内部電極の
一方の端部がセラミック層を挟んで一層おき交互に異な
る端面に露出した構造となっている。
Next, a green chip is manufactured by cutting the laminated green block into a predetermined shape. The obtained green chip has a structure in which one end of an internal electrode is alternately exposed at different end faces on both end faces opposed to each other in the longitudinal direction with a ceramic layer interposed therebetween.

【0008】次いで、グリーンチップを所定の温度で焼
成を行った後、内部電極の露出している両端面に銀等を
主成分とする導電ペーストを塗布、焼き付けを行い外部
電極を形成した積層セラミックコンデンサを完成させ
る。
Then, after firing the green chip at a predetermined temperature, a conductive paste containing silver or the like as a main component is applied to both exposed end surfaces of the internal electrode and baked to form a multilayer ceramic having an external electrode. Complete the capacitor.

【0009】[0009]

【発明が解決しようとする課題】前記製造方法で、導電
性金属粉末、有機溶剤、バインダー等から構成される導
電性ペーストを用い内部電極を形成すると、印刷方法や
導電性ペーストの粘度適性または内部電極のサイズによ
り、形成された矩形の内部電極全体の厚さが図1に示す
ように、内部電極の外周部(A)が中央部(B)より薄
くなる。このため内部電極を形成したセラミックグリー
ンシートの積層性が悪くなり多積層するのが困難であっ
た。また、これを緩和するために内部電極の厚さを薄く
すると内部電極切れが発生し易くなる。特に近年の積層
セラミックコンデンサは、小型、大容量の要求に伴いセ
ラミックグリーンシートの薄膜化と、その多積層が必要
で、多積層に伴い内部電極の周辺部の段差が大きくな
り、セラミックグリーンシートどうしの接着性が低下
し、内部構造欠陥の層間剥離(デラミネーション)等の
問題が発生し易くなる。また、中積層品においても同様
に層間剥離や、焼成後の素子内部にクラックが発生し、
工程条件管理の複雑化と、製品歩留まりを低下させると
いうような問題点を有していた。
When the internal electrodes are formed by using the conductive paste composed of the conductive metal powder, the organic solvent, the binder and the like in the above-mentioned manufacturing method, the printing method and the viscosity suitable for the conductive paste or the internal resistance are determined. Depending on the size of the electrode, the outer peripheral portion (A) of the internal electrode is thinner than the central portion (B) as shown in FIG. For this reason, the laminability of the ceramic green sheets on which the internal electrodes are formed is deteriorated, and it is difficult to perform multi-lamination. Further, if the thickness of the internal electrode is reduced to alleviate this, disconnection of the internal electrode is likely to occur. In particular, recent multilayer ceramic capacitors require ceramic green sheets to be thinner and smaller in size due to the demand for small size and large capacity, and multi-layered ceramic green sheets are required. The adhesiveness of the internal structure decreases, and problems such as delamination of internal structural defects are likely to occur. Similarly, in the case of a middle-layered product, delamination or cracks occur inside the element after firing,
There are problems such as complicated process condition management and reduced product yield.

【0010】[0010]

【課題を解決するための手段】前記問題点を解決するた
めに本発明は、導電性金属粉末、有機溶剤、バインダー
等からなる導電性ペーストを用い、セラミックグリーン
シート面に内部電極を形成する際、一次内部電極の外周
部の厚さを補正するために一次内部電極の厚みの薄い外
周部に二次内部電極を形成し、内部電極全体の厚さを均
一にすることにより所期の目的を達成することができ
る。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention relates to a method for forming an internal electrode on a ceramic green sheet surface using a conductive paste comprising a conductive metal powder, an organic solvent, a binder and the like. In order to correct the thickness of the outer peripheral portion of the primary internal electrode, a secondary internal electrode is formed on the outer peripheral portion where the thickness of the primary internal electrode is thin, and the intended purpose is achieved by making the thickness of the entire internal electrode uniform. Can be achieved.

【0011】[0011]

【発明の実施の形態】本発明の請求項1に記載の発明
は、セラミックグリーンシートと内部電極を交互に複数
層積層した積層体グリーンブロックを所定形状に切断後
焼成を行う積層セラミック電子部品において、前記内部
電極をセラミックグリーンシート面に導電性ペーストを
用いて一次内部電極を形成、乾燥した後、一次内部電極
の外周部とのみ重なり合うように導電性ペーストを用い
二次内部電極を形成する積層セラミック電子部品の製造
方法であり、形成した一次内部電極の外周部の薄さを補
正するために二次内部電極を一次内部電極の外周部にの
み重ね合わせるようにして全体が均一な厚さの内部電極
を形成するため内部電極の全体の厚さが均一となること
で、内部電極全体の厚さを薄くすることが可能となる。
この内部電極全体の厚さを薄くしたセラミックグリーン
シートを用いることにより、内部電極の周辺部の厚み段
差が小さくなり、内部電極を形成したセラミックグリー
ンシートを多積層する際、内部電極とセラミックグリー
ンシート及びセラミックグリーンシートどうしの接着性
が向上し、焼結体の層間剥離等の発生を防止することが
できる。また、得られた焼結体は内部電極形成部と、内
部電極非形成部との内部歪みが小さく、耐熱衝撃性等に
優れた信頼性の高いものとなる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention relates to a multilayer ceramic electronic component in which a laminated green block in which a plurality of ceramic green sheets and internal electrodes are alternately laminated is cut into a predetermined shape and then fired. Forming a primary internal electrode on the ceramic green sheet surface using a conductive paste, drying the internal electrode, and then forming a secondary internal electrode using a conductive paste so as to overlap only with the outer peripheral portion of the primary internal electrode. A method of manufacturing a ceramic electronic component, in which the secondary internal electrode is overlapped only on the outer peripheral portion of the primary internal electrode to correct the thinness of the outer peripheral portion of the formed primary internal electrode, so that the whole has a uniform thickness. Since the entire thickness of the internal electrode is uniform to form the internal electrode, the thickness of the entire internal electrode can be reduced.
By using a ceramic green sheet with a reduced thickness of the entire internal electrode, the thickness step at the peripheral portion of the internal electrode is reduced, and when the ceramic green sheets on which the internal electrodes are formed are multi-layered, the internal electrode and the ceramic green sheet are used. In addition, the adhesiveness between the ceramic green sheets is improved, and the occurrence of delamination of the sintered body can be prevented. Further, the obtained sintered body has a small internal strain between the internal electrode forming portion and the internal electrode non-forming portion, and has high thermal shock resistance and high reliability.

【0012】本発明の請求項2に記載の発明は、導電性
金属粉末、有機溶剤、バインダー、共材(セラミック層
を形成する材料)等から成る導電性ペーストを用い一次
内部電極、二次内部電極をそれぞれグラビア印刷工法を
用いて形成する請求項1に記載の積層セラミック電子部
品の製造方法であり、形成した一次内部電極の外周部に
重なり合うように二次内部電極を形成するには、一次及
び二次内部電極の印刷位置精度が重要となるが望ましい
印刷工法としては印刷画像の変形・歪みの少ないグラビ
ア印刷工法のような金属ロールによる形成が最適であ
る。
According to a second aspect of the present invention, a primary internal electrode and a secondary internal electrode are formed using a conductive paste made of a conductive metal powder, an organic solvent, a binder, a common material (a material for forming a ceramic layer), and the like. 2. The method for manufacturing a multilayer ceramic electronic component according to claim 1, wherein each of the electrodes is formed by using a gravure printing method. In order to form a secondary internal electrode so as to overlap an outer peripheral portion of the formed primary internal electrode, the method comprises the steps of: In addition, the printing position accuracy of the secondary internal electrode is important, but as a desirable printing method, formation by a metal roll such as a gravure printing method with less deformation and distortion of a printed image is optimal.

【0013】本発明の請求項3に記載の発明は、二次内
部電極の導電性ペーストに共材(セラミック層を形成す
る材料)を導電性金属粉末に対し最大50%添加までし
たものを用いる請求項1に記載の積層セラミック電子部
品の製造方法であり、内部電極の外周部は内部電極が形
成されていないセラミックグリーンシート面との厚み段
差が顕著に現れる界面であるためこの部分は積層体グリ
ーンブロックを作製する際に均等に加圧力が加わり難い
が、これを緩和するため二次内部電極に用いる導電性ペ
ーストに共材を添加することにより、焼成過程でセラミ
ックグリーンシートと内部電極との馴染み性を向上させ
界面でのストレスの発生を抑制し、安定した焼結体を得
ることができるものである。尚、一次内部電極用導電ペ
ーストに共材を添加したものを用いることも可能であ
る。
According to a third aspect of the present invention, the conductive paste of the secondary internal electrode is obtained by adding a common material (a material for forming a ceramic layer) to the conductive metal powder by up to 50%. 2. The method for manufacturing a multilayer ceramic electronic component according to claim 1, wherein an outer peripheral portion of the internal electrode is an interface in which a thickness step significantly appears with a ceramic green sheet surface on which the internal electrode is not formed. It is difficult to apply the pressing force evenly when manufacturing the green block, but to alleviate this, by adding a common material to the conductive paste used for the secondary internal electrode, the ceramic green sheet and the internal electrode can be combined in the firing process. This improves the conformability, suppresses the generation of stress at the interface, and can provide a stable sintered body. It is also possible to use a conductive paste for the primary internal electrode to which a common material is added.

【0014】本発明の請求項4に記載の発明は二次内部
電極形成後の厚みを、一次内部電極の中央部の厚さと等
しくなるように、一次内部電極の外周部とのみ重なり合
うようにして形成し、二次内部電極の形成後に内部電極
全体の厚さがほぼ均一になるようにした請求項1に記載
の積層セラミック電子部品の製造方法であり、一次内部
電極の外周部の厚さを補正するためにその外周部のみと
重なり合うように二次内部電極を形成し、二次内部電極
を形成後の内部電極全体の厚みが均一となり、内部電極
を薄くすることが可能となる。
According to a fourth aspect of the present invention, the thickness after the formation of the secondary internal electrode is made to overlap only with the outer peripheral portion of the primary internal electrode so as to be equal to the thickness of the central portion of the primary internal electrode. The method for manufacturing a multilayer ceramic electronic component according to claim 1, wherein the thickness of the outer peripheral portion of the primary internal electrode is reduced by forming the secondary internal electrode so that the thickness of the entire internal electrode becomes substantially uniform after the formation of the secondary internal electrode. For correction, the secondary internal electrode is formed so as to overlap only with the outer peripheral portion thereof. The thickness of the entire internal electrode after the formation of the secondary internal electrode becomes uniform, and the internal electrode can be thinned.

【0015】以下、本発明の一実施の形態を積層セラミ
ックコンデンサを例に説明する。
An embodiment of the present invention will be described below by taking a multilayer ceramic capacitor as an example.

【0016】まず、チタン酸バリウムを主成分とするセ
ラミック誘電体粉末、バインダーとしてポリビニルブチ
ラール、可塑剤としてフタル酸ジブチル、溶媒としてメ
チルエチルケトンを所定量秤量した後、分散メディアと
してジルコニアボールを用い40時間ボールミリングを
行いセラミックスラリーを作製する。
First, a ceramic dielectric powder containing barium titanate as a main component, polyvinyl butyral as a binder, dibutyl phthalate as a plasticizer, and methyl ethyl ketone as a solvent are weighed in predetermined amounts, and then zirconia balls are used as dispersion media for 40 hours. Milling is performed to produce a ceramic slurry.

【0017】また別に、バインダーとしてエチルセルロ
ース、有機溶剤としてメチルエチルケトンを所定量秤量
し、ミキサーで分散してビヒクルを作製した後、これに
平均粒径0.5μmのニッケル粉末を加えミキサーで予
備混練し、更に3本ロールを用い分散を行い、一次内部
電極用導電ペーストを作製した。尚、二次内部電極用ペ
ーストとしては、前記導電性ペーストに更に(表1)に
示す共材を添加した。
Separately, a predetermined amount of ethyl cellulose as a binder and methyl ethyl ketone as an organic solvent are weighed and dispersed by a mixer to prepare a vehicle. To this, nickel powder having an average particle size of 0.5 μm is added, and the mixture is preliminarily kneaded by a mixer. Further, dispersion was performed using three rolls to prepare a conductive paste for a primary internal electrode. In addition, as a paste for the secondary internal electrode, a common material shown in (Table 1) was further added to the conductive paste.

【0018】[0018]

【表1】 [Table 1]

【0019】次に、図1に示すようにセラミックスラリ
ーを離型剤処理を施したポリエチレンテレフタレート製
のキャリアフィルム面にロールコート法を用い塗工、乾
燥して、厚み7μmの有効層用のセラミックグリーンシ
ート1と、厚み50μmの無効層用のセラミックグリー
ンシートをそれぞれ作製する。
Next, as shown in FIG. 1, a ceramic slurry was applied to the surface of a polyethylene terephthalate carrier film treated with a release agent by a roll coating method and dried to form a 7 μm thick ceramic for an effective layer. A green sheet 1 and a ceramic green sheet for an ineffective layer having a thickness of 50 μm are prepared.

【0020】次いで、厚み7μmのセラミックグリーン
シート1面に一次内部電極2a用の導電ペーストをグラ
ビア印刷法を用い塗布した後、100℃で30秒間乾燥
を行い一次内部電極2a(中央部B、外周部A)を形成
する。尚、一次内部電極2aの厚さは(表1)に示すよ
うに焼結後の素体内部で電極切れが発生しない厚さ2μ
mで形成した。
Next, a conductive paste for the primary internal electrode 2a is applied to one surface of the ceramic green sheet 1 having a thickness of 7 μm by using a gravure printing method, and then dried at 100 ° C. for 30 seconds to perform the primary internal electrode 2a (central portion B, outer periphery). Form part A). The thickness of the primary internal electrode 2a is 2 μm as shown in Table 1 so that no electrode break occurs inside the sintered body.
m.

【0021】続いて二次内部電極2b用の導電ペースト
をグラビア印刷法を用い一次内部電極2aの外周部Aの
みに重ね合わせるようにして(表1)に示す厚さCの二
次内部電極2bを塗布した後、100℃で20秒間乾燥
を行い、全体の厚さがほぼ2μmとなるように内部電極
2を形成したセラミックグリーンシートを作製する。
Subsequently, the conductive paste for the secondary internal electrode 2b is superimposed only on the outer peripheral portion A of the primary internal electrode 2a by using a gravure printing method (Table 1). Is applied, followed by drying at 100 ° C. for 20 seconds to produce a ceramic green sheet on which the internal electrodes 2 are formed so that the entire thickness becomes approximately 2 μm.

【0022】また別に、厚み50μmのセラミックグリ
ーンシートを三枚重ね、圧力50Kg/cm2で積層圧着を
行い無効層のセラミックグリーンシートを作製する。
Separately, three ceramic green sheets each having a thickness of 50 μm are stacked and laminated and pressed at a pressure of 50 kg / cm 2 to produce a ceramic green sheet having an ineffective layer.

【0023】その後、無効層のセラミックグリーンシー
ト上に内部電極2を形成したセラミックグリーンシート
1aを圧力50Kg/cm2で加圧積層した後、キャリアフ
ィルムを剥離する。続いて、前記作業を201回繰り返
し積層体グリーンブロックを作製する。尚、セラミック
グリーンシート1aの積層は一層ごと交互に内部電極2
の長手方向に所定寸法ずらして行った。最後に無効層の
セラミックグリーンシートを重ね、圧力50Kg/cm2
加圧積層した後、圧力500Kg/cm2で本加圧を行い積
層体グリーンブロックを作製する。
Thereafter, the ceramic green sheet 1a having the internal electrode 2 formed thereon is laminated under pressure at a pressure of 50 kg / cm 2 on the ceramic green sheet of the ineffective layer, and then the carrier film is peeled off. Subsequently, the above operation is repeated 201 times to produce a laminated green block. The lamination of the ceramic green sheets 1a is performed alternately for each layer.
In the longitudinal direction. Finally stacked ceramic green sheets invalid layer was pressure laminated at a pressure 50 Kg / cm 2, to prepare a green laminate block make this pressurization a pressure 500 Kg / cm 2.

【0024】次に、積層体グリーンブロックを所定のグ
リーンチップ形状に切断、分離した後、これらを焼成用
セッターに収納し、バーンアウト炉で室温〜400℃ま
でを約30時間かけバインダー除去を行った後、焼成炉
で1280℃までを約20時間かけ焼成を行い焼結体を
作製する。尚、得られた焼結体は誘電体セラミック層を
挟んで内部電極2の一方の端部が一層おき交互に、対向
する異なる端面に露出した構造となっている。
Next, after cutting and separating the laminated green block into a predetermined green chip shape, these are stored in a firing setter, and the binder is removed from room temperature to 400 ° C. for about 30 hours in a burnout furnace. After that, firing is performed in a firing furnace to 1280 ° C. for about 20 hours to produce a sintered body. The obtained sintered body has a structure in which one end of the internal electrode 2 is alternately exposed with a dielectric ceramic layer interposed therebetween and is exposed to different end faces facing each other.

【0025】次いで、焼結体の内部電極2が露出してい
る両端面に外部電極を形成した後、半田付性を向上させ
るため外部電極の表面にメッキ処理を施して、積層セラ
ミックコンデンサを作製した。得られた積層セラミック
コンデンサについて、内部構造欠陥発生数と85℃の温
度槽中で定格電圧の4倍を1000時間印加する高温加
速負荷加速寿命試験評価を行い、その結果を、一次内部
電極2a及び二次内部電極2bの形成厚みと併せて(表
1)に示す。
Next, after forming external electrodes on both end surfaces of the sintered body where the internal electrodes 2 are exposed, a plating process is performed on the surfaces of the external electrodes to improve solderability, thereby producing a multilayer ceramic capacitor. did. The obtained multilayer ceramic capacitor was subjected to a high-temperature accelerated load accelerated life test evaluation in which the number of internal structural defects was generated and four times the rated voltage was applied for 1000 hours in a temperature chamber at 85 ° C. The results are shown in Table 1 together with the formed thickness of the secondary internal electrode 2b.

【0026】尚、表中の試料番号No1,3,7,12
は比較例である。
Sample numbers No. 1, 3, 7, 12 in the table
Is a comparative example.

【0027】(表1)に示すように、一次内部電極2a
のみの場合は、中央部Bが外周部Aより厚くなる。これ
を補正するために二次内部電極2bを一次内部電極2a
の外周部Aのみに重なり合うようにして内部電極2C
(厚さC)を形成した場合、内部電極2の中央部Bと外
周部(A+C)の厚み差が±0.5μmを超えると構造
欠陥の発生傾向が高くなると共に、寿命試験での絶縁抵
抗劣化が発生する。これは内部電極2の中央部Bと外周
部(A+C)厚み差が大きくなると積層体グリーンブロ
ック作製時の加圧力が全体に均等に加わり難くなること
が内部構造欠陥及び絶縁抵抗の劣化を助長するものと考
えられる。
As shown in Table 1, the primary internal electrode 2a
In the case of only, the central portion B is thicker than the outer peripheral portion A. To correct this, the secondary internal electrode 2b is replaced with the primary internal electrode 2a.
Of the internal electrode 2C so as to overlap only the outer peripheral portion A of the
When (thickness C) is formed, if the thickness difference between the central portion B and the outer peripheral portion (A + C) of the internal electrode 2 exceeds ± 0.5 μm, the tendency of occurrence of structural defects increases, and the insulation resistance in the life test is increased. Deterioration occurs. This is because if the thickness difference between the central portion B and the outer peripheral portion (A + C) of the internal electrode 2 becomes large, it becomes difficult to uniformly apply the pressing force during the production of the laminated green block, which promotes internal structural defects and deterioration of insulation resistance. It is considered something.

【0028】また、共材の添加量が50%より多くなる
と構造欠陥の発生を抑制する効果はあるものの、静電容
量値のバラツキを大きくすると共に、共材の過剰添加に
より焼結過程で内部電極2が変形し、寿命試験において
絶縁抵抗の劣化をもたらすため好ましくない。
If the amount of the common material is more than 50%, the effect of suppressing the generation of structural defects is obtained. It is not preferable because the electrode 2 is deformed and the insulation resistance is deteriorated in the life test.

【0029】尚、本発明においては、実施の形態のセラ
ミックグリーンシート厚さ、積層数、焼成条件、また、
導電性金属ペーストの金属粉末の種類にとらわれること
なく同様の結果が得られる。
In the present invention, the thickness of the ceramic green sheet, the number of layers, the firing conditions,
Similar results can be obtained regardless of the type of the metal powder of the conductive metal paste.

【0030】[0030]

【発明の効果】以上本発明によると、一次内部電極の外
周部が薄くなるのを補正するために、一次内部電極の外
周部にのみ重なり合うように二次内部電極を形成し、内
部電極全体の中央部と外周部の厚み差を小さくすること
により、内部電極の全体の形成厚さを薄くすることがで
きる。これにより内部電極の形成部と非形成部境界の厚
み段差が少なくなり、内部電極を形成したセラミックグ
リーンシートを多積層した場合においても、内部電極と
セラミックグリーンシート及びセラミックグリーンシー
トどうしの接着性の低下を防ぎ、内部構造欠陥等の発生
を低減することが可能となる。また、内部電極を均一な
厚さで薄くすることにより、歪みの小さな信頼性の高い
積層セラミック電子部品を提供する有効な手段となる。
As described above, according to the present invention, in order to compensate for the thinning of the outer peripheral portion of the primary internal electrode, the secondary internal electrode is formed so as to overlap only with the outer peripheral portion of the primary internal electrode. By reducing the difference in thickness between the central portion and the outer peripheral portion, the overall formed thickness of the internal electrode can be reduced. As a result, the thickness step at the boundary between the formation portion and the non-formation portion of the internal electrode is reduced. Thus, it is possible to prevent the occurrence of internal structural defects and the like. Further, by making the internal electrodes thin with a uniform thickness, it becomes an effective means for providing a highly reliable multilayer ceramic electronic component with small distortion.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の積層セラミック電子部品の一実施の形
態における内部電極の断面図
FIG. 1 is a sectional view of an internal electrode according to an embodiment of a multilayer ceramic electronic component of the present invention.

【符号の説明】[Explanation of symbols]

1 セラミックグリーンシート 2 内部電極 2a 一次内部電極 2b 二次内部電極 A 一次内部電極外周部の厚さ B 一次内部電極中央部の厚さ C 二次内部電極形成厚さ DESCRIPTION OF SYMBOLS 1 Ceramic green sheet 2 Internal electrode 2a Primary internal electrode 2b Secondary internal electrode A Thickness of outer peripheral part of primary internal electrode B Thickness of central part of primary internal electrode C Thickness of secondary internal electrode formation

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 5E001 AB03 AC03 AC04 AC09 AE02 AE03 AF00 AF06 AH01 AH06 AH09 AJ01 5E082 AA01 AB03 BC33 EE04 EE18 EE35 EE41 FG06 FG26 FG27 FG54 GG10 GG26 HH43 JJ03 JJ05 JJ21 LL01 LL02 LL03 MM22 PP03  ──────────────────────────────────────────────────続 き Continued on the front page F-term (reference) 5E001 AB03 AC03 AC04 AC09 AE02 AE03 AF00 AF06 AH01 AH06 AH09 AJ01 5E082 AA01 AB03 BC33 EE04 EE18 EE35 EE41 FG06 FG26 FG27 FG54 GG10 GG26 HH43 JJ03 JJ01 LL03

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 セラミックグリーンシートと内部電極を
交互に複数層積層した積層体グリーンブロックを所定形
状に切断後焼成を行う積層セラミック電子部品におい
て、前記内部電極をセラミックグリーンシート面に導電
性ペーストを用い一次内部電極を形成、乾燥した後、一
次内部電極の外周部とのみ重なり合うように導電性ペー
ストを用い二次内部電極を形成する積層セラミック電子
部品の製造方法。
1. A multilayer ceramic electronic component in which a laminated green block in which a plurality of ceramic green sheets and internal electrodes are alternately laminated is cut into a predetermined shape and then fired, the internal electrodes are coated with a conductive paste on the surface of the ceramic green sheets. A method for manufacturing a multilayer ceramic electronic component, wherein a secondary internal electrode is formed by using a conductive paste so as to overlap with only the outer peripheral portion of the primary internal electrode after forming and drying the primary internal electrode.
【請求項2】 導電性金属粉末、有機溶剤、バインダ
ー、共材(セラミック層を形成する材料)等から成る導
電性ペーストを用い一次内部電極、二次内部電極をそれ
ぞれグラビア印刷工法を用いて形成する請求項1に記載
の積層セラミック電子部品の製造方法。
2. A primary internal electrode and a secondary internal electrode are each formed by a gravure printing method using a conductive paste made of a conductive metal powder, an organic solvent, a binder, a common material (a material for forming a ceramic layer), and the like. The method for manufacturing a multilayer ceramic electronic component according to claim 1.
【請求項3】 二次内部電極の導電性ペーストに、共材
(セラミック層を形成する材料)を導電性金属粉末に対
し最大50%まで添加したものを用いる請求項1に記載
の積層セラミック電子部品の製造方法。
3. The multilayer ceramic electronic device according to claim 1, wherein the conductive paste of the secondary internal electrode is obtained by adding a common material (a material forming a ceramic layer) to the conductive metal powder up to 50% based on the conductive metal powder. The method of manufacturing the part.
【請求項4】 二次内部電極形成後の厚みを一次内部電
極の中央部の厚さと等しくなるように、一次内部電極の
外周部とのみ重なり合うようにして形成し、二次内部電
極形成後に内部電極全体の厚さがほぼ均一になるように
した請求項1に記載の積層セラミック電子部品の製造方
法。
4. The secondary internal electrode is formed so as to have a thickness equal to the thickness of the central portion of the primary internal electrode so as to overlap only with the outer peripheral portion of the primary internal electrode. 2. The method for manufacturing a multilayer ceramic electronic component according to claim 1, wherein the thickness of the entire electrode is made substantially uniform.
JP19561499A 1999-07-09 1999-07-09 Manufacture of multilayer ceramic electronic component Pending JP2001023855A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19561499A JP2001023855A (en) 1999-07-09 1999-07-09 Manufacture of multilayer ceramic electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19561499A JP2001023855A (en) 1999-07-09 1999-07-09 Manufacture of multilayer ceramic electronic component

Publications (1)

Publication Number Publication Date
JP2001023855A true JP2001023855A (en) 2001-01-26

Family

ID=16344105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19561499A Pending JP2001023855A (en) 1999-07-09 1999-07-09 Manufacture of multilayer ceramic electronic component

Country Status (1)

Country Link
JP (1) JP2001023855A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007335726A (en) * 2006-06-16 2007-12-27 Tdk Corp Multilayer ceramic capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007335726A (en) * 2006-06-16 2007-12-27 Tdk Corp Multilayer ceramic capacitor

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